KR20160132155A

KR20160132155A - Gate valves

Info

Publication number: KR20160132155A
Application number: KR1020150062954A
Authority: KR
Inventors: 손영만
Original assignee: 주식회사 에스알티
Priority date: 2015-05-06
Filing date: 2015-05-06
Publication date: 2016-11-17
Also published as: KR101684881B1

Abstract

An upper housing 100 connected to a chamber (not shown), the upper housing 100 including an inlet pipe 110 through which a first moving passage 111 is formed, A second moving passage 210 having an upper portion opened and formed at a lower portion of the first moving path 111 in a direction perpendicular to the first moving path 111 and a second moving path 210 having a horizontal A body housing 200 including a moving space 220 and a rail 230 connected to the horizontal hermetic sealing part 310 to guide horizontal movement of the horizontal hermetic sealing part 310; A horizontal closing part 310 which is seated in the horizontal moving space 220 and opens and closes the first moving path 111, a shaft part 320 connected to the distal end side of the horizontal closing part 310, And a first driving unit 330 coupled to the horizontal hermetic unit 310 to provide a driving force for horizontally moving the horizontal hermetic unit 310 A third moving passage 410 coupled to a lower portion of the main body housing 200 and formed in a punch hole in a direction perpendicular to the second moving passage 210, A lower housing 400 including a first driving part seating space 420 on which the first driving part 330 is mounted and a second driving part seating part 420 inserted into the third traveling path 410, A fourth movement passage 510 is formed in a right angle direction and the horizontal hermetic portion 310 is moved in the vertical direction while the horizontal hermetic portion 310 is positioned on the third movement passage 410 And a fifth transfer passage 610 is connected to the lower portion of the lower housing 400 and connected to a vacuum pump (not shown). The fifth transfer passage 610 is disposed inside the fourth transfer passage 510 in a direction perpendicular to the fourth transfer passage 510, (500) to provide a driving force for vertical movement to the vertical sealing part (500). The vertical sealing part And a drain pipe 600 including a first and second driving units 620. The horizontal closing unit 310 includes a sealing plate 311 for sealing the first moving passage 111, The horizontal hermetic part 310 is horizontally moved by being inserted into the rail part 230 on both sides of the frames 312 and 312 ' And a plurality of rotating rollers (313, 313 ') that rotate and move along the rail (230) are formed in the process.

Description

Gate valves {Gate valves}

The present invention relates to a gate valve comprising an upper housing 100 connected to a chamber (not shown), the upper housing 100 including an inlet pipe 110 through which a first moving passage 111 is formed, A second moving passage 210 formed at a lower portion thereof and formed at a lower portion thereof in a direction perpendicular to the first moving passage 111 and a horizontal closing portion 310 mounted on the inner side of the second moving passage 210, And a rail 230 connected to the horizontal hermetic sealing part 310 and guiding horizontal movement of the horizontal hermetic sealing part 310, A horizontal closing part 310 which is seated in the horizontal moving space 220 and opens and closes the first moving path 111 and a shaft part 310 connected to the distal end of the horizontal closing part 310, 320), and a driving force for horizontally moving the horizontal hermetic part (310) is connected to the shaft part (320) A third moving passage coupled to a lower portion of the main housing 200 and formed in a punching hole in a direction perpendicular to the second moving passage 210. The moving path opening and closing unit 300 includes a first driving part 330, A lower housing 400 including a first drive part 410 and a first drive part seating space 420 on which the first drive part 330 is mounted; A fourth movement passage 510 is formed in a direction perpendicular to the third movement passage 410 and in a state where the horizontal movement portion 310 is positioned on the third movement passage 410, (Not shown) coupled to a lower portion of the lower housing 400 to vertically move the third moving passage 510 in a vertical direction, A fifth movement passage 610 is formed in a direction perpendicular to the vertical sealing part 500 and connected to the vertical sealing part 500, The horizontal hermetically sealing part 310 includes a sealing plate 311 for sealing the first moving passage 111, and a second driving part 620 for providing a driving force for the first hermetically- Are formed on both sides of the sealing plate 311 and are inserted into the rail 230 at both sides of the frames 312 and 312 ' A plurality of rotary rollers 313 and 313 'that rotate and move along the rail 230 are formed in the horizontal movement of the gate valve 310.

In general, semiconductors require process densities and thus require high cleanliness and special manufacturing techniques.

For this reason, the semiconductor device is manufactured in a vacuum state in which the contact of the foreign substances contained in the air can be most completely blocked, and the vacuum working area of the semiconductor manufacturing apparatus and the airtight sealing technique also greatly affect the quality of the semiconductor product.

The gate valve of various shapes is installed in the process section for manufacturing the semiconductor as described above, thereby performing the function of transferring or blocking the gas passing through the cleaning module between the chambers.

Such a gate valve is coupled to an inlet and an outlet between a process chamber and a process chamber or a vibration pump, respectively, so that the outlet or inlet is connected to each other. As the cylinder is driven, the sealing member opens and closes the inlet, To be transmitted or blocked.

As an embodiment of the gate valve as described above, "Vacuum gate valve (Korean Registered Patent No. 10-0954212)" of Patent Document 1 is posted.

The "vacuum gate valve" of Patent Document 1 has a valve body formed with a sliding space in a direction perpendicular to the fluid passage on the inner wall formed with the fluid passage, a valve plate for opening and closing the fluid passage as it moves back and forth into the sliding space, A vacuum gate valve comprising a valve plate driving part for driving a valve plate, a sealing member for opening and closing a sliding space as it ascends and descends in a direction parallel to the fluid passage, and a sealing member driving part for driving the sealing member, Is resiliently supported at the outer periphery of the upper surface and the lower surface so as to vertically move in the sliding space and is limited in the upward and downward directions by the opposite inner wall surfaces of the valve body located at the upper and lower portions of the sliding space, When the back pressure is applied to the valve plate, the sealing member is lowered so that the valve plate and the closing member are in close contact with each other The upper end surface of the sealing member is formed lower than the upper end surface of the inner wall of the valve body located below the sliding space and the seal member is provided at the upper end thereof so that even when the valve plate is moved downward due to abnormal back pressure, There was an advantage of being able to maintain confidentiality.

However, the "vacuum gate valve" of Patent Document 1 is configured such that rollers formed on both sides of the valve plate and guiding movement of the valve plate slide simply on both sides of the inside of the valve body, The valve plate can not be moved accurately due to a vibration or a shaking phenomenon, so that the inlet portion can not be accurately sealed.

The "vacuum gate valve" of Patent Document 1 has a structure in which the lower circumferential surface of the fluid passage and the upper circumferential surface of the closure member are directly in contact with each other and connected to each other. When the fluid moves from the chamber to the vacuum pump, There is a problem in that a fluid may flow in and cause mechanical defects.

Patent Document 1: Korean Patent Publication No. 10-0954212

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a rail unit in which a portion of a rotary roller formed in a horizontal sealing portion is inserted into both sides of a main body housing, The horizontal sealing portion can be accurately moved in the horizontal direction to seal the inlet portion.

It is also an object of the present invention to provide a gate valve capable of increasing airtightness in a state in which the inlet portion is open or in a closed state by providing the elastic member at the lower portion of the inlet pipe and the upper portion of the vertical sealing portion.

In order to solve the above problems, the gate valve according to the present invention includes an upper housing 100, which is connected to a chamber (not shown) and includes an inflow conduit 110 through which a first moving passage 111 is formed, A second moving passage 210 coupled to a lower portion of the upper housing 100 and having an upper portion opened and formed at a lower portion in a direction perpendicular to the first moving passage 111, A horizontally moving space 220 which is formed so as to move horizontally with respect to the horizontal hermetically sealed part 310 and which is connected to the horizontal hermetic part 310 on both inner sides thereof to guide horizontal movement of the horizontal hermetic part 310 A horizontal enclosure 310 that is seated in the horizontal movement space 220 and opens and closes the first movement passage 111 and a second hermetic seal 310 that is located in the horizontal hermetic space 310, A shaft portion 320 connected to the shaft portion 320 and connected to the horizontal sealing portion 310, A moving path opening and closing unit 300 including a first driving part 330 for providing a driving force for horizontal movement of the main body housing 200 and a second moving part 330 coupled to a lower part of the main body housing 200, A lower housing 400 including a third moving passage 410 formed in a perforated shape and a first driving portion seating space 420 on which the first driving portion 330 is mounted; A fourth moving passage 510 is formed in the inside of the third moving passage 410 in a direction perpendicular to the third moving passage 410 and the horizontal closing portion 310 is positioned on the third moving passage 410 A vertical sealing part 500 for vertically moving the horizontal sealing part 310 in a state of being connected to a lower part of the lower housing 400 and connected to a vacuum pump (not shown) A fifth transfer passage 610 is formed in a direction perpendicular to the transfer passage 510 and connected to the vertical seal portion 500 And a second driving unit 620 for providing a driving force for vertical movement to the vertical closing unit 500. The horizontal closing unit 310 is connected to the first moving passage 111 'are formed on both sides of the frames 312 and 312', and frames 312 and 312 'are formed on both side surfaces of the sealing plate 311, A plurality of rotary rollers 313 and 313 'are inserted into the horizontal hermetically sealed part 230 so as to rotate along the rail 230 in the horizontal movement of the horizontal hermetic sealing part 310.

A recess 231 is formed in the inner side of the rail 230 so as to be spaced apart from the rail 231 by a predetermined distance. The outer periphery of the rotary rollers 313 and 313 ' The horizontal protruding parts 313a and 313a` are formed at the corners of the frames 312 and 312 so that the powder adhered to the recessed depressed part 231 is removed And a powder removing block 314 or 314 'in which scratching protrusions 314a and 314a' for scraping are formed.

A main elastic member coupling groove 112 is formed in the lower circumference of the inflow conduit 110 so as to insert the main elastic member 700 and a guide elastic member 800 520 'are formed so as to be inserted into the respective guide elastic member engaging grooves 520, 520', and the sealing plate 310 is inserted between the respective guide elastic member engaging grooves 520, 520 ' When the vertical sealing part 500 rises and the upper surface of the vertical sealing part 500 and the lower surface of the inflow conduit 110 come into contact with each other while the first moving passage 111 is opened, The main elastic part protection groove 530 is formed so as not to be pressed on the upper surface of the vertical sealing part 500.

As described above, according to the present invention, since the rail portion is formed such that a part of the rotary roller formed in the horizontal sealing portion is inserted into the both inner side surfaces of the main body housing, even if the gate valve is vibrated or shaken, It is possible to move in the horizontal direction and seal the inflow portion.

In addition, since the elastic member is provided on the lower portion of the inlet pipe and the upper portion of the vertical sealing portion, the sealing performance can be increased in the state in which the inlet portion is opened or closed.

1 is a perspective view showing an entire structure of a gate valve according to a preferred embodiment of the present invention.
2 is an exploded perspective view showing an exploded view of a gate valve according to a preferred embodiment of the present invention.
FIG. 3 is a detailed view showing a configuration of a gate valve according to a preferred embodiment of the present invention, showing a rail part, a rotating roller, and a powder removing block. FIG.
4 is a detailed view showing a state in which the main elastic member and the guide elastic member are provided in the configuration of the gate valve according to the preferred embodiment of the present invention
FIGS. 5 and 6 are operational states showing the operation of the gate valve according to the preferred embodiment of the present invention;

Hereinafter, a gate valve 1 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that, in the drawings, the same components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as to avoid obscuring the subject matter of the present invention.

The gate valve 1 according to an embodiment of the present invention includes an upper housing 100, a main body housing 200, a moving passage opening and closing unit 300, a lower housing 400, a vertical sealing part 500, (600).

It should be noted that, prior to the explanation, the first moving passage 111 shown in Fig. 2 is set as an inlet, and the fifth moving passage 610 is set as an outlet.

First, the upper housing 100 will be described. 1 or 2, the upper housing 100 is a kind of cover which is coupled to an upper portion of a main body housing 200 to be described later. The cover is connected to a chamber (not shown) on one side, 1, an inflow conduit 110 in which the one moving passage 111 is formed is formed.

4, in order to insert a main elastic member 700 made of an elastic material to increase the sealing force of the first movement passage 111, (112) is formed.

Next, the main body housing 200 will be described. As shown in FIG. 2 or FIG. 3, the main body housing 200 is formed with an open top, and a moving passage opening / closing unit 300 to be described later is seated to move the moving passage opening and closing unit 300 in the horizontal direction And includes a second moving passage 210, a horizontal moving space 220, and a rail 230. The second moving passage 210 is a case for opening and closing the first moving passage 111. [

The second moving passage 210 is a component formed bored in the lower portion of the main body housing 200 in a direction perpendicular to the first moving passage 111. The fluid introduced from the first moving passage 111 is introduced into the second moving passage 111, To the fifth transfer passage 610 of the outflow conduit 600 to be drained.

The horizontal movement space 220 is a kind of seating space formed inside the main body housing 200. The movement passage opening and closing unit 300 is seated to be connected to the first drive unit 330 of the travel passage opening and closing unit 300, The closing plate 311 of the traveling passage opening and closing unit 300, which will be described later, can be moved in the horizontal direction.

The rail part 230 is a component serving as a common rail on both inner side surfaces of the main body housing 200 and is connected to the rotating rollers 313 and 313` of a sealing plate 311 to be described later, To move in a precise horizontal direction.

3, the seating depression 231 may be formed at one or more predetermined intervals (not shown) as shown in FIG. 3, So that the circular protrusions 313a and 313a` of the rotating rollers 313 and 313`, which will be described later, are inserted to enable a firm connection.

Next, the moving passage opening and closing unit 300 will be described. As shown in FIG. 2 or 3, the moving passage opening and closing unit 300 is a component that is seated in the horizontal moving space 220 of the main body housing 200 to open and close the first moving passage 111, A horizontal sealing portion 310, a shaft portion 320, and a first driving portion 330.

The horizontal closing part 310 is a component for opening and closing the first moving passage 111 while moving the horizontal moving space 220 to the operation of the first driving part 330. The horizontal closing part 310 includes a sealing plate 311, (312, 312 '), rotating rollers (313, 313') and a powder removing block (314).

The sealing plate 311 is a slim type plate for sealing the first moving passage 111 and is moved in the horizontal direction by the operation of the first driving unit 330.

The frames 312 and 312 are formed on both side surfaces of the sealing plate 311 and include rotary rollers 313 and 313 for guiding the horizontal movement of the sealing plate 311, A powder removing block 314 for removing the powder adhering to the powder removing block 230 is installed.

The rotatable rollers 313 and 313 are rotatably coupled to a rotatable roller receiving groove 312a having a plurality of rotatable rollers 313 and 313 formed on the frames 313 and 312, Circular protrusions 313a and 313a` inserted into the recesses 231 are further formed on the outer circumference of the rotary rollers 313 and 313` to guide the horizontal movement of the sealing plate 311 Thereby preventing the rotation rollers 313 and 313 'from being separated from the rail 230 in the process of moving the sealing plate 310 in the horizontal direction.

The powder removing block 314 is a component formed at the corners of the frames 312 and 312. The powder removing block 314 is provided at its outer side with a scraping projection 314a 314a` are further formed to scrape off the powder adhered to the recess 231 during horizontal movement of the horizontal closure 310 to smoothly move the closure plate 311 horizontally.

The shaft portion 320 is extended from the horizontal sealing portion 310 and connected to the first driving portion 330 to receive the driving force of the first driving portion 330 to receive the horizontal sealing portion 310, 1 moving path 111, as shown in FIG.

The first driving part 330 is a component connected to the shaft part 320 to provide a driving force to horizontally move the horizontal closing part 310. The first driving part 330 moves the shaft part 32 forward and backward Such as a pneumatic type operated by compressed air, a cylinder type, and the like, and the embodiment thereof may be applied to a general type And therefore, a detailed description thereof will be omitted.

Next, the lower housing 400 will be described. 2 or 4, the upper housing 400 includes a third moving passage 410 coupled to a lower portion of the main body housing 200 and formed in a punch in a direction perpendicular to the second moving passage 210, And a first driving part seating space 420 on which the first driving part 330 is mounted.

Next, the vertical sealing part 500 has been described. As shown in FIG. 2, FIG. 5 and FIG. 6, the vertical sealing part 500 is inserted into the third moving passage 410 and is positioned on the third moving passage 410 The sealing plate 311 may vertically press the sealing plate 311 to seal the first moving passage 111. The sealing plate 311 may be formed of a material having an inner side and a fourth side in a direction perpendicular to the third moving path 410, The transfer passage 510 is formed in a bore.

When the vertical sealing part 500 contacts the lower part of the first moving passage 111 or the lower part of the sealing plate 311 on the upper part of the vertical sealing part 500, It is preferable that the guide elastic member engaging grooves 520 and 520 'are recessed so that the guide elastic members 800 and 800' are inserted and seated.

The vertical sealing part 500 is lifted up between the guide elastic coupling grooves 520 and 520 'with the sealing plate 310 opening the first moving passage 111, The main elastic member protection groove 530 is formed so that the main elastic member 700 is not pressed against the upper surface of the vertical sealing member 500 when the upper surface of the main elastic member 500 and the lower surface of the inflow conduit 110 are in contact with each other, It is preferable that the depression is formed.

Next, the outflow conduit 600 will be described. 2, 5, and 6, the outflow conduit 600 is connected to a lower portion of the lower housing 400 and connected to a vacuum pump (not shown) A fifth moving passage 610 is formed inside the gate valve 1 in a direction perpendicular to the fourth moving passage 510. [

In the meantime, it is preferable that a second driving part 620 connected to the vertical hermetic part 500 and providing a driving force for vertical movement to the vertical hermetic part 500 is formed in the outflow channel 600.

The second driving unit 620 moves upward and downward to vertically move the vertical sealing unit 500 according to whether or not the compressed air flowing into the upper and lower portions of the protrusion of the vertical sealing unit 500 flows, And the second driving unit 620 correspond to general known technologies belonging to the corresponding technology, detailed description will be omitted.

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: Gate valve
100: inlet pipe 111: first passage
112: main elastic member engaging groove
200: main body housing 210: second moving passage
220: Horizontal movement space 230:
231:
300: moving passage opening / closing unit 310: horizontal sealing part
311: sealing plate 312, 312 ': frame
313, 313 ': rotating rollers 313a and 313a': circular protrusions
314: Powder removal block 314a, 314a ': Scraping projection
320: shaft portion 330: first driving portion
400: lower housing 410: third moving passage
500: vertical sealing part 510: fourth moving passage
520, 520`: guide elastic member engaging groove 530: main elastic member protecting groove
600: Outflow conduit 610: Fifth transfer passage
620:
700: main elastic member
800, 800`: Guide elastic member

Claims

An upper housing 100 connected to the chamber (not shown), the upper housing 100 including an inflow conduit 110 through which the first transfer passage 111 is formed;
A second moving path 210 coupled to a lower portion of the upper housing 100 and having an upper portion opened and formed at a lower portion in a direction perpendicular to the first moving path 111 and a horizontal closing portion 310, And a rail 230 connected to the horizontal hermetic part 310 and guiding horizontal movement of the horizontal hermetic part 310. The horizontal hermetic movement space 220 is formed to move horizontally, A body housing (200) comprising:
A horizontal sealing part 310 that is seated in the horizontal movement space 220 and opens and closes the first movement passage 111, a shaft part 320 connected to a distal end of the horizontal sealing part 310, And a first driving part (330) connected to the shaft part (320) and providing a driving force for horizontal movement to the horizontal closing part (310).
A third moving path 410 coupled to the lower portion of the main body housing 200 and formed in a punching hole in a direction perpendicular to the second moving path 210 and a second driving path 410 in which the first driving portion 330 is seated, A lower housing 400 including a seating space 420;
A fourth movement passage 510 is formed in the third movement passage 410 in a direction perpendicular to the third movement passage 410 and the horizontal movement portion 310 is inserted into the third movement passage 410, A vertical closure part (500) for moving the horizontal closure part (310) in a vertical direction while being positioned on the passage (410);
A fifth moving passage 610 is formed in the lower portion of the lower housing 400 so as to be connected to a vacuum pump (not shown), a fifth moving passage 610 is formed inside the fourth moving passage 510 in a direction perpendicular to the fourth moving passage 510, And a second driving unit 620 connected to the vertical sealing unit 500 to provide a driving force for vertical movement to the vertical sealing unit 500,
The horizontal hermetic sealing part 310 may be formed,
A sealing plate 311 for sealing the first moving passage 111 is formed,
Frames 312 and 312 'are formed on both sides of the sealing plate 311,
The rotary hinges 313 and 313 are inserted into the rails 230 at both sides of the frames 312 and 312 to rotate along the rails 230 in the horizontal movement of the horizontal hermetically- 313 ') are formed in plural numbers.

The method according to claim 1,
At the inner side of the rail 230, a recess 231 is formed at a predetermined interval,
Circular protrusions 313a and 313a` are formed around the outer circumference of the rotary rollers 313 and 313` so as to be inserted into the recess 231,
The crushing protrusions 314a and 314a` for scraping the powder adhered to the recesses 231 are formed in the corners of the frames 312 and 312, And a removal block (314, 314) is configured.

The method of claim 2,
A main elastic member coupling groove 112 is formed in a lower circumference of the inflow conduit 110 so as to insert the main elastic member 700,
Two guide elastic member engaging grooves 520 and 520 'are formed in the upper portion of the vertical sealing part 500 so that the guide elastic members 800 and 800'
The vertical sealing part 500 is raised between the respective guide elastic member engaging recesses 520 and 520 'with the sealing plate 310 opening the first moving passage 111, The main elastic member protection groove 530 is formed so that the main elastic member 700 is not pressed against the upper surface of the vertical sealing member 500 when the upper surface of the main elastic member 500 and the lower surface of the inflow conduit 110 are in contact with each other, (1). &Lt; / RTI >