JP2002164695A - Electrostatic attraction plate for transporting electronic material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic attraction plate wherein the attraction state is easily confirmed when a flat electronic material is transported by electrostatic attraction. SOLUTION: The electrostatic attraction plate for attraction-transportation means for a flat electronic material comprises at least an attraction layer, an electrode, and a rear surface plate. The transmissivity of visible light at a part of the electrostatic attraction plate except for an electrode is 20% or above.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction and transfer method for transferring a flat electronic material used in electric and electronic equipment, particularly a material having a large number of small-diameter holes such as a printed wiring board and a shadow mask. The present invention relates to an electrostatic attraction plate used for the means.

[0002]

2. Description of the Related Art In transporting a flat electronic material, for example, a material having many holes even in a thin plate such as a printed wiring board or a shadow mask, a portion having no holes is adsorbed with a small diameter. Means have been adopted in which suction is performed under reduced pressure via a pad for conveyance, or suction and conveyance is performed using a suction surface having a large number of suction ports by using a high flow rate blower.

[0003] In the above-described transfer means, when changing the lot of the electronic material to be transferred, it is necessary to adjust the position of the suction pad or to route a high flow pipe for reducing the pressure. Inconveniences, such as restriction and enlargement of the machine, occurred.

Therefore, a method of transporting a thin plate of electronic material by an electrostatic attraction method has been proposed as an attraction means. However, in the vacuum adsorption system, the degree of vacuum (vacuum)
Can be easily detected by a decompression sensor, but in the electrostatic adsorption method, the material of the adsorption layer and the back plate of the adsorption plate used does not transmit light, and the area is larger than the electronic material to be adsorbed. In many cases, there is a drawback that it is not easy to determine whether or not it is adsorbed by visual inspection or the like.

[0005]

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an electrostatic attraction plate capable of easily determining whether or not a flat electronic material is being attracted in the electrostatic attraction conveyance. Is to do.

[0006]

Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have found the following invention.

[0007] The first invention comprises at least an adsorption layer, an electrode,
What is claimed is: 1. An electrostatic attraction plate for use in a suction and transfer means for a flat plate-shaped electronic material comprising a back plate, wherein a visible light transmittance of a portion of the electrostatic attraction plate other than an electrode is 20% or more. .

The second invention is characterized in that the material of the adsorption layer and the back plate is made of a light-transmitting nylon resin or vinyl chloride resin.

In the electrostatic attraction plate of the present invention, the components of the electrostatic attraction plate, except for the electrodes, are made of nylon resin or vinyl chloride resin having a light transmitting property so that, for example, a printed wiring board to be attracted is attracted. It is possible to visually confirm the presence from the back side or to detect the presence by an optical sensor.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic longitudinal sectional view showing an example of the electrostatic suction plate of the present invention, and FIG. 2 is a schematic plan view. It is composed of an adsorption layer 1, a back plate 3, and comb-shaped electrodes 2a and 2b, and a DC high-voltage power supply 4 is connected to each of the comb-shaped electrodes 2a and 2b.

The operation of the electrostatic suction plate of the present invention will be described. First, when the adsorption layer 1 of the electrostatic adsorption plate is pressed against the electronic material to be adsorbed and a voltage of 1 to 6 KV is applied to the comb-like electrodes 2a and 2b, charges are generated in the adsorption layer 1 and are adsorbed. When the electrostatic chucking plate is lifted from this state, even if the electronic material is smaller than the electrostatic chucking plate, the presence of the electronic material is determined if the visible light transmittance of the portion other than the electrodes of the electrostatic chucking plate is 20% or more. It can be easily confirmed visually. Alternatively, the presence can be confirmed using a light reflection type sensor.

As the material of the adsorbing layer and the back plate of the electrostatic adsorbing plate of the present invention, a nylon resin or a vinyl chloride resin having a light transmitting property can be effectively used because of its adsorbing power, desorbing property, and easy availability. . Other than these, a light-transmitting plastic material having a dielectric constant of 2.5 or more can also be used. These are preferably used alone if the visible light transmittance is 50% or more, and more preferably 80% or more.
Also, it is desirable that the adhesive used when bonding the constituent materials of these electrostatic attraction plates has transparency depending on the amount used. The light transmittance may be such that the visible light transmittance is 20% or more in a state of being formed as the adsorption layer and the back plate. The transmittance of visible light can be easily measured with a light transmission densitometer or a spectrophotometer capable of measuring the visible light region.

The voltage supplied to the comb-shaped electrodes of the electrostatic chuck plate of the present invention can be in the range of 500 V to 6 KV, depending on the size, thickness and weight of the electronic material to be sucked and conveyed. If the electronic material to be conveyed is small and light, the applied voltage may be too high, and if the applied voltage is too high, a plurality of sheets may be adsorbed.

As a DC high-voltage power supply for applying a high voltage, a DC-DC converter capable of boosting a voltage of several volts to several KV can be used. A device that can continuously vary the output voltage, a device that outputs a constant voltage, and the like can be used.

[0015]

EXAMPLES The present invention will be described below in detail with reference to examples, but the present invention is not limited to the following examples unless departing from the gist of the invention.

Embodiment A description will be given with reference to FIGS. The electrostatic attraction plate 101 comprises an adsorption layer 1 made of a nylon resin having a visible light transmittance of 80%, a back plate 3 made of a vinyl chloride resin having a visible light transmittance of 80%, and comb-shaped electrodes 2a and 2b. × 600mm
The comb-teeth electrodes 2a and 2b are formed in a comb-teeth shape, and have a shape in which the comb teeth are inserted into each other, and the DC high-voltage power supply 4 is connected.

Using this electrostatic attraction plate, 300 × 400
When the printed wiring board of mm was sucked and lifted, it was confirmed that the printed wiring board was sucked from the back plate side (FIG. 3).

[0018]

As described above, according to the electrostatic chucking plate of the present invention, when a flat electronic material, particularly a printed wiring board or a shadow mask having a large number of small-diameter holes, is transported while being electrostatically sucked. Unlike the vacuum suction, the vacuum state is not destroyed through the through-holes and the vacuum is not absorbed to the printed wiring board one sheet below.

[Brief description of the drawings]

FIG. 1 is a schematic longitudinal sectional view showing an example of an electrostatic suction plate of the present invention.

FIG. 2 is a schematic plan view showing an example of the electrostatic suction plate of the present invention.

FIG. 3 is a schematic view showing an example of a suction state of the electrostatic suction plate of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Adsorption layer 2a, 2b Comb-shaped electrode 3 Back plate 4 DC high voltage power supply 100 Printed wiring board 101 Electrostatic adsorption plate

Claims (2)

[Claims] 1. An electrostatic attraction plate used for an attraction and conveyance means of a flat plate-shaped electronic material comprising at least an attraction layer, an electrode, and a back plate, wherein a transmittance of visible light at a portion of the electrostatic attraction plate excluding the electrodes is provided. Is not less than 20%. 2. The electrostatic adsorbing plate for transporting electronic materials according to claim 1, wherein the material of the adsorbing layer and the back plate is made of a nylon resin or a vinyl chloride resin having a light transmitting property.