TW200820838A - Plasma arc torch and scrubber using the same - Google Patents

Abstract

Provided are a plasma arc torch and a scrubber using the same. The plasma arc torch includes a cathode rod for discharging a thermal electron depending on an applied voltage, a first anode electrode spaced apart from the cathode rod by a predetermined distance and generating arc discharge when the voltage is applied, and a second anode electrode disposed under the first anode electrode, maintaining transfer arc discharge generated from the cathode rod and the first anode electrode to process waste gas, and having better thermal resistance than the first anode electrode. In addition, the scrubber using a plasma arc torch includes the plasma arc torch, a chamber for providing a closed space under the plasma arc torch to purify the waste gas and having a discharge port for discharging the purified waste gas, and a cooling part coupled with a lower side of the chamber and cooling the chamber.

Description

200820838 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a plasma arc torch and a scrubber using the plasma arc torch, and more particularly to a high temperature flame for use in arc discharge A plasma arc torch and a scrubber for treating exhaust gas using a flame generated from the plasma arc torch. [Prior Art]

Generally, a plasma arc torch converts a gas generated by a plasma into a plasma state to generate a high temperature flame by using an arc discharge between a cathode electrode and an anode electrode. The plasma arc torch can also control the temperature of the flame. As described above, since the plasma arc torch generates a flame caused by an arc discharge between the two electrodes, a high temperature flame must be generated from a portion in contact with an electrode, and the electrode is likely to be damaged by flame and arc discharge. Most conventional plasma arc torches use copper anode electrodes, and at the same time there may be structural differences. These structural differences will be described in detail with reference to the plasma arc torch. ~, 丨, must, 丨 work back to Russia. Referring to Fig. 1 's hai zhizhi plasma arc torch includes a cathode rod which has a pointed end formed at the t end, a main body 2 in which a tube is disposed, a cooling water circulation pipe (not shown), etc. 3 It is connected to the other end of the main body 2; the annular anode electrode is at the anode electrode 3 and the cathode: = electric: gas introduction tube. It uses a plasma gas introduced between 杵1. The cathode rod and the anode electrode 3 are spaced apart from each other by a working distance. When the cathode potential difference is between the buckle 1 and the % electrode 3, an arc is generated between the tip of the cathode rod 1 and the anode electrode 3 of the 121855.doc 200820838. Unlike the other discharges, the arc discharge described above is performed in such a manner that the hot metal is discharged from the cathode rod 1 to cause a strong current between the anode electrode 3 and the cathode rod 1 in a state where the potential difference between the anode electrode 3 and the cathode rod is low. flow. This - the space between the cathode rod 1 and the anode electrode 3 is in a plasma state. The current is continuous and the temperature of the plasma is in the range of 3 GGGt to 6 GGG °C. 〇 In particular, the temperature adjacent to the anode electrode 3 is high, and the electrode material is partially sublimated. The electropolymerized gas supplied between the cathode rod 1 and the anode electrode 3 is converted into an electropolymerized state via the plasma gas introduction pipe 4 to generate a fire caused by the high temperature. Fig. 2 is a view showing an enlarged arc movement in a conventional transfer type plasma arc torch of Fig. 1. Referring to Fig. 2, in a conventional transfer type plasma torch, it is produced by discharging electrons to an adjacent point A of the anode electrode 3 which is closest to the tip of the cathode rod i. The arc is arced and the arc moves vertically along the arc fixed surface B of the anode electrode 3. As above: The 'anode electrode 3' may be damaged due to the generation of the temperature toward the anode electrode 3 adjacent to the plasma arc torch. Therefore, after a short period of about fourteen hours, the anode electrode is replaced with a new anode electrode. In particular, in addition to the adjacent point A, the arc is likely to be damaged by the surface B (the generated arc moves along it). The damaged damaged anode electrode 3 has an annular member, and only a portion of the adjacent point A exists in the annular member. 0 121855.doc 200820838 The arc torch uses a cathode formed of tungsten so that the anode electrode 3 is used as above. According to the conventional plasma electrode rod 1 and the anode electrode 3 formed of copper, the life may be reduced to increase the maintenance cost. In addition, the application of the conventional electric arc torch torch Yang Yang Lei ^ f should stop the exhaust gas during the mother-short exchange cycle of the pole electrode 3 of the plasma arc torch. Figure 3 is a schematic cross-sectional view of another known plasma arc torch.

When the above configuration is applied to the Thunderbolt < W仏 electric water arc torch or scrubber, the velocity can be increased more than the degassing rate in Fig. 1 . 4 Figure $ from the % plasma arc torch similar to the force of the electric arc torch, except for the external components of the anode electrode 3 flared outward. , 'Exhaust gas flow to handle larger gases is not directly exposed to the arc. However, discharge in the above gas supply structure can result in a reduction in efficiency. Figure 4 is a schematic cross-section of a conventional scrubber using the plasma arc torch of Figure 0. Referring to Figure 4, the conventional scrubber includes a plasma arc torch 10 for heating exhaust gas to purify exhaust gas for providing electro-convergence The arc flame moment H) is performed: an exhaust gas treatment space and a discharge σ 3〇 for discharging the purified gas to the outside, a chamber 2G′ having an open bottom, and a cooling water supply port connected to the open bottom of the chamber 2G The cooling member 4A supplies cooling water, cooling water supplied by the heat exchange, and discharges the cooling water to the lower center via the cooling water supply port. Hereinafter, the configuration of the conventional scrubber using the plasma arc torch will be described in detail. And operation. ° 121855.doc 200820838 A conventional scrubber using a plasma arc torch is used to purify the exhaust gas using heat generated from the plasma electric 5 melon torch shown in Fig. 1 or Fig. 3. The exhaust gas is supplied via the plasma gas introduction pipe 4 described in Figs. 1 and 3, and the exhaust gas is treated by arc discharge due to a potential difference between the cathode rod 1 and the anode electrode 3. That is, the arc discharge increases the ambient temperature of the anode electrode 3 to convert the ring air to the plasma state, and via the electricity as the exhaust gas supply pipe.

The exhaust gas supplied from the slurry gas supply pipe 4 is purified by a flame generated around the anode electrode 3 and adjacent to the anode electrode 3. In order to maintain the environment in which the purification is performed, the plasma arc torch 1 is fixed to the chamber 2 to ensure the purification space in the chamber 20. The purified exhaust gas is discharged to the outside through the discharge port 30 of the chamber 20. During this process, the temperature in the chamber 2〇 is increased, and in order to cool the chamber, the cooling member 40 is installed at the lower end of the chamber 2〇. The cold portion member 40 includes a cooling water introduction pipe 411 through which the cooling water is introduced, a member 42 for circulating the lower ends of the cooling waters I to 20 introduced through the cooling water intake pipe 41, and a center discharge pipe 43, It is used to discharge the cooling water supplied to the one piece 42 and overflowed therefrom to the outside. In the cooling member 40, a certain amount of "p water" is continuously supplied via the cooling water introduction pipe 41 to discharge the cooling overflow from the circulation member 42 via the center discharge f43 to the outside and the cooling chamber 2G is supplied to the circulation member 42 from the nearest and continuously. In the cooling water cooling, and the tube should also cool the plasma arc torch 1 〇, but due to the electric arcing (4) / self-cooling structure, there is no separate cooling device. 121855.doc 200820838 In the use of electric arc torch In the conventional stripper, dust generated during the exhaust gas treatment process may be deposited on the circulation member 42 to prevent the cooling water from being discharged from the circulation member 42 to the center discharge pipe 43. Under the Thai condition, the supply may be abnormally supplied and discharged. The water thus significantly reduces the cooling effect of the chamber 20. Therefore, after a certain period of use, the circulation member 42 should be cleaned to remove dust. At this time, since the exhaust gas treatment should be interrupted, the productivity may be reduced. The cooling water overflowing from the circulation member 42 toward the center discharge port 43 is sputtered into the chamber 20 to generate steam, thereby contaminating the inside of the chamber 2〇. [Technical Problem] In order to solve the problems, an object of the present invention is to provide a plasma arc torch capable of prolonging the life of an anode electrode while generating an arc discharge, and a scrubber using the same. Another object is to provide a scrubber using a plasma arc torch capable of handling a large amount of gas and increasing processing efficiency. It is still another object of the present invention to provide a cooling water capable of preventing dust from being deposited on a cooling member and introducing overflowing water into the chamber. A scrubber using a plasma arc torch in a chamber. [Technical Solution] The above and/or other aspects of the present invention can be achieved by providing a plasma arc torch including the following: a cathode rod for viewing Determining the discharge of the hot electrons by the applied voltage; the first anode electrode is spaced apart from the cathode rod by a predetermined distance of 121855.doc -10- 200820838 and generates an arc discharge when the electric dust is applied; the second anode electrode is disposed at the second - under the anode electrode, the arc discharge generated from the cathode rod and the first anode electrode is kept transferred, and it has better thermal resistance than the first anode electrode; a plasma gas supply pipe for supplying a gas generated by the plasma between the cathode rod and the first anode electrode. The present invention can be achieved by providing an electro-convex arc torch including the following. Another aspect is a cathode rod for discharging 〇# electrons depending on an applied voltage; a first-anode electrode spaced apart from the cathode rod by a predetermined distance and generating an arc discharge when electricity is applied; a gas supply pipe disposed under the first anode electrode to maintain an arc discharge generated from the cathode rod and the first anode electrode, and to supply a gas generated by the plasma, wherein the plasma arc torch inlet includes a ratio anode The electrode is better "the first electrode of the thermal resistance" - a further embodiment of the invention can be achieved by providing a scrubber comprising a plasma arc torch as described below: a plasma arc torch comprising a cathode: : 〇 which is used to discharge hot electrons depending on the applied voltage, the first anode electrode being spaced apart from the cathode rod by a predetermined distance and generating an arc discharge when applying a voltage, the second anode electrode Disposed under the first anode electrode to keep the arc discharge generated from the cathode rod and the first anode electrode, and which has better thermal resistance than the first anode electrode, and an exhaust gas supply tube for generating plasma a gas supply between the cathode rod and the first anode electrode; a chamber for providing a closed space under the plasma arc torch to purify the exhaust gas and having a discharge port for discharging the purified exhaust gas; and a cooling component, It is coupled to the lower side of the chamber and cools the chamber. 121855.doc -11 - 200820838 In addition, another aspect of the present invention can be achieved by providing a washing purifier using a plasma arc torch as described below, including a plasma pole, which includes a pole For discharging the hot electrons depending on the applied voltage, the first anode electrode is spaced apart from the cathode rod by a predetermined distance and generates an arc discharge when a voltage is applied, and the plasma generating gas supply tube is disposed at the first anode electrode Lower 'maintains an arc discharge generated from the cathode rod and the first anode electrode, and supplies a gas generated by the plasma, and further includes a second anode electrode having a better thermal resistance than the first anode electrode; a chamber, It is used to provide an enclosed space under the plasma arc torch to purify the exhaust gas and has a discharge port for discharging the purified exhaust gas; and a cooling member coupled to the lower side of the chamber and cooling the chamber. Further, the scrubber using the plasma arc torch may further include a striker disposed between the chamber and the cooling member to prevent dust in the chamber from being deposited onto the cooling member. '[Advantageous effect]

In the plasma arc torch according to the present invention, the anode electrode which generates high temperature is divided into a first anode electrode having good electrical conductivity and a second anode electrode having good thermal resistance, whereby it is possible to prevent damage due to high temperature The life of the anode electrode is reduced and the service life is extended. Further, in the plasma arc torch according to the present invention, since the gas generated by the plasma is directly supplied to the second anode electrode, it is possible to increase the efficiency of power generation. In the scrubber of the slurry arc torch, it is possible to extend the manufacturing process. In addition, the use of electricity in accordance with the present invention can increase the productivity and productivity by extending the processing time of the exhaust gas by the process time of the exhaust gas I2J855.doc 200820838. Furthermore, in the scrubber using the plasma arc torch according to the present invention, it is possible to prevent interference with the flow of the cooling water in the cooling member due to the dust generated from the chamber and the overflowing cooling water. The sound to the chamber. In addition, it is possible to prevent the interruption of the deuteration process in the cooling member by using the scrubber of the plasma arc torch, thereby improving productivity. Further, in the scrubber using the plasma arc torch according to the present invention, 〇 is forced to discharge dust generated in the chamber by the cooling water and is installed from the purification member to purify the cooling member and the baffle during the purification process of the exhaust gas, It is therefore possible to prevent the interruption of the exhaust gas purifying process for performing the separate purging process. [Embodiment] [Best Mode] Reference will now be made in detail to the exemplary embodiments of the invention illustrated in the drawings. Figure 5 is a plasma arc torch in accordance with a first exemplary embodiment of the present invention.

A cross-sectional view of U. 4, FIG. 5, an electro-convex arc torch according to a first exemplary embodiment of the present invention includes a cathode rod 110' having a tip formed at one end thereof to emit hot electrons; and a body 120 for supporting a cathode rod 11〇 has a cooling water circulation pipe (not shown) or the like disposed in the straight line; the first anode electrode 13〇 is in contact with a portion of the body (3) adjacent to the tip of the cathode rod 11G to perform initial arc discharge a second anode electrode 140 that is spaced apart from the first anode electrode - a predetermined distance of the body 12 is spliced to continuously maintain an arc discharge generated from the anode electrode 130 and has good thermal resistance; and 121855.doc -13 - 200820838 Anode electrode 130 and cathode rod plasma gas supply tube 150 for supplying a plasma generated gas between the first 110. The construction and operation of a plasma arc torch in accordance with the present invention will now be described. First, the cathode rod U0 can be formed by a crane, and the first anode electrode 13 can be formed of steel having a resistivity of 1.724xl (r2Qmm2/m. This is because the electrons of the cathode rod can be exchanged, and the electricity is discharged in the valley. To the first anode electrode 130 to cause a strong current to flow. The lower surface of the first anode electrode 130 of the crucible 140 has a larger area than the upper surface of the first anode electrode 130 adjacent to the cathode rod ι. The first anode electrode 130 has a stepped shape of the annular introduction region. In particular, a stepped member formed on the inner periphery thereof, and more preferably having a small annular first anode electrode 130 having hot electrons, has a reason such that it is adjacent to the second anode electrode. The first arc discharge is performed on the lower side of the inner periphery of the first anode electrode 130 adjacent to the second anode electrode, such that the generated electricity

The arc can easily move the (four) two anode electrodes 14 () to move vertically and mutually along the second anode electrode. Further, the second anode electrode 14A may be formed of a material having a strong thermal resistance and a resistivity of the first anode electrode 130. The second anode electrode 14A has a cylindrical shape with a flat inner periphery without any steps. The second anode electrode 140 may be formed of graphite having a good thermal resistance or graphite coated with SiC. Using the second anode electrode 140 formed of graphite or graphite coated with Sic, it is possible to reduce the damage of the second anode electrode 14, in which the current is maintained at 121855.doc -14 - 200820838 in substantially continuous and continuous manner. Figure 6 is a view showing an enlarged arc movement in a portion of the 电' plasma arc torch of Figure 5. Referring to Figure 6, in the plasma arc torch according to the present invention, the electrons of the cathode rod 1 are discharged to the first anode electrode 130 to generate an arc, and the resulting "arc moves to the second anode electrode 140" thereby The two anode electrodes 14 are vertically reciprocated.亦 That is, the first anode electrode 130 serves as an adjacent point, and the second anode electrode 140 serves as an arc fixing surface. As described above, when the second anode electrode 14() continuously maintains the electric fox discharge to increase the nearby temperature, since the second anode electrode 14 is formed of graphite or graphite coated with Sic, the second anode electrode 14〇 It is not easily damaged due to its good thermal resistance. Therefore, the electro-convex arc torch according to the present invention uses the first-anode electrode 13A having good electrical conductivity and the second anode electrode (10) having good thermal resistance to easily generate arc discharge and the sample band sinking 2 Arc discharge and prolong the life of the anode electrode where the arc discharge is maintained. The 'normal' copper refining point is about break and the bright point of graphite or Sic is more than 3000 C 3 Ge, however, there may be a difference depending on its crystal structure. Therefore, the second anode electrode is not easily damaged by high temperature due to arc discharge. Therefore, even when the plasma arc torch according to the present invention is continuously used, the second anode electrode can be used for several months to significantly extend the service life. Figure 7 is a cross-sectional view of a scrubber using a 121855.doc 200820838 plasma arc torch shown in Figure 5, in accordance with an illustrative embodiment of the present invention. Referring to Fig. 7 'A scrubber using a plasma arc torch according to the present invention includes a plasma arc torch 100 including a cathode rod 11' having a tip formed at one end thereof to emit hot electrons a main body 120 for supporting the cathode rod 110 and having a cooling water circulation pipe (not shown) or the like disposed therein, the first anode electrode 130 and the body 12 adjacent to the tip of the cathode rod 11 〇 A portion of the interface is coupled to perform an initial arc discharge, and f) a second anode electrode 140 coupled to the body 12 间隔 spaced apart from the lower surface of the first anode electrode 130 by a predetermined distance to continuously maintain from the first anode electrode 130 Arc discharge and good thermal resistance, and an exhaust gas supply pipe 150 for supplying exhaust gas between the first anode electrode 13A and the cathode rod ιι; a chamber for mounting a plasma arc torch thereon 1) and using the flame generated by the plasma arc torch 100 to purify the exhaust gas; the discharge port 3〇〇 for discharging the exhaust gas processed in the chamber 200; and the cooling member 4〇〇, which is in contact with the chamber 100 Lower end coupling Connected to the cooling chamber〗 〇〇. ◎ In the following, the structure and operation of the scrubber using the plasma arc torch according to the present invention will be described in detail. In the structure,

