JPH0699388A - Robot for vacuum - Google Patents

Abstract

PURPOSE:To freely arrange a motor in a superhigh vacuum and further to solve a problem of emitting gas by providing a thermal converting element in the vicinity of the motor, and converting heat into electricity taken out to the outside of a vacuum vessel. CONSTITUTION:A motor 1 is supported by a bracket 4 to actuate an arm 2, and the bracket 4 is fixed or supported to a vacuum vessel 5, to arrange a thermal converting element 3 in the vicinity of the motor 1. Or the motor 1 is partly constituted of the thermal converting element. In this way, since the motor can be arranged in a free position without receiving restriction in the point of a mechanism, a robot of more elaborate high performance can be equipped in a superhigh vacuum. Since no limitation of a number of the motors brought into the vacuum is received, also an articulated robot can be easily constituted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum processing apparatus such as a semiconductor manufacturing apparatus, which is particularly used in an ultrahigh vacuum.
A vacuum robot for transportation.

[0002]

2. Description of the Related Art As a robot used in an ultrahigh vacuum,
The conventional one has a motor placed in the atmosphere and vacuum sealed with a magnetic fluid, but oil and fat used as a magnetic fluid pollutes the vacuum. As a countermeasure for this, a method of directly installing a motor in a vacuum is being researched, but overheating of the motor in a vacuum becomes a problem, and the motor can be radiated only by heat conduction directly to the vacuum container. I can't place it. A related device of this type is, for example, US Pat. No. 5,102,280.

[0003]

By using a magnetic fluid,
Use in ultra-high vacuum where vacuum contamination is a problem,
As a method of driving the robot, it is preferable to directly place the motor in a vacuum. However, heat dissipation in a vacuum is different from that in the atmosphere, and heat dissipation due to convection of the atmosphere cannot be expected. In other words, the overheating of the motor poses a problem and it cannot be placed freely. Now, assuming that you have a motor that can withstand high temperatures,
Outgassing from the hot section will then be a problem. It is an object of the present invention to provide a vacuum robot in which a motor is freely arranged in such an ultrahigh vacuum and the problem of released gas is solved.

[0004]

In order to achieve the above-mentioned object, a heat conversion element corresponding to the amount of heat generated by a motor is arranged, the heat generated by the motor is converted into electricity, and the heat is taken out of the vacuum container. The present invention provides a vacuum robot in which a motor is freely arranged in an ultrahigh vacuum and the problem of released gas is solved. As the heat conversion element, for example, a Peltier element or the like may be used.

[0005]

According to the present invention, a heat conversion element, which is commensurate with the amount of heat generated by the motor, is arranged, and the heat generated by the motor can be converted into electricity and taken out of the vacuum container. Freely place the motor inside,
Moreover, the problem of released gas can be solved.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In FIG. 1, a motor 1 is supported by a bracket 4 and operates an arm 2. The bracket 4 is fixed to or supported by a vacuum container 5. The heat conversion element 3 is arranged near the motor 1. 6 is a feedthrough. In FIG. 1, the heat conversion element 3 is shown in a place different from the motor, but the heat conversion element may form part of the motor.

[0007]

According to the present invention, in order to prevent the heat generation of the motor, which has been a problem in the past, the bracket of the motor is made as short as possible, and a large cross section is prepared so that the vacuum container is formed by heat conduction. Since the motor can be placed at any position without being mechanically constrained to transfer heat to and to dissipate heat, it is possible to install a more precise and high-performance robbot in an ultra-high vacuum. Further, according to the present invention, a multi-joint robot can be easily configured without being restricted by the number of motors that can be brought into a vacuum.

[Brief description of drawings]

FIG. 1 is a vacuum robot mounting structure according to an embodiment of the present invention.

[Explanation of symbols]

1 ... Motor, 2 ... Arm, 3 ... Heat conversion element, 4 ... Bracket, 5 ... Vacuum container, 6 ... Feedthrough.

Claims (2)

[Claims] 1. A robot driven in a vacuum chamber, wherein a driving motor is installed in the vacuum chamber, and a part of a material forming the motor is a material having a function of converting heat into electricity. A vacuum robot characterized by the fact that it is. 2. A robot driven in a vacuum chamber, wherein a driving motor is installed in the vacuum chamber, and a material having a function of converting heat into electricity is used near the motor. Characteristic vacuum robot.