TWI551411B - Industrial robots - Google Patents

Description

Industrial robot

The present invention relates to an industrial robot having a hand and an arm including a plurality of arms.

An industrial robot that is placed in a vacuum chamber and transports a glass substrate or the like in a vacuum is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a hand for mounting a glass substrate or the like, an arm that is rotatably coupled to the distal end side, and a main body portion that is rotatably coupled to the proximal end side of the arm. The arm includes a first arm portion and a second arm portion that are rotatably coupled to each other. The hand is rotatably coupled to the front end side of the second arm portion. The proximal end side of the second arm portion is rotatably coupled to the front end side of the first arm portion, and the proximal end side of the first arm portion is rotatably coupled to the main body portion.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-6535

In the industrial robot described in Patent Document 1, in order to secure the joint between the hand and the second arm portion or to connect the joint portion between the second arm portion and the first arm portion, it is preferable to arrange a reduction gear at the joint portion. . Further, in an industrial robot such as an industrial robot described in Patent Document 1, the overhaul is periodically performed. Therefore, there is a demand for an industrial robot that can be repaired at low cost and easily.

Therefore, an object of the present invention is to provide an industrial robot in which a reducer is disposed in a joint portion, and can be easily and inexpensively inspected.

In order to solve the above problems, an industrial robot according to the present invention includes: a hand; an arm that is rotatably coupled to a distal end side of a front end side arm portion and a distal end side arm portion that is rotatably coupled to a distal end side a first arm portion on the distal end side; a first joint portion that rotatably connects the distal end side arm portion and the first arm portion; and a second joint portion that rotatably connects the hand and the distal end side arm portion The first joint portion includes a first reduction gear including: a first input shaft to which power is input; and a first output shaft that decelerates power output to the first input shaft and outputs the same; The first housing rotatably supports the first input shaft and the first output shaft; the second joint portion includes a second reduction gear, and the second reduction gear includes a second input shaft that is input with power; An output shaft that decelerates and outputs power input to the second input shaft; and a second housing that rotatably supports the second input shaft and the second output shaft; and the first housing and the second housing The system is fixed to the side of the front side arm.

In the industrial robot according to the present invention, the first housing of the first reduction gear that constitutes at least a part of the first joint portion is fixed to the distal end side arm portion, and constitutes the first input shaft and the first output shaft of the first reduction gear. A member such as a bearing is held at the front end side arm portion. Further, in the present invention, the second housing of the second reduction gear that constitutes at least a part of the second joint portion is fixed to the distal end side arm portion, and constitutes the second input shaft, the second output shaft, and the bearing of the second reduction gear. The member is held at the front end side arm. Therefore, in the present invention, when the industrial robot is inspected, the first reduction gear and the second reduction gear can be integrally replaced with the front end side arm portion. In other words, when the industrial robot is being inspected, the first arm is replaced by the arm at the front end of the arm that is disposed closer to the arm than the first arm, and the first reducer and the first arm can be replaced. 2 reducer. Therefore, in the present invention, in an industrial robot in which a reduction gear is disposed at a joint portion, inspection can be performed at low cost and easily.

In the present invention, the first reduction gear and the second reduction gear are, for example, in the radial center shape thereof. A hollow reducer with a through hole.

In the present invention, it is preferable that the hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and the inside of the distal end side arm portion and the first The inside of the arm portion is at atmospheric pressure, and the first joint portion includes a first magnetic fluid seal that prevents air from flowing out of the connection portion between the front end side arm portion and the first arm portion, and the second joint portion includes air prevention and front end. The connecting portion of the side arm portion flows out to the second magnetic fluid seal in the vacuum, and the first magnetic fluid seal includes: a first seal housing that constitutes the outer peripheral side portion of the first magnetic fluid seal and fixes the first shell a first inner peripheral side member rotatably held by the inner peripheral side of the first seal housing and fixed to the first output shaft; and a first bearing seal portion including a bearing, a permanent magnet, and a magnetic fluid, and The second magnetic fluid seal includes a second seal housing that constitutes a peripheral portion of the second magnetic fluid seal and is fixed to be fixed between the first seal housing and the first inner circumferential side member in the radial direction. 2 housing; 2nd inner peripheral side member, which can be rotated The ground is held on the inner peripheral side of the second seal case and fixes the second output shaft; and the second bearing seal portion includes a bearing, a permanent magnet, and a magnetic fluid, and is disposed in the radial direction of the second seal case and the second seal housing 2 between the inner circumferential side members; and the first housing is fixed to the distal end side arm portion via the first sealing housing, and the second housing is fixed to the distal end side arm portion via the second sealing housing.

According to this configuration, members such as the first inner circumferential side member and the first bearing sealing portion that constitute the first magnetic fluid seal are held by the distal end side arm portion, and the second magnetic fluid seal member is formed. Since the member such as the inner peripheral side member and the second bearing seal portion is held by the distal end side arm portion, the first reduction gear and the second reduction gear can be integrally replaced with the distal end side arm portion when the industrial robot is inspected. Alternatively, the first magnetic fluid seal and the second magnetic fluid seal may be integrally replaced with the distal end side arm. In other words, when the industrial robot is being inspected, the first arm is replaced by the arm at the front end of the arm that is disposed closer to the arm than the first arm, and the first reducer and the first arm can be replaced. In addition to the 2 speed reducer, the first magnetic fluid seal and the second magnetic fluid seal may be replaced. Therefore, that is In the case where the joint portion includes a magnetic fluid seal, it is also possible to perform inspection at low cost and easily.

In the present invention, the industrial robot includes, for example, two hands, two distal end side arm portions, two first arm portions, an arm support portion that fixes the base end sides of the two first arm portions, and an arm support portion. The main body of the arm support portion is coupled to the lower direction as the axial direction of the rotation. In this case, when the industrial robot is being inspected, the first reduction gear and the second reduction gear can be replaced without replacing the two first arm portions fixed to the arm support portion.

According to the research by the inventor of the present invention, when the object to be transported at a high temperature is placed in the vacuum chamber and transported, the temperature of the upper surface side of the arm is caused by the radiant heat from the object to be transported and the wall surface from the vacuum chamber. The influence of the radiant heat becomes higher than the temperature of the side portion of the lower surface of the arm. Further, when the object to be conveyed at a high temperature is transported, if the temperature of the upper surface portion of the arm is higher than the temperature of the lower side portion of the arm, the amount of thermal deformation of the upper surface portion of the arm is greater than that of the lower surface portion. Since the amount of deformation is such that the arm is thermally deformed so that the front end side of the arm is lowered, it is not possible to properly convey the object to be transported by hand.

Therefore, in the present invention, it is preferable that the hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and the inside of the distal end side arm portion and The inside of the first arm portion is at atmospheric pressure, and a heat dissipating fin for heat dissipation is formed on the inner surface of the front end side arm portion and the first arm portion. According to this configuration, when the object to be transported at a high temperature is transported, the upper surface side portion of the arm can be cooled to suppress the temperature rise of the upper surface side portion of the arm, so that the temperature of the upper surface side portion of the arm can be made close to The temperature of the side portion of the lower surface of the arm. Therefore, the amount of thermal deformation of the upper surface side portion of the arm can be made close to the amount of thermal deformation of the lower surface side portion, and the thermal deformation of the lower end arm can be suppressed. As a result, even when the object to be transported at a high temperature is transported, the object to be transported can be appropriately transported by hand.

Moreover, in order to solve the above problems, the industrial robot of the present invention is characterized by a package The arm includes a first arm portion, a second arm portion, and a third arm portion, and the hand is rotatably coupled to the distal end side, and the first joint portion includes the second arm portion and the first arm portion The second joint portion is rotatably coupled to the second arm portion, and the proximal end side of the third arm portion is rotatably coupled to the front end side of the second arm portion. The proximal end side of the second arm portion is rotatably coupled to the front end side of the first arm portion, and the first joint portion includes a first reduction gear including a first input shaft to which power is input; a first output shaft that decelerates the power input to the first input shaft and outputs the same; and a first housing that rotatably supports the first input shaft and the first output shaft; and the second joint portion includes the second a second reduction gear includes: a second input shaft to which power is input; a second output shaft that decelerates power output to the second input shaft and outputs the same; and a second housing that is to be The input shaft and the second output shaft are rotatably supported; and the first housing and the second housing are fixed to the second arm side.

In the industrial robot of the present invention, the first housing of the first reduction gear that constitutes at least a part of the first joint portion is fixed to the second arm portion side, and the first input shaft and the first shaft that constitute the first reduction gear are formed. A member such as an output shaft and a bearing is held by the second arm. Further, in the present invention, the second housing of the second reduction gear that constitutes at least a part of the second joint portion is fixed to the second arm portion side, and the second input shaft and the second output shaft that constitute the second reduction gear are formed. A member such as a bearing is held by the second arm. Therefore, in the present invention, when the industrial robot is inspected, the first reduction gear and the second reduction gear can be integrally replaced with the second arm. In other words, when the industrial robot is being overhauled, the second arm portion disposed closer to the arm end than the first arm portion can be replaced, and the first reduction gear and the first gear can be replaced without replacing the first arm portion. 2 reducer. Therefore, in the present invention, in an industrial robot in which a reduction gear is disposed at a joint portion, inspection can be performed at low cost and easily.

As described above, in the present invention, the inspection of the industrial robot in which the reducer is disposed at the joint portion can be performed at low cost and easily.

1‧‧‧Robots (industrial robots)

2‧‧‧Substrate

4‧‧‧Hand

5‧‧‧Hand

6‧‧‧ Arm

7‧‧‧ Arm

8‧‧‧arm support

9‧‧‧ Body Department

11‧‧‧ base

12‧‧‧ fork unit

13‧‧‧Shell

14‧‧‧Rotary axis

15‧‧‧Support Department Ontology

15a‧‧‧Upper surface

15b‧‧‧Face on the face

15c‧‧‧ side section

15d‧‧‧ openings

15e‧‧‧ openings

15f‧‧‧ openings

15g‧‧‧ openings

16‧‧‧Caps

20‧‧‧1st arm

21‧‧‧2nd arm (front end side arm)

22‧‧‧ Joints (Part 1)

23‧‧‧ Joints (Part 2)

25‧‧‧1st arm

26‧‧‧2nd arm (front end side arm)

27‧‧‧ Joints (Part 1)

28‧‧‧ Joints (2nd Joint)

31‧‧‧arm body

31a‧‧‧Upper surface

31b‧‧‧The following face

31c‧‧‧ Side section

31d‧‧‧ openings

31e‧‧‧ openings

31f‧‧‧ openings

31g‧‧‧ openings

32‧‧‧Caps

32a‧‧‧Heatsink

33‧‧‧Caps

34‧‧‧arm body

34a‧‧‧Upper surface

34b‧‧‧Face on the face

34c‧‧‧ side section

34d‧‧‧ openings

34e‧‧‧ openings

34f‧‧‧ openings

34g‧‧‧ openings

34h‧‧‧ openings

35‧‧‧Motor

36‧‧‧ Pulley

37‧‧‧Reducer (1st reducer)

38‧‧‧Reducer (2nd reducer)

39‧‧‧Magnetic fluid seals (1st magnetic fluid seal)

40‧‧‧Shell (1st sealed housing)

41‧‧‧ inner peripheral side member (first inner peripheral side member)

42‧‧‧ Bearing seal (first bearing seal)

43‧‧‧Magnetic fluid seals (2nd magnetic fluid seal)

44‧‧‧ housing (2nd sealed housing)

45‧‧‧ Inner peripheral side member (2nd inner peripheral side member)

46‧‧‧ bearing seal (second bearing seal)

49‧‧‧ Pulley

50‧‧‧Land

51‧‧‧ Pulley

52‧‧‧ Pulley

53‧‧‧Land

56‧‧‧ Pulley

57‧‧‧Land

58‧‧‧Input shaft (1st input shaft)

59‧‧‧ Output shaft (1st output shaft)

60‧‧‧Shell (1st shell)

61‧‧‧Input shaft (2nd input shaft)

62‧‧‧ Output shaft (2nd output shaft)

63‧‧‧Shell (2nd shell)

66‧‧‧Motor

66‧‧‧ Pulley

67‧‧‧Reducer (1st reducer)

68‧‧‧Reducer (2nd reducer)

69‧‧‧Rotary axis

70‧‧‧ Pulley

71‧‧‧Land

72‧‧‧ Pulley

73‧‧‧ spacers

74‧‧‧ bearing retaining members

75‧‧‧ bearing

76‧‧‧ Pulley

77‧‧‧Belt

80‧‧‧temperature sensor

81‧‧‧ Cover member

82‧‧‧ Cover member

83‧‧‧ Cover member

84‧‧‧ Cover member

85‧‧‧ Cover member

87‧‧‧Air piping

88‧‧‧Air piping

89‧‧‧Air piping

90‧‧‧Air piping

91‧‧‧fan

AR‧‧‧Atmosphere

VR‧‧‧vacuum area

Fig. 1 is a plan view of an industrial robot according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view showing the proximal end side portion of the arm and the arm supporting portion shown in Fig. 1.

Figure 3 is a cross-sectional view of the arm shown in Figure 1.

Figure 4 is a cross-sectional view of the arm shown in Figure 1.

Fig. 5 is an enlarged view of a portion E of Fig. 3.

Figure 6 is an enlarged view of a portion F of Figure 3.

Fig. 7 is an enlarged view of a portion K of Fig. 6.

Figure 8 is an enlarged view of the L portion of Figure 6.

Fig. 9(A) is a cross-sectional view of the cover member shown in Fig. 5, and Fig. 9(B) is a view showing the cover member from the G-G direction of (A).

Figure 10 is an enlarged view of a portion H of Figure 4.

Figure 11 is an enlarged view of a portion J of Figure 4.

Figure 12 is an enlarged view of a portion M of Figure 11.

Figure 13 is an enlarged view of the N portion of Figure 11.

Fig. 14 is a plan view showing an industrial robot according to another embodiment of the present invention.

Fig. 15 is a view showing an industrial robot according to another embodiment of the present invention, wherein (A) is a plan view and (B) is a side view.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(summary structure of industrial robot)

Fig. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. 2 is a cross-sectional view showing the proximal end side portion of the arms 6, 7 and the arm support portion 8 shown in FIG. 1. Figure 3 is a cross-sectional view of the arm 6 shown in Figure 1. Figure 4 is a cross-sectional view of the arm 7 shown in Figure 1.

The industrial robot 1 (hereinafter referred to as "the robot 1") of the present embodiment is a glass substrate 2 for organic EL (Organic Electro-Luminescence) display that is used as a transfer target (hereinafter referred to as " The robot of the substrate 2"). The robot The system 1 is incorporated into a manufacturing system of an organic EL display (not shown) and used to transport the substrate 2 having a high temperature.

As shown in FIG. 1, the robot 1 includes two hands 4 and 5 for mounting the substrate 2, an arm 6 for rotatably connecting to the front end side, and an arm 7 for swinging the hand 5 The arm support portion 8 is coupled to the base end side of the fixed arms 6 and 7 and the main body portion 9 is rotatably coupled to the arm support portion 8. The hands 4, 5, the arms 6, 7 and the arm support portion 8 are disposed on the upper side of the body portion 9.

The hands 4, 5, the arms 6, 7 and the arm support portion 8 and the upper end side of the main body portion 9 are disposed inside the vacuum chamber constituting the manufacturing system of the organic EL display. That is, the hands 4, 5, the arms 6, 7 and the arm support portion 8 and the upper end side of the main body portion 9 are disposed in the vacuum region VR (in a vacuum), and the portion of the main body portion 9 other than the upper end side is disposed in the atmospheric region. In the AR (in the air) (see FIG. 2), the robot 1 transports the substrates 2 mounted on the hands 4 and 5 in a vacuum.

The hands 4 and 5 include a base portion 11 connected to the arms 6 and 7, and two fork portions 12 on which the substrate 2 is mounted. The fork portion 12 is formed in a linear shape. Further, the two yoke portions 12 are arranged in parallel with each other at a predetermined interval.

The body portion 9 includes a housing 13 formed in a hollow shape, and a hollow rotating shaft 14 fixed to a lower surface of the arm support portion 8. The rotating shaft 14 is formed in an elongated cylindrical shape which is an axial direction in the upper and lower directions. The upper end of the rotating shaft 14 is fixed to the lower surface of the arm support portion 8, and the arm support portion 8 is rotatable in the upward and downward directions as the axial direction of the rotation. The upper end side portion of the rotary shaft 14 protrudes upward from the upper end surface of the casing 13, and the portion of the rotary shaft 14 excluding the upper end side portion is housed inside the casing 13.

A motor (not shown) for rotating the arm support portion 8 with respect to the casing 13 is disposed inside the casing 13. The motor is coupled to the lower end side of the rotating shaft 14 via a pulley, a belt, and a speed reducer, for example. Further, inside and below the casing 13, an elevating mechanism (not shown) for raising and lowering the rotating shaft 14 or the like is disposed. The upper end portion of the casing 13 is disposed in the vacuum region VR, and portions other than the upper end portion of the casing 13 are disposed in the atmospheric region AR. shell The inside of the body 13 is at atmospheric pressure, and a magnetic fluid seal and a bellows (not shown) for preventing air from flowing out into the vacuum region VR are disposed on the outer peripheral side of the rotating shaft 14.

The arm support portion 8 is formed in a hollow shape and includes a support portion body 15 and three cover members 16. The cover member 16 is formed of an aluminum alloy. Further, the cover member 16 is formed in a disk shape. The support body 15 is formed of an aluminum alloy. Further, the support portion body 15 includes an upper surface portion 15a constituting an upper surface of the support portion body 15, and a lower surface portion 15b constituting a lower surface of the support portion body 15, and which is substantially separated from the upper surface portion 15a by a specific gap. The side surface portion 15c is connected in parallel with the outer peripheral end of the lower surface portion 15b. The upper surface portion 15a and the lower surface portion 15b are formed in a flat and substantially elliptical flat plate shape, and are opposed to each other in the vertical direction. The side surface portion 15c is formed in a tubular shape having a substantially elliptical shape when viewed from the vertical direction.

In the upper surface portion 15a, three circular openings 15d and 15e are formed so as to penetrate in the vertical direction. One of the three openings 15d and 15e is formed at the center of the upper surface portion 15a, and the other two openings 15e are formed in the longitudinal direction of the substantially elliptical upper surface portion 15a. End side. In the lower surface portion 15b, three circular openings 15f and 15g are formed so as to penetrate in the vertical direction. One of the three openings 15f and 15g is formed at the center of the lower surface portion 15b, and the other two openings 15g are formed in the longitudinal direction of the substantially elliptical lower surface portion 15b. End side.

The upper end of the rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b. The rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b so as to surround the opening 15f, and the inner peripheral side of the rotating shaft 14 communicates with the inside of the arm support portion 8. That is, the inside of the arm support portion 8 communicates with the inside of the casing 13, and the inside of the arm support portion 8 becomes atmospheric pressure. As shown in Fig. 2, the opening 15d is closed by the cover member 16 from the upper side, and the two openings 15g are closed by the cover member 16 from the lower side. An annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the support portion main body 15 and the lid member 16.

The arm 6 includes two arm portions of the first arm portion 20 and the second arm portion 21 that are rotatably coupled to each other. The first arm portion 20 and the second arm portion 21 are formed in a hollow shape. That is, the entire arm 6 is formed in a hollow shape. The proximal end side of the first arm portion 20 is fixed to the arm support portion 8. The proximal end side of the second arm portion 21 is rotatably coupled to the front end side of the first arm portion 20. The hand 4 is rotatably coupled to the front end side of the second arm portion 21. The second arm portion 21 of the present embodiment is a distal end side arm portion.

The connection portion between the first arm portion 20 and the second arm portion 21 serves as a joint portion 22, and the joint portion 22 rotatably connects the first arm portion 20 and the second arm portion 21. The connection portion between the arm 6 and the hand 4 (that is, the connection portion between the second arm portion 21 and the hand 4) serves as the joint portion 23, and the joint portion 23 rotatably connects the second arm portion 21 and the hand 4. The second arm portion 21 is disposed above the first arm portion 20 , and the hand 4 is disposed above the second arm portion 21 . The joint portion 22 of the present embodiment is a first joint portion, and the joint portion 23 is a second joint portion.

The arm 7 includes two arm portions of the first arm portion 25 and the second arm portion 26 that are rotatably coupled to each other. The first arm portion 25 and the second arm portion 26 are formed in a hollow shape. That is, the entire arm 7 is formed in a hollow shape. The proximal end side of the first arm portion 25 is fixed to the arm support portion 8. The proximal end side of the second arm portion 26 is rotatably coupled to the front end side of the first arm portion 25. A hand 5 is rotatably coupled to the front end side of the second arm portion 26. The second arm portion 26 of this embodiment is a distal end side arm portion.

The connection portion between the first arm portion 25 and the second arm portion 26 serves as a joint portion 27, and the joint portion 27 rotatably connects the first arm portion 25 and the second arm portion 26. The connection portion between the arm 7 and the hand 5 (that is, the connection portion between the second arm portion 26 and the hand 5) serves as the joint portion 28, and the joint portion 28 rotatably connects the second arm portion 26 and the hand 5. The second arm portion 26 is disposed above the first arm portion 25 . The hand 5 is disposed on the lower side of the second arm portion 26 and above the first arm portion 25 . The joint portion 27 of the present embodiment is a first joint portion, and the joint portion 28 is a second joint portion.

(Structure of the arm, the internal structure of the arm, and the structure of the joint)

Fig. 5 is an enlarged view of a portion E of Fig. 3. Figure 6 is an enlarged view of a portion F of Figure 3. Fig. 7 is an enlarged view of a portion K of Fig. 6. Figure 8 is an enlarged view of the L portion of Figure 6. Fig. 9(A) is a cross-sectional view of the cover member 32 shown in Fig. 5, and Fig. 9(B) is a view showing the cover member 32 from the G-G direction of Fig. 9(A). Figure 10 is an enlarged view of the H portion of Fig. 4. Figure 11 is an enlarged view of a portion J of Figure 4. Figure 12 is an enlarged view of a portion M of Figure 11. Figure 13 is an enlarged view of the N portion of Figure 11.

The first arm portion 20 includes an arm body 31, three cover members 32, and one cover member 33. The arm body 31 is formed of an aluminum alloy. Further, the arm body 31 includes an upper surface portion 31a which constitutes an upper surface of the arm body 31, and a lower surface portion 31b which constitutes a lower surface of the arm body 31 and which is substantially separated from the upper surface portion 31a by a specific gap. The side surface portion 31c is connected in parallel with the outer peripheral end of the lower surface portion 31b. The upper surface portion 31a and the lower surface portion 31b are formed in a flat and substantially elliptical flat shape, and are opposed to each other in the vertical direction. The upper surface portion 31a constitutes one of the upper surfaces of the first arm portion 20, and the lower surface portion 31b constitutes a portion of the lower surface of the first arm portion 20. The side surface portion 31c is formed in a tubular shape having a substantially elliptical shape when viewed from the vertical direction.

In the upper surface portion 31a, four circular openings 31d and 31e are formed so as to penetrate in the vertical direction. That is, the opening portions 31d and 31e that lead to the inside of the first arm portion 20 are formed in the upper surface portion 31a. The four openings 31d and 31e are formed at specific intervals in the longitudinal direction of the substantially elliptical upper surface portion 31a. In the present embodiment, the opening 31e is formed on the most distal end side of the upper surface portion 31a, and the other three openings 31d are formed on the proximal end side of the upper surface portion 31a of the opening 31e. In the lower surface portion 31b, two circular openings 31f and 31g are formed so as to penetrate in the vertical direction. That is, the opening portions 31f and 31g that lead to the inside of the first arm portion 20 are formed in the lower surface portion 31b. The opening 31f is formed on the front end side of the lower surface portion 31b, and the opening 31g is formed on the proximal end side of the lower surface portion 31b.

The second arm portion 21 includes an arm body 34, two cover members 32, and two cover members 33. The arm body 34 is formed of an aluminum alloy. Further, the arm body 34 includes an upper surface portion 34a which constitutes an upper surface of the arm body 34, and a lower surface portion 34b which constitutes a lower surface of the arm body 34 and which is substantially separated from the upper surface portion 34a by a specific gap. The side surface portion 34c is connected in parallel with the outer peripheral end of the lower surface portion 34b. Above table The face portion 34a and the lower surface portion 34b are formed in a flat and substantially elliptical flat shape, and are opposed to each other in the vertical direction. The upper surface portion 34a and the lower surface portion 34b are formed in a flat and substantially elliptical flat shape and are opposed to each other in the vertical direction. The upper surface portion 34a constitutes one of the upper surfaces of the second arm portion 21, and the lower surface portion 34b constitutes a portion of the lower surface of the second arm portion 21. The side surface portion 34c is formed in a tubular shape having a substantially elliptical shape when viewed from the vertical direction.

In the upper surface portion 34a, four circular openings 34d, 34e, and 34f are formed so as to penetrate in the vertical direction. In other words, the upper surface portion 34a is formed with openings 34d to 34f that open to the inside of the second arm portion 21. The four openings 34d to 34f are formed at specific intervals in the longitudinal direction formed in the substantially elliptical upper surface portion 34a. In the present embodiment, the opening portion 34e is formed on the most distal end side of the upper surface portion 34a, and the opening portion 34f is formed on the most proximal end side of the upper surface portion 34a, and the other two openings 34d are formed in the opening portion 34e and the opening portion. Between 34f. In the lower surface portion 34b, two circular openings 34g and 34h are formed so as to penetrate in the vertical direction. That is, the opening portions 34g and 34h that lead to the inside of the second arm portion 21 are formed in the lower surface portion 34b. The opening portion 34g is formed on the front end side of the lower surface portion 34b, and the opening portion 34h is formed on the base end side of the lower surface portion 34b.

As described above, the proximal end side of the first arm portion 20 is fixed to the arm support portion 8. Specifically, the proximal end side of the first arm portion 20 is fixed to the arm support portion 8 in a state in which the lower surface of the lower surface portion 31b of the arm portion 31 is in close contact with the upper surface of the upper surface portion 15a of the support portion main body 15. Further, the proximal end side of the first arm portion 20 is fixed to the arm support portion 8 in such a manner that the center of the opening portion 15e of the upper surface portion 15a and the opening portion 31g of the lower surface portion 31b when viewed from the up-and-down direction The center is roughly the same. Therefore, the inside of the first arm portion 20 communicates with the inside of the arm support portion 8 via the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 20 becomes atmospheric pressure. Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the support portion main body 15 and the arm portion 31.

A motor is disposed inside the base end side of the first arm portion 20 and inside the arm support portion 8 35. The motor 35 rotates the second arm portion 21 with respect to the first arm portion 20 and rotates the hand 4 with respect to the second arm portion 21. The upper portion of the upper portion of the motor 35 is disposed in the opening portion 15e and the opening portion 31g, and the upper end side of the motor 35 is disposed inside the proximal end side of the first arm portion 20, and the lower end side of the motor 35 is disposed on the arm support side. The inside of the department 8. The output of the motor 35 protrudes from the upper side in the axial direction, and a pulley 36 is fixed to the output shaft.

The joint portion 22 includes a speed reducer 37 that decelerates the rotation of the motor 35 and transmits it to the second arm portion 21. The speed reducer 37 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. Therefore, the inside of the second arm portion 21 communicates with the inside of the first arm portion 20 via the through hole of the hollow reducer, and the inside of the second arm portion 21 becomes atmospheric pressure. That is, in the present embodiment, the inside of the arm 6 is at atmospheric pressure. The speed reducer 37 includes an input shaft 58 that is input to the power of the motor 35, an output shaft 59 that decelerates the power input to the input shaft 58 and outputs it, and a housing that rotatably supports the input shaft 58 and the output shaft 59 via bearings. Body 60. The reduction gear 37 of the present embodiment is a first reduction gear, the input shaft 58 is a first input shaft, the output shaft 59 is a first output shaft, and the casing 60 is a first casing.

The joint portion 23 includes a speed reducer 38 that decelerates the rotation of the motor 35 and transmits it to the hand 4. The speed reducer 38 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. The speed reducer 38 includes an input shaft 61 that is input to the power of the motor 35, an output shaft 62 that decelerates the power input to the input shaft 61 and outputs the same, and rotatably supports the input shaft 61 and the output shaft 62 via bearings. Housing 63. The speed reducer 38 of the present embodiment is a second speed reducer. The input shaft 61 is a second input shaft, the output shaft 62 is a second output shaft, and the casing 63 is a second housing.

Further, the joint portion 22 includes a magnetic fluid seal 39 that prevents air from flowing out from the connection portion between the first arm portion 20 and the second arm portion 21 toward the vacuum region VR. The magnetic fluid seal 39 includes a substantially cylindrical casing 40 constituting an outer peripheral side portion thereof, and a substantially cylindrical inner peripheral side member 41 rotatably held on the inner peripheral side of the casing 40. A bearing seal portion 42 including a bearing, a permanent magnet, and a magnetic fluid is disposed between the casing 40 in the radial direction and the inner peripheral side member 41. The magnetic fluid seal 39 of the present embodiment is a first magnetic fluid seal, and the housing 40 is the first The seal case, the inner peripheral side member 41 is a first inner peripheral side member, and the bearing seal portion 42 is a first bearing seal portion.

Similarly, the joint portion 23 includes a magnetic fluid seal 43 that prevents air from flowing out from the joint portion of the second arm portion 21 and the hand 4 toward the vacuum region VR. The magnetic fluid seal 43 is configured similarly to the magnetic fluid seal 39 and includes a housing 44, an inner peripheral side member 45, and a bearing seal portion 46. The magnetic fluid seal 43 of the present embodiment is a second magnetic fluid seal, the case 44 is a second seal case, the inner peripheral side member 45 is a second inner peripheral side member, and the bearing seal portion 46 is a second bearing seal portion.

As shown in Fig. 7, a pulley 49 is fixed to the lower end side of the input shaft 58 of the reduction gear 37. The pulley 49 is disposed inside the front end side of the first arm portion 20. A belt 50 is placed on the pulley 36 and the pulley 49, and the power of the motor 35 is input to the input shaft 58 via the pulleys 36, 49 and the belt 50. Further, a pulley 51 is fixed to the upper end side of the input shaft 58 of the speed reducer 37. The pulley 51 is disposed inside the proximal end side of the second arm portion 21. A pulley 52 is rotatably attached to the inside of the second arm portion 21. A belt 53 is placed on the pulley 51 and the pulley 52. Further, the outer diameter of the pulley 49 is smaller than the inner diameter of the opening portion 31e.

The front end side of the first arm portion 20 is fixed to the output shaft 59 of the reduction gear 37. Specifically, the front end side of the first arm portion 20 is fixed to the output shaft 59 of the reduction gear 37 via the inner circumferential side member 41 of the magnetic fluid seal 39. The output shaft 59 of the reducer 37 is fixed to the inner peripheral side of the inner peripheral side member 41. The inner peripheral side member 41 is fixed to the front end side of the first arm portion 20 in such a manner that one of the outer peripheral surfaces thereof is in contact with the inner peripheral surface of the opening portion 31e, and a part thereof is in contact with the upper surface of the upper surface portion 31a. Moreover, the inner peripheral side member 41 is fixed to the front end side of the first arm portion 20 by a screw (not shown). Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the upper surface portion 31a and the inner circumferential side member 41.

The base end side of the second arm portion 21 is fixed to the casing 60 of the reduction gear 37. Specifically, the second arm is fixed to the casing 60 of the reduction gear 37 via the casing 40 of the magnetic fluid seal 39. The base end side of the portion 21. That is, the casing 60 is fixed to the second arm portion 21 side. The casing 60 of the reducer 37 is fixed to the inner peripheral side of the casing 40. The casing 40 is fixed to the proximal end side of the second arm portion 21 in such a manner that one of its outer peripheral surfaces is in contact with the inner peripheral surface of the opening portion 34h, and a part thereof is in contact with the lower surface of the lower surface portion 34b. Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the lower surface portion 34b and the casing 40.

As shown in FIG. 8, a pulley 56 is fixed to the lower end side of the input shaft 61 of the speed reducer 38. The pulley 56 is disposed inside the front end side of the second arm portion 21. A belt 57 is placed on the pulley 56 and the pulley 52. The belt 53 and the belt 57 are engaged with the pulley 52 in a state of being displaced in the vertical direction, and the belt 57 is disposed below the belt 53. The power of the motor 35 is input to the input shaft 61 via the pulleys 36, 49, 51, 52, 56, the belts 50, 53, 57 and the input shaft 58.

The base 11 of the hand 4 is fixed to the output shaft 62 of the reduction gear 38. Specifically, the base portion 11 of the hand 4 is fixed to the output shaft 62 of the reduction gear 38 via the inner peripheral side member 45 of the magnetic fluid seal 43. The output shaft 62 of the reducer 38 is fixed to the inner peripheral side of the inner peripheral side member 45. The inner peripheral side member 45 is fixed to the base portion 11 of the hand 4. Further, the inner peripheral side member 45 is fixed to the base portion 11 of the hand 4 by a screw (not shown). Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the base portion 11 of the hand 4 and the inner circumferential side member 45.

The front end side of the second arm portion 21 is fixed to the casing 63 of the speed reducer 38. Specifically, the front end side of the second arm portion 21 is fixed to the casing 63 of the speed reducer 38 with the casing 44 of the magnetic fluid seal 43 interposed therebetween. That is, the casing 63 is fixed to the second arm portion 21 side. The casing 63 of the reducer 38 is fixed to the inner peripheral side of the casing 44. The casing 44 is fixed to the front end side of the second arm portion 21 in such a manner that one of its outer peripheral surfaces is in contact with the inner peripheral surface of the opening portion 34e, and a part thereof is in surface contact with the upper surface of the upper surface portion 34a. Further, an annular sealing member that prevents air from flowing out into the vacuum region VR is disposed between the upper surface portion 34a and the casing 44 (omitted from the drawing) Show).

The cover members 32, 33 are formed of an aluminum alloy. Further, the cover members 32 and 33 are formed in a disk shape. Both sides of the cover member 33 are formed in a planar shape. On the other hand, on one surface of the cover member 32, as shown in Fig. 9, a heat sink 32a for heat dissipation is formed. In the present embodiment, a plurality of fins 32a having annular shapes having different diameters are formed on one surface of the cover member 32, and the plurality of fins 32a are arranged concentrically. Further, in the present embodiment, as shown in FIG. 9(A), a plurality of fins 32a are formed by forming a plurality of annular recesses recessed from one surface of the cover member 32 toward the other surface. Further, a plurality of fins 32a may be formed by a convex portion that protrudes from one surface of the cover member 32.

The opening 31f of the first arm portion 20 is closed by the cover member 33 from the lower side. The opening 34f of the second arm portion 21 is closed by the cover member 33 from the upper side, and the opening portion 34g of the second arm portion 21 is closed by the cover member 33 from the lower side. The opening 31d of the first arm portion 20 and the opening portion 34d of the second arm portion 21 are closed by the cover member 32 from the upper side. The cover member 32 is fixed such that the surface on which the fins 32a are formed faces the lower side. That is, a heat sink 32a is formed on the lower surface of the cover member 32, and a heat sink 32a for heat dissipation is formed on the inner surface of the arm 6. Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the arm portions 31 and 34 and the cover members 32 and 33.

As shown in FIG. 10, the first arm portion 25 is configured similarly to the first arm portion 20, and includes an arm main body 31, three cover members 32, and one cover member 33. Further, as shown in FIG. 11, the second arm portion 26 is configured similarly to the second arm portion 21, and includes an arm main body 34, two cover members 32, and two cover members 33. Therefore, the detailed description of the configuration of the first arm portion 25 and the configuration of the second arm portion 26 will be omitted.

The proximal end side of the first arm portion 25 is fixed to the support portion main body 15 of the arm support portion 8 in the same manner as the proximal end side of the first arm portion 20. The inside of the first arm portion 25 communicates with the inside of the arm support portion 8 via the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 25 becomes atmospheric pressure. A motor 65 is disposed inside the base end side of the first arm portion 25 and inside the arm support portion 8 . The motor 65 rotates the second arm portion 26 with respect to the first arm portion 25 and rotates the hand 5 with respect to the second arm portion 26. The motor 65 is disposed in the same manner as the motor 35 disposed inside the base end side of the first arm portion 20 and inside the arm support portion 8. The output of the motor 65 protrudes from the upper side in the axial direction, and a pulley 66 is fixed to the output shaft.

The joint portion 27 includes a speed reducer 67 that decelerates the rotation of the motor 65 and transmits it to the second arm portion 26. Similarly to the speed reducer 37, the speed reducer 67 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. Therefore, the inside of the second arm portion 26 communicates with the inside of the first arm portion 25 via the through hole of the hollow reducer, and the inside of the second arm portion 26 becomes atmospheric pressure. That is, in the present embodiment, the inside of the arm 7 is at atmospheric pressure. Further, the speed reducer 67 is configured similarly to the speed reducer 37, and includes an input shaft 58 to which the power of the motor 65 is input, an output shaft 59 that decelerates the power input to the input shaft 58 and outputs the output shaft 59, and an input shaft via a bearing. 58 and output shaft 59 rotatably support housing 60. The speed reducer 67 of this embodiment is a first speed reducer.

The joint portion 28 includes a speed reducer 68 that decelerates the rotation of the motor 65 and transmits it to the hand 5. Similarly to the speed reducer 38, the speed reducer 68 is a hollow speed reducer in which a through hole is formed in the center of the radial direction. Further, the speed reducer 68 is configured similarly to the speed reducer 38, and includes an input shaft 61 to which the power of the motor 65 is input, an output shaft 62 that decelerates the power input to the input shaft 61 and outputs the output shaft 62, and an input shaft via a bearing. 61 and the output shaft 62 rotatably support the housing 63. The speed reducer 68 of this embodiment is a second speed reducer.

Further, the joint portion 27 includes a magnetic fluid seal 39 that prevents air from flowing from the connection portion between the first arm portion 25 and the second arm portion 26 to the vacuum region VR, similarly to the joint portion 22. Similarly to the joint portion 23, the joint portion 28 includes a magnetic fluid seal 43 that prevents air from flowing out from the connection portion between the second arm portion 26 and the hand 5 to the vacuum region VR.

As shown in Figs. 11 and 12, the upper end of the rotary shaft 69 formed in a cylindrical shape is fixed to the lower end of the input shaft 58 of the reduction gear 67. A pulley 70 is fixed to the lower end side of the rotating shaft 69. The pulley 70 is disposed inside the front end side of the first arm portion 25. A belt 71 is disposed on the pulley 66 and the pulley 70, and the power of the motor 65 is input to the belt via the pulleys 66, 70 and the belt 71. Into the shaft 58. Further, a pulley 72 is fixed to the upper end side of the input shaft 58 of the speed reducer 67. The pulley 72 is disposed inside the proximal end side of the second arm portion 26. Further, the outer diameter of the pulley 70 is smaller than the inner diameter of the opening portion 31e.

The front end side of the first arm portion 25 is fixed to the output shaft 59 of the speed reducer 67. Specifically, the front end side of the first arm portion 25 is fixed to the output shaft 59 of the speed reducer 67 via the inner peripheral side member 41 and the spacer 73 of the magnetic fluid seal 39. The spacer 73 is formed in a substantially cylindrical shape and is disposed to cover the outer peripheral side of the rotating shaft 69.

The output shaft 59 of the reducer 67 is fixed to the inner peripheral side of the inner peripheral side member 41. The inner peripheral side member 41 is fixed to the upper end of the spacer 73 in such a manner that one of its outer peripheral faces is in contact with the inner peripheral surface of the spacer 73, and a part thereof is in contact with the upper end surface of the spacer 73. The lower end of the spacer 73 is fixed to the front end side of the first arm portion 25 so as to be in contact with the upper surface of the upper surface portion 31a. Moreover, the spacer 73 is fixed to the front end side of the first arm portion 25 by a screw (not shown). A bearing holding member 74 is fixed to the lower end side of the spacer 73. The bearing holding member 74 is fixed to the lower end side of the spacer 73 in such a manner that one of its outer peripheral faces is in contact with the inner peripheral surface of the spacer 73, and a part thereof is in contact with the lower end surface of the spacer 73. Further, one portion of the bearing holding member 74 is disposed on the inner peripheral side of the opening portion 31e. A bearing 75 that rotatably supports the rotating shaft 69 is fixed to the bearing holding member 74. Further, between the inner peripheral side member 41 and the upper end of the spacer 73, and between the upper surface portion 31a and the lower end of the spacer 73, an annular sealing member that prevents air from flowing out into the vacuum region VR is disposed (omitted from illustration ).

The base end side of the second arm portion 26 is fixed to the casing 60 of the reduction gear 67. That is, the casing 60 of the speed reducer 67 is fixed to the second arm portion 26 side. The proximal end side of the second arm portion 26 is fixed to the casing 60 of the reduction gear 67 in the same manner as the casing 60 of the reduction gear 37 is fixed to the base end side of the second arm portion 21. That is, the base end side of the second arm portion 26 is fixed to the casing 60 of the reduction gear 67 via the casing 40 of the magnetic fluid seal 39.

As shown in FIG. 13, a pulley is fixed to the upper end side of the input shaft 61 of the reduction gear 68. 76. The pulley 76 is disposed inside the front end side of the second arm portion 26. A belt 77 is placed on the pulley 72 and the pulley 76, and the power of the motor 65 is input to the input shaft 61 via the pulleys 66, 70, 72, 76, the belts 71, 77, the rotary shaft 69, and the input shaft 58. The base 11 of the hand 5 is fixed to the output shaft 62 of the reduction gear 68. The base portion 11 of the hand 5 is fixed to the output shaft 62 of the reduction gear 68 in the same manner as the output shaft 62 of the reducer 38 is fixed to the base portion 11 of the hand 4. That is, the base portion 11 of the hand 5 is fixed to the output shaft 62 of the reduction gear 68 via the inner circumferential side member 45 of the magnetic fluid seal 43. Further, the inner peripheral side member 45 is fixed to the base portion 11 of the hand 5 by a screw (not shown).

The front end side of the second arm portion 26 is fixed to the casing 63 of the reduction gear 68. Specifically, the front end side of the second arm portion 26 is fixed to the casing 63 of the reduction gear 68 via the casing 44 of the magnetic fluid seal 43. That is, the casing 63 of the speed reducer 68 is fixed to the second arm portion 26 side. The casing 63 of the reducer 68 is fixed to the inner peripheral side of the casing 44. The casing 44 is fixed to the front end side of the second arm portion 26 in such a manner that one of its outer peripheral surfaces is in contact with the inner peripheral surface of the opening portion 34g, and a part thereof is in contact with the lower surface of the lower surface portion 34b. Further, an annular sealing member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the lower surface portion 34b and the casing 44.

The opening 31f of the first arm portion 25 is closed by the cover member 33 from the lower side. The opening portions 34e and 34f of the second arm portion 26 are closed by the lid member 33 from the upper side. The opening 31d of the first arm portion 25 and the opening portion 34d of the second arm portion 26 are closed by the cover member 32 from the upper side. The cover member 32 is fixed such that the surface on which the fins 32a are formed faces the lower side. That is, a heat sink 32a is formed on the lower surface of the cover member 32, and a heat sink 32a for heat dissipation is formed on the inner surface of the arm 7.

(Configuration of cooling mechanism, configuration of temperature sensor, and composition of cover member)

As described above, the robot 1 transports the substrate 2 of high temperature. Therefore, the temperatures of the arms 6, 7 rise due to the radiant heat from the substrate 2 or the radiant heat from the wall surface of the vacuum chamber to which the robot 1 is placed. The robot 1 of the present form includes an inner portion of the arms 6, 7 for raising the temperature. But the cooling mechanism. Further, the robot 1 includes a temperature sensor 80 for measuring internal temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26, and cover members 81 to 85 for suppressing radiant heat. The arms 6, 7 and the arm support 8 are transmitted.

The robot 1 of the present embodiment includes a cooling means for cooling the inside of the arms 6, 7, and an air pipe 87 for cooling the motor 35 and supplying cooling air to the inside of the first arm portion 20; air piping 88 for supplying cooling air to the inside of the second arm portion 21, and an air pipe 89 for cooling the motor 65 and supplying cooling air to the inside of the first arm portion 25, and an air pipe 90 for Cooling air is supplied to the inside of the second arm portion 26, and a plurality of fans (air blowers) 91 are disposed inside the arms 6 and 7.

The air pipes 87 to 90 are metal pipes formed of, for example, a metal such as an aluminum alloy or a copper alloy. Alternatively, it may be a pipe formed of a fluorine pipe or the like. The base ends of the air pipes 87 to 90 are connected to a solenoid valve (not shown) disposed inside the casing 13 of the main body portion 9. In the present embodiment, the four solenoid valves that connect the respective base ends of the air pipes 87 to 90 are disposed inside the casing 13, and the supply amount of the cooling air can be supplied to each of the air pipes 87 to 90. Adjustment. The four solenoid valves are connected to a supply device (not shown) of compressed air disposed inside or outside the casing 13 via a specific pipe.

The air pipes 87 and 88 are guided from the inside of the casing 13 toward the arm 6 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The front end side of the air pipe 87 is wound around the outer peripheral surface of the motor 35. The front end of the air pipe 87 serving as the supply port for the cooling air is disposed inside the proximal end side of the first arm portion 20, and the cooling air is supplied from the air pipe 87 to the inside of the proximal end side of the first arm portion 20. The air pipe 88 is guided inside the first arm portion 20 and the second arm portion 21 so as to pass through the openings 15e and 31g and the through holes formed in the center of the shaft of the speed reducer 37. The front end of the air pipe 88 serving as the supply port for the cooling air is disposed inside the front end side of the second arm portion 21, and the cooling air is supplied from the air pipe 88 to the inside of the front end side of the second arm portion 21.

The air pipes 89 and 90 are passed through the inner peripheral side of the rotating shaft 14 and the opening 15f. The inner portion of the casing 13 is guided toward the arm 7. The front end side of the air pipe 89 is wound around the outer peripheral surface of the motor 65. The front end of the air pipe 89 serving as the supply port for the cooling air is disposed inside the proximal end side of the first arm portion 25, and the cooling air is supplied from the air pipe 89 to the inside of the proximal end side of the first arm portion 25. The air pipe 90 is guided inside the first arm portion 25 and the second arm portion 26 so as to pass through the openings 15e and 31g, the inner peripheral side of the rotating shaft 69, and the through hole formed at the center of the shaft of the speed reducer 67. . The front end of the air pipe 90 serving as the supply port for the cooling air is disposed inside the front end side of the second arm portion 26, and the cooling air is supplied from the air pipe 90 to the inside of the front end side of the second arm portion 26.

The temperature sensor 80 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. Inside the first arm portion 20, one set of temperature sensors 80 is disposed in the vicinity of the motor 35 and in the vicinity of the joint portion 22. Inside the second arm portion 21, one set of temperature sensors 80 is disposed in the vicinity of the joint portion 23. Inside the first arm portion 25, one set of temperature sensors 80 is disposed in the vicinity of the motor 65 and in the vicinity of the joint portion 27. Inside the second arm portion 26, one set of temperature sensors 80 is disposed in the vicinity of the joint portion 28.

As described above, in the present embodiment, the supply amount of the cooling air can be adjusted for each of the air pipes 87 to 90, so that the first arm portions 20 and 25 and the second arm portions 21 and 26 can be adjusted. The respective interiors are individually cooled. Further, in the present embodiment, the inside of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 is individually cooled based on the detection result obtained by the temperature sensor 80. In other words, in the present embodiment, based on the detection result obtained by the temperature sensor 80, the supply amount of the cooling air supplied from each of the air pipes 87 to 90 is adjusted, whereby the first arm portions 20 and 25 and the first arm portions 20 and 25 are provided. The inside of each of the second arm portions 21 and 26 is individually cooled.

The fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. Further, the fan 91 is disposed to convey the cooling air toward the upper side. The fan 91 of the present embodiment is disposed on the lower side of the cover member 32, and conveys cooling air toward a plurality of fins 32a formed on the cover member 32. Further, the fan 91 is rotated or stopped based on, for example, the detection result obtained by the temperature sensor 80.

The cover members 81 to 85 are formed of a material having a lower thermal conductivity than the support portion main body 15, the arm portions 31, 34, and the cover members 16, 32, 33. Further, the cover members 81 to 85 are formed of a material having a high reflectance of radiant heat. For example, the cover members 81 to 85 are formed of a thin stainless steel plate. The cover member 81 covers substantially the entire upper surface, the lower surface, and the side surface of the portion of the first arm portion 20 excluding the portion overlapping the arm support portion 8. The cover member 82 covers substantially the entire upper surface, the lower surface, and the side surface of the second arm portion 21. The cover member 83 covers substantially the entire upper surface, the lower surface, and the side surface of the portion of the first arm portion 25 excluding the portion overlapping the arm support portion 8. The cover member 84 covers substantially the entire upper surface, the lower surface, and the side surface of the second arm portion 26. The cover member 85 covers a portion of the first arm portions 20 and 25 that overlaps with the arm support portion 8 and substantially the entire upper surface, the lower surface, and the side surface of the arm support portion 8.

(The main effect of this form)

As described above, in the present embodiment, the casing 60 of the reduction gear 37 is fixed to the base end side of the second arm portion 21 via the casing 40 of the magnetic fluid seal 39, and constitutes the input shaft of the reduction gear 37. The member such as the output shaft 59 and the bearing and the member such as the inner circumferential side member 41 and the bearing seal portion 42 constituting the magnetic fluid seal 39 are held by the second arm portion 21. Further, in the present embodiment, the casing 63 of the reduction gear 38 is fixed to the front end side of the second arm portion 21 via the casing 44 of the magnetic fluid seal 43, and constitutes the input shaft 61 and the output shaft 62 of the reduction gear 38. A member such as a bearing and a member such as the inner circumferential side member 45 and the bearing seal portion 46 constituting the magnetic fluid seal 43 are held by the second arm portion 21. Therefore, in the present embodiment, when the screw that fixes the inner peripheral side member 41 and the first arm portion 20 and the screw that fixes the inner peripheral side member 45 and the base portion 11 of the hand 4 are removed, and the belt 50 is removed, the belt 50 is removed. The reduction gears 37 and 38 and the magnetic fluid seals 39 and 43 can be integrally removed from the second arm portion 21.

Similarly, in the present embodiment, the casing 60 of the reduction gear 67 is fixed to the base end side of the second arm portion 26 via the casing 40 of the magnetic fluid seal 39, and constitutes the input shaft 58 and output of the reduction gear 67. The member such as the shaft 59 and the bearing is held by the second arm portion 26 such as the inner circumferential side member 41 and the bearing seal portion 42 constituting the magnetic fluid seal 39. Moreover, the rotating shaft 69 is fixed to The lower end of the input shaft 58 of the reducer 67, and the spacer 73 holding the bearing holding member 74 and the bearing 75 are fixed to the inner peripheral side member 41, and the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 are held by The second arm portion 26. Further, in the present embodiment, the casing 63 of the reduction gear 68 is fixed to the front end side of the second arm portion 26 via the casing 44 of the magnetic fluid seal 43, and constitutes the input shaft 61 and the output shaft 62 of the reduction gear 68. A member such as a bearing and a member such as the inner circumferential side member 45 and the bearing seal portion 46 constituting the magnetic fluid seal 43 are held by the second arm portion 26. Therefore, in the present embodiment, when the screw for fixing the spacer 73 and the first arm portion 25 and the screw for fixing the inner peripheral side member 45 and the base portion 11 of the hand 5 are removed, and the belt 71 is removed, the belt 71 can be removed. The reduction gears 67, 68, the magnetic fluid seals 39, 43, the rotary shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 are integrally removed from the second arm portion 26.

Therefore, in the present embodiment, when the robot 1 is inspected, the speed reducers 37 and 38 and the magnetic fluid seals 39 and 43 and the second arm portion 21 can be integrally replaced, and the speed reducers 67 and 68 can be magnetized. The fluid seals 39 and 43, the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 are integrally replaced with the second arm portion 26. In other words, in the present embodiment, when the robot 1 is inspected, the second arm portions 21 and 26 disposed on the front end sides of the arms 6 and 7 are replaced by the first arm portions 20 and 25, even if they are not replaced. The reduction gears 37, 38, 67, 68, the magnetic fluid seals 39, 43, the spacer 73, the bearing holding member 74, and the bearing 75 may be replaced by the first arm portions 20, 25 of the arm support portion 8. As a result, in the present aspect, the inspection of the robot 1 can be performed at low cost and easily.

In the present embodiment, a fan 91 that conveys air toward the upper side is disposed inside the arms 6 and 7. Therefore, in the present embodiment, when the substrate 2 having a high temperature is transported, the upper surface side portions of the arms 6 and 7 can be cooled to suppress the temperature rise of the upper surface side portions of the arms 6 and 7, so that the arms 6 and 7 can be made. The temperature of the upper surface side portion is close to the temperature of the lower surface side portion of the arms 6, 7. Therefore, in the present embodiment, the amount of thermal deformation of the upper surface side portion of the arms 6 and 7 can be made close to the amount of thermal deformation of the lower surface side portion, and the thermal deformation of the arms 6 and 7 which are lowered at the distal end side can be suppressed. As a result, in the present embodiment, even when the substrate 2 having a high temperature is transported, it is possible to 4, 5 properly transport the substrate 2.

Further, in the present embodiment, the heat radiating fins 32a for heat dissipation are formed on the inner surface of the arms 6 and 7, and the fan 91 transports the cooling air toward the fins 32a. Therefore, in the present aspect, the upper surface side portions of the arms 6 and 7 can be effectively cooled, so that the temperature rise of the upper surface side portions of the arms 6 and 7 can be effectively suppressed.

(Other embodiments)

The above-described embodiment is an example of a preferred embodiment of the present invention, and is not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention.

In the above aspect, the proximal end sides of the first arm portions 20 and 25 which are formed differently are fixed to the arm support portion 8. In addition to this, for example, the first arm portion 20, the first arm portion 25, and the arm support portion 8 may be integrally formed. Further, as shown in FIG. 14, the proximal end side of the first arm portion 20 and the proximal end side of the first arm portion 25 may be rotatably coupled to the main body portion 9, respectively. In this case, the motor 35 is disposed inside the first arm portion 20, and the motor 65 is disposed inside the first arm portion 25. Further, in the above aspect, the robot 1 includes the two arms 6 and 7. However, the robot 1 may include only one arm 6 as shown in FIG. In this case, the proximal end side of the first arm portion 20 is rotatably coupled to the main body portion 9. In addition, in FIGS. 14 and 15, the same components as those in the above-described configuration are denoted by the same reference numerals.

In the above embodiment, the arms 6 and 7 include the two arm portions of the first arm portions 20 and 25 and the second arm portions 21 and 26. However, the arms 6 and 7 may include three or more arm portions. For example, the arms 6 and 7 may include the first arm portions 20 and 25, the second arm portions 21 and 26, and the three arm portions of the third arm portion. In this case, the proximal end side of the third arm portion is rotatably coupled to the front end side of the second arm portions 21 and 26, and the hands 4 and 5 are rotatably coupled to the front end side of the third arm portion. Further, in this case, the joint portions that rotatably connect the second arm portions 21 and 26 and the third arm portion include the speed reducers 38 and 68, and the speed reducers 38 and 68, similarly to the joint portions 23 and 28. The casing 63 is fixed to the second arm portions 21 and 26 via a casing 44 of the magnetic fluid seal 43.

In this case, the speed reducers 37, 38 and the magnetic fluid seals 39, 43 can also be used. The second arm portion 21 is integrally replaced, and the speed reducers 67 and 68, the magnetic fluid seals 39 and 43 , the rotating shaft 69 , the spacer 73 , the bearing holding member 74 , and the bearing 75 may be integrally formed with the second arm portion 26 . Replacement, therefore, the same effect as the above-described form can be obtained.

In the above embodiment, the robot 1 is a robot that transports the substrate 2 in a vacuum, but the robot to which the present invention is applied may be a robot that transports the substrate 2 in the atmosphere. In this case, the magnetic fluid seals 39, 43 are not required. Further, in this case, for example, the housings 60 of the speed reducers 37 and 67 are directly fixed to the proximal end sides of the second arm portions 21 and 26, and the housings 63 of the speed reducers 38 and 68 are directly fixed to the second arm. The front ends of the portions 21, 26 are. Further, the output shaft 59 of the speed reducer 37 is directly fixed to the front end side of the first arm portion 20, the output shaft 59 of the speed reducer 67 is directly fixed to the spacer 73, and the output shaft 62 of the speed reducers 38 and 68 is directly fixed to the output shaft 62. The base 11 of the hands 4, 5.

In this case, when the robot is inspected, the speed reducers 37 and 38 and the second arm portion 21 may be integrally replaced, and the speed reducers 67 and 68, the rotating shaft 69, the spacer 73, and the bearing may be held. The member 74 and the bearing 75 are integrally replaced with the second arm portion 26. In other words, when the robot 1 is inspected, the second arm portions 21 and 26 disposed closer to the front end sides of the arms 6 and 7 than the first arm portions 20 and 25 are replaced, and the arm support portions 8 are not fixed and replaced. The first arm portions 20 and 25 may also replace the speed reducers 37, 38, 67, 68, the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75. Therefore, the robot can be repaired at low cost and easily.

In the above embodiment, the rotating shaft 69 is fixed to the lower end of the input shaft 58 of the speed reducer 67, and the pulley 70 is fixed to the lower end side of the rotating shaft 69. In addition to this, for example, the pulley 70 may be fixed to the lower end side of the input shaft 58 of the speed reducer 67. Further, in the above-described embodiment, the front end side of the first arm portion 25 is fixed to the output shaft 59 of the reduction gear 67 via the inner circumferential side member 41 and the spacer 73 of the magnetic fluid seal 39, but the reduction gear may be used. The output shaft 59 of 67 is fixed to the front end side of the first arm portion 25 via the inner peripheral side member 41 of the magnetic fluid seal 39. That is, the rotation shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 may not be disposed in the joint portion 27.

In the above-described embodiment, the robot 1 rotates the second arm portion 21 with respect to the first arm portion 20 by one motor 35, and rotates the hand 4 with respect to the second arm portion 21. In addition to this, for example, a motor that rotates the second arm portion 21 with respect to the first arm portion 20 and a motor that rotates the hand 4 with respect to the second arm portion 21 may be separately provided. Similarly, in the above-described embodiment, the second arm portion 26 is rotated with respect to the first arm portion 25 by one motor 65, and the hand 5 is rotated with respect to the second arm portion 26, but may be individually A motor that rotates the second arm portion 26 with respect to the first arm portion 25 and a motor that rotates the hand 5 with respect to the second arm portion 26 are provided.

In the above embodiment, the fins 32a are formed on the lid member 32, but the fins 32a may be formed on the lower surface of the upper surface portions 31a and 34a. Moreover, in the above aspect, the fins 32a are formed in the lid member 32, but the fins 32a may not be formed in the lid member 32. Further, in the above-described embodiment, the object to be transported by the robot 1 is the substrate 2 for the organic EL display, but the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or may be a semiconductor wafer. Wait. Further, in the above aspect, the robot 1 is a robot for transporting an object to be transported, but the robot to which the present invention is applied may be a robot for other purposes.

4‧‧‧Hand

6‧‧‧ Arm

8‧‧‧arm support

11‧‧‧ base

15‧‧‧Support Department Ontology

20‧‧‧1st arm

21‧‧‧2nd arm

22‧‧‧ Joint Department

23‧‧‧ Joint Department

31‧‧‧arm body

34‧‧‧arm body

35‧‧‧Motor

37‧‧‧Reducer

38‧‧‧Reducer

52‧‧‧ Pulley

80‧‧‧temperature sensor

81‧‧‧ Cover member

82‧‧‧ Cover member

85‧‧‧ Cover member

91‧‧‧fan

Claims (8)

An industrial robot includes: a hand; an arm including a hand that is rotatably coupled to a distal end side distal end side arm portion; and a proximal end side of the distal end side arm portion that is rotatably coupled to the distal end side a first arm portion that rotatably connects the distal end side arm portion and the first arm portion, and a second joint portion that rotatably couples the hand and the distal end side arm portion The first hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and the inside of the distal end side arm portion and the first portion are The inside of the 1 arm portion is atmospheric pressure, and the first joint portion includes a first reduction gear and a first magnetic fluid seal. The first reduction gear includes a first input shaft to which power is input, and a first output shaft. And decelerating the power input to the first input shaft and outputting the same; and the first housing rotatably supporting the first input shaft and the first output shaft; the first magnetic fluid seal prevents air a connection portion between the distal end side arm portion and the first arm portion Dividing into a vacuum; the second joint portion includes a second reducer and a second magnetic fluid seal, wherein the second reducer includes a second input shaft to which power is input, and a second output shaft to a power input to the second input shaft is decelerated and outputted; and a second housing rotatably supporting the second input shaft and the second output shaft; the second magnetic fluid seal prevents air from being a first portion of the first magnetic fluid seal includes a first seal housing that forms an outer peripheral side portion of the first magnetic fluid seal and fixes the first housing. a first inner circumferential side member rotatably held by the inner circumferential side of the first sealing case and fixed to the first output shaft; and a first bearing sealing portion including a bearing and a permanent magnet a magnetic fluid disposed between the first sealing case and the first inner circumferential side member in the radial direction; and the second magnetic fluid sealing member includes a second sealing case constituting the second magnetic fluid sealing member The second outer casing is fixed to the outer peripheral side portion; the second inner peripheral side member is rotatably held by the inner peripheral side of the second seal casing and fixes the second output shaft; and the second bearing seal portion a bearing, a permanent magnet, and a magnetic fluid, and disposed between the second seal case and the second inner peripheral side member in the radial direction; and the first case is fixed to the first case via the first seal case The distal end side arm portion is fixed to the distal end side arm portion via the second sealing case. The industrial robot according to claim 1, wherein the first reduction gear and the second reduction gear are hollow reducers in which a through hole is formed in a center of a radial direction thereof. The industrial robot according to claim 1 or 2, comprising two of the above-mentioned hands, two of the front end side arm portions, two of the first arm portions, and an arm support portion that fixes the base end sides of the two first arm portions And the main body portion of the arm support portion is coupled to the arm support portion so as to be rotatable in the axial direction of the rotation in the up-down direction. The industrial robot according to claim 3, wherein the hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and the distal end side The inside of the arm portion and the inside of the first arm portion are at atmospheric pressure, and a heat dissipation fin for heat dissipation is formed on the upper surface of the front end side arm portion and the first arm portion. The industrial robot according to claim 1 or 2, comprising two of the above-mentioned hands, two of the front end side arm portions, two of the first arm portions, and an arm support portion that fixes the base end sides of the two first arm portions And the arm support portion can be used as the axial direction of the rotation in the up and down direction The body portion of the arm support portion is coupled to the rotation. The industrial robot according to claim 5, wherein the hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and the distal end side The inside of the arm portion and the inside of the first arm portion are at atmospheric pressure, and a heat dissipation fin for heat dissipation is formed on the upper surface of the front end side arm portion and the first arm portion. The industrial robot according to claim 1 or 2, wherein the hand, the distal end side arm portion, and the first arm portion are disposed in a vacuum, and the distal end side arm portion and the first arm portion are formed in a hollow shape, and The inside of the front end side arm portion and the inside of the first arm portion are at atmospheric pressure, and a heat dissipating fin for heat dissipation is formed on the inner surface of the front end side arm portion and the first arm portion. An industrial robot comprising: a hand; an arm including a first arm portion, a second arm portion, and a third arm portion, wherein the hand is rotatably coupled to the distal end side; and the first joint portion is configured The second arm portion is rotatably coupled to the first arm portion, and the second joint portion is rotatably coupled to the third arm portion and the second arm portion; wherein the third arm portion is base The end side is rotatably coupled to the front end side of the second arm portion, and the proximal end side of the second arm portion is rotatably coupled to the front end side of the first arm portion, and the hand and the third arm portion are The second arm portion and the first arm portion are disposed in a vacuum, and the third arm portion, the second arm portion, and the first arm portion are formed in a hollow shape, and the inside of the third arm portion and the first portion are The inside of the arm portion and the inside of the first arm portion are at atmospheric pressure. The first joint portion includes a first reduction gear and a first magnetic fluid seal, wherein the first reduction gear includes a first input shaft to which power is input, and a first output shaft to be input to the first input. The shaft power is decelerated and outputted; and the first housing rotatably supports the first input shaft and the first output shaft; the first magnetic fluid seal prevents air from the second arm and the The connection portion of the first arm portion flows out into the vacuum; the second joint portion includes a second reduction gear and a second magnetic fluid seal, wherein the second reduction gear includes a second input shaft that is input with power; a second output shaft that decelerates and outputs a power input to the second input shaft, and a second housing that rotatably supports the second input shaft and the second output shaft; the second magnetic fluid The seal prevents air from flowing out of the connection portion between the third arm portion and the second arm portion, and the first magnetic fluid seal includes a first seal case that constitutes the outer periphery of the first magnetic fluid seal member. a side portion and fixing the first housing; the first inner circumference side a member rotatably held by the inner peripheral side of the first seal housing and fixed to the first output shaft; and a first bearing seal portion including a bearing, a permanent magnet, and a magnetic fluid, and disposed in a radial direction The first magnetic fluid seal includes a second seal housing that constitutes a peripheral portion of the second magnetic fluid seal and fixes the second portion. a second inner circumferential side member rotatably held by the inner circumferential side of the second sealed casing and fixed to the second output shaft; and a second bearing sealing portion including a bearing, a permanent magnet, and a magnetic body The fluid is disposed between the second seal case and the second inner peripheral side member in the radial direction; and the first case is fixed to the second arm portion via the first seal case, and the first The casing is fixed to the second arm portion via the second sealed casing.