TWI368326B - Thin film transistor array panel and manufacturing method thereof - Google Patents
Thin film transistor array panel and manufacturing method thereofInfo
- Publication number
- TWI368326B TWI368326B TW093137931A TW93137931A TWI368326B TW I368326 B TWI368326 B TW I368326B TW 093137931 A TW093137931 A TW 093137931A TW 93137931 A TW93137931 A TW 93137931A TW I368326 B TWI368326 B TW I368326B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- thin film
- film transistor
- transistor array
- array panel
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030088622A KR101012792B1 (ko) | 2003-12-08 | 2003-12-08 | 박막 트랜지스터 표시판과 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200529452A TW200529452A (en) | 2005-09-01 |
TWI368326B true TWI368326B (en) | 2012-07-11 |
Family
ID=34737862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093137931A TWI368326B (en) | 2003-12-08 | 2004-12-08 | Thin film transistor array panel and manufacturing method thereof |
Country Status (5)
Country | Link |
---|---|
US (1) | US7279371B2 (zh) |
JP (1) | JP4731897B2 (zh) |
KR (1) | KR101012792B1 (zh) |
CN (1) | CN100459167C (zh) |
TW (1) | TWI368326B (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1139837C (zh) * | 1998-10-01 | 2004-02-25 | 三星电子株式会社 | 液晶显示器用薄膜晶体管阵列基板及其制造方法 |
KR100980020B1 (ko) * | 2003-08-28 | 2010-09-03 | 삼성전자주식회사 | 박막 트랜지스터 표시판과 그 제조 방법 |
US7518196B2 (en) | 2005-02-23 | 2009-04-14 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
JP4565572B2 (ja) * | 2006-09-05 | 2010-10-20 | 株式会社フューチャービジョン | 液晶表示パネルの製造方法 |
CN100592181C (zh) * | 2007-05-30 | 2010-02-24 | 北京京东方光电科技有限公司 | 一种可修复的像素结构 |
US8101442B2 (en) * | 2008-03-05 | 2012-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing EL display device |
KR20090096226A (ko) * | 2008-03-07 | 2009-09-10 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
TWI374510B (en) * | 2008-04-18 | 2012-10-11 | Au Optronics Corp | Gate driver on array of a display and method of making device of a display |
US8741702B2 (en) * | 2008-10-24 | 2014-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR20120058106A (ko) | 2010-11-29 | 2012-06-07 | 삼성전자주식회사 | 액정 표시 장치 및 그 제조 방법 |
US10199507B2 (en) * | 2012-12-03 | 2019-02-05 | Lg Display Co., Ltd. | Thin film transistor, display device and method of manufacturing the same |
KR102093192B1 (ko) * | 2012-12-03 | 2020-03-25 | 엘지디스플레이 주식회사 | 박막 트랜지스터와 디스플레이 장치 및 그들의 제조방법 |
KR102290801B1 (ko) * | 2013-06-21 | 2021-08-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR102172972B1 (ko) | 2014-02-26 | 2020-11-03 | 삼성디스플레이 주식회사 | 박막 트랜지스터 및 그의 제조방법 |
CN105609563B (zh) * | 2016-03-10 | 2018-11-23 | 深圳市华星光电技术有限公司 | 薄膜晶体管及其制造方法 |
CN110459607B (zh) * | 2019-08-08 | 2021-08-06 | Tcl华星光电技术有限公司 | 薄膜晶体管阵列基板 |
KR20220010622A (ko) | 2020-07-16 | 2022-01-26 | 삼성디스플레이 주식회사 | 표시 장치 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6190188A (ja) * | 1984-10-09 | 1986-05-08 | セイコーインスツルメンツ株式会社 | 薄膜表示装置 |
US4889983A (en) * | 1987-11-24 | 1989-12-26 | Mitsubishi Denki Kabushiki Kaisha | Image sensor and production method thereof |
JPH02109341A (ja) * | 1988-10-19 | 1990-04-23 | Fuji Xerox Co Ltd | 薄膜トランジスタの製造方法 |
CA1313563C (en) * | 1988-10-26 | 1993-02-09 | Makoto Sasaki | Thin film transistor panel |
US5153754A (en) * | 1989-06-30 | 1992-10-06 | General Electric Company | Multi-layer address lines for amorphous silicon liquid crystal display devices |
JP2655126B2 (ja) * | 1995-03-31 | 1997-09-17 | 日本電気株式会社 | 薄膜トランジスタの製造方法 |
JP2762964B2 (ja) * | 1995-08-30 | 1998-06-11 | 日本電気株式会社 | 液晶表示装置 |
US5879959A (en) * | 1997-01-17 | 1999-03-09 | Industrial Technology Research Institute | Thin-film transistor structure for liquid crystal display |
JP3566028B2 (ja) * | 1997-05-15 | 2004-09-15 | シャープ株式会社 | 液晶表示装置及びその製造方法 |
KR100495797B1 (ko) * | 1997-05-30 | 2005-09-28 | 삼성전자주식회사 | 버퍼층을 이용한 액정 표시 장치용 박막 트랜지스터 기판 및그 제조 방법 |
JP3980156B2 (ja) * | 1998-02-26 | 2007-09-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型表示装置 |
JP3125872B2 (ja) * | 1998-09-14 | 2001-01-22 | 日本電気株式会社 | アクティブマトリクス型液晶表示装置 |
KR100356834B1 (ko) * | 1999-06-25 | 2002-10-18 | 주식회사 현대 디스플레이 테크놀로지 | 고개구율 액정 표시 장치 및 그 제조방법 |
JP3498020B2 (ja) * | 1999-09-29 | 2004-02-16 | Nec液晶テクノロジー株式会社 | アクティブマトリックス基板及びその製造方法 |
KR100366768B1 (ko) * | 2000-04-19 | 2003-01-09 | 삼성전자 주식회사 | 배선의 접촉부 및 그의 제조 방법과 이를 포함하는 박막 트랜지스터 기판 및 그 제조 방법 |
JP2002107762A (ja) * | 2000-10-02 | 2002-04-10 | Sharp Corp | 液晶用マトリクス基板の製造方法 |
JP2002148659A (ja) * | 2000-11-10 | 2002-05-22 | Hitachi Ltd | 液晶表示装置 |
JP2002299627A (ja) * | 2001-03-29 | 2002-10-11 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタの製造方法及びそれを用いた液晶表示装置 |
-
2003
- 2003-12-08 KR KR1020030088622A patent/KR101012792B1/ko active IP Right Grant
-
2004
- 2004-12-08 JP JP2004354846A patent/JP4731897B2/ja not_active Expired - Fee Related
- 2004-12-08 US US11/008,729 patent/US7279371B2/en active Active
- 2004-12-08 TW TW093137931A patent/TWI368326B/zh not_active IP Right Cessation
- 2004-12-08 CN CNB2004100970254A patent/CN100459167C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20050055414A (ko) | 2005-06-13 |
KR101012792B1 (ko) | 2011-02-08 |
US20050158925A1 (en) | 2005-07-21 |
US7279371B2 (en) | 2007-10-09 |
TW200529452A (en) | 2005-09-01 |
CN100459167C (zh) | 2009-02-04 |
JP2005173606A (ja) | 2005-06-30 |
JP4731897B2 (ja) | 2011-07-27 |
CN1627168A (zh) | 2005-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |