TWI391039B - Circuit board with metal heat sink and manufacturing method thereof - Google Patents

Circuit board with metal heat sink and manufacturing method thereof Download PDF

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TWI391039B
TWI391039B TW99125263A TW99125263A TWI391039B TW I391039 B TWI391039 B TW I391039B TW 99125263 A TW99125263 A TW 99125263A TW 99125263 A TW99125263 A TW 99125263A TW I391039 B TWI391039 B TW I391039B
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circuit board
layer
metal
heat dissipation
hole
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TW99125263A
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TW201206261A (en
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Chuan Ling Hu
Yu Wei Chen
Shun Tian Lin
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Umu Technology Co Ltd
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Description

具金屬散熱層的電路板及其製造方法Circuit board with metal heat dissipation layer and manufacturing method thereof

本發明為一種具金屬散熱層的電路板及其製造方法,特別是指一種將預設貫穿孔之介電基板形成具實心銅導柱的散熱電路基板及其製造方法,可廣泛於發光二極體(LED)散熱電路基板或致冷器散熱電路基板等應用。The invention relates to a circuit board with a metal heat dissipation layer and a manufacturing method thereof, in particular to a heat dissipation circuit substrate with a solid copper substrate and a manufacturing method thereof, which can be widely used in a light-emitting diode. Applications such as body (LED) heat sink circuit boards or refrigerator heat sink circuit boards.

隨著電子產品逐漸往高性能化、高頻化、高速化與輕薄化的方向發展,在「輕、薄、短、小、多功能」的設計理念下,各種電子系統相關的主要零件如中央處理器(CPU),晶片組(Chipset)等均朝向高速度、多功能、高功率、體積小的方向進行研究與發展。因此,擁有如此高密度之封裝條件下,當然也會使得零組件因電能消耗所產生的熱量不斷的提高,由於電子元件的穩定度、可靠度及壽命會隨溫度的升高而衰減甚至損毀,溫度越低故障率越低,所以良好的散熱技術也成為電子元件性能提升的關鍵。With the development of high-performance, high-frequency, high-speed, and thin-and-light electronic products, under the design concept of "light, thin, short, small, and versatile", the main components related to various electronic systems, such as the central Processors (CPUs), chipsets, etc. are all researching and developing toward high speed, multi-function, high power, and small volume. Therefore, under such a high-density packaging condition, of course, the heat generated by the power consumption of the components is continuously increased, and the stability, reliability, and life of the electronic components may be attenuated or even deteriorated as the temperature increases. The lower the temperature, the lower the failure rate, so good heat dissipation technology is also the key to the performance improvement of electronic components.

目前電路板所應用的層面及領域相當廣闊,而現今電路板為因應高功率及高熱能之電子元件,皆致力尋求在電路板散熱方面提昇的方案,以提供具高散熱效率的散熱電路板。At present, the application level and field of the circuit board are quite broad. Today, the circuit board is an electronic component that responds to high power and high thermal energy, and strives to improve the heat dissipation of the circuit board to provide a heat dissipation circuit board with high heat dissipation efficiency.

在傳統電路板的運用上,由於所搭載的電子元件數量少及消耗功率低,因此電子元件所產生的熱能大部分都可藉由金屬銅層傳導出來,再直接輻射散逸至空氣環境中。然而現今電路板上所搭載之電子元件功率愈來愈高且數量增多的情況下,隨著電流量增大,所消耗的電功率增加,因而產生電能消耗轉換廢熱過高的問題,利用電子元件本身的導熱途徑進行廢熱排除的方式已無法將大部分熱能散出。In the traditional circuit board application, due to the small number of electronic components and low power consumption, most of the thermal energy generated by the electronic components can be conducted through the metal copper layer and directly radiated into the air environment. However, in the case where the power of electronic components mounted on the circuit board is increasing and the number is increasing, as the amount of current increases, the electric power consumed increases, thereby causing a problem that the power consumption is excessively high, and the electronic component itself is utilized. The heat conduction path for waste heat removal has not been able to dissipate most of the heat.

由於過熱的工作溫度將會導致電子元件物理特性改變,使電子元件無法達到預定的工作效能,恐有燒毀及縮短產品使用壽命之虞。Since the working temperature of overheating will cause the physical characteristics of the electronic components to change, the electronic components cannot achieve the predetermined working efficiency, which may result in burning and shortening the service life of the product.

運用多層電路板是提高電子元件和線路密度的良好解決方案,一般的多層電路板結構與製程,通常是以平面狀的絕緣介電層基板作為基底,藉由一高溫加壓膠合製程,將複數個電路層和黏著性絕緣層設置於基底的單面或雙面而加以積層化,最後經加工處理完成多層印刷電路板的製作。The use of multi-layer circuit boards is a good solution to improve the density of electronic components and circuits. The general multilayer circuit board structure and process are usually based on a planar insulating dielectric substrate, which is a high-temperature pressure bonding process. The circuit layer and the adhesive insulating layer are disposed on one or both sides of the substrate to be laminated, and finally processed to complete the fabrication of the multilayer printed circuit board.

但為了提高元件和線路密度,也相對衍生出散熱效率不佳的問題,尤其傳統印刷電路板是採用玻璃纖維混合樹脂作為黏著性絕緣層的材料,其散熱係數極低約為0.36 W/mK,因導熱性質不佳而導致垂直方向的導熱效果大受限制,無法有效率地將元件所累積的熱能經由電路板傳導至空氣環境中,而使得元件的內部溫度過高造成效能降低,甚至會減少元件的壽命,此情形在裝載高功率電子元件的多層電路板更為嚴重。However, in order to improve the density of components and lines, the problem of poor heat dissipation efficiency is also relatively derived. In particular, the conventional printed circuit board uses a glass fiber hybrid resin as the material of the adhesive insulating layer, and the heat dissipation coefficient is extremely low at about 0.36 W/mK. Due to the poor thermal conductivity, the vertical heat conduction effect is greatly limited, and the heat energy accumulated by the components cannot be efficiently conducted to the air environment through the circuit board, so that the internal temperature of the components is too high, thereby reducing the performance and even reducing the performance. The life of the component, which is more serious in multi-layer boards loaded with high-power electronic components.

在封裝設計的發展趨勢中,只靠元件的導熱途徑(電極金屬導線、導通孔)已經無法迅速導出足夠的熱能至空氣環境中,導致元件溫度過高且熱量不斷累積於元件內部與電路板接觸面上,故必須藉由電路板的熱傳導設計來加強散熱功能,並且能夠導出熱能至整體系統電路板中,因而特別發展出以樹脂混合氧化鋁材料的絕緣導熱膠作為金屬電路層的黏著層的作法,這種絕緣導熱膠的散熱係數甚低約為0.8~1.3 W/mK,僅是傳統印刷電路板2~4倍,故所能提升的垂直導熱及散熱效率有限,亦相對提高了電路板的製造成本,並無其他任何大幅度增加垂直熱傳導及載流的功效,對於電路板要求散熱及載流能力日益升高的情況下,傳統電路板已有不敷使用的情形,有鑑於此,傳統電路板結構及製造方法實有創新改良的必要。In the development trend of package design, only the heat conduction path of the component (electrode metal wire, via hole) can not quickly derive enough thermal energy into the air environment, resulting in high component temperature and heat accumulation in the component inside the board. On the surface, the heat dissipation function of the circuit board must be used to enhance the heat dissipation function, and the thermal energy can be derived into the overall system circuit board. Therefore, the insulating thermal conductive adhesive of the resin mixed alumina material is specially developed as the adhesive layer of the metal circuit layer. In practice, the thermal conductivity of the insulating thermal conductive adhesive is very low, about 0.8-1.3 W/mK, which is only 2 to 4 times that of the conventional printed circuit board. Therefore, the vertical heat conduction and heat dissipation efficiency can be improved, and the circuit board is relatively improved. The manufacturing cost has no other effect of greatly increasing the vertical heat conduction and current carrying. In the case where the circuit board requires heat dissipation and current carrying capacity is increasing, the conventional circuit board is not suitable for use. Traditional circuit board structures and manufacturing methods are in need of innovation and improvement.

本發明之主要目的,旨在提供一種具金屬散熱層的電路板及其製造方法,利用電鑄製程將銅金屬沉積於介電基板的貫穿孔內部形成實心銅導熱柱,體積較傳統介電基板於鍍通孔所形成的導熱薄壁更加厚實,因此,具有較佳的熱傳導功效,大幅提升介電基板垂直方向的熱傳導及載流的能力。The main object of the present invention is to provide a circuit board with a metal heat dissipation layer and a manufacturing method thereof, wherein a copper metal is deposited on a through hole of a dielectric substrate by an electroforming process to form a solid copper heat conduction column, which is larger than a conventional dielectric substrate. The thin conductive wall formed by the plated through holes is thicker, so that it has better heat transfer efficiency and greatly improves the heat conduction and current carrying capacity of the dielectric substrate in the vertical direction.

為達上揭目的,本發明具金屬散熱層的電路板製造方法包含以下步驟:選定一預設的介電基板;於介電基板上進行貫穿孔處理;利用電鑄製程將銅金屬沉積填實於貫穿孔內部形成一實心銅導熱柱,並增厚介電基板表面形成一銅金屬增厚層;利用壓膜(抗蝕刻乾膜)、曝光顯影及蝕刻製程形成銅金屬增厚層的線路圖案;將銅金屬增厚層上的抗蝕刻乾膜剝除;以及電鍍其他抗氧化金屬於銅金屬增厚層表面形成一金屬防護層。In order to achieve the above, the method for manufacturing a circuit board with a metal heat dissipation layer comprises the steps of: selecting a predetermined dielectric substrate; performing through-hole processing on the dielectric substrate; and depositing copper metal deposition by an electroforming process Forming a solid copper heat conducting column inside the through hole, and thickening the surface of the dielectric substrate to form a copper metal thickening layer; forming a circuit pattern of the copper metal thickening layer by using a film (anti-etching dry film), an exposure developing process, and an etching process Stripping the anti-etching dry film on the copper metal thickening layer; and plating other anti-oxidation metals to form a metal protective layer on the surface of the copper metal thickening layer.

於一較佳實施例中,上述介電基板於貫穿孔處理之前,利用網印燒結製程或濺鍍製程於介電基板表面形成一薄膜銅金屬層;或上述介電基板於貫穿孔處理之後,利用濺鍍製程形成一鎳/銅金屬鍍通孔以及表面鎳/銅金屬層,上述貫穿孔處理可設為超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法。In a preferred embodiment, the dielectric substrate is formed on the surface of the dielectric substrate by a screen printing process or a sputtering process to form a thin film copper metal layer before the through hole processing; or the dielectric substrate is processed through the through hole. A nickel/copper metal plated through hole and a surface nickel/copper metal layer are formed by a sputtering process, and the through hole processing can be performed as ultrasonic processing, electron beam processing, laser processing, oil punching, conventional drilling or plastic One of the processing methods for hole forming.

上述介電基板可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種,其中,陶瓷基板可選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料;其中,印刷電路基板可選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料;其中,工程塑膠基板可選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。本發明金屬防護層是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。此外,本發明介電基板表面的銅金屬增厚層及金屬防護層係設為雙面電路基板結構。The dielectric substrate may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or other composite substrate, wherein the ceramic substrate may be selected from the group consisting of alumina, aluminum nitride, tantalum carbide, cerium oxide, zinc oxide or oxidation. One of the ceramic materials of the crucible; wherein the printed circuit substrate may be selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, polytetrafluoroethylene (PTFE) or BT/epoxy; Among them, the engineering plastic substrate can be selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, which are made by plastic molding methods. The metal protective layer of the present invention is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer. Further, the copper metal thickening layer and the metal protective layer on the surface of the dielectric substrate of the present invention are a double-sided circuit substrate structure.

本發明另揭露了一種具金屬散熱層的電路板,其結構包含:一介電基板,具有複數個貫穿基板上、下端的貫穿孔;一銅金屬增厚層,佈設於上述介電基板表面形成一蝕刻成型的線路圖案,並且填實上述介電基板的貫穿孔內部形成一實心銅導熱柱;以及一金屬防護層,佈設於上述已具有蝕刻線路圖案的銅金屬增厚層表面。The invention further discloses a circuit board with a metal heat dissipation layer, the structure comprising: a dielectric substrate having a plurality of through holes penetrating the upper and lower ends of the substrate; a copper metal thickening layer disposed on the surface of the dielectric substrate An etching circuit pattern is formed, and a solid copper heat conducting column is formed inside the through hole of the dielectric substrate; and a metal protective layer is disposed on the surface of the copper metal thickening layer having the etching line pattern.

上述介電基板可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種,其中,上述陶瓷基板可選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料;上述印刷電路基板可選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料;上述工程塑膠基板可選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。The dielectric substrate may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or another composite substrate, wherein the ceramic substrate may be selected from the group consisting of aluminum oxide, aluminum nitride, tantalum carbide, cerium oxide, zinc oxide or One of the ceramic materials of cerium oxide; the above printed circuit board may be selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, polytetrafluoroethylene (PTFE) or BT/epoxy; The above engineering plastic substrate may be selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, and is made by a plastic molding method.

而上述介電基板與銅金屬增厚層之間進一步設有一鎳/銅金屬層,使上述貫穿孔與銅金屬增厚層之間形成一鎳/銅金屬鍍通孔,而上述貫穿孔設為面積尺寸大於0.01mm2的圓孔、方孔或其他幾何形狀貫穿孔的其中一種,該貫穿孔係利用超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法所形成。此外,上述金屬防護層是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。Further, a nickel/copper metal layer is further disposed between the dielectric substrate and the copper metal thickening layer to form a nickel/copper metal plated through hole between the through hole and the copper metal thickening layer, and the through hole is set to One of a circular hole, a square hole or other geometric through hole having an area size larger than 0.01 mm2, which is processed by ultrasonic machining, electron beam processing, laser processing, oil punching, conventional drilling or plastic hole forming. One of the processing methods is formed. Further, the metal protective layer is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer.

本發明的特點係將上述介電基板進行複數個貫穿孔處理,並利用電鑄製程將銅金屬沉積於介電基板上的貫穿孔內部形成一實心銅導熱柱,此導熱柱相較於傳統基板上鍍通孔所形成的導熱金屬銅薄壁體積,實屬於較厚的結構,具有較佳的熱傳導功效,大幅提升介電基板垂直方向的熱傳導及載流的能力。The invention is characterized in that the dielectric substrate is processed by a plurality of through holes, and a solid copper heat conducting column is formed inside the through hole deposited on the dielectric substrate by an electroforming process, and the heat conducting column is compared with the conventional substrate. The thin wall volume of the thermally conductive metal formed by the plated through holes is a thicker structure, has better heat conduction effect, and greatly improves the heat conduction and current carrying capacity of the dielectric substrate in the vertical direction.

茲為便於更進一步對本發明之構造、使用及其特徵有更深一層明確、詳實的認識與瞭解,爰舉出較佳實施例,配合圖式詳細說明如下:首先,請參閱第1圖至第2圖所示的第一較佳實施例,本發明具金屬散熱層的電路板製造方法包含以下步驟:In order to facilitate further understanding and understanding of the structure, use and features of the present invention, the preferred embodiments are described in detail with reference to the drawings as follows: First, please refer to FIG. 1 to FIG. In the first preferred embodiment shown in the drawing, the method for manufacturing a circuit board with a metal heat dissipation layer of the present invention comprises the following steps:

(A) 選定一介電基板20。(A) A dielectric substrate 20 is selected.

上述介電基板20可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種;其中,上述陶瓷基板可選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料;上述印刷電路基板可選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料;上述工程塑膠基板可選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。但此一說明僅用為方便舉例並非加以限制,此即表示上述介電基板20亦可選定為其他不同的基板材料。The dielectric substrate 20 may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or another composite substrate; wherein the ceramic substrate may be selected from the group consisting of aluminum oxide, aluminum nitride, tantalum carbide, hafnium oxide, and zinc oxide. Or one of ceramic materials of cerium oxide; the above printed circuit board may be selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, polytetrafluoroethylene (PTFE) or BT/epoxy resin. The above engineering plastic substrate may be selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, which are made by plastic molding methods. However, this description is for convenience only and is not limited. This means that the dielectric substrate 20 can also be selected as other different substrate materials.

(B) 於介電基板20上進行貫穿孔21處理。(B) The through hole 21 is processed on the dielectric substrate 20.

上述貫穿孔處理可設為超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法。The above-mentioned through hole processing can be set as one of processing methods of ultrasonic processing, electron beam processing, laser processing, oil punching, conventional drilling or plastic hole forming.

(C) 利用濺鍍製程於介電基板20表面及貫穿孔21孔壁,形成一鎳/銅金屬鍍通孔22及表面鎳/銅金屬層23。(C) A nickel/copper metal plated through hole 22 and a surface nickel/copper metal layer 23 are formed on the surface of the dielectric substrate 20 and the hole wall of the through hole 21 by a sputtering process.

所謂濺鍍製程是利用電漿所產生的離子,藉著離子對被濺鍍物電極的轟擊,使電漿的氣相內具有被鍍物的原子,然後產生沉積金屬鍍膜。The so-called sputtering process uses ions generated by the plasma to bombard the electrode to be sputtered by ions, so that the atoms in the gas phase of the plasma have atoms to be plated, and then a deposited metal plating film is produced.

(D) 利用電鑄製程將銅金屬沉積填實於上述鎳/銅金屬鍍通孔22內部形成一實心銅導熱柱28,並增厚介電基板20的表面形成一銅金屬增厚層24。(D) A copper metal deposition is filled in the nickel/copper metal plated through hole 22 to form a solid copper heat conducting column 28 by an electroforming process, and a surface of the dielectric substrate 20 is thickened to form a copper metal thickening layer 24.

所謂電鑄製程是一種電鍍沉積的過程,藉由外界提供的電能,使含有金屬離子及其他添加物的混合溶液,在陰極或陽極表面進行電化學的氧化還原反應,將想要產生的金屬沉積在原型件表面上。The so-called electroforming process is a process of electroplating deposition. The external solution containing metal ions and other additives is subjected to electrochemical redox reaction on the surface of the cathode or anode by the externally supplied electric energy to deposit the desired metal. On the surface of the prototype.

(E) 利用壓膜(抗蝕刻乾膜)、曝光顯影及蝕刻製程30形成銅金屬增厚層24的線路圖案。(E) A wiring pattern of the copper metal thickening layer 24 is formed by a film (anti-etching dry film), an exposure developing process, and an etching process 30.

所謂壓膜製程是在介電基板20上欲形成線路圖案的銅金屬增厚層24表面黏貼一對紫外線反應的聚合性樹脂的乾膜31(Dry Film),其主要用在聚合後保護銅金屬增厚層24的線路圖案不會被蝕刻掉。The film forming process is a dry film 31 (Dry Film) in which a pair of ultraviolet-ray-reactive polymerizable resins are adhered on the surface of the copper metal thickening layer 24 on which the wiring pattern is to be formed on the dielectric substrate 20, and is mainly used for protecting copper metal after polymerization. The line pattern of thickened layer 24 is not etched away.

曝光顯影製程中的曝光部分,是將線路圖案製成正版的光罩後,先行定位及平貼於貼好乾膜31的銅金屬增厚層24上,再經曝光機進行抽真空、壓板及紫外線照射而完成。受到紫外線的照射的乾膜31將產生聚合作用,而乾膜31上受到光罩阻擋無法由紫外線透射的線路圖案,將無法產生聚合作用。The exposed part in the exposure and development process is that after the circuit pattern is made into a genuine mask, it is first positioned and flattened on the copper metal thickening layer 24 to which the dry film 31 is attached, and then vacuumed and pressed by the exposure machine. Completed by ultraviolet radiation. The dry film 31 which is irradiated with ultraviolet rays will cause polymerization, and the dry film 31 is blocked by the mask to be blocked by ultraviolet rays, and polymerization will not occur.

而曝光顯影製程中的顯影部分,則是利用顯影液將未產生聚合的乾膜31部分去除,而以物理及化學剝除方式將需要保留的線路圖案顯現出來,以此製程步驟所構成之線路圖案,具有細直平整之特性。In the developing part of the exposure and development process, the dry film 31 which is not polymerized is partially removed by the developer, and the line pattern to be retained is visually revealed by physical and chemical stripping, and the circuit formed by the process step is formed. The pattern has the characteristics of being straight and flat.

所謂蝕刻製程30是以一蝕刻藥液來進行蝕刻,將介電基板20表面未具有乾膜31阻擋的銅金屬增厚層24溶蝕去除。The etching process 30 is etched by an etching solution to dissolve and remove the copper metal thickening layer 24 having no dry film 31 on the surface of the dielectric substrate 20.

(F) 將銅金屬增厚層24上的抗蝕刻乾膜31剝除。(F) The anti-etching dry film 31 on the copper metal thickening layer 24 is stripped.

(G) 電鍍其他抗氧化金屬於銅金屬增厚層24表面形成一金屬防護層25。(G) Electroplating of other oxidation resistant metal forms a metal protective layer 25 on the surface of the copper metal thickening layer 24.

上述金屬防護層25是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。The metal protective layer 25 is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer.

由前揭步驟(A)~步驟(G)即可產生本發明具有金屬散熱層的電路板。The circuit board having the metal heat dissipation layer of the present invention can be produced by the steps (A) to (G).

請參閱第1圖至第2圖所示,本發明電路板結構設有一具有複數個貫穿孔的介電基板20,上述貫穿孔21係用以貫穿介電基板20的上、下端,並於上述介電基板20表面及貫穿孔21孔壁,沉積形成一鎳/銅金屬層23及一鎳/銅金屬鍍通孔22;上述鎳/銅金屬層23表面設有一銅金屬增厚層24,用以沉積填實於鎳/銅金屬鍍通孔22內部形成一實心銅導熱柱28;上述銅金屬增厚層24具有一蝕刻成型的線路圖案,而對應上述銅金屬增厚層24的蝕刻線路圖案表面佈設一金屬防護層25。Referring to FIG. 1 to FIG. 2, the circuit board structure of the present invention is provided with a dielectric substrate 20 having a plurality of through holes 21 for penetrating through the upper and lower ends of the dielectric substrate 20, and A nickel/copper metal layer 23 and a nickel/copper metal plated through hole 22 are deposited on the surface of the dielectric substrate 20 and the through hole 21 hole wall; a copper metal thickening layer 24 is disposed on the surface of the nickel/copper metal layer 23, A solid copper heat conducting column 28 is formed by depositing a nickel/copper metal plated through hole 22; the copper metal thickening layer 24 has an etched line pattern and an etched line pattern corresponding to the copper metal thickening layer 24. A metal protective layer 25 is disposed on the surface.

上述介電基板20可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種;其中,上述陶瓷基板可選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料;上述印刷電路基板可選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料;而上述工程塑膠基板可選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。而上述金屬防護層25是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。The dielectric substrate 20 may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or another composite substrate; wherein the ceramic substrate may be selected from the group consisting of aluminum oxide, aluminum nitride, tantalum carbide, hafnium oxide, and zinc oxide. Or one of ceramic materials of cerium oxide; the above printed circuit board may be selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, polytetrafluoroethylene (PTFE) or BT/epoxy resin. The above engineering plastic substrate may be selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, and is made by a plastic molding method. The metal protective layer 25 is composed of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer.

於此第一較佳實施例中,上述貫穿孔21設為面積尺寸大於0.012mm的圓孔、方孔或其他幾何形狀貫穿孔的其中一種,該貫穿孔21係利用超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法所形成。In the first preferred embodiment, the through hole 21 is one of a circular hole, a square hole or another geometric through hole having an area size larger than 0.012 mm, and the through hole 21 is processed by ultrasonic processing and electron beam processing. One of the processing methods of laser processing, hydraulic punching, conventional drilling or plastic hole forming.

再來,請參閱第3圖至第4圖所示的第二較佳實施例,本發明具金屬散熱層的電路板製造方法包含以下步驟:Referring to the second preferred embodiment shown in FIGS. 3 to 4, the method for manufacturing a circuit board with a metal heat dissipation layer of the present invention comprises the following steps:

(A) 選定一介電基板20a。(A) A dielectric substrate 20a is selected.

上述介電基板20a可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種。The dielectric substrate 20a may be one of a ceramic substrate, a printed circuit board, an engineering plastic substrate, or another composite substrate.

(B) 利用網印燒結製程或濺鍍製程形成介電基板20a表面之薄膜銅金屬層26a。(B) The thin film copper metal layer 26a on the surface of the dielectric substrate 20a is formed by a screen printing process or a sputtering process.

所謂網印燒結是將粉末材料於印刷沉積成形後加熱,使結合於底材表面形成薄膜層之過程。The so-called screen printing sintering is a process in which a powder material is heated after printing deposition to form a film layer bonded to the surface of the substrate.

(C) 於介電基板20a上進行貫穿孔21a處理。(C) The through hole 21a is processed on the dielectric substrate 20a.

(D) 利用電鑄製程將銅金屬沉積填實於貫穿孔21a內部形成一實心銅導熱柱28a,並增厚介電基板20a表面形成一銅金屬增厚層24a。(D) A solid copper heat transfer column 28a is formed by depositing a copper metal deposit inside the through hole 21a by an electroforming process, and a copper metal thickening layer 24a is formed on the surface of the dielectric substrate 20a.

(E) 利用壓膜(抗蝕刻乾膜)、曝光顯影及蝕刻製程30a形成銅金屬增厚層24a的線路圖案。(E) A wiring pattern of the copper metal thickening layer 24a is formed by a film (anti-etching dry film), an exposure developing process, and an etching process 30a.

(F) 將銅金屬增厚層24a上的抗蝕刻乾膜31a剝除。(F) The anti-etching dry film 31a on the copper metal thickening layer 24a is peeled off.

(G) 電鍍其他抗氧化金屬於銅金屬增厚層24a表面形成一金屬防護層25a。(G) Electroplating of other oxidation resistant metal forms a metal protective layer 25a on the surface of the copper metal thickening layer 24a.

上述金屬防護層25a是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。The metal protective layer 25a is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer.

於此第二較佳實施例中,上述電鑄製程、壓膜、曝光顯影以及蝕刻製程30a皆與前述第一較佳實施例相同。同樣地,上述介電基板20a可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種亦與前述第一較佳實施例相同,在此不加以贅述。In the second preferred embodiment, the electroforming process, the lamination, the exposure development, and the etching process 30a are the same as the first preferred embodiment. Similarly, one of the ceramic substrate 20a, the printed circuit board, the engineering plastic substrate, or other composite substrate may be the same as the first preferred embodiment, and will not be described herein.

而上述貫穿孔21a設為面積尺寸大於0.01mm2的圓孔、方孔或其他幾何形狀貫穿孔的其中一種,該貫穿孔21a係利用超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法所形成。The through hole 21a is one of a circular hole, a square hole or another geometric through hole having an area size larger than 0.01 mm2, and the through hole 21a is ultrasonically machined, electron beam processed, laser processed, and oil punched. One of the processing methods of conventional drilling or plastic hole forming.

此外,第二較佳實施例的製造方法所構成的電路板結構與第一較佳實施例的電路板結構相同,基於同樣理由這邊不加以贅述。In addition, the circuit board structure formed by the manufacturing method of the second preferred embodiment is the same as the circuit board structure of the first preferred embodiment, and will not be described again for the same reason.

再來,請參閱第5圖至第6圖所示的第三較佳實施例,本發明具金屬散熱層的電路板製造方法包含以下步驟:Referring to the third preferred embodiment shown in FIGS. 5 to 6 , the method for manufacturing a circuit board with a metal heat dissipation layer of the present invention comprises the following steps:

(A) 選定一印刷電路基板27,該印刷電路基板27表面已具有一薄膜銅金屬層26b。(A) A printed circuit board 27 having a thin film copper metal layer 26b on its surface is selected.

(B) 於印刷電路基板27上進行貫穿孔21b處理。(B) The through hole 21b is processed on the printed circuit board 27.

(C) 利用電鑄製程將銅金屬沉積填實於貫穿孔21b內部形成一實心銅導熱柱28b,並增厚印刷電路基板27表面形成一銅金屬增厚層24b。(C) A copper metal deposition is filled in the through hole 21b to form a solid copper heat transfer column 28b by an electroforming process, and a surface of the printed circuit board 27 is thickened to form a copper metal thickening layer 24b.

(D) 利用壓膜(抗蝕刻乾膜)、曝光顯影及蝕刻製程30b形成銅金屬增厚層24b的線路圖案。(D) A wiring pattern of the copper metal thickening layer 24b is formed by a film (anti-etching dry film), an exposure developing process, and an etching process 30b.

(E) 將銅金屬增厚層24b上的抗蝕刻乾膜31b剝除。(E) The anti-etching dry film 31b on the copper metal thickening layer 24b is peeled off.

(F) 電鍍其他抗氧化金屬於銅金屬增厚層24b表面形成一金屬防護層25b。(F) Electroplating of other anti-oxidation metal forms a metal protective layer 25b on the surface of the copper metal thickening layer 24b.

請參閱第5圖至第6圖所示,於此一實施例中,本發明電路板結構設有一具有複數個貫穿孔21b的印刷電路基板27,上述貫穿孔21b用以貫穿印刷電路基板27表面上、下端的薄膜銅金屬層26b,並於印刷電路基板27表面佈設一銅金屬增厚層24b,用以填實上述貫穿孔21b內部形成一實心銅導熱柱28b,上述銅金屬增厚層24b具有一蝕刻成型的線路圖案,而對應上述銅金屬增厚層24b的蝕刻線路圖案表面佈設一金屬防護層25b。其中,上述貫穿孔21b設為面積尺寸大於0.012mm的圓孔、方孔或其他幾何形狀貫穿孔的其中一種。Referring to FIG. 5 to FIG. 6 , in the embodiment, the circuit board structure of the present invention is provided with a printed circuit board 27 having a plurality of through holes 21 b for penetrating the surface of the printed circuit board 27 . a thin copper metal layer 26b is disposed on the upper and lower ends, and a copper metal thickening layer 24b is disposed on the surface of the printed circuit board 27 for filling a solid copper heat conducting column 28b formed in the through hole 21b. The copper metal thickening layer 24b There is an etched line pattern, and a metal shield layer 25b is disposed on the surface of the etched line pattern corresponding to the copper metal thickening layer 24b. The through hole 21b is one of a circular hole, a square hole or another geometric through hole having an area size larger than 0.012 mm.

於此第三較佳實施例中,上述金屬防護層25b同樣是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種所構成。In the third preferred embodiment, the metal protective layer 25b is also composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer.

由前揭三個製造方法可知,請參閱第7圖所示,本發明金屬散熱層的電路板製造方法主要包含:選定一預設進行貫穿孔處理的介電基板;利用電鑄製程將銅金屬沉積填實於貫穿孔內部形成一實心銅導熱柱,並增厚介電基板表面形成一銅金屬增厚層;再利用壓膜(抗蝕刻乾膜)、曝光顯影及蝕刻製程形成銅金屬增厚層的線路圖案;將銅金屬增厚層上的抗蝕刻乾膜剝除;以及電鍍其他抗氧化金屬於銅增厚層表面形成一金屬防護層。It can be seen from the foregoing three manufacturing methods that, as shown in FIG. 7, the circuit board manufacturing method of the metal heat dissipation layer of the present invention mainly comprises: selecting a dielectric substrate which is preset for through-hole processing; and using a electroforming process to form a copper metal Depositing and filling a solid copper heat conducting column inside the through hole, and thickening the surface of the dielectric substrate to form a copper metal thickening layer; and then forming a copper metal thickening by using a lamination film (anti-etching dry film), exposure development and etching process The wiring pattern of the layer; stripping the anti-etching dry film on the copper metal thickening layer; and plating other anti-oxidation metal to form a metal protective layer on the surface of the copper thickening layer.

上述介電基板可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種,上述介電基板於貫穿孔處理之前,亦可利用網印燒結製程或濺鍍製程於介電基板表面形成一薄膜銅金屬層;或介電基板於貫穿孔處理之後,進一步利用濺鍍程序形成一鎳/銅金屬鍍通孔以及表面鎳/銅金屬層,其中,上述貫穿孔設為面積尺寸大於0.012mm的圓孔、方孔或其他幾何形狀貫穿孔的其中一種,上述貫穿孔處理係利用超音波加工、電子束加工、雷射加工油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法所形成。The dielectric substrate may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or another composite substrate. The dielectric substrate may also be subjected to a screen printing process or a sputtering process for dielectric prior to the through hole processing. Forming a thin film copper metal layer on the surface of the substrate; or after the dielectric substrate is processed in the through hole, further forming a nickel/copper metal plated through hole and a surface nickel/copper metal layer by using a sputtering process, wherein the through hole is set to an area size One of a circular hole, a square hole or other geometric through hole larger than 0.012 mm, which is processed by ultrasonic machining, electron beam processing, laser processing oil punching, conventional drilling or plastic hole forming. A processing method is formed.

本發明另可由前揭三個電路板結構得知,本發明具金屬散熱層的電路板主要包含:一具有複數個貫穿孔的介電基板,上述貫穿孔用以貫穿介電基板的上、下端;一佈設於介電基板表面的銅金屬增厚層,用以填實上述介電基板的貫穿孔形成實心銅導熱柱,上述銅金屬增厚層具有一蝕刻成型的線路圖案;以及佈設一金屬防護層於上述已具有蝕刻線路圖案銅金屬增厚層的表面。The present invention can be further disclosed in the foregoing three circuit board structures. The circuit board with a metal heat dissipation layer of the present invention mainly comprises: a dielectric substrate having a plurality of through holes for penetrating the upper and lower ends of the dielectric substrate; a copper metal thickening layer disposed on the surface of the dielectric substrate for filling a through hole of the dielectric substrate to form a solid copper heat conducting column, wherein the copper metal thickening layer has an etched line pattern; and a metal is disposed The protective layer is on the surface of the above-described copper metal thickening layer having an etched wiring pattern.

其中,上述介電基板可設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種;其中,印刷電路基板可選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料;其中,工程塑膠基板可選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。The dielectric substrate may be one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or another composite substrate; wherein the printed circuit substrate may be selected from the group consisting of resin, glass fiber/epoxy resin, and polyamidamine ( Polyimide), one of polytetrafluoroethylene (PTFE) or BT/epoxy resin; wherein the engineering plastic substrate can be selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, which are plastic molding methods. production.

又上述介電基板與銅金屬增厚層之間可進一步設有一鎳/銅金屬層,使上述貫穿孔與銅金屬增厚層之間形成一鎳/銅金屬鍍通孔。本發明具金屬散熱層的電路板表面佈設之銅金屬增厚層及金屬防護層係為一雙面電路基板結構。Further, a nickel/copper metal layer may be further disposed between the dielectric substrate and the copper metal thickening layer to form a nickel/copper metal plated through hole between the through hole and the copper metal thickening layer. The copper metal thickening layer and the metal protective layer disposed on the surface of the circuit board with the metal heat dissipation layer of the present invention are a double-sided circuit substrate structure.

最後,請參閱第8圖及第9圖所示,分別為本發明應用於發熱電子元件散熱基板之正面組合示意圖及側面組合示意圖,係利用前述的製造方法於介電基板20c表面及貫穿孔內部形成一實心銅導熱柱28c及具有線路圖案的銅金屬增厚層24c,並佈設一金屬防護層25c於銅金屬增厚層24c表面,將發熱電子元件40正面以電極導線41連接以及背面黏著於上述銅金屬增厚層24c表面,進一步構成一具有提昇熱傳導及載流能力的金屬散熱電路板,本發明具金屬散熱層的電路板相較於傳統散熱基板的鍍通孔金屬銅薄壁的導熱效果而言,更具有較佳的熱傳導功效,有效提升介電基板垂直方向的熱傳導及載流的能力。Finally, please refer to FIG. 8 and FIG. 9 , which are respectively a front view combination diagram and a side view combination diagram of the heat dissipation substrate for a heat-generating electronic component according to the present invention, which are formed on the surface of the dielectric substrate 20 c and the inside of the through-hole by the above-mentioned manufacturing method. Forming a solid copper heat conducting column 28c and a copper metal thickening layer 24c having a line pattern, and disposing a metal protective layer 25c on the surface of the copper metal thickening layer 24c, connecting the front surface of the heat generating electronic component 40 with the electrode wires 41 and the back surface of the heat generating electronic component 40 The surface of the copper metal thickening layer 24c further comprises a metal heat dissipating circuit board having the capability of improving heat conduction and current carrying capacity, and the heat conducting layer of the circuit board with the metal heat dissipating layer of the present invention is thinner than the thin metal wall of the plated through hole metal copper of the conventional heat dissipating substrate. In effect, it has better heat transfer efficiency and effectively improves the heat conduction and current carrying capacity of the dielectric substrate in the vertical direction.

綜上所述,本發明具金屬散熱層的電路板及其製造方法可將陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板等不同的介電基板,貫穿為複數個貫穿孔,並利用電鑄製程將銅金屬沉積填實於貫穿孔內部形成一實心銅導熱柱,此金屬銅導熱柱相較於傳統基板上鍍通孔所形成的導熱金屬銅薄壁體積,實屬於較厚的結構,具有較佳的熱傳導功效,大幅提升介電基板垂直方向的熱傳導及載流的能力。In summary, the circuit board with a metal heat dissipation layer of the present invention and the manufacturing method thereof can penetrate different dielectric substrates such as a ceramic substrate, a printed circuit substrate, an engineering plastic substrate or other composite material substrate into a plurality of through holes, and An electroforming process is used to deposit a copper metal deposit inside the through hole to form a solid copper heat conducting column. The metal copper heat conducting column is thicker than the thin metal wall of the heat conducting metal formed by the plated through hole on the conventional substrate. The structure has better heat conduction effect and greatly improves the heat conduction and current carrying capacity of the dielectric substrate in the vertical direction.

以上所舉實施例,僅用為方便說明本發明並非加以限制,在不離本發明精神範疇,熟悉此一行業技藝人士依本發明申請專利範圍及發明說明所作之各種簡易變形與修飾,均仍應含括於以下申請專利範圍中。The above embodiments are intended to be illustrative only, and are not intended to limit the scope of the present invention. It is included in the scope of the following patent application.

20、20a、20c...介電基板20, 20a, 20c. . . Dielectric substrate

21、21a、21b...貫穿孔21, 21a, 21b. . . Through hole

22...鎳/銅金屬鍍通孔twenty two. . . Nickel/copper metal plated through hole

23...鎳/銅金屬層twenty three. . . Nickel/copper metal layer

24、24a、24b、24c...銅金屬增厚層24, 24a, 24b, 24c. . . Copper metal thickening layer

25、25a、25b、25c...金屬防護層25, 25a, 25b, 25c. . . Metal protective layer

26a、26b...薄膜銅金屬層26a, 26b. . . Thin film copper metal layer

27...印刷電路基板27. . . Printed circuit board

28、28a、28b、28c...實心銅導熱柱28, 28a, 28b, 28c. . . Solid copper heat transfer column

30、30a、30b...蝕刻製程30, 30a, 30b. . . Etching process

31、31a、31b...乾膜31, 31a, 31b. . . Dry film

40...發熱電子元件40. . . Heated electronic component

41...電極導線41. . . Electrode lead

第1圖至第2圖係本發明第一較佳實施例製造流程之結構示意圖;1 to 2 are schematic views showing the structure of a manufacturing process of a first preferred embodiment of the present invention;

第3圖至第4圖係本發明第二較佳實施例製造流程之結構示意圖;3 to 4 are schematic structural views showing a manufacturing process of a second preferred embodiment of the present invention;

第5圖至第6圖係本發明第三較佳實施例製造流程之結構示意圖;5 to 6 are schematic views showing the structure of a manufacturing process of a third preferred embodiment of the present invention;

第7圖係本發明具金屬散熱層的電路板製造方法之流程圖;Figure 7 is a flow chart showing a method of manufacturing a circuit board having a metal heat dissipation layer according to the present invention;

第8圖係本發明應用於發熱電子元件散熱基板之正面組合示意圖;以及Figure 8 is a schematic view showing the front side combination of the heat-dissipating substrate of the heat-generating electronic component of the present invention;

第9圖係本發明應用於發熱電子元件散熱基板之側面組合示意圖。Figure 9 is a schematic view showing the side combination of the heat-dissipating substrate of the heat-generating electronic component of the present invention.

Claims (22)

一種具金屬散熱層的電路板製造方法,包含:選定一預設的介電基板;於介電基板上進行貫穿孔處理;利用電鑄製程將銅金屬沉積填實於貫穿孔內部形成一實心銅導熱柱,並增厚介電基板表面形成銅金屬增厚層;利用壓膜、曝光顯影及蝕刻製程形成銅金屬增厚層的線路圖案;將銅金屬增厚層上的抗蝕刻乾膜剝除;以及電鍍其他抗氧化金屬於銅金屬增厚層表面形成一金屬防護層。A method for manufacturing a circuit board with a metal heat dissipation layer, comprising: selecting a predetermined dielectric substrate; performing through-hole processing on the dielectric substrate; and depositing a copper metal deposit in the through-hole to form a solid copper by an electroforming process Conducting a heat-conducting column and thickening a surface of the dielectric substrate to form a copper metal thickening layer; forming a circuit pattern of the copper metal thickening layer by using a lamination film, an exposure developing process, and an etching process; and peeling off the etching resistant dry film on the copper metal thickening layer And electroplating other anti-oxidation metals to form a metal protective layer on the surface of the copper metal thickening layer. 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述介電基板設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種。The method of manufacturing a circuit board having a metal heat dissipation layer according to the first aspect of the invention, wherein the dielectric substrate is one of a ceramic substrate, a printed circuit board, an engineering plastic substrate, or another composite material substrate. 如申請專利範圍第2項所述具金屬散熱層的電路板製造方法,其中,上述陶瓷基板選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料。The method of manufacturing a circuit board having a metal heat dissipation layer according to claim 2, wherein the ceramic substrate is selected from the group consisting of alumina, aluminum nitride, tantalum carbide, cerium oxide, zinc oxide or cerium oxide. 如申請專利範圍第2項所述具金屬散熱層的電路板製造方法,其中,上述印刷電路基板選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料。The method for manufacturing a circuit board with a metal heat dissipation layer according to claim 2, wherein the printed circuit board is selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, and polytetrafluoroethylene (PTFE). ) or one of BT/epoxy materials. 如申請專利範圍第2項所述具金屬散熱層的電路板製造方法,其中,上述工程塑膠基板選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。The method for manufacturing a circuit board with a metal heat dissipation layer according to the second aspect of the invention, wherein the engineering plastic substrate is selected from the group consisting of thermoplastic plastic, thermosetting plastic or composite plastic material, which is made by a plastic molding method. . 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述貫穿孔設為面積尺寸大於0.01mm2的圓孔、方孔或其他幾何形狀貫穿孔的其中一種。The method for manufacturing a circuit board having a metal heat dissipation layer according to claim 1, wherein the through hole is one of a circular hole, a square hole or another geometric through hole having an area size larger than 0.01 mm 2 . 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述貫穿孔處理設為超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔或塑膠孔成型的其中一種加工方法。The method for manufacturing a circuit board having a metal heat dissipation layer according to the first aspect of the invention, wherein the through hole processing is ultrasonic processing, electron beam processing, laser processing, oil punching, conventional drilling or plastic hole One of the processing methods for forming. 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述介電基板於貫穿孔處理之後,利用濺鍍製程形成一鎳/銅金屬鍍通孔以及表面鎳/銅金屬層。The method for manufacturing a circuit board with a metal heat dissipation layer according to claim 1, wherein the dielectric substrate is formed by a sputtering process to form a nickel/copper metal plated through hole and a surface nickel/copper metal after the through hole is processed. Floor. 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述介電基板於貫穿孔處理之前,利用網印燒結製程或濺鍍製程於介電基板表面形成一薄膜銅金屬層。The method for manufacturing a circuit board with a metal heat dissipation layer according to claim 1, wherein the dielectric substrate forms a thin film copper metal on the surface of the dielectric substrate by using a screen printing process or a sputtering process before the through hole processing. Floor. 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述金屬防護層是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。The method for manufacturing a circuit board having a metal heat dissipation layer according to claim 1, wherein the metal protective layer is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer. 如申請專利範圍第1項所述具金屬散熱層的電路板製造方法,其中,上述介電基板表面的銅金屬增厚層及金屬防護層係設為雙面電路基板結構。The method for manufacturing a circuit board having a metal heat dissipation layer according to claim 1, wherein the copper metal thickening layer and the metal protective layer on the surface of the dielectric substrate are double-sided circuit board structures. 一種具金屬散熱層的電路板,包含:一介電基板,具有複數個貫穿基板上、下端的貫穿孔;一銅金屬增厚層,佈設於上述介電基板表面形成一蝕刻成型的線路圖案,並且填實上述介電基板的貫穿孔內部形成一實心銅導熱柱;以及一金屬防護層,佈設於上述已具有蝕刻線路圖案的銅金屬增厚層表面。A circuit board having a metal heat dissipation layer, comprising: a dielectric substrate having a plurality of through holes penetrating the upper and lower ends of the substrate; a copper metal thickening layer disposed on the surface of the dielectric substrate to form an etched line pattern, And forming a solid copper heat conducting column inside the through hole filling the dielectric substrate; and a metal protective layer disposed on the surface of the copper metal thickening layer having the etched line pattern. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述介電基板與銅金屬增厚層之間設有一鎳/銅金屬層,使上述貫穿孔與銅金屬增厚層之間形成一鎳/銅金屬鍍通孔。The circuit board with a metal heat dissipation layer according to claim 12, wherein a nickel/copper metal layer is disposed between the dielectric substrate and the copper metal thickening layer to make the through hole and the copper metal thickening layer A nickel/copper metal plated through hole is formed therebetween. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述介電基板設為陶瓷基板、印刷電路基板、工程塑膠基板或其他複合材料基板的其中一種。The circuit board with a metal heat dissipation layer according to claim 12, wherein the dielectric substrate is one of a ceramic substrate, a printed circuit substrate, an engineering plastic substrate, or another composite substrate. 如申請專利範圍第14項所述具金屬散熱層的電路板,其中,上述陶瓷基板選自氧化鋁、氮化鋁、碳化矽、氧化鈹、氧化鋅或氧化矽的其中一種陶瓷材料。The circuit board with a metal heat dissipation layer according to claim 14, wherein the ceramic substrate is selected from the group consisting of alumina, aluminum nitride, tantalum carbide, cerium oxide, zinc oxide or cerium oxide. 如申請專利範圍第14項所述具金屬散熱層的電路板,其中,上述印刷電路基板選自樹脂、玻璃纖維/環氧樹脂、聚亞醯胺(Polyimide)、聚四氟乙烯(PTFE)或BT/環氧樹脂的其中一種材料。The circuit board with a metal heat dissipation layer according to claim 14, wherein the printed circuit board is selected from the group consisting of resin, glass fiber/epoxy resin, polyimide, polytetrafluoroethylene (PTFE) or One of the materials of BT/epoxy. 如申請專利範圍第14項所述具金屬散熱層的電路板,其中,上述工程塑膠基板選自熱塑性塑膠、熱固性塑膠或複合性塑膠的其中一種塑膠材料,係採用塑膠成型方法而製成。The circuit board with a metal heat dissipation layer according to claim 14, wherein the engineering plastic substrate is selected from one of thermoplastic materials, thermosetting plastics or composite plastic materials, and is formed by a plastic molding method. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述貫穿孔設為面積尺寸大於0.01mm2的圓孔、方孔或其他幾何形狀貫穿孔的其中一種。The circuit board with a metal heat dissipation layer according to claim 12, wherein the through hole is one of a circular hole, a square hole or another geometric through hole having an area size larger than 0.01 mm 2 . 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述貫穿孔係利用超音波加工、電子束加工、雷射加工、油壓沖孔、傳統鑽孔加工或塑膠孔成型的其中一種加工方法所形成。The circuit board with a metal heat dissipation layer according to claim 12, wherein the through hole is formed by ultrasonic processing, electron beam processing, laser processing, oil punching, conventional drilling processing or plastic hole forming. One of the processing methods is formed. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述金屬防護層是由化學鎳層混合化學金層、化學銀層、錫層或錫合金層的其中一種構成。The circuit board with a metal heat dissipation layer according to claim 12, wherein the metal protection layer is composed of one of a chemical nickel layer mixed with a chemical gold layer, a chemical silver layer, a tin layer or a tin alloy layer. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述介電基板表面的銅金屬增厚層及金屬防護層係設為雙面電路基板結構。The circuit board with a metal heat dissipation layer according to claim 12, wherein the copper metal thickening layer and the metal protective layer on the surface of the dielectric substrate are double-sided circuit substrate structures. 如申請專利範圍第12項所述具金屬散熱層的電路板,其中,上述具金屬散熱層的電路板應用於發光二極體散熱電路基板或致冷器散熱電路基板的其中一種。The circuit board with a metal heat dissipation layer according to claim 12, wherein the circuit board with the metal heat dissipation layer is applied to one of a light emitting diode heat dissipation circuit substrate or a refrigerator heat dissipation circuit substrate.
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TWI642335B (en) * 2017-12-11 2018-11-21 欣興電子股份有限公司 Circuit board and manufacturing method thereof

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TWI581697B (en) * 2014-04-18 2017-05-01 H & H-T Co Ltd Method for manufacturing heat dissipation structure of ceramic substrate
TWI702887B (en) * 2017-12-05 2020-08-21 同泰電子科技股份有限公司 Flexible circuit board structure

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI642335B (en) * 2017-12-11 2018-11-21 欣興電子股份有限公司 Circuit board and manufacturing method thereof
US10468570B2 (en) 2017-12-11 2019-11-05 Unimicron Technology Corp. Circuit board and method for manufacturing the same

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