KR102127189B1 - Door exchange type gate valve system - Google Patents

Abstract

The present invention relates to a door-replaceable gate valve system capable of selectively opening and closing the chamber, the valve housing is formed at least one passage; A door on which a first sealing member is installed to block the passage; A movable stand for supporting the door detachably; A first direction moving device capable of moving the movable table in a first direction from a standby position to a first position facing the passageway in the valve housing; A second direction movement device installed between the movable table and the door and capable of moving the door in a second direction from the first position to a second position capable of blocking the passage; And when installed in the movable table and moved from the standby position to the third position in the third direction, which is the reverse direction of the first direction, using the first direction moving device, the door replacement area of the valve housing can be isolated. Insulating member; may include.

Description

Door exchange type gate valve system

The present invention relates to a door replaceable gate valve system, and more particularly, to a door replaceable gate valve system capable of selectively opening and closing the chamber.

In general, the chamber is an industrial facility facility used to manufacture advanced semiconductor devices, display devices, or other medical devices, such as semiconductor chips, wafers, LCD panels, OLED panels, etc., which require a vacuum or high-clean working environment. The gate valve attached to the chamber serves as an entrance to and from the chamber, and is a type of device that opens a door to move a semiconductor chip or wafer into the chamber space and closes the door again to maintain an airtight state in the chamber.

On the other hand, these conventional gate valves are generally maintained in an airtight state using an O-ring, and the O-ring made of an elastic material is easily worn or deformed periodically due to internal process environment or adverse conditions such as vacuum, high pressure, and high temperature to periodically exchange There was a hassle to do.

As a conventional technique to solve this, as disclosed in the Republic of Korea Patent Publication No. 10-2006-0069287, the opening and closing cover installed on a portion of the valve housing, the sealing member (oring) can be replaced only from the valve body This has been developed.

However, the conventional technology of exchanging only the O-rings cannot be used in the door, which is an integrated O-ring, which is a recent trend. There were problems in that it was difficult to maintain the confidentiality due to the damaged or incomplete installation of the O-ring.

In addition, such a conventional O-ring exchange technology requires a very large area to be opened in order to exchange O-rings. Due to such a large area, the volume of equipment increases, so that the manufacturing cost of the equipment becomes expensive, and the internal space of the equipment increases. There have been many problems, such as taking a lot of time and money to form a vacuum pressure.

The idea of the present invention is to solve these problems, it is possible to replace the entire door including the O-ring can greatly reduce the replacement cost and time, reduce the volume of the equipment unit cost and the vacuum pressure formation time and It is possible to reduce the cost, for example, by providing a door-replaceable gate valve system that allows the door to be replaced without breaking the overall vacuum of the valve housing by simply lowering the movable table. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

Door replacement type gate valve system according to the spirit of the present invention for solving the above problems, the valve housing is formed at least one passage; A door on which a first sealing member is installed to block the passage; A movable stand for supporting the door detachably; A first direction moving device capable of moving the movable table in a first direction from a standby position to a first position facing the passageway in the valve housing; A second direction movement device installed between the movable table and the door and capable of moving the door in a second direction from the first position to a second position capable of blocking the passage; And when installed in the movable table and moved from the standby position to the third position in the third direction, which is the reverse direction of the first direction, using the first direction moving device, the door replacement area of the valve housing can be isolated. Insulating member; may include.

In addition, according to the present invention, the isolation member, the lower bottom portion formed to correspond to the inner surface of the valve housing; An intermediate inclined portion formed to be connected to the lower lower surface portion to correspond to an inclined surface of the protruding wall portion formed to protrude into the valve housing; And an upper lower surface portion formed to be connected to the intermediate inclined portion to correspond to the upper surface of the protruding wall portion.

In addition, according to the present invention, while maintaining the overall vacuum of the valve housing, only the door replacement area can release the vacuum so that the lower surface portion, the middle inclined portion and the upper lower surface edge portion or the protruding wall contact surface A second sealing member may be installed.

Further, according to the present invention, at least one side, the lower surface, the front surface of the valve housing or the protruding wall portion corresponding to the door replacement area is selected, and at least one of the combinations thereof is used to open the door replacement, and the door A cover may be installed in the replacement opening.

Further, according to the present invention, the door may be a slide-replaceable door that can be slidingly attached and detached along a rail member installed in the second direction moving device.

Further, according to the present invention, the door may be a fastening replaceable door that is detachably installed in the second direction movement device using a fixture or a jig.

Further, according to the present invention, the first direction movement device may be a lifting cylinder, and the second direction movement device may be a sealing cylinder.

Further, according to the present invention, the door may be an L motion door capable of blocking a single passage formed in the valve housing.

In addition, according to the present invention, the door includes a first door capable of blocking a first passage formed on one side of the valve housing and a second door capable of blocking a second passage formed on the other side of the valve housing. It may be a motion door.

In addition, according to the present invention, at least one of the door replacement area, at least one of an internal vacuum line, an external vacuum line, a vacuum pressure release line, an inert gas supply line, a clean air supply line, and combinations thereof may be installed. .

In addition, the door replaceable gate valve system of the present invention according to the present invention may further include an identification device capable of identifying the identification information of the door so as to allow the operation only when the identification information matches.

Further, according to the present invention, it may be an RFID sensor or an RFID identification control unit installed in the valve housing or a portion corresponding to the RFID tag to recognize the RFID tag installed in the door.

In addition, according to the present invention, the door, at least one side of the at least one insertion hole coupled to the bar and the forceful engagement is formed, the entrance portion of the insertion hole is installed with an O-ring to prevent scattering of particles when engaged Can be.

According to some embodiments of the present invention made as described above, since the entire door including the O-ring can be replaced, the replacement cost and time can be greatly reduced, and the unit volume and the vacuum pressure forming time are reduced by reducing the volume of the equipment. And it is possible to reduce the cost, for example, by simply lowering the movable platform, the door can be replaced without breaking the overall vacuum of the valve housing, thereby simplifying the operation and operation of the equipment, thereby improving the durability and performance of the equipment. It has the effect of allowing only genuine parts to be used. Of course, the scope of the present invention is not limited by these effects.

1 is an external perspective view showing a door replacement gate valve system according to some embodiments of the present invention.
FIG. 2 is an exploded perspective view of a part of the door replaceable gate valve system of FIG. 1.
3 is a cross-sectional view showing an example of the door replacement gate valve system of FIG. 1.
4 is a cross-sectional view showing another example of the door replacement gate valve system of FIG. 1.
5 is an enlarged perspective view showing a door of the door-replaceable gate valve system of FIG. 1.
6 is a perspective view showing another example of a door replacement opening of the door replacement type gate valve system of FIG. 1.
7 is a perspective view showing still another example of the door replacement opening of FIG. 1.
8 is a cross-sectional view showing still another example of the door replacement opening of FIG. 1.
FIG. 9 is a view showing a normal operation process of the door replaceable gate valve system of FIG. 1.
FIG. 10 is a view showing a door replacement process of the door replacement gate valve system of FIG. 1.
11 is a flowchart illustrating an operation process of the door replacement gate valve system of FIG. 1.
12 is a cross-sectional view illustrating a door replaceable gate valve system according to some other embodiments of the present invention.
13 is a flow chart showing an example of a genuine identification process of the door of the door replaceable gate valve system of FIG. 1.
FIG. 14 is a flowchart illustrating another example of a genuine identification process of a door of the door replacement gate valve system of FIG. 13.
15 is an exploded perspective view showing a part of a door replacement gate valve system according to some other embodiments of the present invention.
16 is a component assembly cross-sectional view showing the door-replaceable gate valve system of FIG. 15.
17 is an enlarged perspective view showing an enlarged door of the door replaceable gate valve system of FIG. 15.
18 is a cross-sectional view illustrating the door of the door replaceable gate valve system of FIG. 15.
19 is an exploded perspective view showing a part of a door replacement gate valve system according to some other embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those of ordinary skill in the art, and the following embodiments can be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terminology used herein is used to describe a specific embodiment and is not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and/or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and/or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on the manufacturing technique and/or tolerance, deformations of the illustrated shape can be expected. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, the door replaceable gate valve system 100 and 200 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is an external perspective view showing a door replaceable gate valve system 100 according to some embodiments of the present invention. And, FIG. 2 is an exploded perspective view showing a part of the door replaceable gate valve system 100 of FIG. 1, and FIG. 3 is a cross-sectional view showing an example of the door replaceable gate valve system 100 of FIG. 1.

First, as shown in Figures 1 to 3, the door replacement gate valve system 100 according to some embodiments of the present invention, largely the valve housing 10, the door 20, and the movable table ( 30), the first direction movement device 40, the second direction movement device 50 and the isolation member 60 may be included.

For example, the valve housing 10 is a hollow box-shaped structure as a whole, and at least one passage 10a may be formed.

Here, the valve housing 10, the semiconductor chip, wafer, LCD panel, OLED panel, such as a state-of-the-art semiconductor device or display device or other medical device, such as various objects to enter and exit one or both sides of the passage (10a) It may be a structure to be formed.

The valve housing 10 includes the above-described door 20, the movable table 30, the first directional movement device 40, the second directional movement device 50 and the isolation member It may support 60, and may be a structure having sufficient strength and durability to be connected to various chambers. However, the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and a wide variety of types and types of passages or valve housings may be applied.

In addition, for example, as illustrated in FIGS. 1 to 3, the door 20 is a type of valve body in which a first sealing member S1 is installed to block the passage 10a, and the door 20 ) May be formed according to the detective of the passage 10a to correspond to the shape of the passage 10a. Here, the first sealing member S1 may be a sealing member such as an O-ring or gasket for airtightness.

Such, the door 20 is shown for the purpose of understanding, and is not limited to the drawings, and may be applied in various ways, such as being installed in various numbers or additionally installing various sealing members, various joints, or hinge structures.

In addition, for example, as shown in FIGS. 1 to 3, the movable table 30 is a structure similar to a head block that detachably supports the door 20 and moves in the first direction, which will be described later. The device 40 may be installed to be movable. However, of course, the movable table 30 is not limited to the drawings.

In addition, for example, as shown in FIGS. 1 to 3, the first directional movement device 40 faces the passage 10a in a standby position by placing the movable table 30 in the valve housing 10. A wide variety of actuators, such as cylinders, motors, power transmissions, gearboxes, etc., which can be moved in the first direction to the first position can be applied.

In addition, for example, as shown in FIGS. 1 to 3, the second direction movement device 50 is installed between the movable table 30 and the door 20, and the door 20 is A wide variety of actuators, such as cylinders, motors, power transmission devices, or gear boxes, that can move in the second direction from the first position to the second position that can block the passage 10a can be applied.

Here, in FIGS. 1 to 3, the first direction movement device 40 is a lifting cylinder, and the second direction movement device 50 is illustrated as a sealing cylinder. All of the mobile devices possessed can be applied.

Accordingly, the door 20 may be moved up and down from the standby position to the first position by the first direction movement device 40 inside the valve housing 10, and then, the second direction movement It is possible to selectively open and close the passage 10a by moving forward and backward from the first position to the second position by the device 50.

In addition, for example, as illustrated in FIGS. 1 to 3, the isolation member 60 is installed on the movable table 30 and is in the standby position using the first direction movement device 40. When it is moved in the third direction, which is the reverse direction of the first direction, to the third position, it may be an overall L-shaped plate structure capable of isolating the door replacement area A of the valve housing 10. .

More specifically, for example, as illustrated in FIGS. 1 to 3, the isolation member 60 includes a lower bottom portion 61 formed to correspond to an inner side surface F1 of the valve housing 10. , The intermediate inclined portion 62 and the protruding wall portion formed to be connected to the lower bottom portion 61 to correspond to the inclined surface F2 of the protruding wall portion W formed to protrude into the valve housing 10 ( It may include an upper lower surface portion 63 formed to be connected to the intermediate inclined portion 62 to correspond to the upper surface (F3) of W).

That is, the isolation member 60 is the valve housing 10, the lower lower portion 61, the intermediate inclined portion 62 and the upper lower portion 63 of the isolation member 60, even by a simple downward movement. ) Is in close contact with one surface (F1), the inclined surface (F2) and the upper surface (F3) of the protruding wall portion (W), to isolate the door replacement area (A).

At this time, while maintaining the overall vacuum of the valve housing 10, the contact surface of the protruding wall portion W or the lower lower surface portion 61 and the intermediate slope so that only the door replacement area A can release the vacuum. A second sealing member S2 may be installed on the edge portion of the portion 62 and the upper and lower surface portions 63. Here, the second sealing member S2 may be a sealing member such as an O-ring or gasket for airtightness.

More specifically, for example, as shown in Figure 3, the door replacement area (A), the first valve (V1) is installed, the inner vacuum line 71 and connected to the housing vacuum area (B) and A second valve V2 is installed, and a vacuum release line 72 connected to an external atmospheric or clean air supply source can be connected.

Therefore, as illustrated in FIG. 3, after the isolating member 60 isolates the door replacement area A, the second valve V2 that receives the vacuum pressure release control signal by the control unit 70. When the vacuum release line 72 is opened, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door C through the door replacement opening H. Can be replaced.

At this time, the door replacement area A is in an isolated state, and the housing vacuum area B can maintain a vacuum state.

Subsequently, as illustrated in FIG. 3, after the door 20 is replaced, the first valve V2 that covers the cover C and receives a vacuum pressure control signal by the control unit 70 is applied. When the vacuum release line 72 is closed, while the first valve V1 opens the internal vacuum line 71, the door replacement area A communicates with the housing vacuum area B. As a result, vacuum pressures of the same pressure may be formed, and through this, normal door opening and closing operation in a vacuum environment is possible.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

FIG. 4 is a cross-sectional view showing another example of the door replaceable gate valve system 100 of FIG. 1.

According to another embodiment, for example, as illustrated in FIG. 4, the door replacement area A is provided with a third valve V3, and an external vacuum line 73 connected to an external pump PUMP. ) And a fourth valve V4 are installed, and a vacuum release line 74 connected to an external atmospheric or clean air supply source may be connected.

Therefore, as illustrated in FIG. 4, after the isolation member 60 isolates the door replacement area A, the fourth valve V2 that receives the vacuum pressure release control signal by the control unit 70. When the vacuum release line 74 is opened, the vacuum pressure of the door replacement area A is released, and the cover C to be described later is opened to open the door C through the door replacement opening H. Can be replaced.

At this time, the door replacement area A is in an isolated state, and the housing vacuum area B can maintain a vacuum state.

Subsequently, as shown in FIG. 4, after the door 20 is replaced, the fourth valve V4 that covers the cover C and receives a vacuum pressure control signal by the control unit 70 is applied. When the vacuum release line 74 is closed, while the third valve V3 opens the external vacuum line 71, the door replacement area A is vacuumed by the pump PUMP. This can be formed, and through this, normal door opening and closing operation in a vacuum environment is possible.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

In addition, although not shown, the door replacement area A may be provided with various connection lines, such as an inert gas supply line supplying inert gas from an inert gas supply source, and a clean air supply line supplying clean air from a clean air supply source. have.

Accordingly, the door replacement area A may be selectively connected to the inside or the outside to form a vacuum, or an inert gas such as nitrogen gas or clean air may be supplied. In addition, various pressure gauges, thermometers, temperature control devices such as heaters and cooling devices, etc. may be additionally installed.

5 is an enlarged perspective view showing the door 20 of the door replaceable gate valve system 100 of FIG. 1.

As illustrated in FIG. 5, the door 20 of the door replacement gate valve system 100 according to some embodiments of the present invention includes a rail member R installed in the second directional movement device 50. Accordingly, it may be a slide-replaceable door 21 that can be detached and sliding.

Therefore, when the door replacement area A is isolated by the isolation member 60, only the door replacement area A communicates with the outside air, so that the old slide replacement door 21 from the rail member R is removed. The first sealing member (S1) and the sliding integrally separated, the new first sealing member (S1) can be replaced by sliding insert the sliding door 21 is installed.

For the inflow and outflow of the door 20, as shown in FIGS. 1 to 5, at least the side surface 10c of the valve housing 10 and the protruding wall portion W corresponding to the door replacement area A ), the door replacement opening (H) is formed, the door replacement opening (H) may be provided with a cover (C). However, the present invention is not necessarily limited thereto, and the door 20 may be flowed in and out in various directions.

6 is a perspective view showing another example of a door replacement opening H of the door replacement gate valve system 100 of FIG. 1, and FIG. 7 is another example of a door replacement opening H of FIG. 1. It is a perspective view and FIG. 8 is a sectional view showing another example of the opening H for replacing a door of FIG. 1.

That is, as shown in FIG. 6, a door replacement opening H is formed on the lower surface 10d of the valve housing 10 or the protruding wall portion W corresponding to the door replacement area A, A cover C may be installed in the door replacement opening H.

In addition, for example, as shown in FIG. 7, a door replacement opening H is formed on the front surface 10e of the valve housing 10 or the protruding wall portion W corresponding to the door replacement area A. And, a cover C may be installed in the opening H for replacing the door.

In addition, for example, as shown in FIG. 8, a door replacement opening H is formed on the lower surface 10d and the front surface 10e of the valve housing 10 corresponding to the door replacement area A, A cover C may be installed in the door replacement opening H. In addition, the lower surface (10d) and one side (10c) or the lower surface (10d), the side (10c) and the front (10e) are all formed of various types of openings (H) to facilitate the replacement of the door (20) have.

Meanwhile, for example, as illustrated in FIG. 8, the door 20 is detachably attached to the second direction movement device 50 using a fixture F or jig such as a bolt, a nut, or a screw. It may be a fastening replaceable door 22 installed. In addition, various fastening doors, such as, for example, an interference engaging groove, an interference engaging protrusion, a snap button, or a magnet, may be applied.

In addition, the cover (C) can also be applied to various types of lids, such as a lid, a foldable door, a cap, a shell, etc., which are variously installed and fixed detachably by a fastener.

In addition, for example, as illustrated in FIGS. 1 to 8, the door 20 may be an L motion door capable of blocking a single passage 10a formed in the valve housing 10. However, it is not necessarily limited to this.

9 is a view showing a normal operation process of the door replacement gate valve system 100 of FIG. 1.

As illustrated in FIG. 9, when a normal operation process of the door replaceable gate valve system 100 according to some embodiments of the present invention is described, during the first time t1, the door 20 is an object to be processed. You can wait in the open stage (Open stage) for loading or unloading.

Subsequently, during the second time t2, the door 20 may be raised from the standby position to the first position (Close stage), and then, from the first position for the third time t3, the second The passage 10a may be sealed by advancing to a position.

Subsequently, for the fourth time t4, when the processing processor of the movable object is finished, for the fifth time t5, the door 20 retracts from the second position back to the first position to unlock the passage 10a. It may be unsealed and may descend from the first position to the standby position during the sixth time t5.

FIG. 10 is a view showing a door replacement process of the door replacement gate valve system 100 of FIG. 1.

Meanwhile, as illustrated in FIG. 10, when a door replacement process of the door replacement gate valve system 100 according to some embodiments of the present invention is described, the door 20 in the process of FIG. 9, that is, a sealing plate When the replacement of the is required, during the zero replacement time (te0), the door 20 is lowered from the standby position (Open stage) to the third position (Exchange stage) to isolate the door replacement area (A), During the first replacement time te1, the above-described door replacement area A is switched to the standby state ATM, and during the second replacement time te2, a door replacement operation may be performed.

Subsequently, during the third replacement time te3, the isolation of the door replacement area A is released to switch the door replacement area A back to a vacuum state, and during the fourth replacement time te4, the door ( 20) may rise from the third position to the standby position and wait.

Here, these replacement times are performed during the first time t1 of FIG. 9 so that the door replacement operation can be quickly performed without breaking the equipment or breaking the entire vacuum.

11 is a flowchart illustrating an operation process of the door replaceable gate valve system 100 of FIG. 1.

As illustrated in FIG. 11, the door replacement operation of the present invention may be performed by the operator or the controller's judgment, “Is it necessary to replace the seal plate (door)?”, for example, to check the usage time of the door, The state of the door can be checked through various sensors, such as a load sensor or vision, which checks the sealing state inside the chamber or measures the state of the sealing member.

12 is a cross-sectional view illustrating a door replaceable gate valve system 200 according to some other embodiments of the present invention.

12, the door 20 of the door replacement gate valve system 200 according to some other embodiments of the present invention includes a first passage 10a formed on one side of the valve housing 10. T motion door 23 including a first door 20-1 that can block and a second door 20-2 that can block a second passage 10b formed on the other side of the valve housing 10 Can be Therefore, the technical idea of the present invention can be applied to all of the gates of various types of gate valves such as T motion as well as L motion.

Therefore, according to various embodiments of the present invention described above, it is possible to replace the entire door including the O-ring, thereby significantly reducing the replacement cost and time, and reducing the volume of the equipment to reduce the unit cost and vacuum pressure formation time and The cost can be reduced, for example, by simply lowering the movable table, the door can be replaced without breaking the overall vacuum of the valve housing, thereby simplifying the operation and operation of the equipment, thereby improving the durability and performance of the equipment.

13 is a flowchart illustrating an example of a genuine identification process of the door replacement gate valve system of FIG. 1.

1 to 13, the door-replaceable gate valve system 100 of the present invention according to the present invention can identify the identification information of the door so that operation is allowed only when matching identification information As it may further include a device, more specifically, as shown in, for example, FIGS. 3 and 4, the identification device may recognize an RFID tag (RT) installed in the door 20. To receive the identification information from the RFID sensor (RS) and the RFID sensor (RS) installed in the valve housing (10) or a portion corresponding to the RFID tag (RT) so that the normal operation of the equipment only when matching the identification information If not, otherwise, it may be an RFID identification control unit 80 to stop the operation of the equipment.

Therefore, as shown in FIG. 13, when replacing the sealing plate SP of the door 20, when the RFID sensor RS of the identification device recognizes the RFID tag RT and detects identification information ( S11), if the RFID identification control unit 80 determines whether to match (S12) or match, normal operation is permitted or replacement of the door 20 is allowed (S13), and if not, operation An improper command or a determination that the door 20 cannot be replaced may be made.

Therefore, it is possible to replace only the genuine door 20 to which the identification information has been officially provided, thereby increasing the safety of the equipment and preventing malfunction or illegal use in advance.

14 is a flowchart illustrating another example of a genuine identification process of the door 20 of the door replaceable gate valve system 100 of FIG. 13.

1 to 14, more specifically, for example, when the exchange processor is started, the door replacement area A is sealed, and the door replacement area A is switched to a standby state in vacuum. When replacing the door by opening the cover C, if the RFID sensor RS recognizes the RFID tag RT and determines that it is genuine, the cover C of the door replacement area A is opened. After closing, the door replacement area (A) is converted into a vacuum to complete a normal exchange processor or, if it is not determined to be genuine, a non-genuine error message is output visually or aurally, and the door replacement area (A) Can terminate abnormal operation in atmospheric pressure. However, it is not necessarily limited to this.

15 is an exploded perspective view of a part of the door 20 of the door replaceable gate valve system 300 according to some other embodiments of the present invention, and FIG. 16 is a door replaceable gate valve system 300 of FIG. 15. Is a component assembly cross-sectional view, Figure 17 is an enlarged perspective view showing an enlarged door 20 of the door replaceable gate valve system 300 of Figure 15, Figure 18 is the door of the door replaceable gate valve system of Figure 15 ( 20).

15 to 18, the door 20 of the door replacement gate valve system 300 according to some other embodiments of the present invention, at least one side of the door support (DS) of the tactile rod ( AR) and at least one insertion hole (ARH) that is coupled by an interference bit is formed, the inlet portion of the insertion hole (ARH) may be provided with an O-ring (S3) to prevent scattering of particles when combined.

Here, the tactile rod AR shown in FIGS. 15 to 18 protrudes to the left in the horizontal direction from the door support DS, and thus, illustrates that the door 20 can be disassembled in the horizontal direction. .

19 is an exploded perspective view of a part of the door 20 of the door replacement gate valve system 400 according to some other embodiments of the present invention.

As illustrated in FIG. 19, the tactile rod AR of the door replacement gate valve system 400 according to some other embodiments of the present invention is projected downward from the door support DS in a vertical direction. , Therefore, it was illustrated that the door 20 can be disassembled in the vertical direction.

However, the disassembly method of the door 20 is very various, and is not limited to the drawings.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: valve housing
10a: passage
20: door
21: replaceable door
22: Fastening replaceable door
20-1: First door
20-2: Second door
30: movable table
40: first direction movement device
50: second direction movement device
60: no containment
61: the lower part
62: middle slope
63: upper lower part
A: Door replacement area
S1: First sealing member
S2: Second sealing member
W: projecting wall
C: cover
R: Rail member
70: control
71: external vacuum line
72: internal vacuum line
73: inert gas supply line
74: clean air supply line
P: vacuum pump
G: Inert gas source
J: clean air supply
100, 200: door replacement gate valve system

Claims (12)

A valve housing in which at least one passage is formed;
A door on which a first sealing member is installed to block the passage;
A movable stand for supporting the door detachably;
A first direction moving device capable of moving the movable table in a first direction from a standby position to a first position facing the passageway in the valve housing;
A second direction movement device installed between the movable table and the door and capable of moving the door in a second direction from the first position to a second position capable of blocking the passage; And
When installed in the movable table and moved from the standby position to the third position in the third direction, which is the reverse direction of the first direction, using the first direction moving device, the door replacement area of the valve housing can be isolated. Absence of isolation;
Including,
The isolation member,
A lower lower surface portion formed to correspond to one inner surface of the valve housing;
An intermediate inclined portion formed to be connected to the lower lower surface portion to correspond to an inclined surface of the protruding wall portion formed to protrude into the valve housing; And
An upper lower surface portion formed to be connected to the intermediate inclined portion to correspond to the upper surface of the protruding wall portion;
Including, door replacement gate valve system. delete According to claim 1,
A second sealing member is installed on the contact surface of the protruding wall portion or the lower lower surface portion, and the edge portion of the intermediate inclined portion and the upper lower surface portion so that only the door replacement area can release the vacuum while maintaining the overall vacuum of the valve housing. Door replacement gate valve system. The method of claim 3,
A door replacement opening is formed by selecting at least one of the valve housing or the protruding wall portion corresponding to the door replacement area, at least one of a side surface, a lower surface, a front surface, and a combination thereof, and a cover is installed in the door replacement opening Door replacement gate valve system. The method of claim 4,
The door is a slide-replaceable door that can be detachably slided along a rail member installed in the second direction movement device, a door-replaceable gate valve system. The method of claim 4,
The door is a door replacement-type gate valve system that is a fastening-replaceable door that is detachably installed in the second direction movement device using a fixture or a jig. According to claim 1,
The first direction movement device is a lifting cylinder,
The second direction movement device is a sealing cylinder, a door replacement gate valve system. According to claim 1,
The door is an L-motion door that can block a single passage formed in the valve housing, the door replacement gate valve system. According to claim 1,
The door,
A T-motion door comprising a first door capable of blocking a first passage formed on one side of the valve housing and a second door capable of blocking a second passage formed on the other side of the valve housing. According to claim 1,
The door replacement area, at least an internal vacuum line, an external vacuum line, a vacuum pressure release line, an inert gas supply line, a clean air supply line and any one or more combinations thereof are installed, the door replacement gate valve system. According to claim 1,
An identification device capable of identifying identification information of the door to allow operation only when matching identification information;
Further comprising, a door replacement gate valve system. The method of claim 4,
The door, the at least one insertion hole is formed to be coupled to the forceful bar and the forceful engagement on at least one side, the inlet portion of the insertion hole is installed, the O-ring is installed to prevent scattering of particles when engaged, is an interference-fed door , Door replaceable gate valve system.

Images