TWI372864B - Method for evaluating water quality, super purified water evaluating device using the same method, and supeer purified water manufacturing system - Google Patents
Method for evaluating water quality, super purified water evaluating device using the same method, and supeer purified water manufacturing systemInfo
- Publication number
- TWI372864B TWI372864B TW094116652A TW94116652A TWI372864B TW I372864 B TWI372864 B TW I372864B TW 094116652 A TW094116652 A TW 094116652A TW 94116652 A TW94116652 A TW 94116652A TW I372864 B TWI372864 B TW I372864B
- Authority
- TW
- Taiwan
- Prior art keywords
- purified water
- evaluating
- supeer
- manufacturing system
- super
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/18—Water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004206679A JP4543799B2 (ja) | 2004-07-14 | 2004-07-14 | 水質評価方法、該方法を用いる超純水評価装置及び超純水製造システム |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200602636A TW200602636A (en) | 2006-01-16 |
TWI372864B true TWI372864B (en) | 2012-09-21 |
Family
ID=35783718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094116652A TWI372864B (en) | 2004-07-14 | 2005-05-23 | Method for evaluating water quality, super purified water evaluating device using the same method, and supeer purified water manufacturing system |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4543799B2 (zh) |
TW (1) | TWI372864B (zh) |
WO (1) | WO2006006370A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4893156B2 (ja) * | 2006-08-21 | 2012-03-07 | 栗田工業株式会社 | 水質評価方法及びそれに用いられる基板接触器具 |
JP5066887B2 (ja) * | 2006-10-18 | 2012-11-07 | 栗田工業株式会社 | 水質評価方法及び装置 |
WO2010013586A1 (ja) * | 2008-07-30 | 2010-02-04 | 株式会社堀場アドバンスドテクノ | ケイ素濃度測定装置 |
JP5707670B2 (ja) * | 2009-03-30 | 2015-04-30 | 栗田工業株式会社 | 水質評価方法及び装置 |
JP5428483B2 (ja) * | 2009-04-15 | 2014-02-26 | 栗田工業株式会社 | 水質評価方法及び装置 |
GB2470208B (en) * | 2009-05-14 | 2014-01-29 | Thornton & Ross Ltd | A method and composition for the control of ectoparasites |
JP5556111B2 (ja) * | 2009-10-01 | 2014-07-23 | 栗田工業株式会社 | イオン交換樹脂の洗浄工程の終了の判定方法及び装置 |
JP5549274B2 (ja) * | 2010-02-25 | 2014-07-16 | 栗田工業株式会社 | 水質評価方法及び装置 |
NL2012149C2 (nl) | 2013-07-15 | 2015-01-21 | Ind Ontwerpbureau Hsm B V | Dispenser en werkwijze voor het dispenseren van tabletten. |
CN104597045B (zh) * | 2015-01-09 | 2017-07-21 | 上海绿帝环保科技有限公司 | 一种水质总重金属检测剂的制备和使用方法 |
JP6561734B2 (ja) * | 2015-09-30 | 2019-08-21 | 栗田工業株式会社 | 炭酸水のシリカ濃度の分析方法 |
JP7054995B2 (ja) * | 2017-07-12 | 2022-04-15 | オルガノ株式会社 | 超純水の評価方法、超純水製造用膜モジュールの評価方法及び超純水製造用イオン交換樹脂の評価方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10272492A (ja) * | 1997-03-31 | 1998-10-13 | Mitsubishi Electric Corp | 高温超純水製造装置およびこれを備えた薬液調製装置 |
JP4449135B2 (ja) * | 2000-01-25 | 2010-04-14 | 栗田工業株式会社 | 半導体基板の保持容器 |
JP4693268B2 (ja) * | 2001-04-02 | 2011-06-01 | オルガノ株式会社 | 試料水の水質評価方法 |
JP3353096B1 (ja) * | 2001-09-27 | 2002-12-03 | スガ試験機株式会社 | シリカ濃度自動測定装置 |
-
2004
- 2004-07-14 JP JP2004206679A patent/JP4543799B2/ja not_active Expired - Lifetime
-
2005
- 2005-05-23 TW TW094116652A patent/TWI372864B/zh not_active IP Right Cessation
- 2005-06-17 WO PCT/JP2005/011566 patent/WO2006006370A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2006029880A (ja) | 2006-02-02 |
WO2006006370A1 (ja) | 2006-01-19 |
JP4543799B2 (ja) | 2010-09-15 |
TW200602636A (en) | 2006-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI372864B (en) | Method for evaluating water quality, super purified water evaluating device using the same method, and supeer purified water manufacturing system | |
EP1928570A4 (en) | DEVICE, SYSTEM AND METHOD USING DISCRETE VOLUMES OF NON-MISCIBLE FLUIDS | |
TWI347496B (en) | Lithographic device, and method | |
IL191556A0 (en) | Solar system and method for the operation thereof | |
TWI346254B (en) | Lithographic apparatus, device manufacturing method and device manufactured thereby | |
EP1901339A4 (en) | EXPOSURE DEVICE, EXPOSURE METHOD, COMPONENT MANUFACTURING METHOD AND SYSTEM | |
EP1958428A4 (en) | SERVICE MANAGEMENT AND PRODUCTION MANAGEMENT SYSTEM AND METHOD | |
EP1878761A4 (en) | WATER ABSORBENT ELEMENT AND MANUFACTURING METHOD THEREFOR | |
IL181642A0 (en) | System and method for producing water | |
HK1105687A1 (en) | System and method for manufacturing | |
GB2426727B (en) | Manufacture method for inner-fin tube and manufacture device for the same | |
EP2085209A4 (en) | APPARATUS FOR MANUFACTURING TUBES, AND METHOD FOR RECONDITIONING EXISTING TUBES USING THE APPARATUS FOR MANUFACTURING TUBES | |
EP1807739A4 (en) | SYSTEM AND METHOD FOR LINE MONITORING | |
GB2440878B (en) | Nibble de-skew method, apparatus and system | |
HK1126835A1 (en) | Improved construction system, method and apparatus | |
EP1714359A4 (en) | SEMICONDUCTOR STRUCTURE OF IV-VI ORIENTED GROUPS (110) AND METHOD FOR PRODUCING AND USING SAME | |
HK1107322A1 (en) | Oval cross-section tube, method for the production and device for the use thereof | |
GB0521454D0 (en) | Devices, method and apparatus | |
EP1964145A4 (en) | DISTRIBUTED SYSTEM AND METHOD FOR DIAGNOSING NETWORK PROBLEMS | |
EP1907668A4 (en) | METHOD AND DEVICE FOR MONITORING STRUCTURAL CHANGES IN THE FLOOR TRACK | |
EP1886981A4 (en) | MOLDING HAVING WATER RETENTION PROPERTIES AND PROCESS FOR PRODUCING THE SAME | |
ZA200705296B (en) | Improved sterlising filter arrangement, apparatus & method | |
EP1865607A4 (en) | REDUCING DEVICE AND METHOD AND RECEIVING DEVICE | |
ZA200702673B (en) | System and method for producing water | |
TWI366746B (en) | Lithography system and lithography method using the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |