TW200812714A - Dust removing device - Google Patents
Dust removing device Download PDFInfo
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- TW200812714A TW200812714A TW095135521A TW95135521A TW200812714A TW 200812714 A TW200812714 A TW 200812714A TW 095135521 A TW095135521 A TW 095135521A TW 95135521 A TW95135521 A TW 95135521A TW 200812714 A TW200812714 A TW 200812714A
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- Prior art keywords
- air
- dust removing
- air suction
- chamber
- dust
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
- B08B7/026—Using sound waves
- B08B7/028—Using ultrasounds
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Abstract
Description
200812714 九、發明說明： 【發明所屬之技術領域】 本發明’係有關於一種最適用於生 々取w用於工件（除塵對象物 凹凸部除塵之除塵裝置。 【先前技術】 先前，提供有種種除塵裝置’以使在液晶面板或電漿 I1示面板之各種片料的製造轉巾，使㈣空氣或被超 曰波震動的空氣吐出到工件表面，將自工件表面剝離之塵 埃等粒子加以吸引去除。又，使前述空氣離子化而將工件 表面除塵除電之除塵/除電裝置也係眾所周知。 例如，專利文獻！之除塵裝置，係具備：空氣吐出腔 體’内藏有超音波產生器且具備空氣吐出口；以及空氣吸 :腔體’鄰接於前述空氣吐出腔體且具備空氣吸入口；空 ，吐出腔體及空氣吸入腔體係沿著工件行走方向配置，同 時’在空氣吐出口及空氣吸入口與工件之間保有間隔，其 中在自工件行走方向觀得之空氣吐出腔體約略上端中央 部處’配置空氣吐出用之配管孔’而I，在空氣吸入腔體 約略上端中央部處，配置空氣吸入用之配管孔，藉此，使 沿著工件橫向流動空氣的吐出力及吸引力約略成均勻，即 使是玻璃基板等寬幅的工件，也能獲得均勻而穩定之除塵 力。 、 •又，專利文獻2之基板用搬運除塵裝置，係具備包含 至少各1個的空氣吸入室及空氣噴出室的除塵單元，對於200812714 IX. Description of the Invention: [Technical Field] The present invention relates to a dust removing device which is most suitable for use in a workpiece (a dust removing device for dust removal of a dust removing object). [Prior Art] Previously, various kinds of dust removing were provided. The device 'sends the manufacturing of the various sheets of the liquid crystal panel or the plasma I1 panel, so that (4) air or air that is subjected to super-shock vibration is discharged to the surface of the workpiece, and particles such as dust peeled off from the surface of the workpiece are sucked and removed. Further, a dust removing/removing device that ionizes the air to remove dust and static electricity on the surface of the workpiece is also known. For example, the dust removing device of the patent document has an air ejection chamber in which an ultrasonic generator is incorporated and air is provided. a discharge port; and an air suction: the cavity 'adjacent to the air discharge cavity and having an air suction port; the air, the discharge cavity and the air suction cavity system are arranged along the traveling direction of the workpiece, and at the same time, the air discharge port and the air suction port There is a space between the workpiece and the workpiece, wherein the air is discharged from the direction of the workpiece and the cavity is discharged from the center of the upper end. At the center of the upper end of the air intake chamber, the pipe hole for air suction is disposed at the center of the upper end of the air suction chamber, thereby making the discharge force and the attractive force of the air flowing in the lateral direction of the workpiece approximately Even if it is a wide-width workpiece such as a glass substrate, it is possible to obtain a uniform and stable dust-removing force. Further, the substrate-carrying dust-removing device of Patent Document 2 includes at least one air suction chamber and air ejection. Room dust removal unit, for
2146*8347-PF 5 200812714 y ' 藉由搬運滚子而往除塵單元方向搬運的基板，使洗淨空氣 自空氣喷出室往基板表面喷出，以空氣吸入室來吸引飛散 的塵埃’其中’僅在搬運滾子側配置除塵單元，藉由文氏 效應使基板抵接到搬運滾子，使藉由文氏效應產生之吸力 作用於基板，而使基板確實地抵接到搬運滾子，藉以防止 產生衝撞等。 【專利文獻1】曰本特開2000-57ί5號公報（段落 _ [_5]，[0016]，第 1 圖，第 2 圖等） 【專利文獻2】日本特開2003-332401號公報（段落 [0010]，[ 0061 ]，第 1 圖，第 2 圖等） 【發明内容】 【發明所欲解決的課題】2146*8347-PF 5 200812714 y ' The substrate transported in the direction of the dust removal unit by the rollers, the cleaning air is ejected from the air ejection chamber to the surface of the substrate, and the air is sucked into the chamber to attract scattered dust. The dust removing unit is disposed only on the conveying roller side, and the substrate is brought into contact with the carrying roller by the Venturi effect, so that the suction force generated by the Venturi effect acts on the substrate, so that the substrate reliably abuts the carrying roller, thereby Prevent collisions and the like. [Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-57375 (paragraph _ [_5], [0016], Fig. 1, Fig. 2, etc.) [Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-332401 (paragraph [ 0010], [0061], Fig. 1, Fig. 2, etc.) [Summary of the Invention] [Problems to be Solved by the Invention]
上述之先則除塵裝置中，雖然其具有能均勻且穩定地 去除工件表面塵埃之效果，但是，其假設工 狀或片狀，且除塵對象表面也為平面。 /、千板 但是，對於表面或内面具有凹凸部之工件，這些凹凸 部會成為障礙而無法使除塵頭與除塵對象表面間之 持一、定’又’空氣會因為凹凸部而產生亂流，所以，有益 除f效果之問題。尤其，當使此種工件使用： 無塵至專潔淨空㈣’附著於凹凸部上之塵埃會附 造線之零件及製品上，而有材㈣科降低之問題。 在此，本發明之解決課題，係提供一種對 凹凸部之除塵性能，而且能使零件局部共用，而能降低iIn the above-described dust removing device, although it has an effect of uniformly and stably removing dust on the surface of the workpiece, it is assumed to be a work shape or a sheet shape, and the surface of the dust removing object is also flat. However, for the workpiece having the uneven surface on the surface or the inner surface, these concave and convex portions may become obstacles, and the air between the dust removing head and the surface of the dust removing object cannot be held, and the air may be turbulent due to the uneven portion. Therefore, it is beneficial to solve the problem of f effect. In particular, when such a workpiece is used: dust-free to clean air (4) 'dust attached to the uneven portion will be attached to the parts and products of the wire, and the material (4) is reduced. Here, the problem to be solved by the present invention is to provide a dust removing performance for the uneven portion, and to make the parts share locally, and to reduce i.
2146-8347-PF 6 200812714 本之除塵裝置。 ’ 【用於解決課題的手段】 為了解決上述課題，申請專利範圍第^貝之發明，俾 -種除塵裝置，藉由吸引自除塵頭往工件表面吐出之* 氣，來吸引去除附著於前述表面上之塵埃，其特徵在於： 包括凸部用除塵頭，前述凸部用除塵頭係具有：空氣吐出 f;空氣吸入室；喷嘴罩，内部空間連通到前述空氣吐出 室，以及空氣吸入筒，與前述喷嘴罩同心地配置於前述喷 嘴罩内側，而且具有與前述空氣吸入室相連通之空氣吸入 口；藉由前述喷嘴罩尖端部與前述空氣吸入筒尖端部間之 間隙來：成空氣吐出口，同時’使前述工件上具有之凸部 2置於前述空氣吸入口内側，使空氣自前述空氣吐出口往 河述凸部方向吐出I，將前述空氣自前述空氣吸入口往前 述空氣吸入室吸入。 申請專㈣圍第2項之發明，係在中請專利範圍第ι 項所述之除塵裝置中’前述凸部用除塵頭係具備配置於前 述空氣吸入室兩側之第1空氣吐出室及第2空氣吐出室。 申請專利範圍第3項之發明，係一種除塵裝置，夢由 =引自除塵頭往工件表面吐出之空氣，來吸引去除附著於 前述表面上之塵埃’其特徵在於：包括凹部用除塵頭，前 述凹部用除塵頭係具有：空氣吐出室；空氣吸入室；喷嘴 罩’内部空間連通到前述空氣吐出室；以及吐出喷嘴，、與 前述噴嘴罩同心地配置於前述噴嘴罩内側，而且具有與前 述空氣吐出室相連通之空氣吐出口；藉由前述喷嘴罩二2146-8347-PF 6 200812714 The dust removal device. 'Means for Solving the Problem' In order to solve the above-mentioned problems, the invention of the patent scope of the present invention, the 除-type dust removing device, attracts and removes the surface by sucking the gas discharged from the dust removing head toward the surface of the workpiece. The dust is characterized by: a dust removing head for a convex portion, the dust removing head for the convex portion having: air discharge f; an air suction chamber; a nozzle cover, an internal space communicating with the air discharge chamber, and an air suction cylinder, and The nozzle cover is disposed concentrically inside the nozzle cover, and has an air suction port that communicates with the air suction chamber; and a gap between the tip end portion of the nozzle cover and the tip end portion of the air suction cylinder: an air discharge port, At the same time, the convex portion 2 provided on the workpiece is placed inside the air suction port, and air is discharged from the air discharge port toward the convex portion of the river, and the air is sucked from the air suction port into the air suction chamber. In the dust removing device according to the first aspect of the invention, the dust removing head of the convex portion has the first air discharging chamber and the first air discharging chamber disposed on both sides of the air suction chamber. 2 air spit out of the room. The invention of claim 3 is a dust removing device, which is characterized in that the dust is discharged from the dust removing head to the surface of the workpiece to attract and remove the dust adhering to the surface, which is characterized in that: the dust removing head for the recess is included, The dust removing head for a recess has an air discharge chamber, an air suction chamber, a nozzle cover 'internal space that communicates with the air discharge chamber, and a discharge nozzle that is disposed concentrically with the nozzle cover inside the nozzle cover and has the air a discharge port for air that is connected to the discharge chamber;
2146-8347-PF 7 200812714 述吐出贺嘴間之空間來形成空氣吸入口，同時，使前述工 件上具有之凹部配置於前* ' 則这工乳吐出口旁邊，使空氣自前 逑空氣吐出口往前诚立 这凹°卩方向吐出後，將前述空氣自前述 工軋吸入口往前述空氣吸入室吸入。 申凊專利範圍第4 > I BB ^ 項之I明，係在申請專利範園第3 Ο卜之除塵裝置中，前述凹部用除塵頭係具備配置於前 述空心土出室兩側之第1空氣吸入室及第2空氣吸入室。 申凊專利範圍第5項之發明，係—種除塵裝置，同時 具備申請專利範圍第〗 、^ 嗦A弟2項所述之凸部用除塵頭、 以及申知專利範圍第3項咬 【發明效果】 項成弟4項所述之凹部用除塵頭。 *使用本發料，藉由具備凸部用除塵頭 塵頭’能確實將附著於工件凸部或凹部之塵埃加去 又’當使構成凸部用除塵頭或凹部用 喷嘴罩共用時，各昤 各除塵頭就無須分別使用專用零件，而能 降低成本。 τ t 【實施方式】 以下，料參照圖面來說明本發明之實施形態。 百先，弟1圖係表示本實施形態除塵裝置 &，使用於麥昤丁址η 1 ^ ® “⑴、、及用：去:部塵埃之凸部用除塵頭1〇° (第1 (第圖）：皆二件凹部T凹部用除塵頭2°° ) 白以局部剖面圖來表示。2146-8347-PF 7 200812714 The space between the mouthpieces is spouted to form an air intake port, and the recessed portion on the workpiece is placed in front of the front spout, so that the air is discharged from the front air outlet. After the front side is ejected in the concave direction, the air is sucked into the air suction chamber from the work inlet. In the dust removing device of the third aspect of the application, the dust removing device for the recessed portion has the first one disposed on both sides of the hollow earth chamber. Air intake chamber and second air suction chamber. The invention of claim 5 of the patent scope is a dust-removing device, and has a dust-removing head for the convex portion described in the second application of the patent scope 〖, ^ 嗦A, and the third item of the patent scope Effect] The dust removal head is used for the recessed part of item 4 of Cheng Chengdi. *When the hair material is used, it is possible to surely add the dust adhering to the convex portion or the concave portion of the workpiece by the dust-removing head dust head for the convex portion, and when the dust-removing head or the concave portion nozzle cover for the convex portion is used,昤 Each dust removal head does not need to use special parts separately, but can reduce costs. τ t [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Hundreds of first, brother 1 shows the dust removal device & this embodiment is used in the wheat 昤 η η 1 ^ ® "(1), and: to: the dust of the convex part of the dust head 1 〇 ° (1st ( Fig.): Both recesses T are recessed with a dust-removing head 2°°) White is shown in partial cross-section.
2146-8347-PF 200812714 一在第l(a)圖凸部用除塵頭100中，101係略呈立方 二之：體，在其内部處，藉由分隔壁1 02, 1 03分別形成有 第1工虱吐出室104、第2空氣吐出室105及空氣吸入室 10 6。 工氣吐出室1 〇4, 105，係透過形成於腔體j 〇 i 一邊基板 上之牙孔（未圖示）而連通到圓筒狀連接器11丨，1丨2， ?淨二氣自设於外部之空氣供給幫浦等透過連接器 in’ 112輸送到空氣吐出室1〇4,1〇5。又，空氣吸入室j⑽， 係透過形成於前述基板110上之穿孔（未圖示）而連通到 =筒狀連接器113,使空氣吸入室1〇6内之空氣藉由設於外 部之空氣吸入幫浦等透過連接器丨丨3而被吸入。 在第1 (a)圖中，註記於各連接器U1〜113旁邊之記 號「P」係表示吐出空氣之入口，「V」係表示吸入空氣之 出口。 而且’在腔體101另一邊之基板丨07處，分別設有連 _通到空氣吐出室1 04, 1 05及後述噴嘴罩114内部空間119 之穿孔1 08, 1 09。 在前述基板107下方，固著有沿著軸向之上下兩端部 成開口狀的喷嘴罩114。在前述噴嘴罩1 ] 4内部，同心配 置有略呈圓筒狀之空氣吸入筒115,沿著上述軸向之上端 部外周面，係被螺固於前述，空氣吸入室丨〇6之下端部内 周面上 空氣吸入筒11 5穿孔，係愈往下方（喷嘴罩丨丨4開口 部）直徑愈擴大，前述穿孔，係作為吸引附著在後述工件 2146-8347-PF 9 200812714 凸面上之塵埃的空氣吸入口 116。 又，藉由噴嘴罩114研钵狀外周壁117開口部周緣與 空氣吸入筒115下端部間之間隙’形成有空氣吐出口 118， 前述空氣吐出口 118，係透過喷嘴罩114與空氣吸入筒115 間之空間119及前述穿孔1 〇 8，1 〇 9連通到空氣吐出室 104,105 〇 在此，由第1 ( a)圖可知’在本實施形態中，空氣吸 入同115下端部’係配置於比贺嘴罩114外周壁11 7下端 參部還往空氣吸入室106侧退縮之位置。而且，雖然未圖示， 也可使空氣吸入简115下端部咼度與噴嘴罩114外周壁Η? 下端部等高。 第2 (a)圖，係凸部用除塵頭100俯視圖，連通到空 氣吐出室1 04, 1 05之前述連接器ln，112係分別配置有1 個，連通到空氣吸入室106之前述連接器U3係在前後方 向配置有2個。 而且，第3圖係凸部用除塵頭j 〇〇之仰視圖。 