JP2015054379A - Industrial robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an industrial robot in which an overhaul can be implemented at a low cost and easily in an industrial robot in which a reduction gear is arranged at a joint part.SOLUTION: The industrial robot comprises a tip-side arm part 21 to which a hand 4 is connected as rotatable, and a first arm part 20 to which the tip-side arm part 21 is connected as rotatable. A first joint part 22, which connects the tip-side arm part 21 and the first arm part 20 to each other, comprises a reduction gear 37 which includes an input axis, an output axis that decelerates the power inputted to the input axis and outputs it, and a case body that supports the input axis and the output axis as rotatable, and a second joint part 23, which connects the hand 4 and the tip-side arm part 21 to each other, comprises a reduction gear 38 which includes an input axis, an output axis that decelerates the power inputted to the input axis and outputs it, and a case body that supports the input axis and the output axis as rotatable. The case body of the reduction gear 37 and the case body of the reduction gear 38 are fixed at the tip-side arm part 21 side.

Description

  The present invention relates to an industrial robot including a hand and an arm constituted by a plurality of arm portions.

  Conventionally, an industrial robot that transports a glass substrate or the like in a vacuum is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a hand on which a glass substrate or the like is mounted, an arm that is rotatably connected to the distal end side, and a main body portion that is rotatably connected to the base end side of the arm. And. The arm is composed of a first arm portion and a second arm portion that are rotatably connected to each other. The hand is rotatably connected to the distal end side of the second arm portion. The proximal end side of the second arm portion is rotatably connected to the distal end side of the first arm portion, and the proximal end side of the first arm portion is rotatably connected to the main body portion.

JP 2008-6535 A

  In the industrial robot described in Patent Document 1, in order to ensure the rigidity of the joint part that connects the hand and the second arm part and the joint part that connects the second arm part and the first arm part, It is preferable that a speed reducer is disposed in Moreover, in an industrial robot such as the industrial robot described in Patent Document 1, overhaul is performed periodically. Therefore, an industrial robot that can be easily overhauled at a low cost is demanded in the market.

  Accordingly, an object of the present invention is to provide an industrial robot that can be easily overhauled at low cost in an industrial robot in which a speed reducer is arranged at a joint.

  In order to solve the above-described problems, the industrial robot of the present invention includes a hand, a distal end arm portion to which the hand is pivotally connected to the distal end side, and a proximal end side of the distal end arm portion that is pivotable to the distal end side. An arm having a first arm portion connected to the first arm portion, a first joint portion that rotatably connects the distal end side arm portion and the first arm portion, and a hand and the distal end side arm portion that are rotatably connected. A first input shaft that receives power, a first output shaft that decelerates and outputs power input to the first input shaft, and a first input shaft. And a first speed reducer having a first case body that rotatably supports the first output shaft, and the second joint portion is input to the second input shaft to which power is input and the second input shaft. A second output shaft that decelerates and outputs power, and a second input shaft and a second output shaft that rotatably support the second input shaft and the second output shaft. A second reduction gear having a casing, the first casing member and the second case body, characterized in that it is fixed to the distal end-side arm portion.

  In the industrial robot of the present invention, the first case body of the first speed reducer that constitutes at least a part of the first joint portion is fixed to the distal arm side, and the first input that constitutes the first speed reducer. Members such as a shaft, a first output shaft, and a bearing are held by the distal arm portion. In the present invention, the second case body of the second speed reducer that constitutes at least a part of the second joint portion is fixed to the distal arm side, and the second input shaft that constitutes the second speed reducer, Members such as the second output shaft and the bearing are held by the distal arm portion. Therefore, in the present invention, when the industrial robot is overhauled, the first reduction gear and the second reduction gear can be exchanged integrally with the distal end side arm portion. That is, when the industrial robot is overhauled, the first deceleration can be achieved without replacing the first arm by replacing the distal arm located on the distal side of the arm relative to the first arm. And the second reduction gear can be exchanged. Therefore, according to the present invention, it is possible to easily perform overhaul at a low cost in an industrial robot in which a reduction gear is disposed at a joint.

  In the present invention, the first reducer and the second reducer are, for example, hollow reducers in which a through hole is formed at the center in the radial direction.

  In the present invention, the hand, the tip side arm portion and the first arm portion are arranged in a vacuum, the tip side arm portion and the first arm portion are formed in a hollow shape, and the inside of the tip side arm portion and The interior of one arm portion is at atmospheric pressure, and the first joint portion includes a first magnetic fluid seal that prevents outflow of air into the vacuum from the connecting portion between the distal arm portion and the first arm portion. The second joint portion includes a second magnetic fluid seal that prevents air from flowing out into the vacuum from the connection portion between the hand and the distal arm portion, and the first magnetic fluid seal constitutes an outer peripheral side portion thereof. A first seal case body to which the first case body is fixed; a first inner peripheral side member that is rotatably held on the inner peripheral side of the first seal case body and to which the first output shaft is fixed; and a bearing; It has a permanent magnet and magnetic fluid A first bearing seal portion disposed between the one seal case body and the first inner peripheral side member, and the second magnetic fluid seal constitutes the outer peripheral side portion and the second case body is fixed. A second seal case body, a second inner periphery side member rotatably held on the inner peripheral side of the second seal case body and to which the second output shaft is fixed, a bearing, a permanent magnet, and a magnetic fluid. And a second bearing seal portion disposed between the second seal case body and the second inner peripheral side member in the radial direction, and the first case body is connected to the distal end side arm portion via the first seal case body. Preferably, the second case body is fixed to the distal arm portion via the second seal case body.

  If comprised in this way, while the members, such as the 1st inner circumference side member and the 1st bearing seal part which constitute the 1st magnetic fluid seal, are held by the tip side arm part, the 2nd which constitutes the 2nd magnetic fluid seal. Since members such as the inner peripheral side member and the second bearing seal portion are held by the distal end side arm portion, in addition to the first reducer and the second reducer, the first magnetic member is used when overhauling the industrial robot. It is possible to replace the fluid seal and the second magnetic fluid seal integrally with the distal arm portion. That is, when the industrial robot is overhauled, the first deceleration can be achieved without replacing the first arm by replacing the distal arm located on the distal side of the arm relative to the first arm. In addition to the speed reducer and the second speed reducer, the first magnetic fluid seal and the second magnetic fluid seal can be exchanged. Therefore, even if the joint portion is provided with a magnetic fluid seal, it is possible to easily overhaul at a low cost.

  In the present invention, the industrial robot includes, for example, two hands, two distal arm portions, two first arm portions, and an arm to which the proximal ends of the two first arm portions are fixed. A support unit, and a main body unit to which the arm support unit is coupled so that the arm support unit can be rotated with the vertical direction as the axis direction of rotation. In this case, when overhauling the industrial robot, the first reduction gear and the second reduction gear can be replaced without replacing the two first arm portions fixed to the arm support portion. It becomes possible.

  Here, according to the study of the present inventor, when a high-temperature transfer object is mounted on the hand in the vacuum chamber and transferred, the effects of the radiant heat from the transfer object and the radiant heat from the wall surface of the vacuum chamber cause The temperature of the upper surface portion is higher than the temperature of the lower surface portion of the arm. Further, when the temperature of the upper surface side portion of the arm becomes higher than the temperature of the lower surface side portion of the arm when the high temperature object is conveyed, the thermal deformation amount of the upper surface side portion of the arm becomes the thermal deformation amount of the lower surface side portion. Therefore, there is a possibility that the arm is thermally deformed so that the tip end side of the arm is lowered, and it is impossible to appropriately convey the object to be conveyed by the hand.

  Therefore, in the present invention, the hand, the tip side arm portion and the first arm portion are arranged in a vacuum, and the tip side arm portion and the first arm portion are formed in a hollow shape, and the inside of the tip side arm portion. The inside of the first arm portion is at atmospheric pressure, and it is preferable that fins for heat dissipation are formed on the top surfaces of the tip side arm portion and the first arm portion. If comprised in this way, when conveying a high temperature conveyance target object, it becomes possible to cool the upper surface side part of an arm, and to suppress the temperature rise of the upper surface side part of an arm, and the temperature of the upper surface side part of an arm Can be brought closer to the temperature of the lower surface side portion of the arm. Therefore, it is possible to bring the thermal deformation amount of the upper surface side portion of the arm closer to the thermal deformation amount of the lower surface side portion, and it is possible to suppress the thermal deformation of the arm whose tip side is lowered. As a result, even when a high-temperature conveyance object is conveyed, the conveyance object can be appropriately conveyed by the hand.

  Moreover, in order to solve said subject, the industrial robot of this invention has a hand, a 1st arm part, a 2nd arm part, and a 3rd arm part, and a hand is rotatably connected to the front end side. An arm, a first joint that rotatably connects the second arm and the first arm, and a second joint that rotatably connects the third arm and the second arm. The proximal end side of the third arm portion is rotatably connected to the distal end side of the second arm portion, and the proximal end side of the second arm portion is rotatably connected to the distal end side of the first arm portion. The first joint unit rotates the first input shaft to which power is input, the first output shaft that decelerates and outputs the power input to the first input shaft, and the first input shaft and the first output shaft. A first speed reducer having a first case body that supports the first case body, and the second joint portion includes a second input shaft to which power is input, and a second input. A second reduction gear having a second output shaft that decelerates and outputs the power input to the output, and a second case body that rotatably supports the second input shaft and the second output shaft. And the 2nd case body is being fixed to the 2nd arm part side, It is characterized by the above-mentioned.

  In the industrial robot of the present invention, the first case body of the first speed reducer constituting at least a part of the first joint part is fixed to the second arm part side, and the first input constituting the first speed reducer. Members such as a shaft, a first output shaft, and a bearing are held by the second arm portion. In the present invention, the second case body of the second speed reducer constituting at least a part of the second joint part is fixed to the second arm part side, and the second input shaft constituting the second speed reducer, Members such as the second output shaft and the bearing are held by the second arm portion. For this reason, in the present invention, when the industrial robot is overhauled, the first reduction gear and the second reduction gear can be integrally replaced with the second arm portion. That is, when overhauling the industrial robot, the first deceleration is achieved without replacing the first arm by replacing the second arm disposed on the tip side of the arm relative to the first arm. And the second reduction gear can be exchanged. Therefore, according to the present invention, it is possible to easily perform overhaul at a low cost in an industrial robot in which a reduction gear is disposed at a joint.

  As described above, according to the present invention, it is possible to easily perform overhaul of an industrial robot in which a reduction gear is disposed at a joint portion at a low cost.

It is a top view of the industrial robot concerning an embodiment of the invention. It is sectional drawing of the base end side part and arm support part of an arm which are shown in FIG. It is sectional drawing of the arm shown in FIG. It is sectional drawing of the arm shown in FIG. It is an enlarged view of the E section of FIG. It is an enlarged view of the F section of FIG. It is an enlarged view of the K section of FIG. It is an enlarged view of the L section of FIG. (A) is sectional drawing of the cover member shown in FIG. 5, (B) is a figure which shows a cover member from the GG direction of (A). It is an enlarged view of the H section of FIG. It is an enlarged view of the J section of FIG. It is an enlarged view of the M section of FIG. It is an enlarged view of the N section of FIG. It is a top view of the industrial robot concerning other embodiment of this invention. It is a figure of the industrial robot concerning other embodiment of this invention, (A) is a top view, (B) is a side view.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. 2 is a cross-sectional view of the base end side portions of the arms 6 and 7 and the arm support portion 8 shown in FIG. FIG. 3 is a cross-sectional view of the arm 6 shown in FIG. 4 is a cross-sectional view of the arm 7 shown in FIG.

  The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is, for example, a glass substrate 2 (hereinafter referred to as “substrate 2”) for an organic EL (organic electroluminescence) display, which is an object to be transported. ). This robot 1 is used by being incorporated in an organic EL display manufacturing system (not shown), and conveys a high-temperature substrate 2.

  As shown in FIG. 1, the robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, an arm 6 to which the hand 4 is pivotably connected to the distal end, and a hand 5 that rotates to the distal end. An arm 7 that is movably connected, an arm support portion 8 to which the base ends of the arms 6 and 7 are fixed, and a main body portion 9 to which the arm support portion 8 is rotatably connected are provided. The hands 4 and 5, the arms 6 and 7, and the arm support portion 8 are arranged on the upper side of the main body portion 9.

  The upper ends of the hands 4 and 5, the arms 6 and 7, the arm support portion 8, and the main body portion 9 are arranged inside a vacuum chamber constituting an organic EL display manufacturing system. That is, the upper ends of the hands 4 and 5, the arms 6 and 7, the arm support 8 and the main body 9 are arranged in the vacuum region VR (in vacuum), and the portion excluding the upper end of the main body 9 is Arranged in the atmospheric region AR (in the atmosphere) (see FIG. 2), the robot 1 transports the substrate 2 mounted on the hands 4 and 5 in a vacuum.

  The hands 4 and 5 include a base portion 11 connected to the arms 6 and 7 and two fork portions 12 on which the substrate 2 is mounted. The fork portion 12 is formed in a straight line shape. Further, the two fork portions 12 are arranged in parallel with a predetermined distance therebetween.

  The main body portion 9 includes a case body 13 formed in a hollow shape and a hollow rotation shaft 14 fixed to the lower surface of the arm support portion 8. The rotating shaft 14 is formed in an elongated cylindrical shape whose axial direction is the vertical direction. The upper end of the rotating shaft 14 is fixed to the lower surface of the arm support portion 8, and the arm support portion 8 can be rotated with the vertical direction as the axial direction of rotation. The upper end portion of the rotating shaft 14 protrudes upward from the upper end surface of the case body 13, and the portion of the rotating shaft 14 excluding the upper end portion is accommodated inside the case body 13.

  A motor (not shown) for rotating the arm support portion 8 with respect to the case body 13 is disposed inside the case body 13. For example, the lower end side of the rotating shaft 14 is connected to the motor via a pulley, a belt, and a speed reducer. Further, an elevating mechanism (not shown) that elevates and lowers the rotating shaft 14 and the like is disposed inside the case body 13. The upper end portion of the case body 13 is disposed in the vacuum region VR, and the portion of the case body 13 excluding the upper end portion is disposed in the atmospheric region AR. The interior of the case body 13 is at atmospheric pressure, and a magnetic fluid seal and a bellows (not shown) for preventing the outflow of air to the vacuum region VR are disposed on the outer peripheral side of the rotating shaft 14.

  The arm support portion 8 is formed in a hollow shape, and includes a support portion main body 15 and three lid members 16. The lid member 16 is made of an aluminum alloy. The lid member 16 is formed in a disc shape. The support body 15 is formed of an aluminum alloy. The support body 15 includes an upper surface 15a that constitutes the upper surface of the support body 15 and a lower surface that constitutes the lower surface of the support body 15 and is opposed to the upper surface 15a in a substantially parallel manner with a predetermined gap. It is comprised from the part 15b and the side part 15c which connects the outer peripheral end of the upper surface part 15a, and the outer peripheral end of the lower surface part 15b. The upper surface portion 15a and the lower surface portion 15b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction. The side surface portion 15c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  Three circular openings 15d and 15e are formed in the upper surface portion 15a so as to penetrate in the vertical direction. Of the three openings 15d and 15e, one opening 15d is formed at the center of the upper surface 15a, and the remaining two openings 15e are the longitudinal sides of the upper surface 15a formed in a substantially oval shape. It is formed on both ends in the direction. The lower surface portion 15b is also formed with three circular openings 15f and 15g penetrating in the vertical direction. Of the three openings 15f and 15g, one opening 15f is formed at the center of the lower surface 15b, and the remaining two openings 15g are the longitudinal length of the lower surface 15b formed in a substantially oval shape. It is formed on both ends in the direction.

  The upper end of the rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b. The rotation shaft 14 is fixed to the lower surface of the lower surface portion 15b so as to surround the opening 15f, and the inner peripheral side of the rotation shaft 14 and the inside of the arm support portion 8 communicate with each other. That is, the inside of the arm support portion 8 communicates with the inside of the case body 13, and the inside of the arm support portion 8 is at atmospheric pressure. As shown in FIG. 2, the opening 15 d is closed from the upper side by the lid member 16, and the two openings 15 g are closed from the lower side by the lid member 16. Between the support part main body 15 and the cover member 16, the cyclic | annular seal member (illustration omitted) which prevents the outflow of the air to the vacuum area | region VR is arrange | positioned.

  The arm 6 is composed of two arm parts, a first arm part 20 and a second arm part 21, which are connected to each other so as to be relatively rotatable. The first arm part 20 and the second arm part 21 are formed in a hollow shape. That is, the entire arm 6 is formed in a hollow shape. The proximal end side of the first arm portion 20 is fixed to the arm support portion 8. The proximal end side of the second arm portion 21 is rotatably connected to the distal end side of the first arm portion 20. The hand 4 is rotatably connected to the distal end side of the second arm portion 21. The 2nd arm part 21 of this form is a front end side arm part.

  The connection part of the 1st arm part 20 and the 2nd arm part 21 is the joint part 22, and the joint part 22 connects the 1st arm part 20 and the 2nd arm part 21 so that rotation is possible. Yes. The connecting portion between the arm 6 and the hand 4 (that is, the connecting portion between the second arm portion 21 and the hand 4) is a joint portion 23. The joint portion 23 connects the second arm portion 21 and the hand 4 together. It is connected so that it can rotate. The second arm portion 21 is disposed above the first arm portion 20, and the hand 4 is disposed above the second arm portion 21. The joint part 22 of this embodiment is a first joint part, and the joint part 23 is a second joint part.

  The arm 7 is composed of two arm portions, a first arm portion 25 and a second arm portion 26, which are connected to each other so as to be relatively rotatable. The first arm part 25 and the second arm part 26 are formed in a hollow shape. That is, the entire arm 7 is formed in a hollow shape. The proximal end side of the first arm portion 25 is fixed to the arm support portion 8. The proximal end side of the second arm portion 26 is rotatably connected to the distal end side of the first arm portion 25. The hand 5 is rotatably connected to the distal end side of the second arm portion 26. The 2nd arm part 26 of this form is a front end side arm part.

  The connection part of the 1st arm part 25 and the 2nd arm part 26 is the joint part 27, and the joint part 27 connects the 1st arm part 25 and the 2nd arm part 26 so that rotation is possible. Yes. A connecting portion between the arm 7 and the hand 5 (that is, a connecting portion between the second arm portion 26 and the hand 5) is a joint portion 28. The joint portion 28 connects the second arm portion 26 and the hand 5 together. It is connected so that it can rotate. The second arm portion 26 is disposed above the first arm portion 25. The hand 5 is disposed below the second arm portion 26 and above the first arm portion 25. The joint part 27 of this embodiment is a first joint part, and the joint part 28 is a second joint part.

(Arm configuration, arm internal configuration and joint configuration)
FIG. 5 is an enlarged view of a portion E in FIG. FIG. 6 is an enlarged view of a portion F in FIG. FIG. 7 is an enlarged view of a portion K in FIG. FIG. 8 is an enlarged view of a portion L in FIG. 9A is a cross-sectional view of the lid member 32 shown in FIG. 5, and FIG. 9B is a diagram showing the lid member 32 from the GG direction of FIG. 9A. FIG. 10 is an enlarged view of a portion H in FIG. FIG. 11 is an enlarged view of a portion J in FIG. FIG. 12 is an enlarged view of a portion M in FIG. FIG. 13 is an enlarged view of a portion N in FIG.

  The first arm unit 20 includes an arm unit main body 31, three lid members 32, and one lid member 33. The arm part body 31 is formed of an aluminum alloy. The arm unit body 31 includes an upper surface part 31a constituting the upper surface of the arm part body 31 and a lower surface constituting the lower surface of the arm part body 31 and facing the upper surface part 31a in a substantially parallel manner with a predetermined gap. It is comprised from the part 31b and the side part 31c which connects the outer periphery end of the upper surface part 31a, and the outer periphery end of the lower surface part 31b. The upper surface portion 31a and the lower surface portion 31b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction. The upper surface part 31 a constitutes a part of the upper surface of the first arm part 20, and the lower surface part 31 b constitutes a part of the lower surface of the first arm part 20. The side surface portion 31c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  In the upper surface portion 31a, four circular openings 31d and 31e are formed so as to penetrate in the vertical direction. The four openings 31d and 31e are formed at a predetermined interval in the longitudinal direction of the upper surface portion 31a formed in a substantially oval shape. In this embodiment, the opening 31e is formed on the most distal end side of the upper surface portion 31a, and the remaining three openings 31d are formed on the proximal end side of the upper surface portion 31a with respect to the opening 31e. The lower surface portion 31b is also formed with two circular openings 31f and 31g penetrating in the vertical direction. The opening 31f is formed on the distal end side of the lower surface portion 31b, and the opening 31g is formed on the proximal end side of the lower surface portion 31b.

  The second arm portion 21 includes an arm portion main body 34, two lid members 32, and two lid members 33. The arm part main body 34 is formed of an aluminum alloy. The arm portion main body 34 includes an upper surface portion 34a that constitutes the upper surface of the arm portion main body 34, and a lower surface that constitutes the lower surface of the arm portion main body 34 and is opposed to the upper surface portion 34a substantially in parallel through a predetermined gap. It is comprised from the part 34b and the side part 34c which connects the outer peripheral end of the upper surface part 34a, and the outer peripheral end of the lower surface part 34b. The upper surface portion 34a and the lower surface portion 34b are formed in an elongated, substantially oval flat plate shape, and face each other in the vertical direction. The upper surface part 34 a constitutes a part of the upper surface of the second arm part 21, and the lower surface part 34 b constitutes a part of the lower surface of the second arm part 21. The side surface portion 34c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  In the upper surface portion 34a, four circular openings 34d, 34e, 34f are formed so as to penetrate in the vertical direction. The four openings 34d to 34f are formed at a predetermined interval in the longitudinal direction of the upper surface 34a formed in a substantially oval shape. In this embodiment, an opening 34e is formed on the most distal end side of the upper surface portion 34a, an opening 34f is formed on the most proximal side of the upper surface portion 34a, and the remaining two openings 34d are the opening 34e and the opening portion. 34f. The lower surface portion 34b is also formed with two circular openings 34g and 34h penetrating in the vertical direction. The opening 34g is formed on the distal end side of the lower surface portion 34b, and the opening 34h is formed on the proximal end side of the lower surface portion 34b.

  As described above, the base end side of the first arm portion 20 is fixed to the arm support portion 8. Specifically, the base end side of the first arm portion 20 is fixed to the arm support portion 8 in a state where the lower surface of the lower surface portion 31b of the arm portion main body 31 is in close contact with the upper surface of the upper surface portion 15a of the support portion main body 15. . Further, when viewed from the vertical direction, the base end side of the first arm portion 20 is the arm support portion 8 so that the center of the opening portion 15e of the upper surface portion 15a substantially coincides with the center of the opening portion 31g of the lower surface portion 31b. It is fixed to. Therefore, the inside of the first arm part 20 communicates with the inside of the arm support part 8, and the inside of the first arm part 20 is at atmospheric pressure. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the support body 15 and the arm body 31.

  The second arm portion 21 is rotated with respect to the first arm portion 20 and the hand 4 is moved with respect to the second arm portion 21 inside the proximal end side of the first arm portion 20 and the inside of the arm support portion 8. A motor 35 that rotates is disposed. The central portion of the motor 35 in the vertical direction is disposed in the opening 15e and the opening 31g. The upper end side of the motor 35 is disposed inside the base end side of the first arm portion 20 and the lower end side of the motor 35. Is arranged inside the arm support 8. The output shaft of the motor 35 protrudes upward, and a pulley 36 is fixed to the output shaft.

  The joint portion 22 includes a speed reducer 37 that decelerates the rotation of the motor 35 and transmits it to the second arm portion 21. The speed reducer 37 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 21 communicates with the inside of the first arm portion 20, and the inside of the second arm portion 21 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 6 is at atmospheric pressure. The speed reducer 37 rotates the input shaft 58 and the output shaft 59 via bearings, an input shaft 58 to which the power of the motor 35 is input, an output shaft 59 that decelerates and outputs the power input to the input shaft 58, and a bearing. And a case body 60 that supports the case. The speed reducer 37 of this embodiment is a first speed reducer, the input shaft 58 is a first input shaft, the output shaft 59 is a first output shaft, and the case body 60 is a first case body.

  The joint unit 23 includes a speed reducer 38 that decelerates and transmits the rotation of the motor 35 to the hand 4. The speed reducer 38 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. The speed reducer 38 includes an input shaft 61 to which power of the motor 35 is input, an output shaft 62 that decelerates and outputs power input to the input shaft 61, and an input shaft 61 and an output shaft 62 through bearings. And a case body 63 that is rotatably supported. The speed reducer 38 of this embodiment is a second speed reducer, the input shaft 61 is a second input shaft, the output shaft 62 is a second output shaft, and the case body 63 is a second case body.

  In addition, the joint portion 22 includes a magnetic fluid seal 39 that prevents air from flowing out from the connection portion between the first arm portion 20 and the second arm portion 21 to the vacuum region VR. The magnetic fluid seal 39 includes a substantially cylindrical case body 40 constituting an outer peripheral side portion thereof, and a substantially cylindrical inner peripheral side member 41 that is rotatably held on the inner peripheral side of the case body 40. . Between the case body 40 and the inner peripheral member 41 in the radial direction, a bearing seal portion 42 having a bearing, a permanent magnet, and a magnetic fluid is disposed. The magnetic fluid seal 39 of this embodiment is a first magnetic fluid seal, the case body 40 is a first seal case body, the inner peripheral side member 41 is a first inner peripheral side member, and the bearing seal portion 42 is a first seal member. It is a bearing seal part.

  Similarly, the joint portion 23 includes a magnetic fluid seal 43 that prevents the outflow of air from the connection portion between the second arm portion 21 and the hand 4 to the vacuum region VR. The magnetic fluid seal 43 is configured similarly to the magnetic fluid seal 39, and includes a case body 44, an inner peripheral side member 45, and a bearing seal portion 46. The magnetic fluid seal 43 of this embodiment is a second magnetic fluid seal, the case body 44 is a second seal case body, the inner peripheral side member 45 is a second inner peripheral side member, and the bearing seal portion 46 is a second seal member. It is a bearing seal part.

  As shown in FIG. 7, a pulley 49 is fixed to the lower end side of the input shaft 58 of the speed reducer 37. The pulley 49 is disposed inside the distal end side of the first arm unit 20. A belt 50 is stretched between the pulley 36 and the pulley 49, and the power of the motor 35 is input to the input shaft 58 via the pulleys 36 and 49 and the belt 50. A pulley 51 is fixed to the upper end side of the input shaft 58. The pulley 51 is disposed inside the base end side of the second arm portion 21. A pulley 52 is rotatably mounted inside the second arm portion 21. A belt 53 is stretched between the pulley 51 and the pulley 52. The outer diameter of the pulley 49 is smaller than the inner diameter of the opening 31e.

  The distal end side of the first arm portion 20 is fixed to the output shaft 59 of the speed reducer 37. Specifically, the distal end side of the first arm portion 20 is fixed to the output shaft 59 via the inner peripheral side member 41 of the magnetic fluid seal 39. The output shaft 59 is fixed to the inner peripheral side of the inner peripheral member 41. The inner peripheral side member 41 is located on the distal end side of the first arm portion 20 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 31e and a part thereof is in contact with the upper surface of the upper surface portion 31a. It is fixed. Further, the inner peripheral side member 41 is fixed to the distal end side of the first arm portion 20 by screws not shown. An annular seal member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the upper surface portion 31a and the inner peripheral side member 41.

  The base end side of the second arm portion 21 is fixed to the case body 60 of the speed reducer 37. Specifically, the base end side of the second arm portion 21 is fixed to the case body 60 via the case body 40 of the magnetic fluid seal 39. That is, the case body 60 is fixed to the second arm portion 21 side. The case body 60 is fixed to the inner peripheral side of the case body 40. The case body 40 is fixed to the proximal end side of the second arm portion 21 such that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34h and a part thereof is in contact with the lower surface of the lower surface portion 34b. Has been. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the lower surface portion 34b and the case body 40.

  As shown in FIG. 8, a pulley 56 is fixed to the lower end side of the input shaft 61 of the speed reducer 38. The pulley 56 is disposed inside the distal end side of the second arm portion 21. A belt 57 is stretched between the pulley 56 and the pulley 52. The belt 53 and the belt 57 are engaged with the pulley 52 in a state shifted in the vertical direction, and the belt 57 is disposed below the belt 53. The power of the motor 35 is input to the input shaft 61 via the pulleys 36, 49, 51, 52, 56, the belts 50, 53, 57 and the input shaft 58.

  The base 11 of the hand 4 is fixed to the output shaft 62 of the speed reducer 38. Specifically, the base 11 of the hand 4 is fixed to the output shaft 62 via the inner peripheral side member 45 of the magnetic fluid seal 43. The output shaft 62 is fixed to the inner peripheral side of the inner peripheral member 45. The inner circumferential side member 45 is fixed to the base 11 of the hand 4. Further, the inner peripheral side member 45 is fixed to the base portion 11 of the hand 4 with screws not shown. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the base 11 of the hand 4 and the inner peripheral member 45.

  The distal end side of the second arm portion 21 is fixed to the case body 63 of the speed reducer 38. Specifically, the distal end side of the second arm portion 21 is fixed to the case body 63 via the case body 44 of the magnetic fluid seal 43. That is, the case body 63 is fixed to the second arm portion 21 side. The case body 63 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the distal end side of the second arm portion 21 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34e and a part thereof is in contact with the upper surface of the upper surface portion 34a. ing. An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the upper surface portion 34a and the case body 44.

  The lid members 32 and 33 are made of an aluminum alloy. The lid members 32 and 33 are formed in a disc shape. Both surfaces of the lid member 33 are formed in a planar shape. On the other hand, as shown in FIG. 9, a heat radiation fin 32 a is formed on one surface of the lid member 32. In this embodiment, a plurality of annular fins 32a having different diameters are formed on one surface of the lid member 32, and the plurality of fins 32a are arranged concentrically. Further, in this embodiment, as shown in FIG. 9A, a plurality of annular recesses that are recessed from one surface of the lid member 32 toward the other surface are formed, whereby the plurality of fins 32a are formed. Is formed. Note that the plurality of fins 32 a may be configured by convex portions protruding from one surface of the lid member 32.

  The opening 31 f of the first arm portion 20 is closed from below by the lid member 33. The opening 34 f of the second arm portion 21 is closed from above by the lid member 33, and the opening 34 g of the second arm portion 21 is closed from below by the lid member 33. The opening 31 d of the first arm part 20 and the opening 34 d of the second arm part 21 are closed from above by the lid member 32. The lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 6. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the arm main bodies 31 and 34 and the lid members 32 and 33.

  As shown in FIG. 10, the first arm portion 25 is configured similarly to the first arm portion 20, and includes an arm portion main body 31, three lid members 32, and one lid member 33. . As shown in FIG. 11, the second arm portion 26 is configured in the same manner as the second arm portion 21, and includes an arm portion main body 34, two lid members 32, and two lid members 33. ing. Therefore, detailed description of the configuration of the first arm portion 25 and the configuration of the second arm portion 26 is omitted.

  The base end side of the first arm portion 25 is fixed to the support portion main body 15 of the arm support portion 8 in the same manner as the base end side of the first arm portion 20. The inside of the first arm portion 25 communicates with the inside of the arm support portion 8, and the inside of the first arm portion 25 is at atmospheric pressure. The second arm portion 26 is rotated with respect to the first arm portion 25 and the hand 5 is moved with respect to the second arm portion 26 inside the base end side of the first arm portion 25 and the inside of the arm support portion 8. A motor 65 that rotates is disposed. The motor 65 is disposed in the same manner as the motor 35 disposed inside the base end side of the first arm portion 20 and inside the arm support portion 8. The output shaft of the motor 65 protrudes upward, and a pulley 66 is fixed to the output shaft.

  The joint portion 27 includes a speed reducer 67 that decelerates the rotation of the motor 65 and transmits it to the second arm portion 26. Similar to the speed reducer 37, the speed reducer 67 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 26 communicates with the inside of the first arm portion 25, and the inside of the second arm portion 26 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 7 is at atmospheric pressure. The speed reducer 67 is configured in the same manner as the speed reducer 37, and includes an input shaft 58 to which the power of the motor 65 is input, an output shaft 59 that decelerates and outputs the power input to the input shaft 58, A case body 60 that rotatably supports the input shaft 58 and the output shaft 59 via a bearing is provided. The speed reducer 67 of this embodiment is a first speed reducer.

  The joint portion 28 includes a speed reducer 68 that decelerates and transmits the rotation of the motor 65 to the hand 5. The reducer 68 is a hollow reducer in which a through hole is formed at the center in the radial direction, like the reducer 38. The speed reducer 68 is configured in the same manner as the speed reducer 38, and includes an input shaft 61 to which the power of the motor 65 is input, an output shaft 62 that decelerates and outputs the power input to the input shaft 61, A case body 63 that rotatably supports the input shaft 61 and the output shaft 62 via a bearing is provided. The speed reducer 68 of this embodiment is a second speed reducer.

  Similarly to the joint portion 22, the joint portion 27 includes a magnetic fluid seal 39 that prevents air from flowing out from the connection portion between the first arm portion 25 and the second arm portion 26 to the vacuum region VR. Similar to the joint portion 23, the joint portion 28 includes a magnetic fluid seal 43 that prevents air from flowing out from the connecting portion of the second arm portion 26 and the hand 5 to the vacuum region VR.

  As shown in FIGS. 11 and 12, the upper end of a rotating shaft 69 formed in a cylindrical shape is fixed to the lower end of the input shaft 58 of the speed reducer 67. A pulley 70 is fixed to the lower end side of the rotating shaft 69. The pulley 70 is disposed inside the distal end side of the first arm portion 25. A belt 71 is stretched between the pulley 66 and the pulley 70, and the power of the motor 65 is input to the input shaft 58 via the pulleys 66 and 70 and the belt 71. A pulley 72 is fixed to the upper end side of the input shaft 58 of the speed reducer 67. The pulley 72 is disposed inside the proximal end side of the second arm portion 26. The outer diameter of the pulley 70 is smaller than the inner diameter of the opening 31e.

  The distal end side of the first arm portion 25 is fixed to the output shaft 59 of the speed reducer 67. Specifically, the distal end side of the first arm portion 25 is fixed to the output shaft 59 of the speed reducer 67 via the inner peripheral side member 41 of the magnetic fluid seal 39 and the spacer 73. The spacer 73 is formed in a substantially cylindrical shape, and is arranged so as to cover the outer peripheral side of the rotation shaft 69.

  The output shaft 59 of the speed reducer 67 is fixed to the inner peripheral side of the inner peripheral side member 41. The inner peripheral side member 41 is fixed to the upper end of the spacer 73 such that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the upper end surface of the spacer 73. . The lower end of the spacer 73 is fixed to the distal end side of the first arm portion 25 so as to contact the upper surface of the upper surface portion 31a. The spacer 73 is fixed to the distal end side of the first arm portion 25 with a screw not shown. A bearing holding member 74 is fixed to the lower end side of the spacer 73. The bearing holding member 74 is fixed to the lower end side of the spacer 73 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the lower end surface of the spacer 73. Further, a part of the bearing holding member 74 is disposed on the inner peripheral side of the opening 31e. A bearing 75 that rotatably supports the rotating shaft 69 is fixed to the bearing holding member 74. An annular seal member (not shown) is provided between the inner peripheral member 41 and the upper end of the spacer 73 and between the upper surface portion 31a and the lower end of the spacer 73 to prevent outflow of air to the vacuum region VR. ) Is arranged.

  The base end side of the second arm portion 26 is fixed to the case body 60 of the speed reducer 67. That is, the case body 60 of the speed reducer 67 is fixed to the second arm portion 26 side. The base end side of the second arm portion 26 is fixed to the case body 60 of the speed reducer 67 in the same manner as the base end side of the second arm portion 21 is fixed to the case body 60 of the speed reducer 37. That is, the base end side of the second arm portion 26 is fixed to the case body 60 of the speed reducer 67 via the case body 40 of the magnetic fluid seal 39.

  As shown in FIG. 13, a pulley 76 is fixed to the upper end side of the input shaft 61 of the speed reducer 68. The pulley 76 is disposed inside the distal end side of the second arm portion 26. A belt 77 is stretched between the pulley 72 and the pulley 76, and the motor 65 is connected to the input shaft 61 via pulleys 66, 70, 72, 76, belts 71, 77, a rotating shaft 69 and an input shaft 58. Power is input. The base 11 of the hand 5 is fixed to the output shaft 62 of the speed reducer 68. The base 11 of the hand 5 is fixed to the output shaft 62 of the speed reducer 68 in the same manner as the base 11 of the hand 4 is fixed to the output shaft 62 of the speed reducer 38. That is, the base 11 of the hand 5 is fixed to the output shaft 62 of the speed reducer 68 via the inner peripheral side member 45 of the magnetic fluid seal 43. The inner peripheral side member 45 is fixed to the base 11 of the hand 5 with a screw (not shown).

  The distal end side of the second arm portion 26 is fixed to the case body 63 of the speed reducer 68. Specifically, the distal end side of the second arm portion 26 is fixed to the case body 63 of the speed reducer 68 via the case body 44 of the magnetic fluid seal 43. That is, the case body 63 of the speed reducer 68 is fixed to the second arm portion 26 side. The case body 63 of the speed reducer 68 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the distal end side of the second arm portion 26 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the opening 34g and a part thereof contacts the lower surface of the lower surface 34b. ing. An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the lower surface portion 34b and the case body 44.

  The opening 31 f of the first arm portion 25 is closed from below by the lid member 33. The openings 34 e and 34 f of the second arm portion 26 are closed from above by the lid member 33. The opening 31 d of the first arm portion 25 and the opening 34 d of the second arm portion 26 are closed from above by the lid member 32. The lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 7.

(Configuration of cooling mechanism, configuration of temperature sensor and configuration of cover member)
As described above, the robot 1 transports the high-temperature substrate 2. Therefore, the temperature of the arms 6 and 7 rises due to radiant heat from the substrate 2, radiant heat from the wall surface of the vacuum chamber in which the robot 1 is installed, and the like. The robot 1 of this embodiment includes a cooling mechanism for cooling the inside of the arms 6 and 7 whose temperature rises. The robot 1 also suppresses the transmission of radiant heat to the temperature sensor 80 for measuring the internal temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26 and the arms 6 and 7 and the arm support portion 8. Cover members 81 to 85 are provided.

  The robot 1 according to the present embodiment includes an air pipe 87 for cooling the motor 35 and supplying cooling air to the inside of the first arm unit 20 as a cooling mechanism for cooling the inside of the arms 6 and 7, An air pipe 88 for supplying cooling air to the inside of the two-arm part 21, an air pipe 89 for cooling the motor 65 and supplying cooling air to the inside of the first arm part 25, and a second arm An air pipe 90 for supplying cooling air to the inside of the section 26 and a plurality of fans (blowers) 91 disposed inside the arms 6 and 7 are provided.

  Air piping 87-90 is piping, such as metal tubes, such as an aluminum alloy, or a fluorine tube, for example. The base ends of the air pipes 87 to 90 are connected to an electromagnetic valve (not shown) disposed inside the case body 13 of the main body 9. In this embodiment, four solenoid valves to which the respective base ends of the air pipes 87 to 90 are connected are arranged inside the case body 13, and the supply amount of cooling air is adjusted for each of the air pipes 87 to 90. It is possible to do. The four solenoid valves are connected to a compressed air supply device (not shown) disposed inside or outside the case body 13 via a predetermined pipe.

  The air pipes 87 and 88 are routed from the inside of the case body 13 toward the arm 6 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The front end side of the air pipe 87 is wound around the outer peripheral surface of the motor 35. The distal end of the air pipe 87 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 20 and is used for cooling from the air pipe 87 to the inside of the base end side of the first arm portion 20. Air is supplied. The air pipe 88 is routed around the insides of the first arm part 20 and the second arm part 21 so as to pass through the openings 15e and 31g and a through hole formed at the shaft center of the speed reducer 37. The front end of the air pipe 88 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 21, and cooling air flows from the air pipe 88 into the front end side of the second arm portion 21. Supplied.

  The air pipes 89 and 90 are routed from the inside of the case body 13 toward the arm 7 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The front end side of the air pipe 89 is wound around the outer peripheral surface of the motor 65. The front end of the air pipe 89 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 25, and is used for cooling from the air pipe 89 to the base end side inside the first arm portion 25. Air is supplied. The air pipe 90 is arranged inside the first arm portion 25 and the second arm portion 26 so as to pass through the openings 15e and 31g, the through hole formed in the inner peripheral side of the rotating shaft 69 and the shaft center of the speed reducer 67. Has been routed around. The front end of the air pipe 90 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 26, and cooling air flows from the air pipe 90 into the front end side of the second arm portion 26. Supplied.

  The temperature sensor 80 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. Inside the first arm portion 20, the temperature sensor 80 is disposed in the vicinity of the motor 35 and in the vicinity of the joint portion 22. Inside the second arm portion 21, the temperature sensor 80 is disposed in the vicinity of the joint portion 23. Inside the first arm portion 25, the temperature sensor 80 is disposed in the vicinity of the motor 65 and in the vicinity of the joint portion 27. Inside the second arm portion 26, the temperature sensor 80 is disposed in the vicinity of the joint portion 28.

  As described above, in the present embodiment, the supply amount of the cooling air can be adjusted for each of the air pipes 87 to 90, and the first arm portions 20 and 25 and the second arm portions 21 and 26 can be adjusted. Each interior can be individually cooled. In the present embodiment, the interiors of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually cooled based on the detection result of the temperature sensor 80. In other words, in the present embodiment, the first arm portions 20 and 25 and the second arm portions 25 and 2 are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80. The inside of each of the arm portions 21 and 26 is individually cooled.

  The fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. The fan 91 is arranged so as to send cooling air upward. The fan 91 of this embodiment is disposed below the lid member 32 and sends cooling air toward the plurality of fins 32 a formed on the lid member 32. Further, the fan 91 rotates or stops based on the detection result of the temperature sensor 80, for example.

  The cover members 81 to 85 are made of a material having a lower thermal conductivity than the support portion main body 15, the arm portion main bodies 31 and 34 and the lid members 16, 32 and 33. Further, the cover members 81 to 85 are made of a material having a high radiant heat reflectivity. For example, cover members 81-85 are formed of a thin stainless steel plate. The cover member 81 covers substantially the entire upper surface, lower surface and side surfaces of the first arm portion 20 except for the portion overlapping the arm support portion 8. The cover member 82 covers substantially the entire upper surface, lower surface, and side surface of the second arm portion 21. The cover member 83 covers substantially the entire upper surface, lower surface, and side surfaces of the portion of the first arm portion 25 excluding the portion overlapping the arm support portion 8. The cover member 84 covers substantially the entire upper surface, lower surface, and side surfaces of the second arm portion 26. The cover member 85 covers portions of the first arm portions 20 and 25 that overlap the arm support portion 8 and substantially the entire upper surface, lower surface, and side surfaces of the arm support portion 8.

(Main effects of this form)
As described above, in the present embodiment, the case body 60 of the speed reducer 37 is fixed to the proximal end side of the second arm portion 21 via the case body 40 of the magnetic fluid seal 39 to constitute the speed reducer 37. The members such as the input shaft 58, the output shaft 59 and the bearing, and the members such as the inner peripheral side member 41 and the bearing seal portion 42 constituting the magnetic fluid seal 39 are held by the second arm portion 21. Further, in this embodiment, the case body 63 of the speed reducer 38 is fixed at the distal end side of the second arm portion 21 via the case body 44 of the magnetic fluid seal 43, and the input shaft 61 and the output shaft constituting the speed reducer 38 62, members such as a bearing, and members such as an inner circumferential side member 45 and a bearing seal portion 46 constituting the magnetic fluid seal 43 are held by the second arm portion 21. Therefore, in this embodiment, if the screw that fixes the inner peripheral side member 41 and the first arm portion 20 and the screw that fixes the inner peripheral side member 45 and the base 11 of the hand 4 are removed and the belt 50 is removed. The speed reducers 37 and 38 and the magnetic fluid seals 39 and 43 can be removed integrally with the second arm portion 21.

  Similarly, in this embodiment, the case body 60 of the speed reducer 67 is fixed to the proximal end side of the second arm portion 26 via the case body 40 of the magnetic fluid seal 39, and the input shaft 58 constituting the speed reducer 67, The members such as the output shaft 59 and the bearing, and members such as the inner peripheral side member 41 and the bearing seal portion 42 constituting the magnetic fluid seal 39 are held by the second arm portion 26. A rotary shaft 69 is fixed to the lower end of the input shaft 58 of the speed reducer 67, and a bearing holding member 74 and a spacer 73 holding the bearing 75 are fixed to the inner peripheral side member 41. The rotary shaft 69, the spacer 73, the bearing holding member 74 and the bearing 75 are held by the second arm portion 26. Further, in this embodiment, the case body 63 of the speed reducer 68 is fixed to the distal end side of the second arm portion 26 via the case body 44 of the magnetic fluid seal 43, and the input shaft 61 and the output shaft constituting the speed reducer 68. 62, members such as a bearing, and members such as an inner circumferential side member 45 and a bearing seal portion 46 constituting the magnetic fluid seal 43 are held by the second arm portion 26. Therefore, in this embodiment, if the screw that fixes the spacer 73 and the first arm portion 25 and the screw that fixes the inner peripheral side member 45 and the base portion 11 of the hand 5 are removed and the belt 71 is removed, the speed reducer 67, 68, the magnetic fluid seals 39, 43, the rotary shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 can be removed integrally with the second arm portion 26.

  Therefore, in this embodiment, when the robot 1 is overhauled, the speed reducers 37 and 38 and the magnetic fluid seals 39 and 43 can be exchanged integrally with the second arm portion 21, and the speed reducers 67, 68, the magnetic fluid seals 39 and 43, the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 can be exchanged integrally with the second arm portion 26. That is, in this embodiment, when the robot 1 is overhauled, the second arm portions 21 and 26 arranged on the distal end side of the arms 6 and 7 with respect to the first arm portions 20 and 25 are replaced, thereby supporting the arm. The reduction gears 37, 38, 67, 68, the magnetic fluid seals 39, 43, the spacer 73, the bearing holding member 74, and the bearing 75 are exchanged without exchanging the first arm parts 20, 25 fixed to the part 8. It becomes possible. As a result, in this embodiment, the robot 1 can be easily overhauled at low cost.

  In this embodiment, a fan 91 that sends air upward is disposed inside the arms 6 and 7. Therefore, in this embodiment, when the high-temperature substrate 2 is transported, the upper surface side portions of the arms 6 and 7 can be cooled to suppress the temperature rise of the upper surface side portions of the arms 6 and 7. , 7 can be brought close to the temperature of the lower surface side portions of the arms 6, 7. Therefore, in this embodiment, it is possible to bring the amount of thermal deformation of the upper surface side portions of the arms 6 and 7 closer to the amount of thermal deformation of the lower surface side portion, and it is possible to suppress the thermal deformation of the arms 6 and 7 whose tip side is lowered. become. As a result, in this embodiment, even when the high-temperature substrate 2 is transferred, the substrate 2 can be appropriately transferred by the hands 4 and 5.

  In this embodiment, the fins 32a for heat radiation are formed on the upper surfaces inside the arms 6 and 7, and the fan 91 sends cooling air toward the fins 32a. Therefore, in this embodiment, it is possible to effectively cool the upper surface side portions of the arms 6 and 7, and it is possible to effectively suppress the temperature rise of the upper surface side portions of the arms 6 and 7.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the base end sides of the first arm portions 20 and 25 formed separately are fixed to the arm support portion 8. In addition, for example, the first arm part 20, the first arm part 25, and the arm support part 8 may be integrally formed. Further, as shown in FIG. 14, the proximal end side of the first arm portion 20 and the proximal end side of the first arm portion 25 may be connected to the main body portion 9 so as to be rotatable. In this case, the motor 35 is arranged inside the first arm unit 20, and the motor 65 is arranged inside the first arm unit 25. In the above-described form, the robot 1 includes the two arms 6 and 7. However, the robot 1 may include only one arm 6 as illustrated in FIG. In this case, the base end side of the first arm portion 20 is rotatably connected to the main body portion 9. In FIG. 14 and FIG. 15, the same reference numerals are given to configurations common to the configurations of the above-described embodiments.

  In the above-described form, the arms 6 and 7 are constituted by two arm parts, ie, the first arm parts 20 and 25 and the second arm parts 21 and 26. However, the arms 6 and 7 have three or more arm parts. You may comprise by an arm part. For example, the arms 6 and 7 may be constituted by three arm portions, that is, the first arm portions 20 and 25, the second arm portions 21 and 26, and the third arm portion. In this case, the proximal end side of the third arm portion is rotatably connected to the distal end sides of the second arm portions 21 and 26, and the hands 4 and 5 are rotatably connected to the distal end side of the third arm portion. The Further, in this case, the joint portion that rotatably connects the second arm portion 21 and 26 and the third arm portion includes the speed reducers 38 and 68, similarly to the joint portions 23 and 28. The case bodies 63 of the machines 38 and 68 are fixed to the second arm portions 21 and 26 via the case body 44 of the magnetic fluid seal 43.

  Even in this case, it is possible to replace the speed reducers 37 and 38 and the magnetic fluid seals 39 and 43 integrally with the second arm portion 21, and the speed reducers 67 and 68 and the magnetic fluid seals 39 and 43. Since the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 can be exchanged integrally with the second arm portion 26, the same effects as those described above can be obtained.

  In the embodiment described above, the robot 1 is a robot that transports the substrate 2 in a vacuum, but the robot to which the present invention is applied may be a robot that transports the substrate 2 in the atmosphere. In this case, the magnetic fluid seals 39 and 43 are not necessary. In this case, for example, the case bodies 60 of the speed reducers 37 and 67 are directly fixed to the base end sides of the second arm portions 21 and 26, and the case bodies 63 of the speed reducers 38 and 68 are directly The arm portions 21 and 26 are fixed to the tip side. Further, the output shaft 59 of the speed reducer 37 is directly fixed to the distal end side of the first arm portion 20, the output shaft 59 of the speed reducer 67 is directly fixed to the spacer 73, and the output shaft 62 of the speed reducers 38 and 68 is It is directly fixed to the base 11 of the hands 4 and 5.

  Even in this case, when the robot is overhauled, the speed reducers 37 and 38 can be exchanged integrally with the second arm portion 21, and the speed reducers 67 and 68, the rotating shaft 69, the spacer 73, the bearing holding member 74 and the bearing 75 can be exchanged integrally with the second arm portion 26. That is, when the robot 1 is overhauled, the second arm portions 21 and 26 arranged on the distal end side of the arms 6 and 7 with respect to the first arm portions 20 and 25 are replaced, so that the robot 1 is fixed to the arm support portion 8. Even without replacing the first arm portions 20 and 25, the speed reducers 37, 38, 67, and 68, the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 can be replaced. Therefore, the robot can be overhauled easily at low cost.

  In the embodiment described above, the rotating shaft 69 is fixed to the lower end of the input shaft 58 of the speed reducer 67, and the pulley 70 is fixed to the lower end side of the rotating shaft 69. In addition, for example, the pulley 70 may be fixed to the lower end side of the input shaft 58 of the speed reducer 67. In the embodiment described above, the distal end side of the first arm portion 25 is fixed to the output shaft 59 of the speed reducer 67 via the inner peripheral side member 41 and the spacer 73 of the magnetic fluid seal 39. The distal end side of the first arm portion 25 may be fixed to the shaft 59 via the inner peripheral side member 41 of the magnetic fluid seal 39. That is, in the joint portion 27, the rotating shaft 69, the spacer 73, the bearing holding member 74, and the bearing 75 may not be arranged.

  In the form described above, the robot 1 rotates the second arm unit 21 with respect to the first arm unit 20 and rotates the hand 4 with respect to the second arm unit 21 by one motor 35. ing. In addition, for example, a motor that rotates the second arm portion 21 with respect to the first arm portion 20 and a motor that rotates the hand 4 with respect to the second arm portion 21 may be provided separately. . Similarly, in the embodiment described above, the single arm 65 rotates the second arm portion 26 with respect to the first arm portion 25 and the hand 5 with respect to the second arm portion 26. However, a motor that rotates the second arm portion 26 with respect to the first arm portion 25 and a motor that rotates the hand 5 with respect to the second arm portion 26 may be provided separately.

  In the embodiment described above, the fin 32a is formed on the lid member 32, but the fin 32a may be formed on the lower surface of the upper surface portions 31a and 34a. In the embodiment described above, the fin 32 a is formed on the lid member 32, but the fin 32 a may not be formed on the lid member 32. Further, in the above-described embodiment, the transport object to be transported by the robot 1 is the organic EL display substrate 2, but the transport object to be transported by the robot 1 may be a glass substrate for a liquid crystal display. However, it may be a semiconductor wafer or the like. Moreover, in the form mentioned above, although the robot 1 is a robot for conveying a conveyance target object, the robot with which this invention is applied may be a robot used for another use.

1 Robot (industrial robot)
4, 5 hands 6, 7 arms 8 arm support portions 9 body portions 20, 25 first arm portions 21, 26 second arm portions (front end side arm portions)
22, 27 Joint (first joint)
23, 28 Joint part (second joint part)
32a Fin 37, 67 Reducer (first reducer)
38, 68 Reducer (second reducer)
39 Magnetic fluid seal (first magnetic fluid seal)
40 Case body (first seal case body)
41 Inner peripheral member (first inner peripheral member)
42 Bearing seal part (first bearing seal part)
43 Magnetic fluid seal (second magnetic fluid seal)
44 Case body (second seal case body)
45 Inner peripheral member (second inner peripheral member)
46 Bearing seal part (second bearing seal part)
58 Input shaft (first input shaft)
59 Output shaft (first output shaft)
60 Case body (first case body)
61 Input shaft (second input shaft)
62 Output shaft (second output shaft)
63 Case body (second case body)

Claims (6)

An arm having a hand, a distal arm part to which the hand is pivotably connected to the distal end side, and a first arm part to which a proximal end side of the distal arm part is pivotally coupled to the distal side; A first joint that rotatably connects the distal arm and the first arm; and a second joint that pivotally connects the hand and the distal arm.
The first joint unit includes a first input shaft to which power is input, a first output shaft that decelerates and outputs power input to the first input shaft, the first input shaft, and the first output. A first speed reducer having a first case body that rotatably supports the shaft;
The second joint unit includes a second input shaft to which power is input, a second output shaft that decelerates and outputs power input to the second input shaft, the second input shaft, and the second output. A second speed reducer having a second case body that rotatably supports the shaft;
The industrial robot according to claim 1, wherein the first case body and the second case body are fixed to the tip side arm portion side.   2. The industrial robot according to claim 1, wherein the first reduction gear and the second reduction gear are hollow reduction gears each having a through hole formed in a center thereof in a radial direction. The hand, the tip side arm part and the first arm part are arranged in a vacuum,
The tip arm portion and the first arm portion are formed in a hollow shape, and the inside of the tip arm portion and the inside of the first arm portion are at atmospheric pressure,
The first joint portion includes a first magnetic fluid seal that prevents outflow of air from the connecting portion between the distal arm portion and the first arm portion into the vacuum,
The second joint portion includes a second magnetic fluid seal that prevents outflow of air into the vacuum from a connection portion between the hand and the distal arm portion,
The first magnetic fluid seal constitutes an outer peripheral side portion of the first magnetic fluid seal and is rotatably held on an inner peripheral side of the first seal case body, and a first seal case body to which the first case body is fixed. A first inner peripheral side member to which the first output shaft is fixed, a bearing, a permanent magnet, and a magnetic fluid are disposed between the first seal case body and the first inner peripheral side member in the radial direction. A first bearing seal portion,
The second magnetic fluid seal constitutes an outer peripheral side portion of the second magnetic fluid seal, and a second seal case body to which the second case body is fixed, and is rotatably held on the inner peripheral side of the second seal case body. A second inner peripheral side member to which the second output shaft is fixed, a bearing, a permanent magnet, and a magnetic fluid, and disposed between the second seal case body and the second inner peripheral side member in the radial direction. A second bearing seal portion,
The first case body is fixed to the distal end side arm portion via the first seal case body, and the second case body is fixed to the distal end side arm portion via the second seal case body. The industrial robot according to claim 1 or 2, wherein   The two hands, the two distal arm portions, the two first arm portions, the arm support portion to which the proximal ends of the two first arm portions are fixed, and the vertical direction The industry according to any one of claims 1 to 3, further comprising a main body portion to which the arm support portion is coupled so that the arm support portion can be turned in a rotation axial direction. Robot. The hand, the tip side arm part and the first arm part are arranged in a vacuum,
The tip arm portion and the first arm portion are formed in a hollow shape, and the inside of the tip arm portion and the inside of the first arm portion are at atmospheric pressure,
The industrial robot according to any one of claims 1 to 4, wherein fins for heat dissipation are formed on upper surfaces of the distal end side arm portion and the first arm portion. A hand, an arm having a first arm part, a second arm part, and a third arm part, the hand being rotatably connected to the distal end side, and the second arm part and the first arm part are rotated. A first joint part that is movably connected; and a second joint part that rotatably connects the third arm part and the second arm part,
The proximal end side of the third arm portion is rotatably connected to the distal end side of the second arm portion,
The proximal end side of the second arm portion is rotatably connected to the distal end side of the first arm portion,
The first joint unit includes a first input shaft to which power is input, a first output shaft that decelerates and outputs power input to the first input shaft, the first input shaft, and the first output. A first speed reducer having a first case body that rotatably supports the shaft;
The second joint unit includes a second input shaft to which power is input, a second output shaft that decelerates and outputs power input to the second input shaft, the second input shaft, and the second output. A second speed reducer having a second case body that rotatably supports the shaft;
The industrial robot according to claim 1, wherein the first case body and the second case body are fixed to the second arm portion side.

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