1357359 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種流體喷射裝置，尤其涉及一種可應用 於基板處理裝置中將液體（DIW)和氣體（CDA)的混合流體喷 射到基板上而對基板進行清洗，且容易製作，並可以提高 流體噴射效率的流體噴射裝置。 【先前技術】 通常，流體喷射裝置可應用於爲清洗基板而對基板喷 射混合流體的過程。這種流體喷射装置中，形成有氣體腔 室的第一墊板和形成有液體腔室的第二墊板相重疊並藉由 連接部件相互結合。並且，第一墊板和第二墊板之間形成 有用於噴射供給到氣體腔室的氣體（CDA，清潔用乾燥氣體） 的喷射管道。另外，第二墊板上形成有以傾斜狀態設置、 並用於連接液體腔室和喷射管道的多個連接管道。 即，液體腔室的液體（DI water ’去離子水）依據汽化器 原理經氣體和連接管道被噴射到喷射管道内而形成混合流 體’然後噴射到基板上。 上述連接管道是通過銑削（milling )作業等工序形成 細長的孔而製作的。這種現有的流體噴射裝置在對該連接 官道進行加工時’由於處理基板逐漸大型化，流體喷射裝 置的長度明顯變大，而且連接管道的數增加，從而導致加 工時間和加工成本增加。 而且’向氣體腔室供給氣體的壓力大於向液體腔室供 3 1357359 給液體的壓力。錢體從氣隸室㈣射管道喷射的過程 中，液體腔室側管道與喷射管道相i^的位置上有 部分氣體沒有噴射到喷射管道外部，而與液體流出的連接 管道的末端壁相撞’從而改變移動方向，反而流入壓力較 弱的液體腔室内，這種現象會降低流體的喷射效率。 而且，現有的流體喷射裝置的底面爲平面形狀，因此 混合流體噴射到基板上時，喷射的流體周圍會産生負壓， 從而發生基板被吸附到流體喷射裝置上的現象，因此會導 致基板處理不良的問題。 【發明内容】 本發明鑒於上述問題而作，本發明的目的在於提供一 種具有可易於加工的用於連接液體腔室和喷射單元的連接 流道結構，從而減少生產成本並節約生產時間，以此來提 高生産效率的流體喷射裝置。 並且，本發明的又一目的在於提供一種可以防止氣體 向液體腔室逆流的現象，以提高流體喷射效率的流體喷射 裝置。 另外，本發明的另一目的在於提供一種可去除在流體 喷射裝置中因喷射的混合流體周圍產生負屢，導致基板被 吸附到流體喷射裝置上的現象，從而防止基板處理不良的 流體喷射裝置。 爲了實現上述目的，本發明提供一種流體喷射裝置， 其包括：第一墊板，其用於形成氣體供給單元；第二墊板， 1357359 其用於形成液體供給單元，並與該第-塾板結合而構成主 體；噴射單it，纽置在相互結合的㈣—塾板和該第二 塾板的末端，ϋ用於喷射混合流體；以及間隙墊板，其設 置在該第—墊板和該第二墊板之間，並且其下面設有用於 連接該液體供給單元和該噴射單元的連接流道。 〇氣體供給單兀最好包括氣體腔室；以及氣體供給流 道，其-端與該氣體腔室連接，另—端與該喷射單元連接， 從而使氣體流動。 該液體供給單it最好包括龍腔t ;以及㈣供給流 道，其一端與該液體腔室連接，另一端與該連接流道連接， 從而使液體流動。 該間隙墊板的下面最好相隔預定距離設置用於形成該 連接流道的多個槽。 該喷射單元的寬度最好大於該氣體供給流道的寬度。 該第一墊板和該第二墊板之間最好放置該間隙墊板並且 瘳 兩者相面對的側面分別形成有氣體腔室和液體腔室。 <»亥第塾板和第一塾板的前端部最好是傾斜面。 該第二墊板的前端部上最好形成有朝該第一墊板方向 延伸的延伸部。 如上所述的本發明，在間隙墊板的下端部以相同距離 隔開形成連接流道並將其結合到第一墊板和第二塾板之 間’該連接流道由將液體輸送到喷射管道上的多個槽組 成。因此其加工容易，生産成本低廉，可提高生産效率。 並且，本發明中噴射單元的寬度大於氣體供給流道的 5 丄357359 ::，因此從氣體供給流道向喷射單元供給的部分氣體不 的噴射效率。 纟喷射出去，從而提高了流體 另山外，本發明中流體喷射裝置的第一墊板和第二整板 二=部爲傾斜面’因此可以防止從喷射單元噴射的混合 "的周圍産生負壓，而避免基板被吸附到流體喷射裝置 上的現象’從而防止基板的處理不良。 【實施方式】 以下參照附圖詳細說明本發明的最佳實施例。 圖1是用於說明本發明流體喷射裝4一個f施例的外 觀結構圖》 流體喷射裝置具有較長的狹缝，其可將在處理槽内混 合的液體（DI Water)和氣體（CDA， Clean Dry Air)的混合流 體喷射到基板G上，而對基板G進行清洗。該流體喷射裝 置中第一墊板1和第二墊板3藉由連接部件5相互連接。 如圖2和圖3所示，上述第一墊板丨和第二墊板3之間配 置有間隙墊板7。 第一塾板1上形成有氣體供給單元氣體供給單元2 可以包括氣體腔室la、用於輸送氣體腔室la中氣體的氣體 供給流道lb。氣體腔至la形成於第一塑•板1上，並可以暫 時存儲從氣體供給裝置（省略圖示）供給的氣體。 而且，第二塾板3上形成有液體供給單元4。液體供給 單元4可以包括液體腔室3a、用於輸送液體腔室3a中液體 1357359 的液體供給流道3b。液體腔室3a形成於第二墊板3上，並 可以暫時存儲從液體供給裝置（省略圖示）供給的液體。 如圖3所示，第一墊板！和第二墊板3相互結合，並 在其間設置有間隙墊板7，並且第一墊板丨和第二墊板3相 互面對的側面分別形成有氣體腔室la和液體腔室3&。 罐1357359 VI. Description of the Invention: [Technical Field] The present invention relates to a fluid ejection device, and more particularly to a substrate processing apparatus for spraying a mixed fluid of liquid (DIW) and gas (CDA) onto a substrate. The fluid ejecting apparatus that cleans the substrate and is easy to manufacture and can improve fluid ejection efficiency. [Prior Art] Generally, a fluid ejection device can be applied to a process of spraying a mixed fluid to a substrate for cleaning a substrate. In this fluid ejecting apparatus, the first pad formed with the gas chamber and the second pad formed with the liquid chamber overlap and are coupled to each other by the connecting member. Further, an injection duct for ejecting gas (CDA, cleaning dry gas) supplied to the gas chamber is formed between the first pad and the second pad. Further, the second pad is formed with a plurality of connecting pipes which are disposed in an inclined state and are used for connecting the liquid chamber and the injection pipe. That is, the liquid of the liquid chamber (DI water 'deionized water) is injected into the injection pipe through the gas and the connecting pipe according to the vaporizer principle to form a mixed fluid' and then sprayed onto the substrate. The connecting pipe is formed by forming an elongated hole by a process such as a milling operation. When the conventional fluid ejecting apparatus is processed in the connection path, the length of the fluid ejecting apparatus is significantly increased due to the gradual enlargement of the processing substrate, and the number of connecting pipes is increased, resulting in an increase in processing time and processing cost. Moreover, the pressure at which the gas is supplied to the gas chamber is greater than the pressure supplied to the liquid chamber by 3 1357359. During the process of spraying the money body from the air chamber (4), some gas at the position of the liquid chamber side pipe and the injection pipe is not injected to the outside of the injection pipe, but collides with the end wall of the connecting pipe from which the liquid flows out. 'Thus changing the direction of movement, but instead flowing into the liquid chamber with weaker pressure, this phenomenon will reduce the efficiency of fluid injection. Moreover, since the bottom surface of the conventional fluid ejecting apparatus has a planar shape, when the mixed fluid is ejected onto the substrate, a negative pressure is generated around the ejected fluid, so that the substrate is adsorbed onto the fluid ejecting apparatus, thereby causing poor substrate processing. The problem. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a connection flow path structure for connecting a liquid chamber and a spray unit which can be easily processed, thereby reducing production cost and saving production time. A fluid ejection device that increases production efficiency. Further, it is still another object of the present invention to provide a fluid ejecting apparatus which can prevent a phenomenon in which a gas flows back to a liquid chamber to improve fluid ejection efficiency. Further, another object of the present invention is to provide a fluid ejecting apparatus which can remove a phenomenon in which a substrate is adsorbed onto a fluid ejecting apparatus due to a negative force generated around a mixed fluid to be ejected in a fluid ejecting apparatus, thereby preventing substrate processing. In order to achieve the above object, the present invention provides a fluid ejection device comprising: a first pad for forming a gas supply unit; a second pad, 1357359 for forming a liquid supply unit, and the first plate Combining to form a main body; spraying a single, the joint is placed at the end of the (four)-plate and the second raft, the raft is used for spraying the mixed fluid; and the gap pad is disposed on the first slab and the A connecting flow path for connecting the liquid supply unit and the injection unit is provided between the second pads. The helium gas supply unit preferably includes a gas chamber; and a gas supply channel having a terminal connected to the gas chamber and a other end connected to the injection unit to allow gas to flow. The liquid supply unit it preferably includes a dragon chamber t; and (iv) a supply passage having one end connected to the liquid chamber and the other end connected to the connecting flow passage to allow the liquid to flow. Preferably, the lower surface of the gap pad is provided with a plurality of grooves for forming the connecting flow path at a predetermined distance. The width of the spray unit is preferably greater than the width of the gas supply flow path. Preferably, the gap pad is placed between the first pad and the second pad, and the side faces facing each other are respectively formed with a gas chamber and a liquid chamber. The front end portion of the <» Haidi raft and the first raft is preferably an inclined surface. Preferably, the front end portion of the second pad is formed with an extending portion extending in the direction of the first pad. According to the invention as described above, the connecting flow path is formed at the lower end portion of the gap pad at the same distance and is joined between the first pad and the second jaw. The connecting flow path is transported to the jet by the liquid. It consists of multiple slots on the pipe. Therefore, the processing is easy, the production cost is low, and the production efficiency can be improved. Further, in the present invention, the width of the injection unit is larger than 5 丄 357359 :: of the gas supply flow path, and therefore the partial gas supplied from the gas supply flow path to the injection unit does not have an ejection efficiency. The cockroach is ejected, thereby increasing the fluid outside the mountain. In the present invention, the first slab and the second full plate of the fluid ejecting apparatus are inclined surfaces, so that it is possible to prevent the circumference of the mixture injected from the ejection unit from being negative. Pressing, while avoiding the phenomenon that the substrate is adsorbed onto the fluid ejecting device', prevents the processing of the substrate from being poor. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the appearance of an embodiment of a fluid ejecting apparatus 4 of the present invention. The fluid ejecting apparatus has a long slit which can mix a liquid (DI Water) and a gas (CDA, which are mixed in a treatment tank). The mixed fluid of Clean Dry Air is sprayed onto the substrate G, and the substrate G is cleaned. In the fluid ejecting apparatus, the first pad 1 and the second pad 3 are connected to each other by a connecting member 5. As shown in Figs. 2 and 3, a gap pad 7 is disposed between the first pad 丨 and the second pad 3. The gas supply unit 2 is formed on the first raft 1 and the gas supply unit 2 may include a gas chamber 1a, a gas supply passage lb for conveying the gas in the gas chamber 1a. The gas chambers to la are formed on the first plastic plate 1, and the gas supplied from the gas supply device (not shown) can be temporarily stored. Further, a liquid supply unit 4 is formed on the second jaw 3. The liquid supply unit 4 may include a liquid chamber 3a, a liquid supply flow path 3b for conveying the liquid 1357359 in the liquid chamber 3a. The liquid chamber 3a is formed on the second pad 3, and can temporarily store the liquid supplied from the liquid supply device (not shown). As shown in Figure 3, the first pad! The second pad 3 is coupled to each other with a gap pad 7 interposed therebetween, and the mutually facing sides of the first pad 丨 and the second pad 3 are respectively formed with a gas chamber 1a and a liquid chamber 3&; tank
