TWI363036B - - Google Patents

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Publication number
TWI363036B
TWI363036B TW094120757A TW94120757A TWI363036B TW I363036 B TWI363036 B TW I363036B TW 094120757 A TW094120757 A TW 094120757A TW 94120757 A TW94120757 A TW 94120757A TW I363036 B TWI363036 B TW I363036B
Authority
TW
Taiwan
Prior art keywords
floating
center
injection
conveyance
detection
Prior art date
Application number
TW094120757A
Other languages
English (en)
Other versions
TW200600440A (en
Inventor
Masayuki Toda
Masaru Umeda
Original Assignee
Watanabe M & Co Ltd
Masayuki Toda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Watanabe M & Co Ltd, Masayuki Toda filed Critical Watanabe M & Co Ltd
Publication of TW200600440A publication Critical patent/TW200600440A/zh
Application granted granted Critical
Publication of TWI363036B publication Critical patent/TWI363036B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/26—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
    • B65G47/28—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a single conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Description

九、發明說明： 【發明所屬之技銜領域】 壯如本發明係有關於一種浮上搬運裝置以及用於浮上搬運 ^的^上搬運方法，藉由對於板狀的被搬運體喷射壓I 乳體，使被搬運體上浮並同時搬運被搬運體。 【先前技術】 專利文獻1 :特開200 0-72250號公報 的被知技術中，在成形及加工製程中’使半導體晶圓等 ㈣❹氣流的噴射而上浮並實施搬運的 為已知（例如，參照專利文獻丨）。 如此的上浮搬運裝 合， 忒置知將和廷用早兀及控制用單元組 而在既疋的成形或加工步 施搬運者。 中進灯成形或加工並實 第6圖表示由与Γ你 半導體晶圓的狀：。， 部份搬運作為被搬運體的 喷射口開口於夺：延伸於既定方向的搬運路徑1裡面， 路徑1的側邊縱橫地配置…在搬運 偏移而搬運的2f搬料徑1的中心 第7圖表示伸节 脫落，立δ又有導引件3。 例。在第7圖中，保4體曰曰囫上洋搬運用的噴射噴嘴的一 保持於保持板5的保彳夺^ 5形成搬運路徑1，喷射噴嘴4為 由與形成於保持〜^、八5a的圓柱體，在其一部份上，藉 下#八5 a的凹ς k μ 位的凸部4a。3 " b卡合，形成無法旋轉地定
在嘴射喷嗜* /1 L 的裡面的連通路4b、、 貝方4上，具有開口於保持板5 X及攸該連通路4b的上端朝上端面以
2015-7201-PF 5

Claims (1)

100年10月7日修正替換頁 136303第6_〇757 號 十、申請專利範圍： 1. 一種上浮搬運裝置，包括： 形成被搬運體的搬運路徑的搬運道； 嘴 將被搬運體Ά上述搬運道上浮搬運的複數個喷射噴 檢測出上述搬運道中被搬運體的搬運方向的至少一檢 測部；以及 x據該檢測部的檢測結果獨立控制上述複數個喷射喷 嘴的控制部； 、 中上述控制部係在得到被搬運體從上述搬運道的中 心離開的檢測結果時， :噴嘴的本體在水平面内旋轉，調整從噴嘴 壓力乳體的噴射方向。 中月專利範圍帛1項所述之上浮搬運裝置，其中 射根據上述檢測部的檢測結果，對於使上述噴 5一面内旋轉的驅動馬達做驅動控制。 、 3广申請專利範圍帛i項所述之上浮搬運裝置 射哈峰 ’、據上述檢測部的檢測結果，控制從上述噴 力軋體之喷射方向或喷射壓力，使被搬 運體返回上述搬運道的中心。 史破搬 4. 如申請專利範@ , 上 靶圍第1項所述之上浮搬運裝置，复中 射=:Γ根據上述檢測部的檢測結果，控制從上述： 運=:=:氣體之噴射方向或嘴射壓力，使被: 龈開上述搬運道的中心。 5. 如申請專利範圍第4項所述之上浮搬運裝置，其中 2015-720!—PF2 14 1363036 100年1〇月7日修正替換頁 第094120757號 上述控制部從上述檢測部得出的結果為連續在同一方向 上，被搬運體從上述搬運道的中心離開，則控制從上述喷 射噴嘴所噴射的壓力氣體之喷射方向或喷射壓力。 6·如申請專利範圍第〗項所述之上浮搬運裝置，其中該 檢測部為具有與上述搬運道的搬運方向平行且跨越上述搬 運道的全寬度的檢測範圍的線檢測器。 7. 如申請專利範圍第丨項所述之上浮搬運裝置，其中 作為上述被《體的半導體晶圓從上述搬運道偏離而被搬 運的情形，基於根據線感測器的偏移位置和偏移量的檢測 結果而修正每個上述半導體晶圓的搬運位置。 8. 如申請專利範圍第丨項所述之上浮搬運裝置，直中 在兩個波峰之間纟置檢測出在上述半導體晶圓形成的缺口 位置，若兩個波峰距上述線感測器的中心等距離控制部 判定為上述半導體晶圓係位於搬運道的搬運中心=备二 置上而作搬運。 k田 9. 一種上浮搬運方法，為用於申請專利範圍第丄至8 項中任一項所記載的上浮搬運裝置而搬運被搬運體的方 2015-7201-PF2 15
TW094120757A 2004-06-28 2005-06-22 Levitation transportation device and levitation transportation method TW200600440A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004189444A JP5291281B2 (ja) 2004-06-28 2004-06-28 浮上搬送装置及び浮上搬送方法

Publications (2)

Publication Number Publication Date
TW200600440A TW200600440A (en) 2006-01-01
TWI363036B true TWI363036B (zh) 2012-05-01

Family

ID=35776006

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094120757A TW200600440A (en) 2004-06-28 2005-06-22 Levitation transportation device and levitation transportation method

Country Status (7)

Country Link
US (2) US7704019B2 (zh)
EP (1) EP1770032A4 (zh)
JP (1) JP5291281B2 (zh)
KR (1) KR101302818B1 (zh)
CN (1) CN1997576A (zh)
TW (1) TW200600440A (zh)
WO (1) WO2006001294A1 (zh)

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* Cited by examiner, † Cited by third party
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US8834891B2 (en) 2005-03-14 2014-09-16 Boehringer Ingelheim Vetmedica, Inc. Immunogenic compositions comprising Lawsonia intracellularis
US8398994B2 (en) 2005-07-15 2013-03-19 Boehringer Ingelheim Vetmedica, Inc. Lawsonia vaccine and methods of use thereof
US20100129397A1 (en) 2006-12-11 2010-05-27 Boehringer Ingelheim Vetmedica, Inc. Effective method of treatment of porcine circovirus and lawsonia intracellularis infections
JP4900115B2 (ja) * 2007-07-27 2012-03-21 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
DE102007043600A1 (de) 2007-09-13 2009-03-19 Robert Bosch Gmbh Pumpenrotor für eine Spaltrohrpumpe
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JP2012076877A (ja) * 2010-10-01 2012-04-19 Nitto Denko Corp ワーク搬送方法およびワーク搬送装置
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JP6468848B2 (ja) * 2015-01-13 2019-02-13 株式会社ディスコ 搬送装置
KR101751278B1 (ko) 2015-02-06 2017-07-11 유옥수 마찰계수 감소와 내경 보강용 디씨 이중벽 하수관 성형장치
KR101751279B1 (ko) 2015-02-06 2017-06-27 유옥수 마찰계수 감소와 내경 보강용 디씨 이중벽 하수관 제조방법
US10807811B2 (en) 2016-03-07 2020-10-20 Purple Innovation, Llc Mattress toppers, air tables for making mattress toppers, and related methods
CN108657821A (zh) * 2018-05-03 2018-10-16 拓卡奔马机电科技有限公司 裁片气浮输送装置
CN110641757B (zh) * 2019-10-14 2021-04-27 中山易裁剪网络科技有限公司 一种柔性布料裁剪半成品的打包设备
JP7437187B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置

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Also Published As

Publication number Publication date
WO2006001294A1 (ja) 2006-01-05
JP5291281B2 (ja) 2013-09-18
CN1997576A (zh) 2007-07-11
KR20070038468A (ko) 2007-04-10
JP2006008347A (ja) 2006-01-12
US20080031696A1 (en) 2008-02-07
EP1770032A1 (en) 2007-04-04
KR101302818B1 (ko) 2013-09-02
EP1770032A4 (en) 2008-02-27
US7704019B2 (en) 2010-04-27
TW200600440A (en) 2006-01-01
US20100104380A1 (en) 2010-04-29

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