TWI367193B - - Google Patents

Info

Publication number
TWI367193B
TWI367193B TW097137615A TW97137615A TWI367193B TW I367193 B TWI367193 B TW I367193B TW 097137615 A TW097137615 A TW 097137615A TW 97137615 A TW97137615 A TW 97137615A TW I367193 B TWI367193 B TW I367193B
Authority
TW
Taiwan
Application number
TW097137615A
Other languages
Chinese (zh)
Other versions
TW200925089A (en
Inventor
Kensuke Hirata
Yoshiyuki Wada
Kai Tanaka
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW200925089A publication Critical patent/TW200925089A/zh
Application granted granted Critical
Publication of TWI367193B publication Critical patent/TWI367193B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
TW97137615A 2007-10-04 2008-09-30 Floating device and floating carrier TW200925089A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007261386 2007-10-04

Publications (2)

Publication Number Publication Date
TW200925089A TW200925089A (en) 2009-06-16
TWI367193B true TWI367193B (ko) 2012-07-01

Family

ID=40526041

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97137615A TW200925089A (en) 2007-10-04 2008-09-30 Floating device and floating carrier

Country Status (5)

Country Link
JP (1) JP5239606B2 (ko)
KR (2) KR20100054857A (ko)
CN (2) CN101815662B (ko)
TW (1) TW200925089A (ko)
WO (1) WO2009044612A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581611B2 (ja) * 2009-06-02 2014-09-03 株式会社Ｉｈｉ 浮上搬送装置及び浮上ユニット
GB2471712A (en) * 2009-07-10 2011-01-12 De Beers Centenary AG Gemstone alignment system
CN105571938A (zh) * 2016-01-14 2016-05-11 西安交通大学 一种水浮式超薄玻璃基板测量平台
CN111285107B (zh) * 2020-02-24 2020-09-15 江苏科技大学 无接触移动操作装置及控制方法
JP7437186B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121524A (en) * 1981-01-16 1982-07-29 Matsushita Electric Ind Co Ltd Float-system transport apparatus
JPS5947457B2 (ja) * 1982-11-15 1984-11-19 株式会社東芝 半導体ウェファ−の洗浄方法
US5222840A (en) * 1991-06-21 1993-06-29 The Stolle Corporation Double plenum air conveyor/accumulator
KR960032667A (ko) * 1995-02-28 1996-09-17 김광호 리드프레임의 이송방법
JP4251279B2 (ja) * 2003-04-14 2009-04-08 株式会社ダイフク 板状体搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ 浮上装置および搬送装置
WO2007088614A1 (ja) * 2006-02-01 2007-08-09 Hirata Corporation ノズル板及び該ノズル板を用いた気流浮上装置

Also Published As

Publication number Publication date
CN101643152A (zh) 2010-02-10
CN101815662A (zh) 2010-08-25
KR20120003627U (ko) 2012-05-24
WO2009044612A1 (ja) 2009-04-09
JP5239606B2 (ja) 2013-07-17
TW200925089A (en) 2009-06-16
CN101643152B (zh) 2013-06-26
CN101815662B (zh) 2013-02-20
JP2009105377A (ja) 2009-05-14
KR20100054857A (ko) 2010-05-25

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