藉由上述構造，自外部供认丧# | 1/、、、Ό水之空氣，係以連接器 111，112·>空氣吐出室1〇4，1〇5令空了丨ιΠ0 ，ιυΰ^ 牙孔 108,109+空間 119 + 空氣吐出口 118之路徑，沿荽办与成、— ，口者空乳吸入筒115中心軸被吐 出到外部，又，使附著於工件 it 〇谇之壓埃剝離，而含有塵 埃之空氣，係以空氣吸入口 1 i2146-8347-PF 200812714 In the dust removing head 100 for the convex portion of the l(a), the 101 series is slightly cubic: the body, and at the inside thereof, the partition wall 102, 103 is respectively formed with the first 1 worker discharge chamber 104, second air discharge chamber 105, and air suction chamber 106. The working fluid discharge chamber 1 〇 4, 105 is connected to the cylindrical connector 11 丨, 1 丨 2, through the dental hole (not shown) formed on the substrate on the side of the cavity j 〇i, The external air supply pump or the like is sent to the air discharge chamber 1〇4, 1〇5 through the connector in'112. Further, the air suction chamber j (10) is communicated to the cylindrical connector 113 through a through hole (not shown) formed in the substrate 110, so that the air in the air suction chamber 1〇6 is sucked by the air provided outside. The pump or the like is sucked through the connector 丨丨3. In the first (a) diagram, the symbol "P" marked next to each of the connectors U1 to 113 indicates the inlet of the discharge air, and the "V" indicates the outlet of the intake air. Further, at the substrate 丨07 on the other side of the cavity 101, perforations 108, 119 which are connected to the air discharge chambers 104, 156 and the internal space 119 of the nozzle cover 114 to be described later are respectively provided. Below the substrate 107, a nozzle cover 114 having an opening shape along the upper and lower ends in the axial direction is fixed. Inside the nozzle cover 1] 4, a substantially cylindrical air suction cylinder 115 is concentrically arranged, and is screwed to the outer peripheral surface of the upper end portion of the axial direction, and the lower end portion of the air suction chamber 丨〇6 The air suction cylinder 11 5 is perforated on the circumferential surface, and the diameter is increased downward (the opening of the nozzle cover 4), and the perforation is used as air for attracting dust adhering to the convex surface of the workpiece 2146-8347-PF 9 200812714 to be described later. Suction port 116. Further, an air discharge port 118 is formed by the nozzle cover 114 in the gap between the periphery of the opening portion of the outer peripheral wall 117 and the lower end portion of the air suction tube 115, and the air discharge port 118 passes through the nozzle cover 114 and the air suction tube 115. The space 119 and the perforations 1 〇8,1 〇9 are connected to the air discharge chambers 104, 105. Here, as shown in the first (a) diagram, "in the present embodiment, the air intake is the same as the lower end portion 115". The lower end portion of the outer peripheral wall 117 of the mouthpiece cover 114 is also retracted toward the air suction chamber 106 side. Further, although not shown, the lower end portion of the air suction pin 115 can be made equal to the lower end portion of the outer peripheral wall of the nozzle cover 114. Fig. 2(a) is a plan view of the dust removing head 100 for the convex portion, and the connector ln, 112 connected to the air discharge chamber 104, 156, respectively, is disposed, and the connector is connected to the air suction chamber 106. There are two U3s arranged in the front-rear direction. Further, Fig. 3 is a bottom view of the dust removing head j 凸 of the convex portion. With the above configuration, the air is confessed from the outside # | 1/,,, the air of the drowning water, with the connector 111, 112·> the air spouting room 1〇4, 1〇5 is empty 丨ιΠ0, ιυΰ^ teeth The path of the hole 108, 109 + the space 119 + the air discharge port 118 is discharged to the outside along the central axis of the air suction tube 115, and the pressure attached to the workpiece is peeled off. Air containing dust, with air intake 1 i
Ub◊空乳吸入室106 +連接器 113之路徑，被吸引排出到外部。 接著，參照第1(b)圖來說明凹部用除塵頭2。The path of the Ub hollow milk suction chamber 106 + connector 113 is sucked and discharged to the outside. Next, the dust removing head 2 for a recess will be described with reference to Fig. 1(b).
造。 2146-8347-PF 10 200812714 在前述凹部用除鹿％ 〇ΛΛ i *塵碩_中’腔體2Gi及喷嘴罩214 、、貫貝上與别述凸部用除塵頭100之腔體101及 喷嘴罩U4相同。亦即，在第⑴）圖中，腔體謝，係 具備分隔壁2 〇 2 2 (Π、楚1 w ^ z，⑼扣弟1空氣吸入室204、第2空氣吸入 至205工氣吐出至2〇6、基板2〇7, 21〇及穿孔2〇8, 2⑽，， 喷嘴罩214，係沿著抽向之上下兩端部成開口狀，同時， 具備外周壁21 7。 凹部用除塵頭200與凸部用除塵頭1〇〇不同處主要在 於吐出喷嘴220之構造。 前述吐出喷嘴220，係由螺固於空氣吐出室2〇6上端 部内周面之筒狀吐出筒22卜以及與其上端部成同軸狀^ 結且外型略呈圓錐狀之噴嘴本體222所構成。在前述噴嘴 本體222中心，形成有透過吐出筒221内部空間連通到空 氣吐出室206之空氣吐出口 223。Made. 2146-8347-PF 10 200812714 The cavity 101 and the nozzle of the dust removing head 100 for the convex portion are used in the recessed portion, the cavity 2Gi and the nozzle cover 214, and the nozzle cover 214 The cover U4 is the same. That is, in the figure (1)), the cavity is provided with a partition wall 2 〇 2 2 (Π, Chu 1 w ^ z, (9) buckled brother 1 air suction chamber 204, second air suction to 205 work gas discharge to 2〇6, the substrate 2〇7, 21〇 and the perforations 2〇8, 2(10), the nozzle cover 214 is formed in an opening shape along the upper and lower ends of the drawing, and has the outer peripheral wall 21 7 . The dust removing head for the concave portion The difference from the dust-removing head 1 of the convex portion is mainly the structure of the discharge nozzle 220. The discharge nozzle 220 is a cylindrical discharge tube 22 screwed to the inner peripheral surface of the upper end portion of the air discharge chamber 2〇6 and the upper end thereof. The nozzle body 222 having a coaxial shape and a substantially conical shape is formed in the center of the nozzle body 222, and an air discharge port 223 that communicates with the air discharge chamber 206 through the internal space of the discharge cylinder 221 is formed.
又’空氣吐出室2 0 6，係透過形成於腔體2 〇 1 —邊之 基板210上的穿孔（未圖示）而連通到圓筒狀連接器2丄3 内部’使潔淨空氣自設於外部之空氣供給幫浦等透過連接 器213輸送到空氣吐出室206。而且，空氣吸入室204, 205, 係透過形成於前述基板210之穿孔（未圖示）而連通到圓 筒狀連接器211，212内部，使空氣吸入室204, 205内之空 氣藉由設於外部之空氣吸入幫浦等透過連接器2 Τι，21 2而 被吸入。 在第1 (b)圖中，註記於各連接器211〜213旁邊之記 3虎「P」係表示吐出空氣之入口，「V」係表示吸入空氣之 2146-8347-PF 11 200812714 出口。 而且’第2 ( b)圖，係凹部用除塵頭200仰視圖，連 通到空氣吸入室204,205之前述連接器211，212係在前後 方向分別配置有2個，連通到空氣吐出室2〇6之前述連接 器21 3係配置有1個。 藉由上述構造，自外部供給來之空氣’係以連接器 213+空氣吐出室2〇6 +吐出孔221内部空間+空氣吐出口 223之路徑，往喷嘴本體222中心軸方向被吐出，又，使 附者於工件凹部之塵埃剝離，而含有塵埃之空氣，係以噴 嘴罩214與吐出喷嘴22〇間之空間（空氣吸入口）219+穿 孔208,2094空氣吸入室2〇4,2〇5 +連接器2U2i2之路 徑，被吸引排出到外部。 接著’說明本實施形態之使用狀態。 在此，本發明之除塵裝置，可為具備凸部用除塵頭1〇〇 及與凸部用除塵頭100連結之幫浦等空氣供給/吸引機構 之物件’也可為㈣凹部用除塵帛200及與凹部用除塵頭 200連結之幫浦等空氣供給/吸引機構之物件，也可為具備 々凸部用除塵頭100、凹部用除塵頭200及與其連結的幫浦 專玉氣供給/吸引機構之物件。 ―亦即’對於僅具有凸部之工件，則使用具備凸部用除 “ 100及與凸部㈣塵頭⑽連結之空氣供給/吸引機構 的除塵裝i，對於僅具有凹部之卫件，則使用具備凹部用 除塵頭200及與凹部用除塵頭2〇〇連結之空氣供給/吸引機 構的除塵裝置：而對於同時具有凸部及凹部之工件，則使Further, the air discharge chamber 206 is connected to the inside of the cylindrical connector 2丄3 through a through hole (not shown) formed in the substrate 210 on the side of the cavity 2 〇1. The external air supply pump or the like is sent to the air discharge chamber 206 through the connector 213. Further, the air suction chambers 204, 205 are communicated to the inside of the cylindrical connectors 211, 212 through perforations (not shown) formed in the substrate 210, so that the air in the air suction chambers 204, 205 is provided by The external air intake pump or the like is sucked through the connector 2 Τι, 21 2 . In the first (b) diagram, the note "3" in the vicinity of each of the connectors 211 to 213 indicates the inlet of the discharge air, and the "V" indicates the outlet of the intake air 2146-8347-PF 11 200812714. Further, in the second (b) view, the recessed portion of the dust removing head 200 is viewed from the bottom view, and the connectors 211 and 212 connected to the air suction chambers 204 and 205 are respectively disposed in the front-rear direction, and are connected to the air discharge chamber 2〇6. One of the aforementioned connectors 21 3 is disposed. With the above configuration, the air supplied from the outside is discharged by the path of the connector 213 + the air discharge chamber 2 〇 6 + the discharge space 221 inner space + the air discharge port 223 toward the central axis direction of the nozzle body 222, and The dust which is attached to the concave portion of the workpiece is peeled off, and the air containing dust is a space between the nozzle cover 214 and the discharge nozzle 22 (air suction port) 219 + perforation 208, 2094 air suction chamber 2〇4, 2〇5 + The path of the connector 2U2i2 is sucked and discharged to the outside. Next, the state of use of this embodiment will be described. Here, the dust removing device of the present invention may be an object including an air supply/suction mechanism such as a dust removing head for a convex portion and a pump connected to the dust removing head 100 for a convex portion, or (d) a dust removing device for the recess portion. The object of the air supply/suction mechanism such as the pump connected to the dust removing head 200 for the recess may be a dust removing head 100 for the convex portion, a dust removing head 200 for the recess, and a jade gas supply/suction mechanism connected thereto. Objects. ― That is, for a workpiece having only a convex portion, a dust removing device i having a convex portion for an air supply/suction mechanism connected to "100 and a convex portion (four) dust head (10) is used, and for a guard having only a concave portion, A dust removing device including a dust removing head 200 for a recess and an air supply/suction mechanism connected to the dust removing head 2〇〇 for a recess is used: for a workpiece having both a convex portion and a concave portion,
2146-8347-PF 12 200812714 用具備凸部用除塵頭1GG、凹部用除塵頭㈣及與其連結 的空氣供給/吸引機構的除塵裝置。 第4圖及第5 ®，係表示對於在表面具有凸部， 且在内面具有凹部3〇2的略呈立方體工件’使用凸部用除 塵頭1〇〇及凹部用除塵頭200兩者，對凸部及凹部加以除 塵的情形。 凸部用除塵頭100及凹部用除塵頭2〇〇，可藉由人手 緊貼在工件3GG之凸部3G1或凹部302上，也可以藉由機 械手臂等來_性移動，使其f貼在凸部3()1或凹部繼 上。又，凸部用徐塵頭100及凹部用除塵頭2〇〇，係可為 分別分離形成’也可藉由適當連結構件連結兩者，而能往 接近第4圖工# 3〇〇表内面之方向，或者，離開工件3〇〇 表内面之方向移動。 如第4圖及第5圖所示’在工件则凸部3〇ι侧處， 自凸部用除塵頭100前述空氣吐出口 118吐出之空氣，係 :撞到凸部301基端部，沿著凸部3〇1外周面往空氣吸入 筒115中心軸方向移動，而被吸引往空氣吸入室1〇6。因 此’凸部301上表面附近係成負壓，其上表面附近之空氣 也被往空氣吸入室1 〇 6方向吸引。 々藉由此-連動作，凸部301基端部或外周面、上表面 等上附著的塵埃會被剝離’而透過空氣吸入室1〇6被外部 的空氣吸入幫浦吸引去除。 而且，噴嘴罩114開口部或空氣吸入筒115空氣吸入 口 116之内徑及形狀等’係當然必須形成為能收容凸部3012146-8347-PF 12 200812714 A dust removing device including a dust removing head 1GG for a convex portion, a dust removing head for a concave portion (4), and an air supply/suction mechanism connected thereto. In the fourth and fifth aspects, the dust-removing head 1 for the convex portion and the dust-removing head 200 for the concave portion are provided for the substantially cubic workpiece having the convex portion on the surface and having the concave portion 3〇2 on the inner surface. The case where the convex portion and the concave portion are dusted. The dust removing head 100 for the convex portion and the dust removing head 2 for the concave portion can be closely attached to the convex portion 3G1 or the concave portion 302 of the workpiece 3GG by a human hand, or can be moved by a mechanical arm or the like to cause the f to be attached thereto. The projection 3 () 1 or the recess is continued. Further, the dust portion 100 for the convex portion and the dust removing head 2 for the concave portion may be separated and formed separately, or may be connected to each other by an appropriate connecting member, and may be close to the inner surface of the fourth drawing #3〇〇 Oriented, or moved away from the inner surface of the workpiece. As shown in Fig. 4 and Fig. 5, the air ejected from the air discharge port 118 of the dust removing head 100 for the convex portion hits the base end portion of the convex portion 301 along the convex portion 3〇 side of the workpiece. The outer peripheral surface of the convex portion 3〇1 moves toward the central axis of the air suction cylinder 115, and is attracted to the air suction chamber 1〇6. Therefore, the vicinity of the upper surface of the convex portion 301 is negatively pressurized, and the air near the upper surface thereof is also attracted to the air suction chamber 1 〇 6 . By this operation, the dust adhering to the base end portion, the outer peripheral surface, the upper surface, and the like of the convex portion 301 is peeled off, and is sucked and removed by the external air suction pump through the air suction chamber 1〇6. Further, the inner diameter, the shape, and the like of the opening of the nozzle cover 114 or the air suction port 115 of the air suction cylinder 115 must of course be formed so as to accommodate the convex portion 301.
2146-8347-PF 13 200812714 輪 - 之内徑及形狀等。又，凸部301之形狀等，並不侷限於圖 示例。 二另外，在工件300凹部302侧處，自凹部用除塵頭2〇〇 前述空氣吐出口 223吐出之空氣，係衝撞到凹部3〇2底面， 沿著凹部302内周面往喷嘴罩214内部空間219 (空氣吸 入口）方向移動，而被吸引往空氣吸入室2〇4, 。 口此凹邻3 0 2底面或内周面等上附著的塵埃會被剝 離而透過空氣吸入室204, 205被外部的空氣吸入幫浦吸 引去除。 、 而且，喷嘴罩214開口部之内徑及形狀等，係當然必 須形成為能適合凹部302之内徑及形狀等。又，凹部3〇2 之形狀等，並不侷限於圖示例。 如上所述，當使用本實施形態時，藉由凸部用除塵頭 100及凹部用除塵頭200,能使附著於凸部3〇1及凹部 附近之塵埃確實地剝離而被吸引去除。 _ 又，凸部用除塵頭100及凹部用除塵頭200之主要零 件（腔體101,201或喷嘴罩114,214等）係相同構造，戶: 以，能使其共用，與各除塵頭分別需要使用專用零件者相 比較下，能降低製造成本。 而且，當施加超音波震動到往工件3〇〇吐出之空氣上 日守’更此提而除塵效率。 ” 【圖式簡單說明】 第1圖係實施形態凸部用除塵頭之局部剖面圖（第i 2146-8347-PF 14 200812714 (b)圖） 〔第 2 ( a) ⑴圖）及凹部用除塵頭之局部剖面圖（第! 弟2圖係實施形態凸部用除塵頭之俯視圖 圖）及凹部用除塵頭之仰視圖（第2(b)圖) 第3圖係實施形態凸部用除塵頭之仰視圖， 弟4圖係表示實施形態使用狀態之正視圖< 第5圖係表示實施形態使用狀態之侧視圖（ 主要元件符號說明】 100 凸部用除塵頭 101 腔體 102, 103 分隔壁 104, 105 空氣吐出室 106 空氣吸入室 107, 110 基板 108, 109 穿孔 111〜113 連接器 114 喷嘴罩 115 空氣吸入筒 116 空氣吸入口 117 外周壁 118 空氣吐出口 119 空間 200 凹部用除塵頭 201 腔體2146-8347-PF 13 200812714 Wheel - Inner diameter and shape, etc. Further, the shape and the like of the convex portion 301 are not limited to the illustrated examples. Further, at the side of the concave portion 302 of the workpiece 300, the air discharged from the concave portion by the dust removing head 2 〇〇 the air discharge port 223 collides against the bottom surface of the concave portion 3〇2, and follows the inner circumferential surface of the concave portion 302 toward the inner space of the nozzle cover 214. The 219 (air intake) moves and is attracted to the air intake chamber 2〇4. The dust adhering to the bottom surface or the inner peripheral surface of the concave portion of the mouth may be peeled off and passed through the air suction chamber 204, and the 205 is sucked and removed by the external air suction pump. Further, the inner diameter and shape of the opening of the nozzle cover 214 must of course be formed so as to be suitable for the inner diameter and shape of the recess 302. Further, the shape of the concave portion 3〇2 and the like are not limited to the illustrated examples. As described above, when the dust removing head 100 for the convex portion and the dust removing head 200 for the concave portion are used, the dust adhering to the convex portion 3〇1 and the vicinity of the concave portion can be reliably peeled off and sucked and removed. _ Further, the main parts (cavity 101, 201 or nozzle cover 114, 214, etc.) of the dust removing head 100 for the convex portion and the dust removing head 200 for the recess are the same structure, and the household parts can be shared, and the special parts are required for each of the dust removing heads. In comparison, the manufacturing cost can be reduced. Moreover, when ultrasonic vibration is applied to the air that is ejected to the workpiece 3, the defensive efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial cross-sectional view of a dust removing head for a convex portion of an embodiment (i 2146-8347-PF 14 200812714 (b)) [2nd (a) (1)) and dust removal for a recess The partial cross-sectional view of the head (the top view of the dust-removing head for the convex portion of the embodiment) and the bottom view of the dust-removing head for the concave portion (Fig. 2(b)) Fig. 3 is a dust-removing head for the convex portion of the embodiment FIG. 5 is a side view showing the state of use of the embodiment. FIG. 5 is a side view showing the state of use of the embodiment (description of the main components). 100 Dedusting head for the convex portion 101 cavity 102, 103 partition wall 104, 105 air discharge chamber 106 air suction chamber 107, 110 substrate 108, 109 perforations 111 to 113 connector 114 nozzle cover 115 air suction cylinder 116 air suction port 117 outer peripheral wall 118 air discharge port 119 space 200 recessed dust removal head 201 cavity body
2146-8347-PF 15 200812714 202, 203分隔壁 204, 205空氣吸入室 206 空氣吐出室 207, 21 0 基板 208, 209 穿孔 211〜213連接器 214 喷嘴罩 217 外周壁2146-8347-PF 15 200812714 202, 203 partition wall 204, 205 air suction chamber 206 air discharge chamber 207, 21 0 base plate 208, 209 perforation 211 to 213 connector 214 nozzle cover 217 outer peripheral wall
21 9 空間 220 吐出喷嘴 221 吐出筒 222 喷嘴本體 223 空氣吐出口 300 工件 301 凸部 302 凹部 2146-8347-PF 1621 9 Space 220 Discharge nozzle 221 Discharge cylinder 222 Nozzle body 223 Air spout 300 Workpiece 301 Convex 302 Concave 2146-8347-PF 16
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006239668A JP2008062122A (en) | 2006-09-05 | 2006-09-05 | Dust collector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200812714A true TW200812714A (en) | 2008-03-16 |
Family
ID=39156936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095135521A TW200812714A (en) | 2006-09-05 | 2006-09-26 | Dust removing device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2008062122A (en) |
| KR (1) | KR20090047382A (en) |
| CN (1) | CN101304818A (en) |
| TW (1) | TW200812714A (en) |
| WO (1) | WO2008029490A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9468952B2 (en) | 2013-01-18 | 2016-10-18 | Chan Li Machinery Co., Ltd. | Automatic cleaning device |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039613B (en) * | 2009-10-22 | 2014-04-30 | 株式会社伸兴 | Dust-removing device |
| JP5162612B2 (en) * | 2010-03-26 | 2013-03-13 | 三星ダイヤモンド工業株式会社 | Air dust collector |
| WO2013152984A1 (en) * | 2012-04-10 | 2013-10-17 | Tetra Laval Holdings & Finance S.A. | Edge cleaner |
| JP6058312B2 (en) * | 2012-08-06 | 2017-01-11 | ヒューグル開発株式会社 | Cleaning head |
| CN103143530B (en) * | 2013-01-18 | 2016-03-23 | 全利机械股份有限公司 | Automatic cleaning apparatus |
| KR101627823B1 (en) * | 2014-05-22 | 2016-06-07 | 문상호 | Web Cleaner |
| CN107114010B (en) * | 2015-01-14 | 2020-11-20 | 株式会社富士 | Feeder maintenance device and control method of feeder maintenance device |
| CN105032841B (en) * | 2015-07-23 | 2017-07-14 | 熊一凡 | High pressure draught hand for clearing up harmful dust |
| CN111299245A (en) * | 2018-12-11 | 2020-06-19 | 韶阳科技股份有限公司 | Gas circulation device |
| CN112170390B (en) * | 2020-09-25 | 2023-07-07 | 青岛海鼎通讯技术有限公司 | Back cleaning machine for mobile phone back cover plate |
| CN113351582B (en) * | 2021-06-22 | 2022-07-29 | 武昌理工学院 | Single-air-duct and double-air-duct alternating radar base cleaning device and cleaning method |
| TWI793842B (en) * | 2021-11-03 | 2023-02-21 | 立百邑有限公司 | Dust removal device |
| CN115250861B (en) * | 2022-07-20 | 2024-05-07 | 临沂林园市政园林工程有限公司 | Gardens vegetation root system equipment for packing of environmental protection |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0557257A (en) * | 1991-09-03 | 1993-03-09 | Nec Ibaraki Ltd | Parts cleaner |
| JP2002316110A (en) * | 2001-04-19 | 2002-10-29 | Matsushita Electric Ind Co Ltd | Electronic part washing method and washing apparatus used therein |
| JP2002343761A (en) * | 2001-05-16 | 2002-11-29 | Kubota Corp | Laser cleaning apparatus and method therefor |
| JP2004330162A (en) * | 2003-05-12 | 2004-11-25 | Hugle Electronics Inc | Clogging detecting device for dust-proof apparatus |
-
2006
- 2006-09-05 JP JP2006239668A patent/JP2008062122A/en active Pending
- 2006-09-21 CN CNA2006800414890A patent/CN101304818A/en active Pending
- 2006-09-21 WO PCT/JP2006/319216 patent/WO2008029490A1/en active Application Filing
- 2006-09-21 KR KR1020087009962A patent/KR20090047382A/en not_active Application Discontinuation
- 2006-09-26 TW TW095135521A patent/TW200812714A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9468952B2 (en) | 2013-01-18 | 2016-10-18 | Chan Li Machinery Co., Ltd. | Automatic cleaning device |
| TWI576174B (en) * | 2013-01-18 | 2017-04-01 | Chan Li Machinery Co Ltd | Automatic cleaning device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008029490A1 (en) | 2008-03-13 |
| KR20090047382A (en) | 2009-05-12 |
| JP2008062122A (en) | 2008-03-21 |
| CN101304818A (en) | 2008-11-12 |
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