JP6309877B2 - 排ガス処理装置 - Google Patents
排ガス処理装置 Download PDFInfo
- Publication number
- JP6309877B2 JP6309877B2 JP2014220226A JP2014220226A JP6309877B2 JP 6309877 B2 JP6309877 B2 JP 6309877B2 JP 2014220226 A JP2014220226 A JP 2014220226A JP 2014220226 A JP2014220226 A JP 2014220226A JP 6309877 B2 JP6309877 B2 JP 6309877B2
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- Prior art keywords
- gas
- tube
- reaction tube
- reaction
- exhaust gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000006243 chemical reaction Methods 0.000 claims description 76
- 238000010926 purge Methods 0.000 claims description 28
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 146
- 238000000034 method Methods 0.000 description 8
- 150000002222 fluorine compounds Chemical class 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 150000001805 chlorine compounds Chemical class 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
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- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
Claims (3)
- トーチ部で発生させたプラズマジェットによって排ガス中の有害成分を処理する排ガス処理装置に置いて、前記プラズマジェットを発生させるトーチ部と、該トーチ部を天板の中央に設けたプラズマジェット噴射口の下方に配置した反応筒とを備え、該反応筒は、前記トーチ部の軸線上に軸線を有する反応管と、該反応管の外周に配置された内管と、該内管の外周に配置された外管とを有し、前記反応管の内部に反応室を、前記反応管と前記内管との間に被処理ガス導入室を、前記内管と前記外管との間にパージガス導入室を、それぞれ設けた三重管構造で形成し、前記反応管の下部を前記反応筒の底板を貫通させて処理ガス導出部とし、前記反応管の上端部に、被処理ガス導入室から反応室に被処理ガスを流入させる被処理ガス流入部を設け、前記内管の下部に、被処理ガス導入室に被処理ガスを導入する被処理ガス導入部を設けるとともに、前記外管に、パージガス導入室にパージガスを導入するパージガス導入部を設けたことを特徴とする排ガス処理装置。
- 前記被処理ガス導入部は、前記被処理ガス導入室に内管の接線方向から前記被処理ガス導入室内に導入することを特徴とする請求項1記載の排ガス処理装置。
- 前記反応管は、ニッケル合金又はセラミックスで形成されていることを特徴とする請求項1又は2記載の排ガス処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014220226A JP6309877B2 (ja) | 2014-10-29 | 2014-10-29 | 排ガス処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2014220226A JP6309877B2 (ja) | 2014-10-29 | 2014-10-29 | 排ガス処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016083648A JP2016083648A (ja) | 2016-05-19 |
JP6309877B2 true JP6309877B2 (ja) | 2018-04-11 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014220226A Active JP6309877B2 (ja) | 2014-10-29 | 2014-10-29 | 排ガス処理装置 |
Country Status (1)
Country | Link |
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JP (1) | JP6309877B2 (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5814978Y2 (ja) * | 1975-08-27 | 1983-03-25 | トウカイデンキトソウ カブシキガイシヤ | ダツシユウソウチ |
JPH0240475Y2 (ja) * | 1985-08-29 | 1990-10-29 | ||
AT402338B (de) * | 1988-08-11 | 1997-04-25 | Grimma Masch Anlagen Gmbh | Verfahren zur vernichtung toxischer abprodukte sowie plasmatischer reaktor zur durchführung des verfahrens |
JP4570506B2 (ja) * | 2005-04-20 | 2010-10-27 | カンケンテクノ株式会社 | プラズマ除害機および当該プラズマ除害機を用いた排ガス処理システム |
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2014
- 2014-10-29 JP JP2014220226A patent/JP6309877B2/ja active Active
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JP2016083648A (ja) | 2016-05-19 |
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