TWI358508B - - Google Patents

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Publication number
TWI358508B
TWI358508B TW95119656A TW95119656A TWI358508B TW I358508 B TWI358508 B TW I358508B TW 95119656 A TW95119656 A TW 95119656A TW 95119656 A TW95119656 A TW 95119656A TW I358508 B TWI358508 B TW I358508B
Authority
TW
Taiwan
Prior art keywords
flow path
block
gas supply
path block
supply unit
Prior art date
Application number
TW95119656A
Other languages
English (en)
Chinese (zh)
Other versions
TW200801384A (en
Inventor
Moriya Shuji
Nagaoka Hideki
Okabe Tsuneyuki
Itafuji Hiroshi
Hiroki Doi
Ito Minoru
Original Assignee
Ckd Corp
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp, Tokyo Electron Ltd filed Critical Ckd Corp
Priority to TW95119656A priority Critical patent/TW200801384A/zh
Publication of TW200801384A publication Critical patent/TW200801384A/zh
Application granted granted Critical
Publication of TWI358508B publication Critical patent/TWI358508B/zh

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  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
TW95119656A 2006-06-02 2006-06-02 Gas supply unit and gas supply system TW200801384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Publications (2)

Publication Number Publication Date
TW200801384A TW200801384A (en) 2008-01-01
TWI358508B true TWI358508B (fr) 2012-02-21

Family

ID=44765054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Country Status (1)

Country Link
TW (1) TW200801384A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668386B (zh) * 2018-09-03 2019-08-11 台灣積體電路製造股份有限公司 流體控制元件及其使用方法

Also Published As

Publication number Publication date
TW200801384A (en) 2008-01-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees