TWI366552B - Micro-oscillation element and array of micro oscillation elements - Google Patents

Micro-oscillation element and array of micro oscillation elements

Info

Publication number
TWI366552B
TWI366552B TW097122151A TW97122151A TWI366552B TW I366552 B TWI366552 B TW I366552B TW 097122151 A TW097122151 A TW 097122151A TW 97122151 A TW97122151 A TW 97122151A TW I366552 B TWI366552 B TW I366552B
Authority
TW
Taiwan
Prior art keywords
micro
oscillation
array
elements
oscillation element
Prior art date
Application number
TW097122151A
Other languages
English (en)
Other versions
TW200902430A (en
Inventor
Osamu Tsuboi
Norinao Kouma
Hiromitsu Soneda
Hisao Okuda
Yoshihiro Mizuno
Tsuyoshi Matsumoto
Ippei Sawaki
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of TW200902430A publication Critical patent/TW200902430A/zh
Application granted granted Critical
Publication of TWI366552B publication Critical patent/TWI366552B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
TW097122151A 2007-06-29 2008-06-13 Micro-oscillation element and array of micro oscillation elements TWI366552B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173078A JP4477659B2 (ja) 2007-06-29 2007-06-29 マイクロ揺動素子およびマイクロ揺動素子アレイ

Publications (2)

Publication Number Publication Date
TW200902430A TW200902430A (en) 2009-01-16
TWI366552B true TWI366552B (en) 2012-06-21

Family

ID=39827499

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122151A TWI366552B (en) 2007-06-29 2008-06-13 Micro-oscillation element and array of micro oscillation elements

Country Status (6)

Country Link
US (1) US8018118B2 (zh)
EP (1) EP2008964B1 (zh)
JP (1) JP4477659B2 (zh)
KR (1) KR100945122B1 (zh)
CN (1) CN101334526A (zh)
TW (1) TWI366552B (zh)

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JP4138736B2 (ja) * 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
JP4477659B2 (ja) * 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
DE102008041757B4 (de) * 2008-09-02 2019-01-03 Robert Bosch Gmbh Herstellungsverfahren für eine Rotationssensorvorrichtung und Rotationssensorvorrichtung
JP5347628B2 (ja) * 2009-03-26 2013-11-20 富士通株式会社 マイクロ構造体
JP5344035B2 (ja) * 2009-03-31 2013-11-20 富士通株式会社 マイクロ可動素子アレイおよび通信機器
JP5285030B2 (ja) * 2010-06-11 2013-09-11 日本電信電話株式会社 マイクロミラー素子、ミラーアレイおよびその製造方法
EP2447755B1 (en) * 2010-10-26 2019-05-01 Lumentum Operations LLC A pivotable MEMS device
JP5798992B2 (ja) * 2012-08-31 2015-10-21 アオイ電子株式会社 静電誘導型変換装置およびｄｃ−ｄｃコンバータ
JP2016110008A (ja) * 2014-12-10 2016-06-20 スタンレー電気株式会社 二軸光偏向器
US10175344B2 (en) * 2015-12-08 2019-01-08 The Boeing Company Light detection and ranging (LIDAR) scanning systems and methods

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WO1998044571A1 (en) * 1997-04-01 1998-10-08 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6771850B1 (en) * 2000-11-18 2004-08-03 Agere Systems Inc. Article comprising a MEMS device and method therefor
JP2003019700A (ja) 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
KR100469062B1 (ko) * 2002-08-13 2005-02-02 한국전자통신연구원 광통신용 주사 미세거울 및 그 제조 방법
JP2004082288A (ja) * 2002-08-27 2004-03-18 Matsushita Electric Works Ltd 静電型アクチュエータ及びそれを用いた光スイッチ
JP4353399B2 (ja) * 2003-01-17 2009-10-28 株式会社リコー 振動ミラー
JP2004301865A (ja) 2003-03-28 2004-10-28 Canon Inc アクチュエーター
JP2004341364A (ja) 2003-05-16 2004-12-02 Ricoh Co Ltd 振動ミラーとその製造方法、光走査モジュール、光書込装置、画像形成装置
JP4073886B2 (ja) * 2004-03-30 2008-04-09 アンリツ株式会社 可変波長光源
JP4464186B2 (ja) * 2004-04-20 2010-05-19 富士通株式会社 マイクロ揺動素子
KR100586967B1 (ko) * 2004-05-28 2006-06-08 삼성전기주식회사 회전형 빗살 구동 액츄에이터 및 이를 이용한 가변 광감쇄기
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JP4138736B2 (ja) 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
JP4365308B2 (ja) * 2004-12-02 2009-11-18 富士通株式会社 マイクロ揺動素子
JP4573676B2 (ja) * 2005-03-11 2010-11-04 富士通株式会社 櫛歯電極対形成方法
JP4598795B2 (ja) * 2007-03-30 2010-12-15 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
JP4477659B2 (ja) * 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
EP2216288A4 (en) * 2007-10-31 2013-07-03 Fujitsu Ltd MICROMOVABLE ELEMENT AND MICROMANUAL ELEMENT ARRAY
JP5056633B2 (ja) * 2008-07-14 2012-10-24 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5029551B2 (ja) * 2008-09-18 2012-09-19 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5176146B2 (ja) * 2008-10-08 2013-04-03 富士通株式会社 マイクロ可動素子および光スイッチング装置
JP5239722B2 (ja) * 2008-10-10 2013-07-17 富士通株式会社 マイクロ可動素子および光スイッチング装置

Also Published As

Publication number Publication date
KR100945122B1 (ko) 2010-03-02
CN101334526A (zh) 2008-12-31
EP2008964B1 (en) 2014-11-05
US20090001847A1 (en) 2009-01-01
JP4477659B2 (ja) 2010-06-09
JP2009012082A (ja) 2009-01-22
EP2008964A3 (en) 2010-08-25
US8018118B2 (en) 2011-09-13
KR20090004540A (ko) 2009-01-12
TW200902430A (en) 2009-01-16
EP2008964A2 (en) 2008-12-31

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