TWI372470B - Schottky device - Google Patents

Schottky device

Info

Publication number
TWI372470B
TWI372470B TW094116366A TW94116366A TWI372470B TW I372470 B TWI372470 B TW I372470B TW 094116366 A TW094116366 A TW 094116366A TW 94116366 A TW94116366 A TW 94116366A TW I372470 B TWI372470 B TW I372470B
Authority
TW
Taiwan
Prior art keywords
schottky device
schottky
Prior art date
Application number
TW094116366A
Other languages
English (en)
Chinese (zh)
Other versions
TW200610193A (en
Inventor
Vijay Parthasarathy
Vishnu K Khemka
Ronghua Zhu
Amitava Bose
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of TW200610193A publication Critical patent/TW200610193A/zh
Application granted granted Critical
Publication of TWI372470B publication Critical patent/TWI372470B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/811Combinations of field-effect devices and one or more diodes, capacitors or resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/637Lateral IGFETs having no inversion channels, e.g. buried channel lateral IGFETs, normally-on lateral IGFETs or depletion-mode lateral IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/113Isolations within a component, i.e. internal isolations
    • H10D62/115Dielectric isolations, e.g. air gaps
    • H10D62/116Dielectric isolations, e.g. air gaps adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
TW094116366A 2004-05-28 2005-05-19 Schottky device TWI372470B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/856,602 US7071518B2 (en) 2004-05-28 2004-05-28 Schottky device

Publications (2)

Publication Number Publication Date
TW200610193A TW200610193A (en) 2006-03-16
TWI372470B true TWI372470B (en) 2012-09-11

Family

ID=35459654

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116366A TWI372470B (en) 2004-05-28 2005-05-19 Schottky device

Country Status (6)

Country Link
US (1) US7071518B2 (https=)
EP (1) EP1749343A4 (https=)
JP (1) JP5290574B2 (https=)
CN (1) CN100539181C (https=)
TW (1) TWI372470B (https=)
WO (1) WO2005119913A2 (https=)

Families Citing this family (38)

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US6809386B2 (en) * 2002-08-29 2004-10-26 Micron Technology, Inc. Cascode I/O driver with improved ESD operation
JP4845410B2 (ja) * 2005-03-31 2011-12-28 株式会社リコー 半導体装置
US7728402B2 (en) 2006-08-01 2010-06-01 Cree, Inc. Semiconductor devices including schottky diodes with controlled breakdown
US8432012B2 (en) 2006-08-01 2013-04-30 Cree, Inc. Semiconductor devices including schottky diodes having overlapping doped regions and methods of fabricating same
EP2631951B1 (en) 2006-08-17 2017-10-11 Cree, Inc. High power insulated gate bipolar transistors
JP5358882B2 (ja) * 2007-02-09 2013-12-04 サンケン電気株式会社 整流素子を含む複合半導体装置
US7777257B2 (en) * 2007-02-14 2010-08-17 Freescale Semiconductor, Inc. Bipolar Schottky diode and method
US8835987B2 (en) 2007-02-27 2014-09-16 Cree, Inc. Insulated gate bipolar transistors including current suppressing layers
JP5109506B2 (ja) * 2007-07-03 2012-12-26 株式会社デンソー 半導体装置
US7692483B2 (en) * 2007-10-10 2010-04-06 Atmel Corporation Apparatus and method for preventing snap back in integrated circuits
US7745845B2 (en) * 2008-04-23 2010-06-29 Fairchild Semiconductor Corporation Integrated low leakage schottky diode
US8232558B2 (en) 2008-05-21 2012-07-31 Cree, Inc. Junction barrier Schottky diodes with current surge capability
US8085604B2 (en) * 2008-12-12 2011-12-27 Atmel Corporation Snap-back tolerant integrated circuits
US7808069B2 (en) * 2008-12-31 2010-10-05 Taiwan Semiconductor Manufacturing Co., Ltd. Robust structure for HVPW Schottky diode
US8294507B2 (en) 2009-05-08 2012-10-23 Cree, Inc. Wide bandgap bipolar turn-off thyristor having non-negative temperature coefficient and related control circuits
US8193848B2 (en) 2009-06-02 2012-06-05 Cree, Inc. Power switching devices having controllable surge current capabilities
US8629509B2 (en) 2009-06-02 2014-01-14 Cree, Inc. High voltage insulated gate bipolar transistors with minority carrier diverter
US8541787B2 (en) 2009-07-15 2013-09-24 Cree, Inc. High breakdown voltage wide band-gap MOS-gated bipolar junction transistors with avalanche capability
US8681518B2 (en) 2009-07-21 2014-03-25 Cree, Inc. High speed rectifier circuit
US8354690B2 (en) 2009-08-31 2013-01-15 Cree, Inc. Solid-state pinch off thyristor circuits
CN102088020B (zh) * 2009-12-08 2012-10-03 上海华虹Nec电子有限公司 功率mos晶体管内集成肖特基二极管的器件及制造方法
US9117739B2 (en) 2010-03-08 2015-08-25 Cree, Inc. Semiconductor devices with heterojunction barrier regions and methods of fabricating same
US8415671B2 (en) 2010-04-16 2013-04-09 Cree, Inc. Wide band-gap MOSFETs having a heterojunction under gate trenches thereof and related methods of forming such devices
US8415748B2 (en) 2010-04-23 2013-04-09 International Business Machines Corporation Use of epitaxial Ni silicide
US9142662B2 (en) 2011-05-06 2015-09-22 Cree, Inc. Field effect transistor devices with low source resistance
US9029945B2 (en) 2011-05-06 2015-05-12 Cree, Inc. Field effect transistor devices with low source resistance
US8618582B2 (en) 2011-09-11 2013-12-31 Cree, Inc. Edge termination structure employing recesses for edge termination elements
US8664665B2 (en) 2011-09-11 2014-03-04 Cree, Inc. Schottky diode employing recesses for elements of junction barrier array
US9373617B2 (en) 2011-09-11 2016-06-21 Cree, Inc. High current, low switching loss SiC power module
US8680587B2 (en) 2011-09-11 2014-03-25 Cree, Inc. Schottky diode
US9640617B2 (en) 2011-09-11 2017-05-02 Cree, Inc. High performance power module
WO2013036370A1 (en) 2011-09-11 2013-03-14 Cree, Inc. High current density power module comprising transistors with improved layout
JP2014027253A (ja) * 2012-06-22 2014-02-06 Toshiba Corp 整流回路
CN105789333A (zh) * 2014-12-25 2016-07-20 中芯国际集成电路制造(上海)有限公司 一种半导体器件及其制造方法和电子装置
US10573637B2 (en) * 2016-11-21 2020-02-25 Nexperia B.V. Carrier bypass for electrostatic discharge
WO2018191217A1 (en) * 2017-04-10 2018-10-18 Schottky Lsi, Inc. Schottky-cmos asynchronous logic cells
CN109088533A (zh) * 2018-09-17 2018-12-25 苏州芯智瑞微电子有限公司 一种具有可拓展反向击穿电压新型二极管拓扑结构
US12495576B2 (en) * 2022-05-03 2025-12-09 Fast SiC Semiconductor Incorporated Silicon carbide semiconductor device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227098A (en) * 1979-02-21 1980-10-07 General Electric Company Solid state relay
US4253162A (en) * 1979-08-28 1981-02-24 Rca Corporation Blocked source node field-effect circuitry
US5614755A (en) 1993-04-30 1997-03-25 Texas Instruments Incorporated High voltage Shottky diode
US5396085A (en) * 1993-12-28 1995-03-07 North Carolina State University Silicon carbide switching device with rectifying-gate
US5818084A (en) * 1996-05-15 1998-10-06 Siliconix Incorporated Pseudo-Schottky diode
JP3348711B2 (ja) * 1999-12-03 2002-11-20 セイコーエプソン株式会社 半導体装置およびその製造方法
JP2001230425A (ja) * 2000-02-17 2001-08-24 Seiko Epson Corp Mosダイオード回路
KR20030001823A (ko) * 2001-06-28 2003-01-08 주식회사 하이닉스반도체 반도체 소자

Also Published As

Publication number Publication date
WO2005119913A2 (en) 2005-12-15
JP2008501238A (ja) 2008-01-17
CN101142684A (zh) 2008-03-12
EP1749343A2 (en) 2007-02-07
JP5290574B2 (ja) 2013-09-18
CN100539181C (zh) 2009-09-09
TW200610193A (en) 2006-03-16
EP1749343A4 (en) 2007-11-14
US7071518B2 (en) 2006-07-04
WO2005119913A3 (en) 2007-05-24
US20050275055A1 (en) 2005-12-15

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees