TWI371652B - - Google Patents

Info

Publication number
TWI371652B
TWI371652B TW094136565A TW94136565A TWI371652B TW I371652 B TWI371652 B TW I371652B TW 094136565 A TW094136565 A TW 094136565A TW 94136565 A TW94136565 A TW 94136565A TW I371652 B TWI371652 B TW I371652B
Authority
TW
Taiwan
Application number
TW094136565A
Other versions
TW200619843A (en
Inventor
Junya Kusunoki
Takashi Hirano
Original Assignee
Sumitomo Bakelite Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co filed Critical Sumitomo Bakelite Co
Publication of TW200619843A publication Critical patent/TW200619843A/zh
Application granted granted Critical
Publication of TWI371652B publication Critical patent/TWI371652B/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3218Carbocyclic compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3171Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
  • Formation Of Insulating Films (AREA)
TW094136565A 2004-10-20 2005-10-19 Semiconductor wafer and semiconductor device TW200619843A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004306116 2004-10-20

Publications (2)

Publication Number Publication Date
TW200619843A TW200619843A (en) 2006-06-16
TWI371652B true TWI371652B (zh) 2012-09-01

Family

ID=36203032

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094136565A TW200619843A (en) 2004-10-20 2005-10-19 Semiconductor wafer and semiconductor device

Country Status (8)

Country Link
US (1) US7915467B2 (zh)
EP (1) EP1804291A4 (zh)
JP (1) JPWO2006043617A1 (zh)
KR (1) KR20070068387A (zh)
CN (1) CN100481404C (zh)
SG (1) SG156657A1 (zh)
TW (1) TW200619843A (zh)
WO (1) WO2006043617A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
UY30892A1 (es) 2007-02-07 2008-09-02 Smithkline Beckman Corp Inhibidores de la actividad akt
JP4765951B2 (ja) * 2007-02-08 2011-09-07 Jsr株式会社 絶縁膜を有する大型シリコンウエハおよびその製造方法
US7999354B2 (en) * 2007-06-12 2011-08-16 Sumitomo Bakelite Company, Ltd. Resin composition, filling material, insulating layer and semiconductor device
JP5520590B2 (ja) 2009-10-06 2014-06-11 富士フイルム株式会社 パターン形成方法、化学増幅型レジスト組成物及びレジスト膜
CN105440540A (zh) 2010-09-02 2016-03-30 默克专利股份有限公司 用于电子器件的夹层
PL2721106T3 (pl) 2011-06-17 2021-03-08 Materia, Inc. Promotory przyczepności i modyfikatory żelowania dla kompozycji do metatezy olefin
EP2814855B1 (en) * 2012-02-15 2017-07-26 Merck Patent GmbH Planarization layer for organic electronic devices
US9196559B2 (en) * 2013-03-08 2015-11-24 Taiwan Semiconductor Manufacturing Company, Ltd. Directly sawing wafers covered with liquid molding compound
US10224258B2 (en) * 2013-03-22 2019-03-05 Applied Materials, Inc. Method of curing thermoplastics with microwave energy
JP6318637B2 (ja) * 2014-01-17 2018-05-09 日立金属株式会社 高硬度材料のマルチワイヤソーによる切断方法
WO2015141525A1 (ja) * 2014-03-20 2015-09-24 住友ベークライト株式会社 感光性樹脂組成物、および電子装置
WO2016035615A1 (ja) * 2014-09-03 2016-03-10 株式会社ダイセル 塗布型絶縁膜形成用組成物
KR102083654B1 (ko) * 2016-07-29 2020-03-02 주식회사 엘지화학 고리형 올레핀계 공중합체 및 이의 제조 방법
KR20220061267A (ko) * 2016-10-19 2022-05-12 세키스이가가쿠 고교가부시키가이샤 유기 el 표시 소자용 봉지제
KR102392859B1 (ko) * 2016-10-19 2022-04-29 세키스이가가쿠 고교가부시키가이샤 유기 el 표시 소자용 봉지제

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2931297A1 (de) 1979-08-01 1981-02-19 Siemens Ag Waermebestaendige positivresists und verfahren zur herstellung waermebestaendiger reliefstrukturen
JPS6446862A (en) 1987-08-18 1989-02-21 Fujitsu Ltd Bus controller
JP3393453B2 (ja) 1994-02-02 2003-04-07 ジェイエスアール株式会社 光半導体の封止方法
JP4754039B2 (ja) * 1997-06-20 2011-08-24 日本ゼオン株式会社 電子部品オーバーコート材
JPH11271973A (ja) * 1998-01-19 1999-10-08 Hitachi Chem Co Ltd 感光性樹脂組成物及びこれを用いた半導体素子
JP2003075125A (ja) * 2001-09-06 2003-03-12 Okamoto Machine Tool Works Ltd ウエハの厚み測定方法および厚み測定装置
JP2003209104A (ja) * 2002-01-15 2003-07-25 Hitachi Chemical Dupont Microsystems Ltd 半導体装置及びその材料
JP2003268188A (ja) * 2002-03-19 2003-09-25 Jsr Corp 半導体装置およびその製造方法
US7022790B2 (en) * 2002-07-03 2006-04-04 Sumitomo Bakelite Company, Ltd. Photosensitive compositions based on polycyclic polymers
CN101095082B (zh) * 2003-02-20 2012-08-08 普罗梅鲁斯有限责任公司 光致抗蚀剂组合物用的溶解速率改性剂
JP2004285129A (ja) * 2003-03-19 2004-10-14 Nippon Zeon Co Ltd 感光性ポリイミド前駆体、感光性ポリイミド樹脂組成物、及び該樹脂組成物を用いた半導体素子の製造方法
US7875686B2 (en) * 2004-08-18 2011-01-25 Promerus Llc Polycycloolefin polymeric compositions for semiconductor applications
TW200628981A (en) * 2004-09-29 2006-08-16 Sumitomo Bakelite Co Semiconductor device

Also Published As

Publication number Publication date
EP1804291A4 (en) 2010-09-01
EP1804291A1 (en) 2007-07-04
SG156657A1 (en) 2009-11-26
TW200619843A (en) 2006-06-16
CN101044617A (zh) 2007-09-26
US7915467B2 (en) 2011-03-29
JPWO2006043617A1 (ja) 2008-05-22
WO2006043617A1 (ja) 2006-04-27
CN100481404C (zh) 2009-04-22
KR20070068387A (ko) 2007-06-29
US20080090176A1 (en) 2008-04-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees