KR102160232B1 - Magnet coupling type gate valve system - Google Patents

Abstract

The present invention relates to a magnetic coupling type gate valve system for moving a door using magnetic force, comprising: a valve housing having a passage; A door opening and closing the passage; And a door moving device for moving the door in the direction of the passage, wherein the door moving device includes: an inner magnetic body installed inside the valve housing and interlocked with the door; An external magnetic body installed outside the valve housing and corresponding to the internal magnetic body; And a magnetic body shaft rotation device installed outside the valve housing and configured to axially rotate the external magnetic body so that the internal magnetic body can be moved by magnetic force.

Description

Magnetic coupling type gate valve system

The present invention relates to a magnet coupling type gate valve system, and more particularly, to a magnet coupling type gate valve system for moving a door using magnetic force.

In general, the chamber is an industrial facility facility used to manufacture advanced semiconductor devices such as semiconductor chips, wafers, LCD panels, OLED panels, etc., or display devices or other medical devices that require a vacuum or high clean working environment. The gate valve attached to the chamber serves as an entrance to the chamber, and is a type of device that opens the door to move semiconductor chips or wafers into the chamber space, and closes the door again to maintain an airtight state in the chamber.

Meanwhile, such a conventional gate valve generally uses a motor or cylinder as a driving device, and uses a bellows pipe or an O-ring to keep the internal environment of the gate valve clean from driving devices such as a motor or cylinder. Although airtightness was maintained, these bellows pipes and O-rings also had problems in that foreign substances may be generated due to deterioration of parts after long use.

As a conventional technology to solve this problem, as disclosed in Japanese Patent Application No. 1993-350099, a permanent magnet is installed inside the gate valve, and the door is raised and lowered in a non-contact manner using an electromagnet corresponding to the gate valve. A technology that can be used has been developed.

However, such a conventional non-contact door moving technology using a permanent magnet and an electromagnet is difficult to generate strong magnetic force because the magnetic efficiency of the electromagnet is relatively low compared to that of a permanent magnet, and the electromagnet is a core, a coil, a power supply device, or a control unit. Since the number is too large, the installation cost increases, and the occupied volume is also large, there are problems that were not suitable for the installation space of a gate valve that is generally very narrow between the chamber and the chamber.

The idea of the present invention is to solve these problems, and it is possible to increase the magnetic force easily by increasing the number and arrangement of the permanent magnets, and the number of parts or the electromagnet control process is unnecessary, so that equipment cost and installation space can be greatly reduced. A magnet coupling type gate valve that improves space utilization by using the side and upper surfaces of the valve housing, and greatly improves the internal cleanliness of the valve housing by using a magnet coupling not only for lifting and lowering but also for door opening and closing operations. To provide a system. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

The magnet coupling type gate valve system according to the spirit of the present invention for solving the above problem includes: a valve housing having a passage; A door opening and closing the passage; And a door moving device for moving the door in the direction of the passage, wherein the door moving device includes: an inner magnetic body installed inside the valve housing and interlocked with the door; An external magnetic body installed outside the valve housing and corresponding to the internal magnetic body; And a magnetic body shaft rotation device installed outside the valve housing and configured to axially rotate the external magnetic body so that the internal magnetic body can be moved by magnetic force.

In addition, according to the present invention, the door may be an L-motion door that is primarily moved in a first direction from a stand-by position to a position opposite the passage, and secondly moved in the second direction from the position opposite the passage to the closing position. .

In addition, according to the present invention, in the door moving device, a cylinder operated by a working fluid line may be installed between the first moving head and the door so that the door can be moved secondarily.

In addition, according to the present invention, the door moving device further includes a magnetic rotating device for the door to move the secondarily, wherein the magnetic rotating device is connected to a pinion gear meshing with a rack gear installed in the door. An external rotating magnetic body which is magnet-coupled with an internal rotating magnetic body to rotate the internal rotating magnetic body and installed outside the valve housing; And a rotary actuator that rotates the external rotary magnetic body.

In addition, according to the present invention, a door replacement area in which a plurality of doors can wait is formed on one side of the valve housing, and the door is detachably installed from the head so that the door can be replaced inside the valve housing. I can.

In addition, according to the present invention, the external magnetic body is installed on one side of the cylindrical protrusion of the valve housing, is formed in a ring shape or arc shape so as to correspond to the outer diameter surface of the protrusion, and magnetic force acting on the inner magnetic body Including; a 1-1 axially rotating magnetic body array capable of axially rotating the protrusion with a rotational axis so that the polarity of the 1-1 axially rotating magnetic body array is axially rotated. It may include a; 1-1 magnetic body shaft rotation device.

In addition, according to the present invention, the external magnetic body is installed on the other side of the cylindrical protrusion of the valve housing, is formed in a ring shape or an arc shape so as to correspond to the outer diameter surface of the protrusion, and magnetic force acting on the internal magnetic body Further comprising: a 1-2 axial rotation magnetic body array capable of axially rotating the protrusion with a rotation axis so that the polarity of the protrusion can be changed, wherein the magnetic body axial rotation device axially rotates the 1-2 axial rotation magnetic body array It may further include a; 1-2 magnetic body shaft rotation device to let.

In addition, according to the present invention, the 1-1 magnetic body shaft rotation device includes: a driven gear formed on an outer diameter surface of the 1-1 shaft rotation magnetic body array; A drive gear engaged with the driven gear to drive the driven gear; And a drive motor that rotates the drive gear.

In addition, according to the present invention, the magnetic body shaft rotation device includes: a first magnetic body shaft rotation device capable of first moving the door; And a second magnetic material shaft rotation device capable of secondarily moving the door.

In addition, according to the present invention, the door moving device may further include a door guide device installed inside the valve housing and guiding the door or a movable table on which the door is installed.

In addition, according to the present invention, the door guide device includes: a first door guide device for first guiding the door in a first direction from a standby position to a passage opposite position; And a second door guide device for secondarily guiding the door in a second direction from a position facing the passage to a position closing the passage.

In addition, the magnet coupling type gate valve system according to the present invention may further include a return magnetic body capable of returning the door to a ready position when the inner magnetic body is away from the external magnetic body.

Further, according to the present invention, the inner magnetic body and the outer magnetic body may be permanent magnets.

In addition, the magnet coupling type gate valve system according to the present invention may further include an identification device capable of identifying identification information of the door so that operation is allowed only when matching identification information.

According to some embodiments of the present invention made as described above, the permanent magnet and the permanent magnet can be magnet-coupled to move the door in a non-contact manner, and at the same time, the magnetic force can be easily increased by increasing the number and arrangement of the permanent magnets. , As the number of parts or electromagnet control process is unnecessary, facility cost and installation space can be greatly reduced, and space utilization is increased by using the side and upper surfaces of the valve housing, and not only the lifting (primary movement) operation but also opening and closing ( It has the effect of greatly improving the internal cleanliness of the valve housing by using the magnetic coupling in the secondary movement) operation. Of course, the scope of the present invention is not limited by these effects.

1 is a side cross-sectional view illustrating a magnet coupling type gate valve system according to some embodiments of the present invention.
FIG. 2 is a front view illustrating a door lowering state of the magnet coupling type gate valve system of FIG. 1.
FIG. 3 is a front view showing an elevated state of a door of the magnet coupling type gate valve system of FIG. 1.
4 is a front view showing a magnet coupling type gate valve system according to some other embodiments of the present invention.
5 is a front view showing a door of the magnet coupling type gate valve system of FIG. 1.
6 is a side cross-sectional view illustrating a door and a magnetic body rotating device of a magnet coupling type gate valve system according to still another exemplary embodiment of the present invention.
7 is a perspective view showing a magnetic rotation device of the magnet coupling type gate valve system of FIG. 6.
8 is a side cross-sectional view illustrating a magnet coupling type gate valve system according to still another exemplary embodiment of the present invention.
9 is a side cross-sectional view illustrating a magnet coupling type gate valve system according to still another exemplary embodiment of the present invention.
10 is a side cross-sectional view illustrating a magnet coupling type gate valve system according to still another exemplary embodiment of the present invention.
FIG. 11 is a flow chart illustrating an example of a door identification process of the magnet coupling type gate valve system of FIG. 10.
12 is a flow chart showing another example of a door identification process of the magnet coupling type gate valve system of FIG. 10.
13 is a side cross-sectional view illustrating a door closed state of a magnet coupling type gate valve system according to still another exemplary embodiment of the present invention.
14 is a perspective view illustrating a door open state of the magnet coupling type gate valve system of FIG. 13.
15 is a cross-sectional view illustrating an operation process of the magnet coupling type gate valve system of FIG. 13.
FIG. 16 is a cross-sectional view showing a second magnetic shaft rotation device of the magnet coupling type gate valve system of FIG. 13.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to completely convey the spirit of the present invention to those skilled in the art. In addition, in the drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, the singular form may include the plural form unless the context clearly indicates another case. Further, as used herein, "comprise" and/or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and/or groups thereof. And does not exclude the presence or addition of one or more other shapes, numbers, actions, members, elements and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on manufacturing techniques and/or tolerances, variations of the illustrated shape can be expected. Accordingly, the embodiments of the inventive concept should not be construed as being limited to the specific shape of the region shown in the present specification, but should include, for example, a change in shape caused by manufacturing.

Hereinafter, magnet coupling type gate valve systems 100 to 600 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a side cross-sectional view showing a magnet coupling type gate valve system 100 according to some embodiments of the present invention, and FIG. 2 is a door lowering state of the magnet coupling type gate valve system 100 of FIG. It is a front view, and FIG. 3 is a front view showing a door elevation state of the magnet coupling type gate valve system 100 of FIG. 1.

First, as shown in Figs. 1 to 3, the magnet coupling type gate valve system 100 according to some embodiments of the present invention includes a valve housing 10, a door 20, and a door moving device. (30) may be included.

For example, the valve housing 10 is an overall hollow box-shaped structure, and at least one passage 10a may be formed.

Here, the valve housing 10 has the passages 10a on one or both sides so that various objects such as high-tech semiconductor devices such as semiconductor chips, wafers, LCD panels, OLED panels, display devices, and other medical devices can enter and exit. It may be a structure to be formed.

The valve housing 10 may support the door 20 and the door moving device 30 described above, and may be a structure having sufficient strength and durability to be connected to various chambers. However, the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and a wide variety of types and types of passages or valve housings may be applied.

In addition, for example, as shown in FIGS. 1 and 2, the door 20 is a type of valve body in which a sealing member S is installed to block the passage 10a, and the door 20 It may be formed according to the shape of the passage 10a so as to correspond to the shape of the passage 10a. Here, the sealing member S may be a sealing member such as an O-ring or a gasket for airtightness.

Such, the door 20 is shown to obtain understanding, and is not limited to the drawings, and may be installed in various numbers, various sealing members, various joints, hinge structures, etc. may be additionally installed.

In addition, as shown in Figs. 1 and 2, the door moving device 30 is a device for moving the door 20 in the passage direction, using magnetic force from the outside of the valve housing 10 It may be a non-contact type magnetic device capable of moving the door 20.

More specifically, for example, as shown in FIG. 1, the door moving device 30 is installed in the valve housing 10 and interlocked with the door 20. , It is installed outside the valve housing 10, the external magnetic body 32 corresponding to the internal magnetic body 31 and the external magnetic body 32 installed outside the valve housing 10, the internal magnetic body 31 by magnetic force It may include a magnetic body shaft rotation device 33 for axially rotating the external magnetic body 32 so that it can be moved.

In this case, both the inner magnetic body 31 and the outer magnetic body 32 may be super strong permanent magnets in order to reinforce the magnetic force.

In addition, the inner magnetic body 31 and the outer magnetic body 32 may be applied with a plurality of permanent magnet arrays arranged side by side so as to enhance magnetic force.

Here, as shown in FIG. 1, the door 20 is first moved (lifting operation) in a first direction from a standby position to a position opposite to the passage, and in a second direction from the position opposite to the passage to the closing position. It may be an L motion door that is moved secondarily (opening and closing operation).

However, the door 20 is not necessarily limited to an L motion operation, and may also be applied to a T motion operation in which two L motion doors are installed on both sides.

To this end, the door moving device 30 is connected to a working fluid line L between the first moving head unit H and the door 20 so that the door 20 can be moved secondarily. A cylinder 34 operated by the can be installed.

In addition, for example, as shown in FIG. 1, the door moving device 30 is installed inside the valve housing 10, and the door 20 or the head portion H ), the door guide device 40 may further include a guide rod for first guiding the door 20 in a first direction from a standby position to a passage opposite position It may include a first door guide device 41 such as a rail or the like.

Accordingly, as shown in FIG. 2, when the magnetic body forward and backward device 33 lifts and lowers the external magnetic body 32, the inner magnetic body 31, which is magnetically coupled thereto, is magnetically caused to cause the first door guide device. As the door 20 moves up and down along 41, the door 20 may be first moved (lifting operation).

Subsequently, as shown in FIG. 3, the door 20 is moved in the direction of the passage 10a by the cylinder 34 operated by the fluid pressure of the working fluid line L (opening and closing operation) ) While opening and closing the door 20.

Therefore, the inner magnetic body 31 also uses a super strong permanent magnet, and the outer magnetic body 32 also uses a super strong permanent magnet to magnetically couple, so that the door 10 can be transported in a non-contact manner with strong magnetic force, Magnetic force can be easily increased by increasing the number and arrangement of the permanent magnets, and equipment cost and installation space can be greatly reduced because the number of parts or the electromagnet control process is unnecessary, and by using the side of the valve housing 10 Space utilization can be improved.

4 is a front view showing a magnet coupling type gate valve system 200 according to some other embodiments of the present invention.

As shown in FIG. 4, the magnetic body shaft rotation device 33 may rotate the two external magnetic bodies 32 at the same time. Here, at least one gear combination, a belt and pulley combination, a chain and a sprocket wheel combination, and a cam that distributes and transmits power to enable simultaneous rotation between the magnetic shaft rotation autonomous device 33 and the two external magnetic bodies 32 A power transmission device made by selecting one or more of a combination, a pulley and a wire combination, and combinations thereof may be installed. However, it is not necessarily limited to the drawings, and a wide variety of power transmission devices may be applied.

5 is a front view showing the door 20 of the magnet coupling type gate valve system 100 of FIG. 1.

As shown in FIG. 5, the door 20 may be moved secondarily by four cylinders 34 operated simultaneously by the fluid pressure of the working fluid line L. However, the number and shape of such cylinders are not necessarily limited to the drawings.

6 is a side cross-sectional view showing the door 20 and the magnetic rotating device 35 of the magnet coupling type gate valve system 300 according to some other embodiments of the present invention, and FIG. 7 is a magnet couple of FIG. 6 A perspective view showing the magnetic rotating device 35 of the ring-type gate valve system 300.

6 and 7, in the magnetic coupling type gate valve system 200 according to some other embodiments of the present invention, the door moving device 30 includes the door 20 It may further include a magnetic rotating device 35 for moving the vehicle (opening and closing operation).

6 and 7, the magnetic rotating device 35 is an internal rotating magnetic body (M1) connected to a pinion gear (G2) meshing with the rack gear (G1) installed in the door (20) And, the internal rotating magnetic body (M1) and the magnetic coupling to rotate the internal rotating magnetic body (M1), the external rotating magnetic body (M2) and the external rotating magnetic body installed outside the valve housing (10) It may include a rotary actuator 351 for rotating the magnetic body (M2).

Accordingly, the external rotating magnetic body M2 is also installed outside the valve housing 10, like the external magnetic body 22 described above, and as shown in FIGS. 3 and 4, first, a motor, etc. When the external rotating magnetic body M2 is rotated forward or reverse by using the rotating actuator 351, the internal rotating magnetic body M1 is rotated forward or reverse by magnetic force, and the internal rotating magnetic body ( As the pinion gear G2 rotated together with M1) rotates forward or reverse, the door 20 may be moved (opening and closing) a second time together with the rack gear G1.

Therefore, the use of the side surface (first surface) and the upper surface (second surface) of the valve housing 10 is used to increase space utilization, and not only the lifting and lowering (primary movement) operation, but also the opening and closing (secondary movement) operation The internal cleanliness of the valve housing can be greatly improved by using the coupling.

8 is a side cross-sectional view illustrating a magnet coupling type gate valve system 400 according to still another exemplary embodiment of the present invention.

As shown in FIG. 8, in the magnet coupling type gate valve system 400 according to some other embodiments of the present invention, a plurality of doors 20 may be waiting on one side of the valve housing 10. The door replacement area A is formed, and the door 20 may be installed detachably from the head portion H so that the door can be replaced inside the valve housing 10. Here, although not shown, a separate cover may be installed outside the door replacement area A, such as at the side or front.

Therefore, when the life of the door 20 is over, the door 20 is replaced without breaking the vacuum inside the valve housing 10 by replacing with a new door 20 waiting in the door replacement area A. can do. As a replacement method, a wide variety of methods can be applied, such as a force biting method or a sliding method.

9 is a side cross-sectional view illustrating a magnet coupling type gate valve system 500 according to still other embodiments of the present invention.

For example, as shown in Figure 9, the magnet coupling type gate valve system 400 according to some other embodiments of the present invention, the second direction moving device 50 or the head portion (H) It may further include an isolation member 60 to be installed.

The isolating member 60 has a flat plate structure, and when the isolating member 60 is moved to the door replacement area A, the door replacement area A may be isolated.

More specifically, for example, as shown in FIG. 9, the isolation member 60 is an isolation plate formed to correspond to the side surface of the protruding wall portion horizontally protruding in a ring shape inside the valve housing 10 ( 61) may be included.

That is, the isolation member 60 may have a side surface of the isolation member 60 in close contact with the side surface of the protruding wall portion W to isolate the door replacement area A.

At this time, the door 20 on the contact surface of the protruding wall portion W or the isolation plate 61 so that the vacuum can be released only in the door replacement area A while maintaining the overall vacuum of the valve housing 10. A second sealing member (S2) separate from the first sealing member (S1) installed in may be installed. Here, the second sealing member S2 may be a sealing member such as an O-ring or a gasket for airtightness.

More specifically, for example, as shown in FIG. 9, the door replacement area A has an internal vacuum line 71 that is installed with a first valve V1 and is connected to the housing vacuum area B, and The second valve V2 may be installed, and a vacuum release line 72 connected to an external air or clean air supply source may be connected.

Accordingly, as shown in FIG. 9, after the isolation member 60 isolates the door replacement area A, the second valve V2 receives a vacuum pressure release control signal by the control unit 70. When the vacuum release line 72 is opened, the vacuum pressure in the door replacement area A is released, and the cover C, which will be described later, is opened, and the door 20 is opened through the door replacement opening H. Can be replaced.

In this case, the door replacement region A is in an isolated state, and the housing vacuum region B may maintain a vacuum state.

Next, as shown in FIG. 9, after the door 20 is replaced, the first valve V2, which covers the cover C, and receives a vacuum pressure formation control signal by the control unit 70, is When the vacuum release line 72 is closed, while the first valve V1 opens the internal vacuum line 71, the door replacement area A communicates with the housing vacuum area B. As a result, a vacuum pressure of the same pressure can be formed, and through this, a normal door opening and closing operation is possible under a vacuum environment.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

10 is a side cross-sectional view showing another example of the magnet coupling type gate valve system 500 of FIG. 9.

For example, as shown in FIG. 10, the door replacement area A has a third valve V3 installed, an external vacuum line 73 and a fourth valve V4 connected to an external pump PUMP. ) Is installed, and a vacuum release line 74 connected to an external air or clean air supply source may be connected.

Accordingly, as shown in FIG. 10, after the isolation member 60 isolates the door replacement area A, the fourth valve V2 receives a vacuum pressure release control signal by the control unit 70. When the vacuum release line 74 is opened, the vacuum pressure in the door replacement area A is released, and the cover C, which will be described later, is opened, and the door 20 is opened through the door replacement opening H. Can be replaced.

In this case, the door replacement region A is in an isolated state, and the housing vacuum region B may maintain a vacuum state.

Subsequently, as shown in FIG. 10, after the door 20 is replaced, the fourth valve V4, which covers the cover C, and receives a vacuum pressure formation control signal by the control unit 70, is When the vacuum release line 74 is closed, on the other hand, when the third valve V3 opens the external vacuum line 71, the door replacement area A is subjected to a vacuum pressure by the pump PUMP. This can be formed, and through this, normal door opening and closing operation is possible in a vacuum environment.

Therefore, through this process, it is possible to replace the door 20 without breaking the vacuum pressure in the housing vacuum region B.

In addition, although not shown, in the door replacement area (A), various connection lines, such as an inert gas supply line for supplying inert gas from an inert gas supply source, and a clean air supply line for supplying clean air from a clean air supply source, may be installed. have.

Accordingly, the door replacement region A may be selectively connected to the inside or outside to form a vacuum, or an inert gas such as nitrogen gas or clean air may be supplied. In addition, various pressure gauges, thermometers, and temperature control devices such as heaters or cooling devices may be additionally installed.

In addition, for example, as shown in FIG. 10, a door replacement opening (H) is formed in the valve housing 10 corresponding to the door replacement area (A), and a cover on the door replacement opening (H) (C) can be installed. In addition, it is possible to easily replace the door 20 by forming openings H of various shapes on all surfaces of the valve housing 10.

Meanwhile, the door 20 may be detachably installed using a fixture or a jig such as a bolt, nut, or screw. In addition to this, for example, all kinds of fastening-type doors, such as using an interlocking groove, an interlocking protrusion, a snap button, or a magnet, can be applied.

In addition, the cover (C) may also be applied to various types of covers, such as a lid, a foldable door, a cap, or a shell, which is detachably fixed by a fastener by installing various O-rings.

11 is a flowchart illustrating an example of a door identification process of the magnet coupling type gate valve system 500 of FIG. 10.

10 and 11, the magnetic coupling type gate valve system 500 of the present invention according to the present invention can identify the identification information of the door so that the operation is allowed only when matching the identification information. As that may further include an identification device, more specifically, for example, as shown in FIG. 10, the identification device, so that it can recognize the RFID tag (RT) installed on the door 20 By receiving identification information from the RFID sensor (RS) and the RFID sensor (RS) installed in the valve housing 10 or the portion corresponding to the RFID tag (RT), allowing the normal operation of the equipment only when matching identification information If not, it may be the RFID identification control unit 80 stopping the operation of the device.

Therefore, as shown in FIG. 10, when the sealing plate SP of the door 20 is replaced, when the RFID sensor RS of the identification device recognizes the RFID tag RT and detects the identification information ( S11), the RFID identification control unit 80 determines whether there is a match (S12), and if it is matched, allows normal operation or permits the replacement of the door 20 (S13), and if the match does not match, operation It is possible to make an impossible command or a determination that the door 20 cannot be replaced.

Therefore, it is possible to replace only the genuine door 20 that has been officially given identification information, thereby increasing the safety of the equipment, and preventing malfunction or illegal use in advance.

12 is a flowchart illustrating another example of a door identification process of the magnet coupling type gate valve system 500 of FIG. 10.

As shown in Figs. 10 to 12, more specifically, for example, when starting the exchange processor, the door replacement area A is sealed, and the door replacement area A is switched to a standby state in a vacuum, When the door is exchanged by opening the cover (C), if the RFID tag (RT) is recognized as a genuine product by the RFID sensor (RS), the cover (C) of the door replacement area (A) is closed. Thereafter, the door replacement area (A) is converted to a vacuum to complete the normal replacement process, or if it is not identified as a genuine product, a visual or audible non-genuine error message is output, and the door replacement area (A) is at atmospheric pressure. Abnormal operation can be terminated in the state. However, it is not necessarily limited thereto.

13 is a side cross-sectional view showing a door closed state of the magnet coupling type gate valve system 600 according to some other embodiments of the present invention, and FIG. 14 is a magnetic coupling type gate valve system 600 of FIG. Is a perspective view showing an open state of the door, and FIG. 15 is a cross-sectional view showing an operation process of the magnet coupling type gate valve system 600 of FIG. 13, and FIG. 16 is a diagram of the magnet coupling type gate valve system 600 of FIG. It is a sectional view showing the 2nd magnetic body shaft rotation device 33B.

13 to 16, the magnetic shaft rotation device 33 of the magnet coupling type gate valve system 600 according to some other embodiments of the present invention includes the door 20 as the 1 It may include a first magnetic body shaft rotation device (33A) capable of secondary movement and a second magnetic body shaft rotation device (33B) capable of secondary movement of the door (20).

Here, as shown in Figs. 13 to 16, the external magnetic body 32 applied to the first magnetic body shaft rotation device 33A and the second magnetic body shaft rotation device 33B, respectively, includes the valve housing ( It is installed on one side of the cylindrical protrusion 10b of 10), is formed in a ring shape or an arc shape to correspond to the outer diameter surface of the protrusion, so that the polarity of the magnetic force acting on the inner magnetic body 31 can be changed. A 1-1 axially rotating magnetic body array 32-1 capable of axially rotating the protrusion 10b with a rotation axis, and installed on the other side of the cylindrical protrusion 10b of the valve housing 10, and the protrusion 10b ) Is formed in a ring shape or an arc shape to correspond to the outer diameter surface of the inner magnetic body 31, and the protrusion 10b can be axially rotated with a rotation axis so that the polarity of the magnetic force acting on the inner magnetic body 31 can be changed. -It is installed on the other side of the cylindrical protrusion 10b of the 2-axis rotating magnetic body array 32-2 and the valve housing 10, and has a ring shape or an arc shape so as to correspond to the outer diameter surface of the protrusion 10b. It is formed, and may include a 1-3 th axis-rotating magnetic material array 32-3 capable of axially rotating the protrusion 10b with a rotation axis so that the polarity of the magnetic force acting on the internal magnetic material 31 can be changed. have. However, the arrays are not limited to three as shown in the drawing, and a plurality of arrays may be applied in a wide variety, such as two or four or more.

In addition, the magnetic body shaft rotation device 33 for axially rotating them includes a 1-1 magnetic body shaft rotation device 33-1 for axially rotating the 1-1 axial rotation magnetic body array 32-1, and the The 1-2 magnetic body shaft rotation device (33-2) for axial rotation of the 1-2 axial rotation magnetic body array (32-1), and a third axial rotation device for the 1-3 axial rotation magnetic body array (32-3). 1-3 It may include a magnetic shaft rotation device (33-3). However, these shaft rotation devices are also not limited to three as shown in the drawing, and a plurality of the shaft rotation devices may be applied in a very diverse number such as two or four or more.

More specifically, for example, as shown in Figs. 13 to 16, the 1-1 magnetic body shaft rotation device 33-1 is the outer diameter of the 1-1 shaft rotation magnetic body array 32-1. A driven gear (Gb) formed on the surface, a driving gear (Ga) engaged with the driven gear (Gb) to drive the driven gear (Gb), and a driving motor (M) for rotating the driving gear (Ga). Can include.

Here, as shown in FIG. 13, the door moving device 30 is installed inside the valve housing 10, and includes the door 20 or the head portion H on which the door 20 is installed. Further comprising a door guide device 40 for guiding, wherein the door guide device 40 includes a first door guide device for first guiding the door 20 in a first direction from a standby position to a passage opposite position ( 41) and a second door guide device 42 for secondarily guiding the door 20 in a second direction from a position opposite the passage to a position closing the passage.

Accordingly, as shown in FIG. 13, in a state in which the door 20 closes the passage 10a, the door 20 is in an elevated state by the first magnetic shaft rotation device 33A, The door 20 may be in an advanced state by the second magnetic shaft rotation device 33B.

When explaining the operation process of the magnet coupling type gate valve system 600 according to some other embodiments of the present invention, as shown in FIG. 15A, the first magnetic shaft rotation device ( The drive motor (M) of 33A) uses the driven gear (Gb) and the drive gear (Ga) to the 1-1 axial rotation magnetic body array (32-1) or the 1-2 axial rotation magnetic body When the magnetic force is changed by rotating the array 32-2 or the 1-3th axis-rotating magnetic material array 32-3, the head portion H may be located at the lowest point according to a polarity.

Subsequently, as shown in (b) of FIG. 15, the drive motor M of the first magnetic shaft rotation device 33A uses the driven gear Gb and the drive gear Ga. Magnetic force is generated by rotating the 1-1 shaft-rotating magnetic body array 32-1, the 1-2 shaft-rotating magnetic body array 32-2, or the 1-3th shaft-rotating magnetic body array 32-3. If changed, the head portion H may be located at an intermediate point according to the polarity.

Subsequently, as shown in (c) of FIG. 15, the drive motor M of the first magnetic shaft rotation device 33A uses the driven gear Gb and the drive gear Ga. Magnetic force is generated by rotating the 1-1 shaft-rotating magnetic body array 32-1, the 1-2 shaft-rotating magnetic body array 32-2, or the 1-3th shaft-rotating magnetic body array 32-3. If changed, the head portion H may be located at the highest point according to the polarity.

On the other hand, as shown in Figure 13, the door moving device 30, when the inner magnetic body 31 is away from the outer magnetic body 32, the door 20 is returned to the ready position. A magnetic body 36 may be further included to facilitate the return of the inner magnetic body 31 installed in the door 20.

Meanwhile, as shown in FIG. 16, the inner magnetic body 31 or the external magnetic body 32 may be a permanent magnet array MA in which a plurality of M rows and N columns are disposed so as to strengthen magnetic force.

Therefore, the inner magnetic body 31, which is a permanent magnet, and the outer magnetic body 32, which is also a permanent magnet, is magnet-coupled with the wall of the valve housing 10 interposed therebetween to transfer the door 20 in a non-contact manner. At the same time, the magnetic force can be easily increased by increasing the number and arrangement of permanent magnets.

In addition, as shown in FIG. 14, since the side and upper surfaces of the valve housing 10 can be utilized, facility costs and installation space can be greatly reduced, and space utilization can be improved.

In addition, as shown in FIG. 13, the same principle can be applied to the second magnetic body shaft rotation device 33B as it is. However, the driving motor M may partially rotate the external magnetic body 32 by only a few tens of degrees in the capital so as to change the polarity without necessarily rotating the external magnetic body 32 by 180 degrees or more.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those of ordinary skill in the art will appreciate that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: valve housing
10a: passage
10b: cylindrical protrusion
20: door
S: sealing member
30: door moving device
31: inner magnetic body
32: external magnetic body
33: magnetic body shaft rotation device
H: head
L: working fluid line
34: cylinder
35: magnetic body rotating device
G1: rack gear
G2: pinion gear
M1: internal rotating magnetic body
M2: external rotating magnetic body
351: rotary actuator
A: Door replacement area
32-1: 1-1 axial rotation magnetic body array
32-2: 1-2 axial rotation magnetic body array
33-1: 1-1 magnetic body shaft rotation device
33-2: 1-2 magnetic body shaft rotation device
Ga: drive gear
Gb: driven gear
M: drive motor
33A: first magnetic body shaft rotation device
33B: second magnetic body shaft rotation device
36: return magnetic body
40: door guide device
41: first door guide device
42: second door guide device
100~600: Magnet coupling type gate valve system

Claims (14)

A valve housing in which a passage is formed;
A door opening and closing the passage; And
Including; a door moving device for moving the door in the passage direction,
The door moving device,
An internal magnetic body installed inside the valve housing and interlocked with the door;
An external magnetic body installed outside the valve housing and corresponding to the internal magnetic body; And
Including; a magnetic body shaft rotation device installed outside the valve housing and axially rotates the external magnetic body so that the internal magnetic body can be moved by magnetic force,
A door replacement area in which a plurality of doors can stand by is formed on one side of the valve housing, and the door is detachably installed from the head so that the door can be replaced inside the valve housing, a magnet coupling type gate valve system. The method of claim 1,
The door is an L motion door that is first moved in a first direction from a standby position to a position opposite to the passage, and is secondly moved in a second direction from the position opposite to the passage to the closing position of the passage, a magnet coupling type gate valve system. The method of claim 2,
In the door moving device, a cylinder actuated by a working fluid line is installed between the first moving head and the door so that the door can be moved secondarily. The method of claim 2,
The door moving device further includes a magnetic rotating device for the door to move the secondarily,
The magnetic body rotating device,
An external rotating magnetic body that is magnet-coupled with an internal rotating magnetic body connected to a pinion gear engaged with the rack gear installed on the door to rotate the internal rotating magnetic body and installed outside the valve housing; And
A rotary actuator for rotating the external rotary magnetic body;
Including a magnetic coupling type gate valve system. delete The method of claim 2,
The external magnetic body,
It is installed on one side of the cylindrical protrusion of the valve housing, is formed in a ring shape or an arc shape so as to correspond to the outer diameter surface of the protrusion, and the protrusion is turned into a rotation axis so that the polarity of the magnetic force acting on the inner magnetic body can be changed. Including; a 1-1 axis-rotating magnetic body array that can be rotated
The magnetic body shaft rotation device,
Including, a magnet coupling type gate valve system; a 1-1 magnetic body axial rotation device for axially rotating the 1-1 axial rotation magnetic body array. The method of claim 6,
The external magnetic body,
It is installed on the other side of the cylindrical protrusion of the valve housing, is formed in a ring shape or an arc shape so as to correspond to the outer diameter surface of the protrusion, and the protrusion is turned into a rotation axis so that the polarity of the magnetic force acting on the inner magnetic body can be changed. Including a; 1-2 axis rotation magnetic body array that can be rotated axis,
The magnetic body shaft rotation device,
The magnetic coupling type gate valve system further comprises a; 1-2 magnetic body shaft rotation device for axially rotating the 1-2 axis rotation magnetic body array. The method of claim 7,
The 1-1 magnetic body shaft rotation device,
A driven gear formed on an outer diameter surface of the 1-1 shaft rotating magnetic body array;
A drive gear engaged with the driven gear to drive the driven gear; And
A drive motor rotating the drive gear;
Including a magnetic coupling type gate valve system. The method of claim 2,
The magnetic body shaft rotation device,
A first magnetic shaft rotation device capable of first moving the door; And
A second magnetic body shaft rotation device capable of secondarily moving the door;
Including a magnetic coupling type gate valve system. The method of claim 1,
The door moving device,
A door guide device installed inside the valve housing and guiding the door or a movable table on which the door is installed;
The magnetic coupling type gate valve system further comprising. The method of claim 10,
The door guide device,
A first door guide device for first guiding the door from a standby position to a passage opposite position in a first direction; And
A second door guide device for secondarily guiding the door in a second direction from a position opposite the passage to a closed position;
Including a magnetic coupling type gate valve system. The method of claim 1,
A return magnetic body capable of returning the door to a ready position when the inner magnetic body is away from the external magnetic body;
The magnetic coupling type gate valve system further comprising. The method of claim 1,
The inner magnetic body and the outer magnetic body are permanent magnets, a magnet coupling type gate valve system. The method of claim 1,
An identification device capable of identifying identification information of the door so that operation is allowed only when matching identification information;
The magnetic coupling type gate valve system further comprising.

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