並且，第一墊板1和間隙墊板7之間形成有與氣體腔 至1 a連接的氣體供給流道丨b。另外，第二墊板3和間隙墊 板7之間形成有與液體腔室3a連接的液體供給流道孙。 另外’第一墊板！和第二墊板3之間的前端上形成有 供混合流體通過的噴射單元13。即，第-塾板！和第一整 板3的前端具有間距㈣），從而形成了可喷射混合流 體的空間，該空間即爲噴射單元13〇 °話說’軋體供給流冑lb是由氣體腔室h流出的氣 ==域’嘴射單元13是由氣體腔室u流出的氣體和 液 。流體通過並噴射到基板G上的區域。 體供如圖4所示)最好大於上述氣 07尤度a (如圖4所示 另外’第二墊板3的前端部朝 而形成突出形狀的延伸部3c P朝第一塾板1的方向延伸 並且，如圖2所示，間隙墊板 離隔開的多_ 7a， &下端Φ成有專距 7a是用於連接液體二S 、下的開口部。該多個槽 饮饮體腔室3a和喷射 圖4所示），從而向噴 的連接流道9(如 即，間隙塾板7盘第 ^ ，液體腔室3a内的液體。 4二墊板3相結合後，間隙塾板7下面 1357359 的多個槽7a成爲輸送液體的連接流道9。 如上所述，間隙墊板7可通過在其下端部以相同間矩 隔開形成的多個槽7a來製作使液體流到喷射單元13的連接 流道9。如此，通過對間隙墊板7的下端部進行加工來製作 多個槽而形成連接流道9的方式具有加工性優良、減少生 産成本和時間，從而可提高生産效率的效果。 另外，第一墊板1和第二墊板3的下端部形成有朝兩 側傾斜的傾斜面le、3e。當混合流體以高壓狀態經噴射單 元13喷射到基板G上時，該傾斜面le、3e的周圍會形成 充分的閒置空間’從而防止喷射的混合流體周圍産生負壓。 下文參照附圖具體說明如上所述的本發明的作用。並 且詳細說明向通過輸送裝置移送到處理槽内部的基板G嘴 射混合流體的過程。 通過氣體供給裝置供給到氣體腔室1 a内的氣體經由氣 體供給流道lb和喷射單元13喷射。此時，液體腔室3a内 的液體流過液體供給流道3b，並沿由間隙墊板7的槽7a構 成的連接流道9喷射到喷射單元13上。即，根據汽化器的 原理，氣體從氣體供給流道lb和喷射單元13流出時，液 體就會與氣體一起通過連接流道9,此時液體和氣體混合的 混合流體被噴射到基板G上。 此時，如圖5所示，氣體從氣體喷射流道ib流過喷射 單元13。並且’隨著喷射單元13的擴充，可防止現有技術 中氣體向液體喷射流道3b逆流的現象。 當然氣體流過喷射單元13時，液體腔室3a的液體流過 連接流道9的同時成爲混合流 m 然後喷射到基板G上。 如上所述，由於第一執拓7 、 板和第二墊板3的前端部被Further, a gas supply flow path 丨b connected to the gas chamber to 1a is formed between the first pad 1 and the gap pad 7. Further, a liquid supply flow path connected to the liquid chamber 3a is formed between the second pad 3 and the gap pad 7. Also 'first pad! An injection unit 13 through which the mixed fluid passes is formed on the front end between the second pad 3. That is, the first - seesaw! And the front end of the first whole plate 3 has a distance (four)), thereby forming a space for spraying the mixed fluid, which is the injection unit 13 〇 ° saying that the rolling body supply flow lb is the gas flowing out of the gas chamber h = The = field nozzle unit 13 is a gas and a liquid that flows out of the gas chamber u. The fluid passes through and is ejected to a region on the substrate G. The body is preferably as shown in FIG. 4) is preferably larger than the above-mentioned gas 07 yoke a (as shown in FIG. 4, the front end portion of the second backing plate 3 is formed to face the extension portion 3c P of the protruding shape toward the first raft 1 The direction is extended and, as shown in FIG. 2, the gap pad is separated from the spaced apart _ 7a, & the lower end Φ is formed with a special distance 7a for connecting the liquid two S and the lower opening portion. The plurality of slots drink body chamber 3a and sprayed as shown in Fig. 4), so as to the spray connection flow path 9 (i.e., the gap raft 7 disk ^, the liquid in the liquid chamber 3a. 4 after the two pads 3 are combined, the gap raft 7 The plurality of grooves 7a of 1357359 below become the connection flow path 9 for conveying the liquid. As described above, the gap pad 7 can be made to flow the liquid to the ejection unit by the plurality of grooves 7a formed at the lower end portions thereof at the same inter-distance. 13 is connected to the flow path 9. Thus, by forming the plurality of grooves by processing the lower end portion of the gap pad 7, the connection flow path 9 is formed to have excellent workability, reduce production cost and time, and thereby improve production efficiency. In addition, the lower end portions of the first pad 1 and the second pad 3 are formed to be inclined toward both sides. The inclined faces le, 3e. When the mixed fluid is ejected onto the substrate G through the ejecting unit 13 in a high pressure state, a sufficient idle space is formed around the inclined faces le, 3e to prevent a negative pressure from being generated around the injected mixed fluid. The drawings specifically explain the action of the present invention as described above, and the process of jetting the mixed fluid to the substrate G transferred to the inside of the treatment tank by the conveying means in detail. The gas supplied into the gas chamber 1a by the gas supply means is via The gas supply flow path lb and the ejection unit 13 are sprayed. At this time, the liquid in the liquid chamber 3a flows through the liquid supply flow path 3b, and is ejected to the ejection unit 13 along the connection flow path 9 constituted by the groove 7a of the gap pad 7. That is, according to the principle of the vaporizer, when the gas flows out from the gas supply flow path lb and the injection unit 13, the liquid passes through the connection flow path 9 together with the gas, at which time the mixed fluid of the liquid and the gas is sprayed onto the substrate G. At this time, as shown in Fig. 5, gas flows from the gas injection flow path ib through the injection unit 13. And 'with the expansion of the injection unit 13, the gas in the prior art can be prevented The phenomenon in which the liquid jet flow path 3b flows countercurrently. Of course, when the gas flows through the jetting unit 13, the liquid of the liquid chamber 3a flows through the connecting flow path 9 and becomes a mixed stream m and then ejected onto the substrate G. As described above, The front end of the extension 7, the plate and the second pad 3 are
構成爲斜面1 e、3 e ,因此ι»^· _ή·ι· 5ι丨«· I 此嘴射到基板G上的混合流體的周 圍會形成充分的空間1而防止喷射到基板g上的混合流 體的周圍產生負壓。因此’可以避免基板G被吸附到流體 喷射裝置上或者搖晃’從而防止基板處理不良的現象。 【圖式簡單說明】 圖1是本發明流體噴射裝置一個實施例的的外觀結構 圖2是圖1中主要部分的分解立體圖。 圖3是圖i中瓜-诅向剖面圖。 圖4是圖3中A部分的放大圖。 圖5是用於說明本發明實施例作用的示意圖。 【主要元件符號說明】 1 第一墊板 2 氣體供給單元 3 第二墊板 4 液體供給單元 5 連接部件 7 間隙墊板 9 連接流道 13 喷射單元 9 1357359 a 氣體供給流道的寬度 b 喷射單元的寬度 la 氣體腔室 lb 氣體供給流道 le ' 3e 斜面 3a 液體腔室 3b 液體供給流道 3c 延伸部 7a 槽 G 基板It is formed as a slope 1 e, 3 e , so ι»^· _ή·ι· 5ι丨«· I will form a sufficient space 1 around the mixed fluid on the substrate G to prevent mixing onto the substrate g. A negative pressure is generated around the fluid. Therefore, it is possible to prevent the substrate G from being adsorbed onto the fluid ejecting apparatus or to be shaken to prevent the substrate from being poorly processed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an external view of an embodiment of a fluid ejecting apparatus according to the present invention. Fig. 2 is an exploded perspective view of a main portion of Fig. 1. Figure 3 is a cross-sectional view of the melon-诅 direction in Figure i. Figure 4 is an enlarged view of a portion A of Figure 3. Figure 5 is a schematic view for explaining the action of an embodiment of the present invention. [Main component symbol description] 1 First pad 2 Gas supply unit 3 Second pad 4 Liquid supply unit 5 Connection member 7 Gap pad 9 Connection flow path 13 Spray unit 9 1357359 a Width of gas supply flow path b Spray unit Width la gas chamber lb gas supply flow path le ' 3e slope 3a liquid chamber 3b liquid supply flow path 3c extension portion 7a groove G substrate