TWI378234B - Inline automatic insepction apparatus and inline automatic detection system - Google Patents

Inline automatic insepction apparatus and inline automatic detection system Download PDF

Info

Publication number
TWI378234B
TWI378234B TW097107675A TW97107675A TWI378234B TW I378234 B TWI378234 B TW I378234B TW 097107675 A TW097107675 A TW 097107675A TW 97107675 A TW97107675 A TW 97107675A TW I378234 B TWI378234 B TW I378234B
Authority
TW
Taiwan
Prior art keywords
inspection
unit
upstream
conveyance
liquid crystal
Prior art date
Application number
TW097107675A
Other languages
Chinese (zh)
Other versions
TW200900681A (en
Inventor
Susumu Otsu
Shinji Fujiwara
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007061846A priority Critical patent/JP5001681B2/en
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200900681A publication Critical patent/TW200900681A/en
Application granted granted Critical
Publication of TWI378234B publication Critical patent/TWI378234B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8803Visual inspection
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Description

1378234 下一個線內自動檢查裝置,在該線內自動檢查裝置開始檢 查上述檢查對象物。下一個檢查對象物是通過第2個線內 自動檢查裝置的內部搬運部輸送至下一個線內自動檢查裝 置,和上述相同開始檢查,因此能夠有效率地檢查多數的 檢查對象物。1378234 The next in-line automatic inspection device, in which the automatic inspection device starts to inspect the inspection object. The next object to be inspected is transported to the next in-line automatic inspection device by the internal conveyance unit of the second in-line automatic inspection device, and the inspection is started in the same manner as described above. Therefore, it is possible to efficiently inspect a large number of inspection objects.

ί 發 rL 式 方 施 態 形 施 實 佳 最 之 明 的 關 相 態 形 施 實 明 發 本 明 說 邊 - 圖 附 照 參 邊 1 下 以 的態 關形 相施 態實 形明 施發 實本 明示 發表 本爲 示圖 表 2 爲第 圖 , 1 圖 第視 。 透 置置 裝裝 查查 檢檢 otsn non 0 白 內內 線線 相關的線內自動檢查裝置側面圖,第3圖爲表示本發明實 施形態相關的線內自動檢査裝置其工件平台成傾斜狀態下 的側面圖,第4圖爲表示本發明實施形態相關的線內自動 檢查裝置其工件平台成傾斜狀態下的透視圖,第5圖爲表 示本發明實施形態相關的線內自動檢査裝置正面剖面圖 (第6圖的A-A線剖面圖),第6圖爲表示本發明實施形 態相關的線內自動檢查裝置正面圖,第7圖爲表示本發明 實施形態相關的線內自動檢查裝置正面剖面圖,第8圖爲 表示本發明實施形態相關線內自動檢查裝置的轉動機構透 視圖,第9圖爲表示發明實施形態相關線內自動檢查裝置 的粗定位單元裝置透視圖,第10圖爲表示本發明實施形 態相關線內自動檢查裝置的粗定位單元裝置組入在上游側 搬運部時的狀態透視圖,第Π圖爲表示本發明實施形態 -8- 1378234 相關線內自動檢查裝置的粗定位單元裝置組入在上游側搬 運部時的狀態平面圖,第1 2圖爲表示本發明實施形態相 關的線內自動檢查裝置複數組入在生產線時的線內自動檢 查系統透視圖。 線內自動檢查裝置1是一種組入在檢查對象物搬運路 徑的裝置。線內自動檢查裝置1是於各種檢查對象物的搬 運路徑進行該檢查對象物的檢查。檢查對象物的搬運路 徑,於此是以液晶面板的生產線爲例子進行說明。液晶面 板的生產線,通常是以輸送機構成,於該輸送機的途中去 除該輸送機的一部份然後組入線內自動檢查裝置1。 線內自動檢査裝置1,如第〗圖至第8圖所示,由上 游側搬運部2、檢査部3、下游側搬運部4、上游側移載部 5及下游側移載部6構成。 上游側搬運部2是將上述輸送機所搬運過來的液晶面 板8沿著搬運路徑搬運至檢查部3用的搬運裝置。上游側 搬運部2是在上述輸送機一部份去除的位置,配置在該輸 送機的上游側成彼此接近形成連續。該上游側搬運部2是 由輥式輸送機構成。上游側搬運部2,具體而言是由:隔 著一定間隔配設成平行的輥9;從各輥9兩側支撐著各輥 9使各輥9支撐成可旋轉的側壁10;可對液晶面板8的大 槪位置(粗位置)進行調整的粗定位單元裝置1 1 (參照第 10圖):及上述輥9旋轉驅動用的驅動部(未圖示)所構 成。側壁10設有配合上述輸送機高度的腳部(未圖 示)。上述驅動部是被控制成和下述的下游側移載部6的 -9- 1378234 驅動部及下述的檢查部3的內部搬運部47的驅動部連 動,形成能夠順利搬運液晶面板8。 粗定位單元裝置1 1,是在上游側移載部5將液晶面板 8從上游側搬運部2轉移至下述的檢查部3的工件平台45 時,對液晶面板8的粗位置進行調整的裝置。粗定位單元 裝置11,如第9圖至第11圖所示,由縱向定位部13、橫 向定位部14及昇降部15構成。另,第9圖至第π圖所 示的上游側搬運部2的全體構成,雖是和第1圖所示的上 游側搬運部2在尺寸方面有些不同,但功能相同^ 縱向定位部1 3是在搬運至上游側搬運部2下游側端 部的液晶面板8轉移至檢查部3時,對液晶面板8的縱向 位置進行調整的裝置。縱向定位部13是由軌道17、滑件 1 8、缸筒1 9、支撐構件20及面板檢測感測器2 1構成。軌 道17是沿著上述搬運路徑配設,可將滑件18支撐成沿著 搬運路徑的縱向移動。軌道17是固定在上游側搬運部2 側。滑件18是可滑動地嵌合在軌道17,由軌道17支撐成 可沿著搬運路徑縱向移動。缸筒19是可對支撐構件20進 行支撐加以昇降的裝置。該缸筒19是可使用空氣缸筒、 油壓缸筒等既有的缸筒。於缸筒19連接有空氣壓或油壓 供應用的裝置(未圖示)。缸筒19是安裝在滑件18,形 成可沿著搬運路徑縱向移動。支撐構件20是從液晶面板8 下側直接接觸對液晶面板8進行支撐的構件。該支撐構件 20是以矽膠等構成。面板檢測感測器2 1是一種對液晶面 板8是否位於粗定位單元裝置1 1正上方進行檢測用的感发 r r r 式 式 式 式 式 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实 实Chart 2 is the first picture, 1 picture is the first view. Side view of the in-line automatic inspection device related to the otsn non 0 white inner wire, and FIG. 3 is a side view showing the in-line automatic inspection device according to the embodiment of the present invention in which the workpiece platform is tilted. 4 is a perspective view showing a workpiece platform in an in-line automatic inspection apparatus according to an embodiment of the present invention, and FIG. 5 is a front cross-sectional view showing the in-line automatic inspection apparatus according to the embodiment of the present invention (6th) Fig. 6 is a front view showing an in-line automatic inspection device according to an embodiment of the present invention, and Fig. 7 is a front sectional view showing an in-line automatic inspection device according to an embodiment of the present invention, and Fig. 8 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 9 is a perspective view showing a coarse positioning unit of an in-line automatic inspection device according to an embodiment of the present invention, and FIG. 10 is a perspective view showing an embodiment of the present invention. A perspective view of the state in which the coarse positioning unit of the in-line automatic inspection device is incorporated in the upstream conveying portion, and the figure is a view EMBODIMENT 8 - 1378234 A plan view of a state in which a coarse positioning unit device of an in-line automatic inspection device is incorporated in an upstream conveying portion, and FIG. 1 is a view showing an in-line automatic inspection device according to an embodiment of the present invention. The system perspective is automatically checked in-line at the production line. The in-line automatic inspection device 1 is a device that is incorporated in the inspection object transport path. The in-line automatic inspection device 1 performs inspection of the inspection object on the transportation path of various inspection objects. The conveyance path of the inspection object is described here as an example of a production line of the liquid crystal panel. The production line of the liquid crystal panel is usually constituted by a conveyor, and a part of the conveyor is removed on the way of the conveyor and then incorporated into the in-line automatic inspection device 1. The in-line automatic inspection device 1 is constituted by the upstream side conveying unit 2, the inspection unit 3, the downstream side conveying unit 4, the upstream side transfer unit 5, and the downstream side transfer unit 6, as shown in Figs. 8 to 8 . The upstream side conveyance unit 2 is a conveyance device for conveying the liquid crystal panel 8 conveyed by the conveyor to the inspection unit 3 along the conveyance path. The upstream side conveying portion 2 is disposed at a position where the conveyor is partially removed, and is disposed adjacent to each other on the upstream side of the conveyor to form a continuous flow. This upstream side conveying portion 2 is constituted by a roller conveyor. The upstream side conveying portion 2 specifically includes: rollers 9 arranged in parallel at regular intervals; each roller 9 is supported from both sides of each roller 9 to support each roller 9 as a rotatable side wall 10; The coarse positioning unit device 1 1 (see FIG. 10) for adjusting the large-sized position (thick position) of the panel 8 is composed of a driving unit (not shown) for rotationally driving the roller 9 described above. The side wall 10 is provided with a foot (not shown) that fits the height of the conveyor described above. The drive unit is controlled to be connected to the drive unit of the -9- 1378234 drive unit of the downstream side transfer unit 6 and the internal transport unit 47 of the inspection unit 3 described below, so that the liquid crystal panel 8 can be smoothly transported. The coarse positioning unit device 1 1 is a device for adjusting the coarse position of the liquid crystal panel 8 when the upstream transfer unit 5 transfers the liquid crystal panel 8 from the upstream transport unit 2 to the workpiece stage 45 of the inspection unit 3 described below. . The coarse positioning unit device 11 is composed of a longitudinal positioning portion 13, a lateral positioning portion 14, and a lifting portion 15, as shown in Figs. 9 to 11. In addition, the entire configuration of the upstream side conveyance unit 2 shown in FIG. 9 to FIG. π is different from the upstream side conveyance unit 2 shown in FIG. 1 in terms of size, but has the same function. The longitudinal positioning portion 1 3 When the liquid crystal panel 8 conveyed to the downstream end of the upstream side conveyance unit 2 is transferred to the inspection unit 3, the vertical position of the liquid crystal panel 8 is adjusted. The longitudinal positioning portion 13 is composed of a rail 17, a slider 18, a cylinder 19, a support member 20, and a panel detecting sensor 21. The rail 17 is disposed along the above-described conveyance path, and the slider 18 can be supported to move in the longitudinal direction of the conveyance path. The rail 17 is fixed to the upstream side conveying portion 2 side. The slider 18 is slidably fitted to the rail 17, and is supported by the rail 17 so as to be longitudinally movable along the conveyance path. The cylinder 19 is a device that can support the support member 20 to be raised and lowered. The cylinder tube 19 is an existing cylinder tube such as an air cylinder or a hydraulic cylinder. A device (not shown) for supplying air pressure or hydraulic pressure is connected to the cylinder tube 19. The cylinder 19 is mounted to the slider 18 and is formed to be longitudinally movable along the transport path. The support member 20 is a member that directly contacts the liquid crystal panel 8 from the lower side of the liquid crystal panel 8. The support member 20 is made of silicone or the like. The panel detecting sensor 2 1 is a feeling for detecting whether or not the liquid crystal panel 8 is located directly above the coarse positioning unit device 1 1 .

-10- 1378234 測器。.除此之外,適宜配設有可對液晶面板8縱向位置進 行檢測的感測器。 橫向定位部14,在搬運至上游側搬運部2下游側端部 的液晶面板8轉移至檢查部3時,對液晶面板8的橫向位 置進行調整的裝置。橫向定位部14是由軌道23、滑件 24、缸筒25及支撐構件26構成。軌道23是配設在上述 搬運路徑正交橫向,支撐著滑件24使滑件24可橫向移 動。軌道23是和上述縱向定位部13的軌道17成一體固 定在上游側搬運部2側。滑件24是可滑動地嵌合在軌道 23,由軌道23支撐成可橫向移動。缸筒25是設置2個在 滑件24。各缸筒25是可對支撐構件26進行支撐加以昇降 的裝置。各缸筒25是可使用空氣缸筒、油壓缸筒等既有 的缸筒。於缸筒25連接有空氣壓或油壓供應用的裝置 (未圖示)。缸筒25是安裝在滑件24,形成爲可橫向移 動。支撐構件2 6是從液晶面板8下側直接接觸對液晶面 板8進行支撐的構件。該支撐構件26是以矽膠等構成。 昇降部15是上述縱向定位部13及橫向定位部14調 整粗位置後的液晶面板8昇降用的裝置。昇降部15是由 面板提升器28及缸筒29構成。 面板提升器28是一種直接接觸液晶面板8背面可將 液晶面板8舉起的構件。面板提升器28是由支撐板31’ 和配設在該支撐板31下側的4支導棒32,和配設在該支 撐板31上側的4根支撐棒33,及設置在各支撐棒33上端 部的支撐構件34所構成》4支導棒32是插入在導板35的-10- 1378234 Detector. In addition to this, a sensor capable of detecting the longitudinal position of the liquid crystal panel 8 is suitably provided. When the liquid crystal panel 8 conveyed to the downstream end of the upstream side conveyance unit 2 is transferred to the inspection unit 3, the lateral positioning unit 14 adjusts the lateral position of the liquid crystal panel 8. The lateral positioning portion 14 is composed of a rail 23, a slider 24, a cylinder 25, and a support member 26. The rail 23 is disposed in the orthogonal direction of the above-described conveyance path, and supports the slider 24 to allow the slider 24 to move laterally. The rail 23 is fixed to the upstream side conveying portion 2 side integrally with the rail 17 of the longitudinal positioning portion 13. The slider 24 is slidably fitted to the rail 23 and supported by the rail 23 so as to be laterally movable. The cylinder 25 is provided with two sliders 24. Each cylinder 25 is a device that can support and support the support member 26. Each cylinder 25 is an existing cylinder such as an air cylinder or a hydraulic cylinder. A device (not shown) for supplying air pressure or hydraulic pressure is connected to the cylinder tube 25. The cylinder 25 is mounted to the slider 24 and is formed to be laterally movable. The support member 26 is a member that directly contacts the liquid crystal panel 8 from the lower side of the liquid crystal panel 8. The support member 26 is made of silicone or the like. The elevating portion 15 is a device for elevating and lowering the liquid crystal panel 8 after the vertical positioning portion 13 and the lateral positioning portion 14 are adjusted in a thick position. The lifting portion 15 is composed of a panel lifter 28 and a cylinder barrel 29. The panel lifter 28 is a member that directly contacts the back surface of the liquid crystal panel 8 to lift the liquid crystal panel 8. The panel lifter 28 is composed of a support plate 31' and four guide bars 32 disposed on the lower side of the support plate 31, and four support bars 33 disposed on the upper side of the support plate 31, and are disposed on the support bars 33. The support member 34 at the upper end constitutes a "four guide rods 32" which are inserted into the guide plate 35.

-11 - 1378234 4個導孔36,被支撐成可朝上下方向滑動。導板35是固 定在上游側搬運部2的框架3 7。 缸筒29是面板提升器28昇降用的構件。該缸筒29 是固定在導板35的背面,其缸筒桿(未圖示)連結在支 撐板31。如此一來,當缸筒28伸出缸筒桿時,可使面板 提升器28上昇,將支撐棒33上端的支撐構件34所支撐 的液晶面板8往上方舉起。被舉起的液晶面板8被交接至 上游側移載部5然後轉移至檢查部3。 檢查部3是配置在上游側搬運部2下游側成彼此接近 形成連續‘,對上述液晶面板8進行支撐加以傾斜或往上方 舉起進行檢查的同時,其下側可容許液晶面板8通過的裝 置。檢查部3,如第1圖至第8圖所示,主要是由XYZ 0 平台40 (參照第7圖)、檢査平台41圖像處理部42構 成。 ΧΥΖ0平台40是將檢查平台41朝XYZ軸方向及旋轉 方向微調整用的裝置。該XYZ 0平台40是另外組入有別 於Z平台’大幅昇降檢查平台41用的昇降機構(未圖 示)。檢查平台41是由該昇降機構從上述搬運路徑下側 推出在該搬運路徑對液晶面板8進行支撐往上方舉起。如 此一來’就能夠使檢査平台41往上方大幅上昇進行檢 查。 檢查平台4 1可正確地支撐著液晶面板8從該液晶面 板8背面進行照明的裝置。檢查平台41是由工件平台 45、背光燈46 '內部搬運部47及轉動機構48構成。 •12- 1378234 工件平台45是直接支撐液晶面板8用的構件。工件 平台45是由ΧΥΖ0平台40支撐成可昇降,使液晶面板8 可支撐在正確位置。背光燈46是對工件平台45所支撐的 液晶面板8從其背面(下側面)進行照射用的構件。以背 光燈46從液晶面板8背面照射液晶面板8,對液晶面板8 進行點燈檢查。 內部搬運部47是一種爲了讓液晶面板8接受檢查可 在工件平台45上昇時,和上游側搬運部2及下游側搬運 部4共同合作構成上述搬運路徑的搬運裝置。內部搬運部 47是由設置在ΧΥΖ0平台40和背光登46之間的輥式輸 送機構成。該輥式輸送機是設定成在ΧΥΖ0平台40的昇 降機構使檢查平台41成爲上昇的狀態,其高度和上游側 搬運部2及下游側搬運部4 —致。內部搬運部47設有其 內部輥9驅動用的驅動部(未圖示)。該驅動部是構成爲 和上游側搬運部2及下游側搬運部4的驅動部同步對各輥 9進行驅動。 轉動機構4 8是爲了目視檢査可對工件平台4 5加以傾 斜的機構。該轉動機構48是由底座板49、旋轉軸50、軸 承51及旋轉驅動部52構成。 底座板49是工件平台45支撐用的板材。工件平台45 是以支撐在該底座板49的狀態和底座板49 一起轉動。底 座板49的基端側設有旋轉軸50連結用的連結塊4 9Α»該 連結塊49A和旋轉軸50是彼此牢固結合著。 旋轉軸50是轉動底座板49用的軸。軸承51可支撐 ί -13- 1378234 著旋轉軸50使旋轉軸旋轉的構件。軸承51是以支撐 XYZ 0平台40側的狀態,將旋轉軸50的兩端部支撐成 旋轉。旋轉驅動部52是透過旋轉軸50轉動底座板49 的裝置。該旋轉驅動部52是以固定在軸承51的狀態連 於旋轉軸50。旋轉驅動部52,具體而言是構成爲具備 驅動馬達(未圖示)和根據需求設置的減速機構(未 示)。當工件平台45或座板49較重時,具備減速機構 根據上述重量程度設定減速比。上述驅動馬達是連接於 內自動檢查系統全體控制用的控制部(未圖示),和上 側搬運部2及下游側搬運部4等同時受到控制。 工件平台45的上部,設有探針單元(未圖示)。 探針單元是以其探針接觸液晶面板8的電極施加檢查 號,將測試圖案等顯示在液晶面板8。 圖像處理部42是對液晶面板8的表面進行攝影利 圖像處理對液晶面板8的瑕疵等進行檢查的裝置。圖像 理部42,主要是由攝影機53、攝影機驅動機構54、處 裝置55及暗室用箱體56構成。 攝影機53是緊貼著工件平台45形成設置。由該攝 機5 3對液晶面板8進行攝影,使液晶面板8的影像資 送訊至處理裝置55。攝影機驅動機構54是可支撐著攝 機53對攝影機53位置進行調整的裝置。由攝影機驅動 構54使該攝影機53上下、前後左右移動執行攝影機 對準位置。處理裝置55是處理攝影機53所攝影的圖像 的裝置。 在 可 用 結 有 圖 y 線 游 該 訊 用 處 理 影 料 影 機 53 用 -14 - 54 1378234 暗室用箱體56是可將攝影機53和攝影機驅動機構 —起收納在內部,從工件平台45上側覆蓋著工件平台 時可構成暗室的箱體。暗室用箱體56是設置成可昇降 從工件平台45上側適當覆蓋著工件平台54構成暗室。 此一來,就能夠讓工件平台45所支撐的液晶面板8受 背光燈46照射,由攝影機53攝影,在處理裝置55進 圖像處理執行液晶面板8的檢查。 下游側搬運部4是可將檢查後的液晶面板8沿著搬 路徑往下游側搬運的裝置。下游側搬運部4是配置在檢 部3下游側成彼此接近形成連續。下游側搬運部4的全 構成,除了不具有粗定位單元裝置11以外,其他是和 述上游側搬運部2成對稱構成。 上游側移載部5是將液晶面板8從上游側搬運部2 移至檢查部3用的裝置。上游側移載部5是由面板吸附 57、面板搬運臂58及面板搬運機構59構成。 面板吸附部5 7是可吸附著液晶面板8對液晶面板 進行支撐的構件。面板吸附部57是構成具備有可吸附 晶面板8表面的吸附墊61,和面板昇降機構62。該吸 墊61是連接於吸引裝置(未圖示)。面板昇降機構62 以固定在面板搬運臂58的狀態,支撐著吸附墊61使該 附墊6 1所吸附的液晶面板8昇降。 面板搬運臂5 8是從上游側搬運部2的側部支撐液 面板8用的棒材。面板搬運臂58的前端安裝有面板吸 部5 7,使該面板吸附部5 7所吸附的液晶面板8由面板 54 如 到 行 運 查 體 上 轉 部 液 附 是 吸 晶 附 搬 -15- 1378234 運臂58從上游側搬運部2的側部加以支撐。面板搬運機 構59是將液晶面板8從上游側搬運部2往檢查部3移動 用的裝置。面板搬運機構59是以直接支撐著面板搬運臂 58,透過該面板搬運臂58及面板吸附部57對液晶面板8 加以支撐,使液晶面板8能夠從上游側搬運部2往檢查部 3移動。 下游側移載部6是將液晶面板8從檢查部3轉移至下 游側搬運部4用的裝置。下游側移載部6是和上述上游側 移載部5相同,由面板吸附部65、面板搬運臂66及面板 搬運機構67構成。該等各部的功能,除了左右對稱不同 以外,其他是和上游側移載部5的各部機構相同。 上述上游側移載部5和下游側移載部6被控制成互相 連動,設定成可同時執行液晶面板8從上游側搬運部2轉 移至檢查部3的移載動作,和液晶面板8從檢查部3轉移 至下游側搬運部4的移載動作。 [動作] 構成爲上述的線內自動檢查裝置1,其動作如下述。 液晶面板8的生產線是從玻璃基板的狀態,經過各種 處理步驟後製造出液晶面板8。 該生產線的製造步驟中,有時會加入檢查步驟。該狀 況時,於生產線途中,設置線內自動檢查裝置1。該線內 自動檢查裝置1中,生產線所搬運過來的液晶面板8是沿 著其搬運路徑一邊輸送一邊搬入至線內自動檢查裝置I, IS1 -16- 1378234 檢查結束後返回搬運路徑。該線內自動檢查裝置1的動 作,如以下所述。 生產線搬運過來的液晶面板8,首先是輸送至上游側 搬運部2。於上游側搬運部2,由粗定位單元裝置11對液 晶面板8的位置進行大致定位。具體而言是由粗定位單元 裝置11的縱向定位部13進行液晶面板8的縱向定位,由 橫向定位部14進行液晶面板8的橫向定位。當滑件1 8檢 測出有液晶面板8時,由缸筒19上昇支撐構件20舉起液 晶面板8,透過滑件1 8在軌道1 7滑動,使液晶面板8的 縱向形成定位。接著,由缸筒25上昇支撐構件26舉起液 晶面板8,透過滑件24在軌道23滑動,使液晶面板8的 橫向形成定位。 其次,上昇昇降部15的支撐構件34舉起液晶面板 8,將液晶面板8交給上游側移載部5的面板吸附部5 7。 於上游側移載部5,面板吸附部5 7是吸附著液晶面板8對 液晶面板8加以支撐,由面板搬運機構59搬運至檢査部3 的工件平台45。此時,工件平台45上若已有液晶面板8 時,在其檢査結束後執行搬運。此時,上游側移載部5和 下游側移載部6是連動形成同時移載。 接著,由XYZ 0平台40內的昇降機構上昇液晶面板 8,使液晶面板8靠近攝影機53。其次,以圖像處理部42 進行圖像處理。具體而言,將攝影機5 3所攝影的液晶面 板8的表面圖像資料送訊至處理裝置55,由該處理裝置 5 5進行圖像處理,執行液晶面板8的點燈檢查。 -17- 1378234 此時,下一個液·晶面板8是從上游側搬運部2通過內 部搬運部47輸送至下游側搬運部4。設有複數的線內自動 檢查裝置1時,下一個液晶面板8是輸送至後方的線內自 動檢查裝置1。 另一方面,由作業員進行目視檢查時,上昇暗室用箱 體56,使工件平台45形成傾斜。具體而言,由旋轉驅動 部52透過旋轉軸50轉動底座板49,使工件平台45從第 2圖的狀態傾斜成第3圖或第4圖的狀態。 作業員是位於已經傾斜的工件平台45的正面,以目 視檢查被支撐在傾斜的工件平台4 5從背面加有背光燈照 射的液晶面板。檢查結束後,就由旋轉驅動部5 2將工件 平台4 5恢復成水平狀態,經由上游側搬運部2和下游側 搬運部4等的連動對液晶面板8進行移載。 接著,由旋轉驅動部52使工件平台45成傾斜狀態, 重覆性執行上述處理。此時,同樣地下一個液晶面板8是 從上游側搬運部2通過內部搬運部4 7輸送至下游側搬運 部4。 [效果] 如以上所述,於線內自動檢査裝置1,因該線內自動 檢查裝置1是設置在搬運路徑上,所以不需要有該線內自 動檢査裝置1設置用的特別空間,能夠達到大幅度空間的 節省。 線內自動檢查裝置1具備有轉動機構48,所以在搬運 m -18- 1378234 路徑能夠執行目視檢查,能夠提昇檢查效率。 此外’因不需要特別設置移載裝置,所以能夠有效利 用空間或降低營運成本等,因此能夠實現整體成本的降 低。 [變形例] 上述實施形態是以設有1個線內自動檢查裝置1爲例 子進行了說明,但如第12圖所示,也可於生產線設有複 數的線內自動檢查裝置1。該狀況時,複數的線內自動檢 查裝置〗是彼此合作進行液晶面板8的檢查》具體而言, 複數配設在上述搬運路徑的線內自動檢查裝置1當中,當 前頭的線內自動檢查裝置1開始進行液晶面板8的檢査 時,下一個液晶面板8就會通過前頭的線內自動檢查裝置 1的內部搬運部47輸送至下一個線內自動檢查裝置1,在 該線內自動檢査裝置1開始檢查液晶面板8。下一個液晶 面板8通過第2個線內自動檢查裝置1的內部搬運部47 輸送至下一個線內自動檢查裝置1’形成和上述相同開始 檢查,因此能夠有效率地檢查多數的液晶面板8。 再加上,自動檢查和目視檢查能夠選擇性進行’或用 複數的線內自動檢查裝置1能夠同時進行雙方的檢査’因 此能夠大幅提昇檢査效率。 另外,上述實施形態’檢査對象物是以液晶面板8爲 例子進行了說明’但也可應用在液晶面板8以外的檢查對 象物,於該狀況同樣能夠達到上述相同的作用、效果。 iiSl! -19 - 1378234 【圖式簡單說明】 第1圖爲表示本發明實施形態相關的線內自動檢查裝 置透視圖。 第2圖爲表示本發明實施形態相關的線內自動檢查裝 置側面圖。 第3圖爲表示本發明實施形態相關的線內自動檢查裝 置其工件平台成傾斜狀態下的側面圖。 第4圖爲表示本發明實施形態相關的線內自動檢查裝 置其工件平台成傾斜狀態下的透視圖。 第5圖爲表示本發明實施形態相關的線內自動檢查裝 置正面剖面圖(第6圖的A-A剖線剖面圖)。 第6圖爲表示本發明實施形態相關的線內自動檢查裝 置正面圖。 第7圖爲表示本發明實施形態相關的線內自動檢査裝 置正面剖面圖。 第8圖爲表示本發明實施形態相關線內自動檢查裝置 的轉動機構透視圖。 第9圖爲表示發明實施形態相關線內自動檢査裝置的 粗定位單元裝置透視圖。 第1 〇圖爲表示本發明實施形態相關線內自動檢查裝 置的粗定位單元裝置組入在上游側搬運部時的狀態透視 圖。 第】1圖爲表示本發明實施形態相關線內自動檢查裝-11 - 1378234 Four guide holes 36 are supported to slide in the up and down direction. The guide plate 35 is a frame 37 fixed to the upstream side conveying portion 2. The cylinder barrel 29 is a member for lifting and lowering the panel lifter 28. The cylinder barrel 29 is fixed to the back surface of the guide plate 35, and a cylinder rod (not shown) is coupled to the support plate 31. As a result, when the cylinder tube 28 is extended from the cylinder rod, the panel lifter 28 can be raised, and the liquid crystal panel 8 supported by the support member 34 at the upper end of the support rod 33 can be lifted upward. The raised liquid crystal panel 8 is transferred to the upstream side transfer portion 5 and then transferred to the inspection portion 3. The inspection unit 3 is a device that is disposed so as to be continuous with each other on the downstream side of the upstream side conveyance unit 2, and that supports the liquid crystal panel 8 while tilting or lifting upward, and allowing the liquid crystal panel 8 to pass underneath. . The inspection unit 3 is mainly composed of an XYZ 0 platform 40 (see Fig. 7) and an inspection platform 41 image processing unit 42 as shown in Figs. 1 to 8 . The ΧΥΖ0 stage 40 is a device for finely adjusting the inspection platform 41 in the XYZ-axis direction and the rotation direction. The XYZ 0 platform 40 is separately incorporated into a lifting mechanism (not shown) for use with the Z platform 'large lifting inspection platform 41. The inspection platform 41 is pushed out from the lower side of the conveyance path by the elevating mechanism, and the liquid crystal panel 8 is supported upward by the conveyance path. As a result, the inspection platform 41 can be raised upwards for inspection. The inspection platform 41 can correctly support the apparatus for illuminating the liquid crystal panel 8 from the back surface of the liquid crystal panel 8. The inspection platform 41 is composed of a workpiece stage 45, a backlight 46' internal conveying portion 47, and a rotating mechanism 48. • 12-1378234 The workpiece stage 45 is a member for directly supporting the liquid crystal panel 8. The workpiece platform 45 is supported by the 平台0 platform 40 so as to be movable up and down so that the liquid crystal panel 8 can be supported in the correct position. The backlight 46 is a member for illuminating the liquid crystal panel 8 supported by the workpiece stage 45 from the back surface (lower side surface) thereof. The liquid crystal panel 8 is irradiated from the back surface of the liquid crystal panel 8 with the backlight 46, and the liquid crystal panel 8 is inspected for lighting. The internal conveyance unit 47 is a conveyance device that cooperates with the upstream conveyance unit 2 and the downstream conveyance unit 4 to form the conveyance path when the workpiece platform 45 is raised in order to allow the liquid crystal panel 8 to be inspected. The internal transport unit 47 is constituted by a roller conveyor provided between the 平台0 platform 40 and the backlight 46. This roller conveyor is a state in which the inspection platform 41 is raised by the raising/lowering mechanism of the 平台0 stage 40, and the height thereof is identical to the upstream side conveying unit 2 and the downstream side conveying unit 4. The internal conveyance unit 47 is provided with a drive unit (not shown) for driving the internal roller 9. The drive unit is configured to drive the rollers 9 in synchronization with the drive units of the upstream side transport unit 2 and the downstream side transport unit 4. The rotating mechanism 48 is a mechanism for visually checking the tilt of the workpiece stage 45. The rotation mechanism 48 is composed of a base plate 49, a rotating shaft 50, a bearing 51, and a rotation driving portion 52. The base plate 49 is a plate for supporting the workpiece platform 45. The workpiece stage 45 is rotated together with the base plate 49 in a state of being supported by the base plate 49. The base end side of the base plate 49 is provided with a coupling block for coupling the rotating shaft 50. The coupling block 49A and the rotating shaft 50 are firmly coupled to each other. The rotary shaft 50 is a shaft for rotating the base plate 49. The bearing 51 can support a member that rotates the shaft 50 by rotating the shaft 50. The bearing 51 is in a state of supporting the XYZ 0 platform 40 side, and both end portions of the rotating shaft 50 are supported to rotate. The rotation driving unit 52 is a device that rotates the base plate 49 through the rotating shaft 50. The rotary drive unit 52 is coupled to the rotary shaft 50 in a state of being fixed to the bearing 51. Specifically, the rotary drive unit 52 is configured to include a drive motor (not shown) and a speed reduction mechanism (not shown) provided as needed. When the workpiece stage 45 or the seat plate 49 is heavy, the speed reduction mechanism is provided to set the reduction ratio based on the above weight. The drive motor is connected to a control unit (not shown) for controlling the entire internal inspection system, and is controlled simultaneously with the upper conveyance unit 2 and the downstream conveyance unit 4. A probe unit (not shown) is provided on the upper portion of the workpiece stage 45. The probe unit applies a test number to an electrode whose probe contacts the liquid crystal panel 8, and displays a test pattern or the like on the liquid crystal panel 8. The image processing unit 42 is a device that inspects the surface of the liquid crystal panel 8 to perform image processing on the liquid crystal panel 8 and the like. The image processing unit 42 is mainly composed of a camera 53, a camera drive mechanism 54, a device 55, and a darkroom case 56. The camera 53 is disposed in close contact with the workpiece stage 45. The liquid crystal panel 8 is photographed by the camera 503, and the image of the liquid crystal panel 8 is sent to the processing device 55. The camera drive mechanism 54 is a device that can support the camera 53 to adjust the position of the camera 53. The camera drive unit 54 moves the camera 53 up and down, front, back, left and right to perform the camera alignment position. The processing device 55 is a device that processes an image captured by the camera 53. In the available picture, the picture is processed by the y-line. The video processing machine 53 is used. -14 - 54 1378234 The darkroom box 56 can accommodate the camera 53 and the camera drive mechanism, and is covered from the upper side of the workpiece platform 45. The workpiece platform can form a cabinet of the darkroom. The darkroom cabinet 56 is arranged to be lifted and lowered. The workpiece platform 54 is appropriately covered from the upper side of the workpiece platform 45 to constitute a darkroom. As a result, the liquid crystal panel 8 supported by the workpiece stage 45 can be irradiated by the backlight 46, photographed by the camera 53, and processed by the processing device 55 to perform inspection of the liquid crystal panel 8. The downstream side conveyance unit 4 is a device that can convey the liquid crystal panel 8 after inspection along the conveyance path to the downstream side. The downstream side conveying portions 4 are disposed on the downstream side of the inspection portion 3 so as to be continuous with each other. The entire configuration of the downstream conveying portion 4 is configured to be symmetrical with the upstream conveying portion 2 except that the coarse positioning unit device 11 is not provided. The upstream side transfer unit 5 is a device for moving the liquid crystal panel 8 from the upstream side transport unit 2 to the inspection unit 3. The upstream side transfer unit 5 is composed of a panel suction 57, a panel transport arm 58, and a panel transport mechanism 59. The panel adsorption portion 57 is a member that can support the liquid crystal panel by adsorbing the liquid crystal panel 8. The panel adsorption unit 57 is configured to include a suction pad 61 having a surface on which the crystal panel 8 can be adsorbed, and a panel elevating mechanism 62. The suction pad 61 is connected to a suction device (not shown). The panel elevating mechanism 62 is supported by the adsorption pad 61 in a state of being fixed to the panel transport arm 58 to raise and lower the liquid crystal panel 8 sucked by the attachment pad 61. The panel transport arm 58 is a bar for supporting the liquid panel 8 from the side of the upstream transport unit 2. The front end of the panel transport arm 58 is attached with a panel suction portion 57, so that the liquid crystal panel 8 adsorbed by the panel suction portion 57 is attached to the liquid panel by the panel 54. The arm 58 is supported from the side of the upstream side conveying portion 2. The panel transport mechanism 59 is a device for moving the liquid crystal panel 8 from the upstream transport unit 2 to the inspection unit 3. The panel transport mechanism 59 directly supports the panel transport arm 58. The panel transport arm 58 and the panel suction unit 57 support the liquid crystal panel 8, and the liquid crystal panel 8 can be moved from the upstream transport unit 2 to the inspection unit 3. The downstream side transfer unit 6 is a device for transferring the liquid crystal panel 8 from the inspection unit 3 to the downstream side conveyance unit 4. The downstream transfer unit 6 is constituted by the panel suction unit 65, the panel transport arm 66, and the panel transport mechanism 67, similarly to the upstream transfer unit 5. The functions of the respective units are the same as the respective mechanisms of the upstream transfer unit 5 except for the difference in left-right symmetry. The upstream side transfer unit 5 and the downstream side transfer unit 6 are controlled to be interlocked with each other, and are set so that the transfer operation of the liquid crystal panel 8 from the upstream side transport unit 2 to the inspection unit 3 can be simultaneously performed, and the liquid crystal panel 8 is inspected. The portion 3 shifts to the transfer operation of the downstream side transport unit 4. [Operation] The in-line automatic inspection device 1 described above is configured as follows. The production line of the liquid crystal panel 8 is manufactured from the state of the glass substrate, and the liquid crystal panel 8 is manufactured through various processing steps. In the manufacturing steps of the production line, an inspection step is sometimes added. In this case, the in-line automatic inspection device 1 is provided on the way to the production line. In the in-line automatic inspection device 1, the liquid crystal panel 8 conveyed by the production line is transported to the in-line automatic inspection device I while being conveyed along the conveyance path, and IS1 -16 - 1378234 is returned to the conveyance path after the inspection is completed. The operation of the in-line automatic inspection device 1 is as follows. The liquid crystal panel 8 transported by the production line is first transported to the upstream side transport unit 2. In the upstream transport unit 2, the position of the liquid crystal panel 8 is substantially positioned by the coarse positioning unit device 11. Specifically, the longitudinal positioning of the liquid crystal panel 8 is performed by the longitudinal positioning portion 13 of the coarse positioning unit device 11, and the lateral positioning portion 14 performs lateral positioning of the liquid crystal panel 8. When the slider 18 detects the liquid crystal panel 8, the support member 20 is lifted by the cylinder 19 to lift the liquid crystal panel 8, and the slider 18 is slid on the rail 17 to position the liquid crystal panel 8 in the longitudinal direction. Then, the liquid crystal panel 8 is lifted by the cylinder 25 rising support member 26, and is slid by the slider 24 on the rail 23 to position the liquid crystal panel 8 in the lateral direction. Next, the support member 34 of the ascending/elevating portion 15 lifts the liquid crystal panel 8, and the liquid crystal panel 8 is delivered to the panel adsorption portion 57 of the upstream transfer portion 5. In the upstream side transfer unit 5, the panel suction unit 57 is a workpiece stage 45 that is supported by the liquid crystal panel 8 and supported by the liquid crystal panel 8, and transported by the panel transport mechanism 59 to the inspection unit 3. At this time, if the liquid crystal panel 8 is present on the workpiece stage 45, the conveyance is performed after the inspection is completed. At this time, the upstream side transfer unit 5 and the downstream side transfer unit 6 are interlocked to form a simultaneous transfer. Next, the liquid crystal panel 8 is raised by the elevating mechanism in the XYZ 0 stage 40, and the liquid crystal panel 8 is brought close to the camera 53. Next, the image processing unit 42 performs image processing. Specifically, the surface image data of the liquid crystal panel 8 imaged by the camera 53 is sent to the processing device 55, and the processing device 5 performs image processing to perform the lighting inspection of the liquid crystal panel 8. -17- 1378234 At this time, the next liquid crystal panel 8 is transported from the upstream transport unit 2 to the downstream transport unit 4 via the internal transport unit 47. When a plurality of in-line automatic inspection devices 1 are provided, the next liquid crystal panel 8 is an in-line automatic inspection device 1 that is conveyed to the rear. On the other hand, when the visual inspection is performed by the operator, the darkroom casing 56 is raised to tilt the workpiece stage 45. Specifically, the rotation driving unit 52 rotates the base plate 49 through the rotating shaft 50, and the workpiece stage 45 is inclined from the state of Fig. 2 to the state of Fig. 3 or Fig. 4 . The operator is located on the front side of the already tilted workpiece stage 45 to visually inspect the liquid crystal panel supported by the inclined workpiece platform 45 from the back with backlight illumination. After the completion of the inspection, the workpiece platform 45 is returned to the horizontal state by the rotation driving unit 52, and the liquid crystal panel 8 is transferred via the interlocking of the upstream side conveying unit 2 and the downstream side conveying unit 4. Next, the workpiece platform 45 is tilted by the rotation driving unit 52, and the above processing is repeatedly performed. At this time, the liquid crystal panel 8 is also transported from the upstream side conveyance unit 2 to the downstream side conveyance unit 4 through the internal conveyance unit 47. [Effects] As described above, in the in-line automatic inspection device 1, since the in-line automatic inspection device 1 is installed on the conveyance path, it is not necessary to have a special space for the in-line automatic inspection device 1 to be installed. Great space savings. Since the in-line automatic inspection device 1 is provided with the rotation mechanism 48, it is possible to perform visual inspection on the path of the transport m-18-1378234, and it is possible to improve the inspection efficiency. In addition, since it is not necessary to provide a special transfer device, it is possible to effectively utilize space or reduce operating costs, and thus it is possible to reduce the overall cost. [Modification] Although the above embodiment has been described with an example in which one in-line automatic inspection device 1 is provided, as shown in Fig. 12, a plurality of in-line automatic inspection devices 1 may be provided in the production line. In this case, the plurality of in-line automatic inspection devices are inspecting the liquid crystal panel 8 in cooperation with each other. Specifically, the in-line automatic inspection device 1 is disposed in the in-line automatic inspection device 1 of the above-described conveyance path. When the inspection of the liquid crystal panel 8 is started, the next liquid crystal panel 8 is transported to the next in-line automatic inspection device 1 by the internal conveyance portion 47 of the in-line automatic inspection device 1 in the front, and the automatic inspection device 1 is in the line. Start checking the liquid crystal panel 8. The next liquid crystal panel 8 is transported to the next in-line automatic inspection device 1' by the internal conveyance unit 47 of the second in-line automatic inspection device 1 to form the same start inspection as described above, so that the plurality of liquid crystal panels 8 can be efficiently inspected. Further, the automatic inspection and the visual inspection can be selectively performed, or the in-line automatic inspection device 1 can perform both inspections simultaneously. Thus, the inspection efficiency can be greatly improved. In the above-described embodiment, the liquid crystal panel 8 has been described as an example. However, the object to be inspected other than the liquid crystal panel 8 can be applied. In this case, the same effects and effects as described above can be achieved. iiSl! -19 - 1378234 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an in-line automatic inspection apparatus according to an embodiment of the present invention. Fig. 2 is a side view showing an in-line automatic inspection device according to an embodiment of the present invention. Fig. 3 is a side elevational view showing the in-line automatic inspection apparatus according to the embodiment of the present invention in a state in which the workpiece stage is inclined. Fig. 4 is a perspective view showing the in-line automatic inspection device according to the embodiment of the present invention in a state in which the workpiece stage is inclined. Fig. 5 is a front sectional view showing the in-line automatic inspection device according to the embodiment of the present invention (cross-sectional view taken along line A-A of Fig. 6). Fig. 6 is a front elevational view showing the in-line automatic inspection apparatus according to the embodiment of the present invention. Figure 7 is a front sectional view showing an in-line automatic inspection device according to an embodiment of the present invention. Fig. 8 is a perspective view showing a turning mechanism of the in-line automatic inspection device according to the embodiment of the present invention. Fig. 9 is a perspective view showing a coarse positioning unit device of the in-line automatic inspection device according to the embodiment of the invention. Fig. 1 is a perspective view showing a state in which a coarse positioning unit device of an in-line automatic inspection device according to an embodiment of the present invention is incorporated in an upstream conveying portion. Fig. 1 is a view showing an in-line automatic inspection device according to an embodiment of the present invention;

I -20- 1378234 置的粗定位單元裝置組入在上游側搬運部時的狀態平面 圖。 第12圖爲表示本發明實施形態相關的線內自動檢查 裝置複數組入在生產線時的線內自動檢查系統透視圖。 【主要元件符號說明】 1:線內自動檢查裝置 2 :上游側搬運部 3 :檢查部 4 :下游側搬運部 5 :上游側移載部 6 :下游側移載部 8 :液晶面板 9 :輥 1 0 :側壁 1 1 :粗定位單元裝置 1 3 :縱向定位部 1 4 :橫向定位部 15 :昇降部 17 :軌道 1 8 :滑件 ]9 :缸筒 2 〇 :支撐構件 2 1 :面板檢測感測器 -21 - 1378234 23 :軌道 24 :滑件 25 :缸筒 26 :支撐構件 28 :面板提升器 29 :缸筒 31 :支撐板 32 :導棒 33 :支撐棒 3 4 :支撐構件 35 :導板 3 6 :導孔 37 :框架 40 : XYZ 0 平台 41 :檢査平台 4 2 ·圖像處理部 4 5 :工件平台 4 6 :背光燈 47 :內部搬運部 48 :轉動機構 49 :底座板 5 0 :旋轉軸 5 1 :軸承 5 2 :旋轉驅動部 -22 1378234I -20- 1378234 A state plan view of the coarse positioning unit set when it is placed in the upstream transport section. Fig. 12 is a perspective view showing the in-line automatic inspection system when the in-line automatic inspection device according to the embodiment of the present invention is integrated into the production line. [Description of main component symbols] 1: In-line automatic inspection device 2: upstream conveyance unit 3: inspection unit 4: downstream conveyance unit 5: upstream transfer unit 6: downstream transfer unit 8: liquid crystal panel 9: roller 1 0 : side wall 1 1 : coarse positioning unit device 1 3 : longitudinal positioning portion 1 4 : lateral positioning portion 15 : lifting portion 17 : rail 1 8 : slider ] 9 : cylinder 2 〇 : support member 2 1 : panel detection Sensor-21 - 1378234 23 : Track 24 : Slide 25 : Cylinder 26 : Support member 28 : Panel lifter 29 : Cylinder 31 : Support plate 32 : Guide bar 33 : Support bar 3 4 : Support member 35 : Guide plate 3 6 : Guide hole 37 : Frame 40 : XYZ 0 Platform 41 : Inspection platform 4 2 · Image processing unit 4 5 : Workpiece platform 4 6 : Backlight 47 : Internal conveyance portion 48 : Rotation mechanism 49 : Base plate 5 0: rotary shaft 5 1 : bearing 5 2 : rotary drive unit - 22 1378234

53 : 54 : 55 : 56 : 57 : 58 : 59 : 62 : 65 : 66 : 6 7 : 攝影機 攝影機驅動機構 處理裝置 暗室用箱體 面板吸附部 面板搬運臂 面板搬運機構 吸附墊 面板昇降機構 面板吸附部 面板搬運臂 面板搬運機構53 : 54 : 55 : 56 : 57 : 58 : 59 : 62 : 65 : 66 : 6 7 : Camera camera drive mechanism processing device darkroom cabinet panel suction panel panel transport arm panel transport mechanism adsorption pad panel lift mechanism panel suction section Panel handling arm panel handling mechanism

-23--twenty three-

Claims (1)

1378234 第097107675號專利申請案中文申請專利範圍修正本 民國101年4月12日修正 十、申請專利範園 1.一種線內自動檢查裝置,其特徵爲,構成具備: 可將檢查對象物沿著搬運路徑搬運的上游側搬運部; 配置在該上游側搬運部下游側成彼此接近形成連續, 可從上述搬運路徑舉起上述檢查對象物並支撐加以傾斜進 行目視檢查,並使得形成在其下側的內部搬運部與上述上 游側搬運部共同合作構成上述搬運路徑而可容許上述檢查 對象物通過的檢查部; 配置在該檢查部下游側成彼此接近形成連續,可將檢 査後的上述檢查對象物沿著搬運路徑往下游側搬運的下游 側搬運部; 可將上述檢查對象物從上述上游側搬運部轉移至上述 檢査部的上游側移載部;及 可將上述檢査對象物從上述檢查部轉移至上述下游側 搬運部的下游側移載部。 2 ·如申請專利範圍第1項所記載的線內自動檢查裝 置’其中,上述檢查部,構成爲具備有:設置成可轉動並 且可昇降地對上述檢查對象物進行支撐的工件平台;爲了 讓上述檢查對象物接受檢查可在該工件平台已上昇的位置 與上述上游側搬運部及下游側搬運部共同合作構成搬運路 徑的內部搬運部;及可使上述工件平台於目視檢查時成爲 傾斜的轉動機構。 1378234 3. 如申請專利範圍第1項所記載的線內自動檢查裝 置,其中,上述檢查對象物從上述上游側搬運部轉移至上 述檢查部的動作,和上述檢查對象物從上述檢查部轉移至 上述下游側搬運部的動作,是由上述上游側移載部和上述 下游側移載部形成連動同時執行。 4. 如申請專利範圍第2項所記載的線內自動檢查裝 置,其中,上述上游側搬運部,具備有可在上述檢查部的 工件平台對上述上游側移載部轉移的上述檢查對象物的大 致位置進行調整的粗定位單元裝置。 5. 如申請專利範圍第1項所記載的線內自動檢查裝 置,其中,上述檢查部具有緊貼著上述工件平台形成設置 的攝影機;及可將該攝影機收納在內部的同時,可從上述 工件平台上側覆蓋該工件平台構成上述攝影機對該工件平 台所支撐的上述檢査對象物進行攝影時所需之暗室的可昇 降箱體》 6. —種線內自動檢查系統,其特徵爲:於上述搬運路 徑複數配設有下述構成的線內自動檢查裝置,即該線內自 動檢查裝置構成具備:可將檢查對象物沿著搬運路徑搬運 的上游側搬運部;配置在該上游側搬運部下游側成彼此接 近形成連續,可從上述搬運路徑舉起上述檢查對象物並支 撐加以傾斜進行目視檢查,並使得形成在其下側的內部搬 運部與上述上游側搬運部共同合作構成上述搬運路徑而可 容許上述檢查對象物通過的檢查部;配置在該檢查部下游 側成彼此接近形成連續,可將檢查後的上述檢查對象物沿 -2- 1378234 著搬運路徑往下游側搬運的下游側搬運部;可將上述檢查 對象物從上述上游側搬運部轉移至上述檢查部的上游側移 載部:及可將上述檢查對象物從上述檢查部轉移至上述下 游側搬運部的下游側移載部,又,上述檢查部,具備有: 設置成可轉動並且可昇降地對上述檢查對象物進行支撐的 工件平台;爲了讓上述檢查對象物接受檢查可在該工件平 台已上昇的位置與上述上游側搬運部及下游側搬運部共同 合作構成搬運路徑的內部搬運部;及可使上述工件平台於 目視檢査時成爲傾斜的轉動機構。1378234 Patent Application No. 097107675 Chinese Patent Application Amendment Amendment of the Republic of China on April 12, 101. Application for Patent Park 1. An in-line automatic inspection device, characterized in that it is configured to: The upstream side transporting portion that is transported by the transport path is disposed so as to be continuous with each other on the downstream side of the upstream transporting portion, and the object to be inspected can be lifted from the transporting path, supported and tilted for visual inspection, and formed on the lower side thereof. The internal conveyance unit cooperates with the upstream conveyance unit to form an inspection unit that allows the inspection object to pass through the conveyance path, and is disposed on the downstream side of the inspection unit so as to be continuous with each other, and the inspection target object can be inspected. a downstream conveyance unit that is conveyed to the downstream side along the conveyance path; the inspection object may be transferred from the upstream conveyance unit to the upstream transfer portion of the inspection unit; and the inspection object may be transferred from the inspection unit The downstream side transfer portion to the downstream side transport portion. (2) The in-line automatic inspection device according to the first aspect of the invention, wherein the inspection unit is configured to include a workpiece platform that is rotatably and slidably supported by the inspection object; The inspection object may be inspected to form an internal conveyance portion of the conveyance path in cooperation with the upstream conveyance portion and the downstream conveyance portion at a position where the workpiece platform has been raised; and the workpiece platform may be tilted when visually inspected. mechanism. 1. The automatic in-line inspection device according to the first aspect of the invention, wherein the inspection object is transferred from the upstream conveyance unit to the inspection unit, and the inspection object is transferred from the inspection unit to the inspection unit. The operation of the downstream side conveying unit is performed by interlocking the upstream side transfer unit and the downstream side transfer unit. 4. The in-line automatic inspection device according to the second aspect of the invention, wherein the upstream conveyance unit includes the inspection object that can be transferred to the upstream transfer portion by the workpiece platform of the inspection unit. A coarse positioning unit that adjusts the approximate position. 5. The in-line automatic inspection device according to the first aspect of the invention, wherein the inspection unit has a camera that is formed in close contact with the workpiece platform; and the camera can be housed inside and can be removed from the workpiece The upper side of the platform covers the workpiece platform to form a liftable casing of the darkroom required for photographing the object to be inspected by the camera platform. 6. An in-line automatic inspection system, characterized in that: In the in-line automatic inspection device having the following configuration, the in-line automatic inspection device includes an upstream conveyance portion that can convey the inspection object along the conveyance path, and is disposed on the downstream side of the upstream conveyance portion. The objects to be inspected are lifted from each other, and the inspection object is lifted from the conveyance path, and the inspection is performed by tilting and visual inspection, and the internal conveyance unit formed on the lower side and the upstream conveyance unit cooperate to constitute the conveyance path. An inspection unit that allows the inspection object to pass through; and is disposed on the downstream side of the inspection unit to be connected to each other The downstream side conveyance unit that conveys the inspection target object to the downstream side along the transport path -2- 1378234 can be continuously formed, and the inspection object can be transferred from the upstream side conveyance unit to the upstream of the inspection unit. a side shifting portion: the downstream object side transfer portion that can be transferred from the inspection portion to the downstream side transport portion, and the inspection portion is provided to be rotatably and slidably a workpiece platform for supporting the object; the internal transport portion of the transport path may be configured to cooperate with the upstream transport portion and the downstream transport portion at a position where the workpiece platform has been raised in order to receive the inspection object; The workpiece platform becomes a tilting mechanism when visually inspected.
TW097107675A 2007-03-12 2008-03-05 Inline automatic insepction apparatus and inline automatic detection system TWI378234B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007061846A JP5001681B2 (en) 2007-03-12 2007-03-12 Inline automatic inspection device and inline automatic inspection system

Publications (2)

Publication Number Publication Date
TW200900681A TW200900681A (en) 2009-01-01
TWI378234B true TWI378234B (en) 2012-12-01

Family

ID=39843183

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097107675A TWI378234B (en) 2007-03-12 2008-03-05 Inline automatic insepction apparatus and inline automatic detection system

Country Status (3)

Country Link
JP (1) JP5001681B2 (en)
KR (1) KR100909601B1 (en)
TW (1) TWI378234B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4686593B2 (en) * 2008-12-10 2011-05-25 日立アプライアンス株式会社 Scroll compressor
KR100994305B1 (en) 2009-11-10 2010-11-12 엘지디스플레이 주식회사 Inspection device for display device and inspecting method thereof
JP5291665B2 (en) * 2010-05-07 2013-09-18 株式会社日本マイクロニクス Panel processing system and panel processing method
JP2012237594A (en) * 2011-05-10 2012-12-06 Micronics Japan Co Ltd Insulation measuring probe unit and insulation measuring apparatus
CN102540515B (en) * 2012-01-12 2015-07-08 北京凌云光视数字图像技术有限公司 Quality detection system for thin film transistor (TFT) liquid crystal display screen
CN204422430U (en) * 2014-12-25 2015-06-24 日东电工株式会社 Visual inspection apparatus
CN105607318B (en) * 2016-04-08 2019-06-04 深圳市升达康科技有限公司 A kind of automatic detection device of LCD display
US11313807B2 (en) * 2018-08-30 2022-04-26 Riso Kagaku Corporation Image inspection device
US20220122241A1 (en) * 2020-10-15 2022-04-21 Applied Materials, Inc. In-line metrology systems, apparatus, and methods for optical devices

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0762653B2 (en) * 1987-07-06 1995-07-05 日立電子エンジニアリング株式会社 Conveyance scanning mechanism of printed circuit board inspection device
JP3365781B2 (en) * 1991-10-15 2003-01-14 オリンパス光学工業株式会社 Board appearance inspection device
JP3414427B2 (en) * 1993-01-29 2003-06-09 オリンパス光学工業株式会社 Substrate transfer device and substrate inspection device
JP2001091474A (en) * 1999-09-22 2001-04-06 Olympus Optical Co Ltd Defect inspection system
JP2001194311A (en) * 1999-10-25 2001-07-19 Olympus Optical Co Ltd Substrate inspecting device
KR100490952B1 (en) 2002-11-29 2005-05-19 (주)넥스트인스트루먼트 Display panel conveyer for multipurpose optics test having stage type
JP2004271268A (en) 2003-03-06 2004-09-30 Matsushita Electric Ind Co Ltd Lighting inspection apparatus of display panel
JP2006138634A (en) * 2004-10-15 2006-06-01 Micronics Japan Co Ltd Electrical connection apparatus used for inspection device of panel for display
JP4570930B2 (en) * 2004-10-22 2010-10-27 株式会社日本マイクロニクス Electrical connection device used in panel inspection equipment
KR100715160B1 (en) 2004-11-09 2007-05-07 태산엘시디 주식회사 Device detecting automatically defect of backlight unit using image processing techniques
JP2007107973A (en) 2005-10-12 2007-04-26 Micronics Japan Co Ltd Inspection device

Also Published As

Publication number Publication date
JP5001681B2 (en) 2012-08-15
KR20080083567A (en) 2008-09-18
KR100909601B1 (en) 2009-07-27
JP2008224371A (en) 2008-09-25
TW200900681A (en) 2009-01-01

Similar Documents

Publication Publication Date Title
TWI378234B (en) Inline automatic insepction apparatus and inline automatic detection system
TWI333544B (en) Substrate inspection apparatus
TW200906695A (en) Substrate adsorption device, substrate transportation device and external inspection equipment
CN109521017B (en) Inline gantry with AOI theta axis alignable transport apparatus
JP2000009661A (en) Flat panel inspection device
TWI231964B (en) LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit
JP5189370B2 (en) Substrate exchange apparatus, substrate processing apparatus, and substrate inspection apparatus
JP2009085865A (en) Substrate inspection device
JP3999863B2 (en) Substrate inspection device
JP5722049B2 (en) Board inspection system
JP2009168860A (en) Stage device for substrate
JP5269328B2 (en) Inline automatic inspection device and inline automatic inspection system
JP2012094711A (en) Inspection equipment
JP2011199218A (en) Substrate conveyance device and substrate inspection system using the same
KR20060077176A (en) Automatic transport system of tray transport for backlight unit
JP5099318B2 (en) Exposure apparatus and exposure method
KR101954416B1 (en) Inspection apparatus
JP5928771B2 (en) Substrate inspection apparatus and substrate inspection method
JP2009022823A (en) Inspection apparatus and substrate treatment system
JP5089257B2 (en) Proximity scan exposure system
JP2008304853A (en) Proximity scanning exposure apparatus and air pad
JPH0933589A (en) Inspection instrument
JP3526709B2 (en) LCD panel alignment device
JP4976922B2 (en) Substrate transfer device
JP5046157B2 (en) Proximity scan exposure system