First, an electric arc torch as described in detail in the embodiment of Fig. 3, an anode, and a second anode electrode 140 of a resistor. The exhaust gas should be supplied 150. Exhaust gas between the anode electrode 130 and the cathode rod 110

Materials and pollution are introduced into the material. Harmful materials from dry conductors, flat panel displays, etc. Exhaust gases are purified via a scrubber and drained from the air before being discharged to 121855.doc 200820838. The exhaust gas supplied via the exhaust gas supply pipe 150 is converted into an electropolymerized state by the electric discharge between the cathode rod 11 〇 and the first anode electrode w or between the cathode rod 11G and the second anode electrode, and is discharged by the arc. Flame caused

To purify. U substantially 'on the first: the anode electrode just (four) performs the purification process, the closed electrode below the electrode electrode 140

In order to perform the purification process, the first portion is provided in the chamber 200. The chamber provides a space in which the exhaust gas is cleaned by the plasma arc torch trace, and has a discharge port formed at its side to discharge the purified exhaust gas. The cooling water flows through the electro-convex arc torch 100 to cool the first anode electrode 13A and the second anode electrode 14A and the body 12G, and the chamber is cooled by the cooling member 400 formed at the lower portion thereof. According to the present invention, during the process of purging the plasma arc fire (4) m, the purification process is continuously performed, and the exhaust gas generation process should be stopped when the product is to be interrupted. This disruption of the process can result in a reduction in productivity and productivity. With this configuration, it is possible to extend the use of the first % electrode 140 of the plasma arc torch w I, thereby preventing the process from being frequently interrupted and improving the productivity of the semiconductor display.卞 菔 十 十 and Fig. 8 is a cross-sectional view of a second example according to the present invention. Referring to FIG. 8, the basic structure of the plasma arc raft according to the first embodiment of the present invention and the second example of the invention according to the invention are not shown. The 121850.doc 200820838 embodiment of the plasma arc torch is similar. The difference from the first-behind yoke example is that there is no separate exhaust gas supply pipe 150' and the exhaust gas supply pipe 16 is disposed in the second anode electrode just to supply the exhaust gas. The second anode electrode 140 includes: a gas supply pipe 141 having an exhaust gas supply pipe 16 and a relatively small inner diameter, and disposed adjacent to the cathode rod 110; and a discharge fixing member 142 for fixing at the first The arc generated between the anode electrode Ο 130 and the cathode rod 11G has an inner diameter larger than that of the gas supply member 14 1 . The gas supply member 141 can be integrated with the discharge fixing member 142. The first anode electrode 130 serves as an adjacent point, and the discharge fixing member 142 of the second anode electrode (10) serves as an arc fixing surface. As described above, 'when the second anode electrode 14 〇 continuously maintains the arc discharge X 曰 plus the nearby 'degree of the dish', the second anode electrode 14 is formed of graphite or graphite coated with slC, so the second anode electrode 14〇 is not easily damaged due to its good thermal resistance. Therefore, the plasma arc torch according to the present invention uses an anode electrode 13A having a good electrical conductivity and a second anode electrode 14B having a good thermal resistance to easily generate an electric arc discharge and maintain an arc discharge and prolong the arc retention. The service life of the anode electrode where the discharge is located. Figure 9 is a longitudinal cross-sectional view of the gas supply portion 41 of Figure 8 and a lateral cross-sectional view of the exhaust gas supply pipe 16A, in accordance with an exemplary embodiment of the present invention. > Looking at Fig. 9, the gas supply part 141 has an exhaust gas supply pipe 60 from the outer periphery of the gas supply part "121855.doc -18-200820838 to the inner periphery of the gas supply part 14 1 . The exhaust gas supply pipe 160 may face inward The periphery is inclined downward. This is because the gas is directed to the discharge fixing member 142 to prevent the flame from being ejected upward. Fig. 10 is a longitudinal cross-sectional view of another exemplary embodiment 141 according to the present invention.

参看 Referring to Fig. 1A, the gas supply member 141 has an exhaust gas supply pipe 160 that passes through from the outer periphery to the inner periphery thereof. The gas supply pipe ι 60 is formed in the tangential direction of its inner periphery to rotate the gas supplied through the exhaust gas supply pipe 16 沿 along the inner periphery of the second anode electrode 140 to generate eddy current. As described above, the structure of the gas supply member 141 generates eddy currents in the gas generated from the plasma supplied therein, thereby preventing backflow. Figure 11 is a cross-sectional view of a scrubber using the plasma arc torch shown in Figure 8 in accordance with an exemplary embodiment of the present invention. Referring to Fig. 11, a scrubber using a plasma arc torch according to the present invention includes: a plasma arc torch 100 including a cathode rod 110 having a tip formed at one end thereof to emit hot electrons The main body 120' is for supporting the cathode rod 11 () and has a cooling water circulation pipe (4) disposed therein, etc., the first anode electrode 13 (), and (d) the main body of the cathode rod 11 丨 20 - partially pure to perform initial arc discharge and /, have good electrical conductivity, the: anode electrode 14G, which is spaced apart from the lower surface of the first anode electrode 130 - a predetermined distance of the body 12 is continuously connected to maintain the first anode The arc generated by the electrode 130 is discharged, and the upper portion of the upper portion is larger than the inner diameter of the lower portion thereof and has a good thermal resistance, and a plurality of exhaust gas supplies 121855.doc -19-200820838 lv 160 [formed to pass through the second anode electrode 14 The upper part of the crucible and the exhaust gas is supplied into the inner space of the second anode electrode 14; the chamber is used for the electric arc torch 1 〇〇 and the self-electrical arc torch is used to generate the exhaust gas 'Exhaust 3 〇 () It is used to discharge the exhaust gas treated in the chamber, and the cold portion 4 is coupled to the lower end of the chamber 1 to cool the chamber 100. Hereinafter, the structure and operation of a scrubber using a plasma arc torch according to the present invention will be described in detail. First, in the structure of a plasma arc torch as specifically described by the embodiment of Fig. 8, the anode electrode is divided into a first anode electrode 130 having good electrical conductivity and a second anode electrode 140 having good thermal resistance. The second anode electrode 14A has a stepped shape in which the inner diameter of the upper portion is larger than the inner diameter of the lower portion, and a plurality of exhaust gas supply tubes 16 are disposed above the second anode electrode to supply the exhaust gas into the second anode electrode 14A. The exhaust gas contains hazardous materials for manufacturing semiconductors, flat panel displays, and the like, and dyeable lead-in materials. The exhaust gas is purified via a scrubber and drained therefrom before being discharged to the air. The exhaust gas supplied via the exhaust gas supply pipe 160 is below the second anode electrode ι4 of the arc discharge generated between the cathode rod 丨1〇 and the first anode electrode 130. The phase of the crucible is converted to a plasma state and is purified by a flame caused by an electric solitary discharge. In order to perform the purification process, the enclosed space below the second anode electrode 14 is provided in the chamber 200. The chamber 200 provides a space in which the exhaust gas is cleaned by the plasma arc torch 1 121 121855.doc -20- 200820838 and has a discharge port formed at its side to discharge the purified exhaust gas. The cold portion = flows through the plasma arc torch i 0 0 to cool the first anode electrode m the first anode electrode 140 and the body 12, and the chamber is cooled by the cooling member 4〇〇 formed at the lower portion thereof. (4) The sender of the arc torch shall perform the purification process continuously during the process of generating the exhaust gas f, and the waste gas generation process shall be stopped when the purification process needs to be interrupted. Ο Ο The interruption of the private process may cause productivity and production. Reduction in the rate. With this configuration, it is possible to prolong the service life of the second anode electrode 14A of the electropolymer arcing fire W(9), thereby preventing frequent interruption of the process and improving the productivity of the semiconductor or flat panel display. The anode electrode 14 is directly supplied with the exhaust gas, so it is possible to increase the gas treatment efficiency and to manufacture a large-capacity scrubber. Fig. 12 is a cross-sectional view of a scrubber using a plasma arc torch according to another exemplary embodiment of the present invention. Referring to FIG. 12, a scrubber using a plasma arc torch according to another exemplary embodiment of the present invention includes a plasma arc torch 1 for heating exhaust gas to a high temperature to purify exhaust gas; a moon chamber 2〇〇 It is used to fix the plasma arc torch 100 and provide an exhaust gas purification space, and has a discharge port 130 for discharging the purified exhaust gas; a component 400 disposed between the lower portion of the chamber 2 to cool the chamber 2 using cooling water, and an annular baffle 5〇〇 disposed between the cooling member 4〇〇 and the chamber 2〇〇 To prevent dust generated in the chamber 2 from being deposited on the cooling member 4A. Hereinafter, the use of a plasma arc torch according to another exemplary embodiment of the present invention 121855.doc-21 - 200820838 will be described in detail. Construction and operation of the scrubber. First, any configuration of the plasma arc burner 100 capable of generating high temperature heat to purify the exhaust gas can be used in the present invention, and preferably according to the present invention as shown in FIG. 5 or FIG. The plasma arc torch of the first or second embodiment. The plasma arc torch 100 is fixed to the upper portion of the chamber 200 to enable purification by a flame ejected inside the chamber 200. Will be in the plasma arc torch 100 and cavity The exhaust gas purified in the chamber 200 is discharged to the outside through the discharge port 3. At this time, the temperature in the chamber 200 is increased by the plasma and the flame. In order to cool the chamber 200, the cooling member 4 using the cooling water is placed. At the lower end of the chamber 200. The component 400 includes a cooling water supply pipe 41〇 through which cooling water is supplied, and a circulation member 420 for circulating cooling water supplied through the cooling water supply pipe 41〇 along the lower end of the chamber 200; and a center discharge pipe 43〇 It is used to discharge the cooling water overflowing from the circulation member 420 to the outside. ij Although the foreign matter contained in the exhaust gas can be burned and then dripped toward the circulation member 420 during the process of treating the exhaust gas by the plasma arc torch, The broadcaster 500 can be placed on the circulation member 420 to prevent dust from being deposited on the circulation member 420 and to prevent interference with the flow of the cooling water. In addition, the baffle 500 prevents the overflowing cooling water from being sputtered into the chamber 2 The baffle 500 has an annular shape that slopes downward toward the center of the chamber 2〇〇. The installation of the baffle 500 enables the smooth horizontal supply of the cooling level to the scrubber using the plasma arc torch according to the present invention, and prevents the scrubber using the plasma arc torch due to the abnormal supply of the cooling water. Operation 121855.doc -22- 200820838 interrupted. Figure 13 is a cross-sectional view of a scrubber using a plasma arc torch from each of the anastomotic embodiments in accordance with the present invention. Referring to Fig. 13', in addition to the structure of Fig. 12, a scrubber using a plasma electric fox torch according to still another exemplary embodiment of the present invention includes an injection jet, 6Gi) which is used to dust the chamber It is forcibly discharged to the center discharge pipe 43 0 and the cooling member 4 is purified. 〇 In the following, the construction and operation of a scrubber using a plasma arc torch according to still another exemplary embodiment of the present invention will be described. First, an injection nozzle 600 is placed above the baffle 500 to inject an inert gas. The gas may be nitrogen or any gas exhibiting inert properties under a high temperature atmosphere. The baffle 500 may be a ring that slopes downward toward its center, or has a central portion that is curved downward. The dust generated in the cavity to 200 is not deposited on the cooling member 4 by the injection nozzle 600 for injecting an inert gas, and therefore, the overflow water is overflowed through the center discharge pipe 430 of the cooling member 400. Drain it to the outside. As described above, the interference with the flow of the cooling water is prevented and the inside of the cooling member 400 is continuously and periodically cleaned, whereby it is possible to prevent the interruption of the exhaust gas purifying process due to the purification of the cooling member 4〇〇. iiL | The present invention has been described with reference to the exemplary embodiments thereof, but those skilled in the art of the present invention will be apparently not obscured from the accompanying application 121855.doc -23 - Ο 以 to block the patent scope of 200820838 Various modifications may be made to the described embodiments in the context of the spirit and scope of the invention as defined in the equivalents. [Industrial Applicability] As can be understood from the above, the plasma arc torch according to the present invention includes an anode electrode composed of a first anode electrode having a good electrical conductivity and a first anode electrode having a good thermal resistance, thereby making Increase mission and reduce maintenance costs. In addition, according to the present invention, the exhaust gas is directly supplied from the Tiandi electrode to enable the treatment efficiency of the exhaust gas to be increased. In addition, the battery arc torch exchange using the electric (four) arc torch according to the present invention is used. The cycle is elongated and separated. u. Intermittent time for moxibustion. In addition, installing (4) in the chamber of m and cooling components to block dust can extend the cleaning cycle of the scrubber. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view of a conventional plasma arc torch; Fig. 2 is a schematic view showing an enlarged arc movement in part I of Fig. 1; ", a shifting electric wheel torch = another - Schematic cross-sectional view of a conventional electric arc torch; FIG. 5 is a cross-sectional view of a first embodiment of the invention; a plasma arc torch of an exemplary embodiment Figure 6 is a view showing an enlarged arc shift 121855.doc -24-200820838 in a portion of the Γ plasma arc torch of Figure 5; "1 is the use of the electric power shown in Figure 5 in accordance with an exemplary embodiment of the present invention. FIG. 8 is a cross-sectional view of a plasma arc torch according to a second exemplary embodiment of the present invention; FIG. 9 is a view of an exemplary embodiment of the present invention; FIG. 10 is a longitudinal cross-sectional view of a gas supply member according to another exemplary embodiment of the present invention; FIG. 11 is a longitudinal cross-sectional view of a gas supply portion of a gas supply portion; According to an exemplary embodiment of the present invention FIG. 12 is a cross-sectional view of a scrubber using a plasma arc torch according to another exemplary embodiment of the present invention; and FIG. 12 is a cross-sectional view of a scrubber using a plasma arc torch according to another exemplary embodiment of the present invention; A cross-sectional view of a scrubber using a plasma arc torch in accordance with yet another exemplary embodiment of the present invention. 〇 [Main component symbol description] 1 cathode rod 2 main body 3 anode electrode 4 plasma gas introduction pipe 10 plasma arc torch 20 chamber 30 discharge port 40 cooling unit 121855.doc * 25 - 200820838 Ο

(J 41 cooling water introduction pipe 42 circulation part 43 center discharge pipe 100 plasma arc torch 110 cathode rod 120 main body 130 first anode electrode 140 second anode electrode 141 gas supply pipe/gas supply part 142 discharge fixing part 150 plasma gas Supply pipe/exhaust gas supply pipe 160 exhaust gas supply pipe 200 chamber 300 discharge port 400 cooling member 410 cooling water supply pipe 420 circulation member 430 center discharge pipe 500 baffle 600 injection nozzle A adjacent point B arc fixing surface 121855.doc • 26-

Claims (1)

200820838 X. Patent application scope: 1 · A plasma arc torch, comprising: a cathode #, which is used for discharging a thermoelectric % electrode according to an applied voltage, which is generated when the voltage is applied to the cathode rod Arc discharge; and a second anode electrode disposed under the first anode electrode to maintain an arc discharge generated from the cathode rod and the first anode electrode to transfer the treated exhaust gas, which is better than the first anode electrode m ° ..., 2. The electrical arc torch of claim 1, wherein the first anode electrode is a ring-shaped electrode, and the inner diameter of the lower portion is smaller than an upper inner diameter in an installed state. Or a plasma arc torch, wherein the first anode electrode is made of copper, and the second anode electrode is formed of graphite or coated with stone black. < 4. The plasma arc torch of claim 3, wherein the exhaust gas is supplied between the cathode rod and the first anode electrode. 5: The plasma arc torch of claim 3, wherein the second anode electrode has an upper inner end smaller than a lower inner diameter-stepped cylindrical shape, and a plurality of one-female are placed with the small inner diameter The upper portion is to directly supply the exhaust gas via the second anode electrode. 6. The plasma arc torch of claim 5, wherein the exhaust gas supply pipe passes from the upper outer periphery of the second anode electrode to the inner periphery of the second anode electrode. The plasma arc torch of claim 5, wherein the exhaust gas supply pipe is configured to pass from an upper outer periphery of one of the second anode electrodes to an inner periphery of one of the second anode electrodes, and at the second anode electrode A tangential direction of the inner periphery is disposed to rotate the gas generated by the supplied electropolymer along the inner periphery. 8. A scrubber using a plasma arc torch, comprising: Ο Ο an electric arc torch comprising: a cathode rod for treating an applied electricity (four) a fixed discharge - a hot electron; - a first anode An electrode spaced apart from the cathode rod and generating an arc discharge when the voltage is applied, and a second anode electrode disposed below the first anode electrode 'from the cathode rod and the first anode electrode The generated arc discharge is kept transferred to treat the exhaust gas, and the A 兮筮 兮筮 丑 has a better thermal resistance than the first anode electrode of the child; To provide a closed space under the plasma arc torch for purifying the exhaust gas and having an AL 'non-outlet for discharging the purified exhaust gas; and a cooling component, which is swelled _ τ 7 ... & to one of the lower side coupled and cooled the cavity to 0. 9. The scrubber of claim 8 causes a boat to be countered, and the progress includes a baffle, the baffle being disposed in the cavity A chamber is placed between the chamber and the cooling member to prevent dust from depositing into the cooling member. 10. A scrubber according to claim 8 or 9, and the eight baffle is a central portion thereof facing downwards, a % plate or having a downwardly curved central portion. 121855.doc 】·If the scrubber of claim 8 and 士 α t, which one A:, /' mouth is placed in the chamber and the cold J. Containing an injection nozzle that injects an inert gas. /, f卩. Between the components and toward the cooling portion 12. The stripping state of claim 8, wherein the crucible is formed, and the first % electrode of the crucible 4 is formed of copper. Graphite or graphite coated with Sic 13 · The stripper of claim 12 Μ.β ^, ° Hai first dangerous electrode has a waste rolling supply tube for 仏 尾 tail milk. 121855.doc