TWI364317B - - Google Patents

Download PDF

Info

Publication number
TWI364317B
TWI364317B TW98103275A TW98103275A TWI364317B TW I364317 B TWI364317 B TW I364317B TW 98103275 A TW98103275 A TW 98103275A TW 98103275 A TW98103275 A TW 98103275A TW I364317 B TWI364317 B TW I364317B
Authority
TW
Taiwan
Prior art keywords
exhaust gas
cylindrical wall
chamber
gas
forming
Prior art date
Application number
TW98103275A
Other languages
English (en)
Chinese (zh)
Other versions
TW201029726A (en
Inventor
Akifumi Nishiwaki
Toshitada Shimozaki
Original Assignee
Akifumi Nishiwaki
Toshitada Shimozaki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akifumi Nishiwaki, Toshitada Shimozaki filed Critical Akifumi Nishiwaki
Priority to TW98103275A priority Critical patent/TW201029726A/zh
Publication of TW201029726A publication Critical patent/TW201029726A/zh
Application granted granted Critical
Publication of TWI364317B publication Critical patent/TWI364317B/zh

Links

Landscapes

  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
TW98103275A 2009-02-02 2009-02-02 An exhausted gas processing method and its device TW201029726A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98103275A TW201029726A (en) 2009-02-02 2009-02-02 An exhausted gas processing method and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98103275A TW201029726A (en) 2009-02-02 2009-02-02 An exhausted gas processing method and its device

Publications (2)

Publication Number Publication Date
TW201029726A TW201029726A (en) 2010-08-16
TWI364317B true TWI364317B (ja) 2012-05-21

Family

ID=44854115

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98103275A TW201029726A (en) 2009-02-02 2009-02-02 An exhausted gas processing method and its device

Country Status (1)

Country Link
TW (1) TW201029726A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738053B (zh) * 2018-09-25 2021-09-01 日商國際電氣股份有限公司 清潔方法、半導體裝置之製造方法、基板處理裝置及記錄媒體

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738053B (zh) * 2018-09-25 2021-09-01 日商國際電氣股份有限公司 清潔方法、半導體裝置之製造方法、基板處理裝置及記錄媒體

Also Published As

Publication number Publication date
TW201029726A (en) 2010-08-16

Similar Documents

Publication Publication Date Title
KR101995211B1 (ko) 배기 가스 처리 장치
JP4937998B2 (ja) Ｈｃｄガスの除害方法とその装置
TW201240718A (en) Ammonia detoxification device
TWI364317B (ja)
JP6758318B2 (ja) 放射バーナー
CA1179827A (en) Chlorinator furnace and method for producing tetrachloride of such metals as titanium and zirconium
JP2004216246A (ja) 高周波プラズマ処理装置及び高周波プラズマ処理方法
JP2009034636A (ja) 排ガス処理方法およびその装置
JPS6157222A (ja) ハロゲンを含有する有害物質を浄化する装置
JP2015116568A (ja) 反応装置
JP6970570B2 (ja) 溶融塩電解槽の乾燥方法
WO2022009313A1 (ja) ガス処理炉及びこれを用いた排ガス処理装置
KR101142184B1 (ko) 플라즈마 토치
WO2022101981A1 (ja) ガス処理炉及びこれを用いた排ガス処理装置
JP2006207864A (ja) 燃焼脱臭装置、及び燃焼脱臭方法
TW200820838A (en) Plasma arc torch and scrubber using the same
JP2010240595A (ja) 排ガス除害装置
KR100505099B1 (ko) 수정제조장치
JP2005336293A (ja) 炭化装置
CN214582403U (zh) 高温炉和具有其的高温加工系统
JP2000167351A (ja) 排オゾン含有ガス分解装置
JP6309877B2 (ja) 排ガス処理装置
KR101542297B1 (ko) 유해가스를 처리하기 위한 방법 및 장치
JP2001232381A5 (ja)
JPH11169663A (ja) 高温腐食性ガス体の除害装置及び除害方法

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees