JP2004330162A - Clogging detecting device for dust-proof apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a clogging detecting device for a dust-proof apparatus, constituted simply, in which when a foreign substance such as a glass fragment is absorbed to a suction slit, immediately the absorption of the foreign substance can be detected to prevent the occurrence of a situation such that a substrate is bruised. <P>SOLUTION: In the inferior surface of the dust proof head 200, clogging detecting sensors 240 and 250 of a capacitor type and a determination treating means connected electrically respectively to the clogging detecting sensors 240 and 250 by a capacitor are provided. The clogging detecting device for dust-proof apparatus detects a variation of an admittance caused by the foreign substance acting as a dielectric between the electrodes of the clogging detecting sensors 240 and 250, and, by detecting the variation of this admittance, judges that the foreign substance is absorbed to the suction slits 210 and 230. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
In the present invention, dust, dust and the like adhering to the surface of a dust removal target (hereinafter collectively referred to as dust) are simply cleaned air, or ultrasonic air vibrated at an ultrasonic frequency (hereinafter collectively referred to as dust). The present invention relates to a clogging detection device for a dust removal device mounted on a dust removal device that scatters dust by suction with a cleaning air).
[0002]
[Prior art]
An example of a dust removal target that is conveyed to the dust removal device and removed therefrom is, for example, a plate-like glass substrate. This glass substrate is used for, for example, a TFT (thin film transistor) liquid crystal panel, a PDP (plasma display panel), or an LCD (liquid crystal display).
As a dust removing apparatus for such a substrate, for example, there are Patent Documents 1 and 2 which are patent publications disclosed by the present applicant in connection with a patent application of the present applicant.
[0003]
[Patent Document 1]
JP-A-2000-84510 (paragraph numbers 0013 to 0025, FIGS. 1 to 4)
[Patent Document 2]
JP-A-2000-210630 (paragraph numbers 0020 to 0056, FIGS. 1 to 11)
[0004]
[Problems to be solved by the invention]
However, in the dust removing apparatus according to the related art, it has been confirmed that the substrate G to be transported is broken by various causes (for example, broken during vacuum suction), and glass fragments are sucked to the suction slit.
In particular, a glass substrate for a TFT liquid crystal panel is a thin substrate having a thickness of 0.3 mm to 1.1 mm, which often causes breakage.
[0005]
In this case, if the glass fragments adsorbed on the suction slit fall to the substrate for some reason, or if the adsorbed glass fragments come into contact with the substrate being transported, the surface of the substrate will be damaged and become defective. There was a risk of becoming. In the case of dropping onto a glass substrate, only one substrate is damaged, but there is a problem that contact by broken glass fragments adsorbs many glass substrates. Under such circumstances, there has been a request to immediately detect that the glass fragments have been adsorbed and to remove the glass fragments.
[0006]
However, since the dust remover is located in a clean room where the amount of dust is extremely small and there is almost no foreign matter, such a situation is not assumed and no countermeasure is taken at present.
Furthermore, although detection by a change in pressure in the suction chamber is conceivable, even if a foreign substance due to glass fragments adheres to the suction slot, the change in pressure is very small and cannot be detected by the pressure sensor.
As described above, there has been no detection method conventionally.
[0007]
Therefore, the present invention has been made to solve the above problem, and an object of the present invention is to make it possible to immediately detect the suction of a foreign substance such as a piece of glass or the like on a substrate when the foreign substance such as a piece of glass is attracted to the suction slit. An object of the present invention is to provide a clogging detection device for a dust removal device having a simple configuration that prevents occurrence of a situation that may be damaged.
[0008]
[Means for Solving the Problems]
In order to solve the problems of the present invention, according to the clogging detection device for a dust removal device according to the first aspect of the present invention,
A dust removal head having at least one air suction chamber and one air ejection chamber is provided. Cleaning air is ejected from the ejection slit of the air ejection chamber toward the surface to be dust-removed, and the scattered dust is sucked into the suction slit of the air suction chamber. A clogging detection device mounted on the dust removal device,
A clogging detection sensor in which first and second electrodes are provided on the dust removing head on both sides of the suction slit,
Determination processing means for electrically connecting the first and second electrodes of the clogging detection sensor,
With
Detects a change in admittance caused by the foreign substance adsorbed in the suction slot acting as a dielectric between the first and second electrodes of the clogging detection sensor, and detects the foreign substance adsorbed on the suction slit by detecting the change in admittance. It is characterized in that it is determined whether or not it is.
[0009]
Further, according to the clogging detection device for a dust removal device according to the second aspect of the invention,
The clogging detection device for a dust removal device according to claim 1,
The determination processing means includes:
Application means for applying a constant AC voltage to the first electrode and the second electrode of the clogging detection sensor;
Detecting means for detecting a change of increase in admittance due to a foreign substance adsorbed in the suction slot acting as a dielectric between the first and second electrodes of the clogging detection sensor as a change of increase in amplitude of an alternating current;
Notification means for notifying that a foreign substance is adsorbed when a change is detected,
It is characterized by having.
[0010]
Further, according to the clogging detection device for a dust removal device of the invention according to claim 3,
The clogging detection device for a dust removal device according to claim 1 or 2,
In the dust removal head, a first air ejection chamber and first and second air suction chambers sandwiching the first air ejection chamber are provided side by side along a transport direction of a dust removal target, and each of the first and second air suction chambers is provided. And a clogging detection sensor is provided around the suction slit.
[0011]
Further, according to the clogging detection device for a dust removal device according to the invention of claim 4,
The clogging detection device for a dust removal device according to claim 3,
In the clogging detection sensors provided in the suction slits of the first and second air suction chambers, the first electrodes are electrically connected in series, and the second electrodes are electrically connected in series. Characterized by being connected to
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a clogging detection device for a dust removal device according to the present invention will be described with reference to the drawings. 1 is a configuration diagram of a clogging detection device for a dust removing device according to the present embodiment, FIG. 2 is a cross-sectional view of first and second electrodes, FIG. 3 is a structural diagram of a glass facing surface of a dust removing head, and FIGS. It is an explanatory view of a detection principle.
As shown in FIG. 1, the dust removing device according to the present embodiment includes a transport roller 100 and a dust removing head 200. In this dust remover, the substrate G is transported in the direction of arrow a.
[0013]
Subsequently, each configuration will be described.
The substrate G is a specific example of a dust removal target of the present invention, and is, for example, a glass substrate used for a TFT (thin film transistor) liquid crystal panel, a PDP (plasma display panel), an LCD (liquid crystal display), or the like. As the substrate G shown in FIG. 1, only a part of the long substrate G is shown. The thickness of the substrate G is, for example, a glass substrate for a TFT liquid crystal panel as thin as 0.3 mm to 1.1 mm.
In addition, the other dust removal target includes a substrate such as a synthetic resin plate or a metal plate.
[0014]
The transport roller 100 is a roller that supports and transports the substrate G. The transport roller 100 is configured to provide a driving force for transporting the substrate G, or is configured to be rotatable so as to follow the substrate G transported by another drive source.
[0015]
The dust removing head 200 is arranged so as to be an air suction chamber V1, an air ejection chamber P, and an air suction chamber V2 along the substrate transfer direction (the direction of arrow a). The air suction chambers V1 and V2 are connected to a suction pump (not shown), and the air ejection chamber P is connected to a blower pump (not shown). In FIG. 1, the dust removing head 200 is disposed on the opposite side to the transport roller 100 side, but is disposed on the transport roller side, and blows out cleaning air from below to the lower surface of the substrate G, A dust removing head that sucks dust downward from the substrate G may be used.
[0016]
The air suction chamber V1 is provided with a suction slit 210, the air ejection chamber P is provided with an ejection slit 220, and the air suction chamber V2 is provided with a suction slit 230.
The suction slit 210 of the air suction chamber V1 is inclined toward the upstream side, in other words, toward the ejection slit 220, and the air flow ejected from the ejection slit 220 is sucked into the suction slit 230.
Similarly, the suction slit 230 of the air suction chamber V2 is inclined toward the downstream side, in other words, toward the ejection slit 220, and the air flow ejected from the ejection slit 220 is sucked into the suction slit 210.
Note that the suction slits 210 and 230 do not necessarily need to be inclined, and may be provided so as to be substantially perpendicular to the transport direction of the substrate G, although not shown.
[0017]
A clogging detection sensor 240 for V1 is formed in the suction slit 210 of the air suction chamber V1, and a clogging detection sensor 250 for V2 is formed in the suction slit 230 of the air suction chamber V2.
[0018]
In the clogging detection sensor 240 for V1, the first electrode 241 is formed on the upstream side (on the ejection slit 220 side), and the second electrode 242 is formed on the downstream side. The periphery of the suction slot 210 is formed to be concave in an arc shape, so that the area of the first electrode 241 is large and the area of the second electrode 242 is small.
[0019]
In the clogging detection sensor 250 for V2, the first electrode 251 is formed on the downstream side (the ejection slit 220 side), and the second electrode 252 is formed on the upstream side. The area around the suction slot 230 is formed to be concave in an arc shape, so that the area of the first electrode 251 is large and the area of the second electrode 252 is small.
Note that the first electrodes 241 and 251 and the second electrodes 242 and 252 may be adjusted to have the same area.
[0020]
Further, as shown in FIG. 3, the first electrode 241 and the second electrode 242 of the clogging detection sensor 240 for V1 are formed in a rectangular shape extending substantially in parallel with the longitudinal direction of the suction slot 210. The first electrode 251 and the second electrode 252 of the clogging detection sensor 250 are formed in a rectangular shape extending substantially parallel to the longitudinal direction of the suction slot 210.
[0021]
Specifically, the first electrode 241 and the second electrode 242 of the clogging detection sensor 240 for V1 have a laminated structure as shown in FIG. Taking the first electrode 241 of the clogging detection sensor 240 for V1 as an example, an insulating resin layer 241a is formed on the surface of the dust removing head 200 that is a metal body. The insulating resin layer 241a can be made of various materials, for example, a layer formed of an epoxy resin. Then, a conductive resin layer 241b is formed on the surface of the insulating resin layer 241a. The conductive resin layer 241b can be made of various materials, for example, a layer formed of a silver paste.
[0022]
The same applies to the second electrode 242 of the clogging detection sensor 240 for V1, which has a laminated structure of an insulating resin layer 242a and a conductive resin layer 242b.
The same applies to the first electrode 251 of the clogging detection electrode 250 for V2, which has a laminated structure of an insulating resin layer 251a and a conductive resin layer 251b.
The same applies to the second electrode 252 of the clogging detection electrode 250 for V2, which has a laminated structure of an insulating resin layer 252a and a conductive resin layer 252b.
[0023]
Regarding the arrangement and wiring of these electrodes, as shown in FIG. 3, the first electrode 241 of the clogging detection sensor 240 for V1 and the first electrode 251 of the clogging detection sensor 250 for V2 are electrically connected by the conductor 300. And further connected to the determination processing means 400.
Similarly, the second electrode 242 of the clogging detection sensor 240 for V1 and the second electrode 252 of the clogging detection sensor 250 for V2 are electrically connected by the conductor 300 and further connected to the determination processing means 400. You.
[0024]
Note that such a configuration can be variously modified. For example, although it has been described above that the insulating resin layers are provided separately below the first electrodes 241 and 251 and the second electrodes 242 and 252, a layer that integrally covers at least the entire lower side of the dust removal head 200 is described. It may be. In this case, a circuit pattern in which the conductive resin layer (silver paste) including the conductor 300 is integrated can be formed.
[0025]
Next, the detection principle will be described with reference to FIGS.
It should be noted that only the clogging detection sensor 240 will be described, and the clogging detection sensor 250 has the same detection principle, and a detailed description thereof will be omitted.
An AC voltage is applied from the determination processing means 400 to the opposing first electrode 241 and second electrode 242, and an AC current is flowing. The first electrode 241 and the second electrode 242 correspond to an electrode plate of a capacitor. The admittance (jωC) of this capacitor is usually a value in a state where there is no dielectric as shown in FIG.
[0026]
In the case where a foreign substance, which is a piece of glass, is attracted to the suction slit 241 between the clogging detection sensors 240, if the piece of glass is considered to be a dielectric, the opposing first electrode as shown in FIG. It can be considered that a dielectric is inserted between the first electrode 241 and the second electrode 242. In this case, admittance increases (impedance decreases) and the amplitude of the alternating current increases. The determination processing means 400 detects the increase in the amplitude of the alternating current and determines that the glass shards have adhered to the suction slit 210.
[0027]
The specific configuration of the determination processing unit 400 includes, for example, an application unit that applies a constant AC voltage to the first electrode 241 and the second electrode 242, a detection unit that detects a change in the amplitude of the AC current, and a change unit. And a notifying unit for notifying that a foreign substance, which is a piece of glass, is being adsorbed when the detection is made.
[0028]
In particular, the detection means / notification means includes a CPU device (not shown), A / D conversion means, and an output device. For example, the AC current is A / D converted and read into the CPU device as AC current data. In this case, a process in which a change in amplitude appears sufficiently may be performed with an amplifying means interposed in the preceding stage. The CPU device detects an increase in the amplitude of the alternating current data by program processing (detection means), and outputs a signal so as to notify that a foreign substance, which is a piece of glass, is adsorbed (notification means) when detecting the change. Control devices (displays, alarms, rotating lights, etc.).
The detection processing by the determination processing means 400 is performed in this manner.
[0029]
The embodiment of the invention has been described above. However, various modifications are possible in the present invention.
For example, in the above embodiment, the dust removing head is described as an example in which one air ejection chamber P is disposed between two air suction chambers V1 and V2 (VPV structure). In addition, an example in which one air suction chamber is disposed between two air ejection chambers (PVP structure) may be adopted.
Further, an example in which one air suction chamber is disposed between one air ejection chamber (VP structure, PV structure) may be adopted.
Further, an example in which a plurality of air ejection chambers and a plurality of air suction chambers are alternately arranged (a repetitive structure of V and P such as VPPVPV) may be employed. These configurations are appropriately selected.
[0030]
Further, the transport roller 100 is a long rod-shaped transport roller passing both ends of the substrate G, and two disks that contact only the side of the G in order to avoid scratching the back surface of the substrate G. There are two modes and a case where the transport roller 100 is shaped like a letter. Such an embodiment is appropriately selected according to the dust removal target surface of the substrate G to be used.
[0031]
Further, the transport roller can be replaced with another configuration, and a transport unit having at least a function of transporting the substrate G can be employed. Various types of such transfer means can be employed.
Further, the present invention can be applied to a dust removing device which does not have a transporting means and removes dust from a fixed substrate.
[0032]
Furthermore, the first electrode 241 and the second electrode 242 of the clogging detection sensor 240 for V1 and the first electrode 251 and the second electrode 252 of the clogging detection sensor 250 for V2 are individually determined processing means 400. May be connected.
[0033]
According to the present invention, even foreign substances other than glass fragments can be detected as long as they act as a dielectric substance and are attracted to the suction slot.
It is also conceivable that a short circuit may occur when dust or the like adheres. However, since dust is reliably sucked into the suction slot, such considerations are unnecessary, and a simple configuration for a dust removing device with improved convenience is provided. A clogging detection device can be provided.
[0034]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, when foreign substances, such as a piece of glass of a glass, adsorb | suck to a suction slit, it can detect the adsorption | suction of a foreign substance immediately and prevent the situation which damages a board | substrate from occurring. A clogging detection device for a device can be provided.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a clogging detection device for a dust removal device according to an embodiment of the present invention.
FIG. 2 is a sectional view of first and second electrodes.
FIG. 3 is a structural diagram of a glass-facing surface of a dust removing head.
FIG. 4 is an explanatory diagram of a detection principle.
FIG. 5 is an explanatory diagram of a detection principle.
[Explanation of symbols]
100 Conveyance roller 200 Dust removal head V1, V2 Air suction chamber P Air ejection chamber 210 Suction slot 220 for V1 Squirting slot 230 for P Suction slot 240 for V2 Clogging detection sensor 241 for V1 First electrode 241a Insulating resin layer 241b Conductive resin layer 242 Second electrode 242a Insulating resin layer 242b Clogging detection sensor 251 for conductive resin layer 250 V2 First electrode 251a Insulating resin layer 251b Conductive resin layer 252 Second electrode 252a Insulating resin layer 252b Conductivity Resin layer 300 Conductor 400 Judgment processing means G Substrate

Claims (4)

A dust removal head having at least one air suction chamber and one air ejection chamber is provided. Cleaning air is ejected from the ejection slit of the air ejection chamber toward the surface to be dust-removed, and the scattered dust is sucked into the suction slit of the air suction chamber. A clogging detection device mounted on the dust removal device,
A clogging detection sensor in which first and second electrodes are provided on the dust removing head on both sides of the suction slit,
Determination processing means for electrically connecting the first and second electrodes of the clogging detection sensor,
With
Detects a change in admittance caused by the foreign substance adsorbed in the suction slot acting as a dielectric between the first and second electrodes of the clogging detection sensor, and detects the foreign substance adsorbed on the suction slit by detecting the change in admittance. What is claimed is: 1. A clogging detection device for a dust removal device, comprising: The clogging detection device for a dust removal device according to claim 1,
The determination processing means includes:
Application means for applying a constant AC voltage to the first electrode and the second electrode of the clogging detection sensor;
Detecting means for detecting a change of increase in admittance due to a foreign substance adsorbed in the suction slot acting as a dielectric between the first and second electrodes of the clogging detection sensor as a change of increase in amplitude of an alternating current;
Notification means for notifying that a foreign substance is adsorbed when a change is detected,
A clogging detection device for a dust removal device, comprising: The clogging detection device for a dust removal device according to claim 1 or 2,
In the dust removal head, a first air ejection chamber and first and second air suction chambers sandwiching the first air ejection chamber are provided side by side along a transport direction of a dust removal target, and each of the first and second air suction chambers is provided. A clogging detection sensor is provided around the suction slit. The clogging detection device for a dust removal device according to claim 3,
In the clogging detection sensors provided in the suction slits of the first and second air suction chambers, the first electrodes are electrically connected in series, and the second electrodes are electrically connected in series. A clogging detection device for a dust removal device, which is connected to the device.

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