TWI378906B - - Google Patents
Download PDFInfo
- Publication number
- TWI378906B TWI378906B TW97121459A TW97121459A TWI378906B TW I378906 B TWI378906 B TW I378906B TW 97121459 A TW97121459 A TW 97121459A TW 97121459 A TW97121459 A TW 97121459A TW I378906 B TWI378906 B TW I378906B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical glass
- etching
- glass
- optical
- solution
- Prior art date
Links
- 239000005304 optical glass Substances 0.000 claims description 128
- 239000011521 glass Substances 0.000 claims description 61
- 238000000034 method Methods 0.000 claims description 54
- 238000005530 etching Methods 0.000 claims description 49
- 230000003287 optical effect Effects 0.000 claims description 20
- 239000002253 acid Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 16
- 238000004140 cleaning Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000005507 spraying Methods 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 4
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims description 3
- 229910001632 barium fluoride Inorganic materials 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 235000019504 cigarettes Nutrition 0.000 claims 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 35
- 239000000126 substance Substances 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 12
- 239000000047 product Substances 0.000 description 12
- 239000007921 spray Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 6
- 239000007795 chemical reaction product Substances 0.000 description 5
- 238000000227 grinding Methods 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000010436 fluorite Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 210000003802 sputum Anatomy 0.000 description 2
- 241000238366 Cephalopoda Species 0.000 description 1
- 108010068370 Glutens Proteins 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000004071 biological effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007705 chemical test Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004334 fluoridation Methods 0.000 description 1
- 235000021312 gluten Nutrition 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000006166 lysate Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- YRQNNUGOBNRKKW-UHFFFAOYSA-K trifluororuthenium Chemical compound F[Ru](F)F YRQNNUGOBNRKKW-UHFFFAOYSA-K 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97121459A TW200951089A (en) | 2008-06-09 | 2008-06-09 | Device of optical glass etching and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97121459A TW200951089A (en) | 2008-06-09 | 2008-06-09 | Device of optical glass etching and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200951089A TW200951089A (en) | 2009-12-16 |
| TWI378906B true TWI378906B (https=) | 2012-12-11 |
Family
ID=44871615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97121459A TW200951089A (en) | 2008-06-09 | 2008-06-09 | Device of optical glass etching and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200951089A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112876090A (zh) * | 2021-04-07 | 2021-06-01 | 惠州市清洋实业有限公司 | 一种超薄玻璃化学减薄方法 |
| CN113292246B (zh) * | 2021-06-02 | 2022-05-17 | 中建材玻璃新材料研究院集团有限公司 | 一种用于玻璃减薄的连续生产装置 |
-
2008
- 2008-06-09 TW TW97121459A patent/TW200951089A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200951089A (en) | 2009-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100462319C (zh) | 化学抛光方法、经该方法抛光的玻璃基板及化学抛光装置 | |
| TWI698403B (zh) | 包含光提取特徵之玻璃物件以及製造彼之方法 | |
| CN101209902B (zh) | 玻璃减薄方法 | |
| US20160355689A1 (en) | Method for sparkle control and articles thereof | |
| TW200932695A (en) | An apparatus for etching a glass wafer, and a glass sheet manufactured by the same | |
| TW201002636A (en) | Downward type apparatus for slimming substrate and slimming system of the same | |
| KR20160012186A (ko) | 유리 캐리어를 갖는 얇은 플렉서블 유리 기판을 가공하는 방법 | |
| TW201006777A (en) | Method for etching alkali-free glass substrate and display device | |
| CN111902380B (zh) | 用于减少静电带电的纹理化玻璃表面 | |
| CN101633563A (zh) | 一种光学玻璃蚀刻装置及方法 | |
| TWI378906B (https=) | ||
| JP2018507158A (ja) | 合わせガラス物品のエッジを強化する方法及びそれによって形成された合わせガラス物品 | |
| JP3523239B2 (ja) | ガラス基板の化学加工方法及びガラス基板 | |
| CN101417862A (zh) | 瀑布式层流蚀刻装置 | |
| JP2018049199A (ja) | 局所ウェットエッチング装置及びフォトマスク用基板の製造方法 | |
| TWI599547B (zh) | Method of manufacturing glass substrate, glass substrate, and display panel | |
| Egatz-Gomez et al. | Super-wetting, wafer-sized silicon nanowire surfaces with hierarchical roughness and low defects | |
| JP2006055775A (ja) | ダイコータの塗工方法およびこの方法によって作製されたフォトリソグラフィ用ペリクル | |
| CN100478503C (zh) | 一种动态物理限制条件下的光子晶体模板制备方法 | |
| KR20060052081A (ko) | 도포막 형성 장치 및 도포막 형성 방법 | |
| TW200844063A (en) | Etching method and apparatus of optical glass | |
| CN101445327A (zh) | 用于玻璃的表面处理系统 | |
| JP2004002205A (ja) | ガラス基板の化学加工方法 | |
| JP3959726B2 (ja) | 液体塗布方法 | |
| TWI352748B (https=) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |