JP2002018760A - Electrostatic attracting plate for carrying electronic material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic attracting plate, capable of easily detecting whether a flat plate electronic material, when electrostatically attracted and carried, is surely attracted or not and surely separating the material, if desired. SOLUTION: The electrostatic attracting plate to be used for attraction carrying means for, at least, the flat plate electronic material has a grooved or holed cavity in an effective attraction range, where at least an electrode is arranged, excluding a portion closely adhered to an attracted material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction and transfer method for transferring a flat electronic material used in electric and electronic equipment, particularly a material having a large number of small-diameter holes such as a printed wiring board and a shadow mask. The present invention relates to an electrostatic attraction plate used for the means.

[0002]

2. Description of the Related Art In the transport of a flat electronic material, for example, a material having many holes even in a thin plate such as a printed wiring board or a shadow mask, a portion having no holes is adsorbed with a small diameter. Means have been adopted in which suction is performed under reduced pressure via a pad for conveyance, or suction and conveyance is performed using a suction surface having a large number of suction ports by using a high flow rate blower.

[0003] In the above-described conveying means, when changing the lot of the electronic material to be conveyed, it is necessary to adjust the position of the suction pad or to route a high-flow pipe for reducing the pressure. Inconveniences, such as restriction and enlargement of the machine, occurred.

Therefore, a method of transporting a thin plate of electronic material by an electrostatic attraction method has been proposed as an attraction means. However, in the vacuum adsorption system, the degree of vacuum (vacuum)
In contrast, the electrostatic adsorption method has a drawback that it is not easy to judge whether or not the electronic material has been adsorbed.

Further, in the electrostatic attraction method, there is a case where the detachment of the electronic material cannot be immediately performed even when the applied voltage is cut off, depending on a material to be adsorbed, an applied voltage, environmental conditions such as ambient temperature and humidity, and the like. However, there has been a problem in carrying control.

[0006]

SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to make it possible to easily detect whether or not a flat electronic material is securely adsorbed and to remove the electronic material. An object of the present invention is to provide an electrostatic attraction plate that can be reliably detached when desired.

[0007]

Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have found the following invention.

A first aspect of the present invention is an electrostatic attraction plate used for at least a plate-like electronic material for attracting and conveying an electronic material. It is characterized by having a void in the shape of a hole or a hole.

A second aspect of the present invention is characterized in that a detecting means for confirming whether or not the electronic material is adsorbed in the gap is provided.

A third aspect of the present invention is characterized in that there is provided a means for accelerating the detachment of the electronic material adsorbed in the void.

In the electrostatic chuck plate of the present invention, even if the flat plate-shaped electronic material, particularly a printed wiring board or a shadow mask having a large number of small holes such as through holes, leaks through the small holes as in vacuum suction. Therefore, the drawback that the degree of decompression required for suction cannot be easily achieved and the drawback of sucking electronic materials one sheet down are eliminated, and the suction and transfer of each sheet can be easily performed. Further, it is possible to easily install a sensor for detecting whether or not the electronic material has been electrostatically attracted, in the provided groove-like or hole-like space, and furthermore, it remains even after the application of the attracting voltage is cut off. Even if the adsorbing force remains due to electrostatic force, it is easy to separate from the groove-shaped or hole-shaped gap, and it is also possible to allow air to flow in through the gap or to attach the actuator and attach it to the electron. By providing a means for promoting the detachment of the material, the detachment can be performed more reliably.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic longitudinal sectional view showing an example of the electrostatic suction plate of the present invention. The suction surface sheet 1, the insulating layer 3, the comb-shaped electrodes 2 a and 2 b, the proximity sensor 4, and the compressed air discharge port 5 are connected to the comb-shaped electrodes 2 a and 2 b, respectively. Wiring and piping are respectively provided from the proximity sensor 4 and the compressed air discharge port 5.

FIG. 3 is a schematic diagram showing an example of the pattern of the comb-like electrode. Each of the comb-shaped electrodes 2a and 2b is formed in a comb-tooth shape so that the comb-tooth is inserted into each other. In the vicinity of the provided gap, the wiring pattern is arranged so as to avoid the gap. In the drawing, the wiring pattern is broken, but it is electrically connected by wiring (not shown).

FIG. 2 is a schematic top view of the electrostatic suction plate of the present invention. There is a gap at the center of the suction surface sheet 1 and the insulating layer 3 is exposed. The proximity sensor 4 and the compressed air discharge port 5 are attached to the insulating layer 3.

The operation of the electrostatic attraction plate of the present invention will be described. First, the adsorption surface sheet 1 of the electrostatic adsorption plate is brought into close contact with the electronic material to be adsorbed by pressing or the like. Comb-shaped electrode 2
When a voltage of 1 to 6 KV is applied to a and 2b, a charge is generated in the suction surface sheet 1 and suction is started. When the suction is started, the proximity sensor 4 arranged in the gap constantly monitors the presence of the electronic material while the electrostatic suction plate moves together with the electronic material. Next, the application of the voltage is released at the destination. At the time of release, the compressed air is blown out from the compressed air discharge port 5, and the electrostatic attraction plate is slightly moved from the stationary position of the electronic material to make a gap, and the proximity sensor confirms whether or not the electronic material is absorbed.

The suction surface sheet of the electrostatic suction plate of the present invention is disclosed in JP-B-57-58872 and JP-A-59-10.
What is described in 8915 gazette can be used effectively. Further, the size of the suction surface sheet is preferably capable of covering at least the area of the electronic material to be adsorbed, and the space provided is preferably 50% or less of the total area of the adsorption plane. In addition, the shape of the void is not limited, and may be continuous or may be plural independently.

The detecting means used in the electrostatic attraction plate of the present invention for confirming the presence or absence of attraction is a reflection type photoelectric sensor using light, a high frequency oscillation type using a magnetic field, a differential coil type, or the like.
Proximity sensor such as magnetic type, capacitance type proximity sensor using electric field, micro switch and displacement sensor for detecting contact, ultrasonic sensor, visual recognition sensor using CCD,
Further, a thickness sensor using laser light or the like can be used.

Means for promoting the desorption of the adsorbed electronic material used in the electrostatic adsorption plate of the present invention include a method of blowing air or compressed air, and a method of extruding air or an electric actuator. Can be

The voltage supplied to the comb-shaped electrodes of the electrostatic chuck plate of the present invention can be used in the range of 500 V to 6 KV, though it depends on the size, thickness and weight of the electronic material to be sucked and conveyed. If the electronic material to be conveyed is small and light, the applied voltage may be too high, and if the applied voltage is too high, a plurality of sheets may be adsorbed.

As a voltage supply device for applying a high voltage, a DC-DC converter capable of increasing a voltage of several volts to several kV can be used. A device that can continuously vary the output voltage, a device that outputs a constant voltage, and the like can be used.

[0021]

EXAMPLES The present invention will be described below in detail with reference to examples, but the present invention is not limited to the following examples unless departing from the gist of the invention.

An embodiment will be described with reference to FIGS. A printed circuit board 1 was prepared by using a double-sided copper-clad laminate (500 × 600 mm) as an electronic material and forming a wiring pattern having through-holes with a hole diameter of 0.8 mm and 0.5 mm according to a conventional method.

Fifty printed wiring boards 100 are stacked on a pallet 102, and one printed wiring board 100 is placed on a belt conveyor 105 to be introduced into a solder resist coating device 106, which is the next step, by using a suction conveyance means 103. Suction conveyance was performed for each sheet.

The suction and conveyance means 103 includes an electrostatic suction plate 101.
And a mechanism for moving up and down (here, an air cylinder is used), and a guide rail 104 having pneumatic drive as a lateral moving means.

The electrostatic attraction plate 101 comprises an attraction surface sheet 1, an insulating layer 3, comb-like electrodes 2a and 2b, a proximity sensor 4, and a compressed air discharge port 5, and the comb-like electrodes 2a and 2b respectively have A DC high-voltage power supply (not shown) is connected, and wiring is provided from the proximity sensor 4 and the compressed air discharge port 5 to a control unit (not shown) and a pipe to an air source.

As shown in FIG. 3, the pattern of the comb-like electrodes 2a and 2b is formed in a comb-like shape and the comb-like electrodes are inserted into each other. In the vicinity of the provided gap, the wiring pattern is arranged so as to avoid the gap. In the drawing, the wiring pattern is broken, but it is electrically connected by wiring (not shown).

The operation of the suction conveyance means 103 will be described. The suction conveyance means 103 is provided with the uppermost printed wiring board 1.
Then, a voltage is applied to the comb-shaped flat electrodes 2a and 2b of the electrostatic chucking plate 101 to suck one printed wiring board 100. Next, when the suction conveyance means 103 starts to move up, the proximity sensor 4 monitors whether or not the printed wiring board 100 is suctioned. If suction cannot be confirmed, the suction transporting means 103 descends again and repeats the suction operation.

After the suction and conveyance means 103 completes ascending, it moves laterally, and when it reaches a fixed position on the belt conveyor 105, it descends, stops supplying voltage to the electrostatic suction plate 101, and outputs the compressed air from the compressed air discharge port 5. Air is blown out and the belt conveyor 105
The printed wiring board 100 is set to rest.

Using the above-mentioned suction and conveyance means 103, the printed wiring boards for five pallets were continuously suctioned and conveyed, but no adsorption / desorption error and suction of a plurality of sheets were found.

[0030]

As described above, according to the electrostatic chucking plate of the present invention, when a flat electronic material, particularly a printed wiring board or a shadow mask having a large number of small-diameter holes, is transported while being electrostatically sucked. As in the case of vacuum suction, vacuum suction through through holes and adsorption to the printed wiring board one sheet below can be easily performed, and suction conveyance of each sheet can be easily performed.
In addition, desorption can be performed without error. Further, it is possible to easily install a sensor for detecting whether or not the electronic material has been electrostatically attracted, in the provided groove-shaped or hole-shaped gap.

[Brief description of the drawings]

FIG. 1 is a schematic longitudinal sectional view showing an example of an electrostatic suction plate of the present invention.

FIG. 2 is a schematic top view showing an example of the electrostatic suction plate of the present invention.

FIG. 3 is a schematic diagram showing an example of a comb-like electrode pattern of the electrostatic chuck plate of the present invention.

FIG. 4 is a schematic view showing an embodiment of the electrostatic suction plate of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Adsorption surface sheet 2a, 2b Comb-shaped electrode 3 Insulation layer 4 Proximity sensor 5 Compressed air discharge port 100 Printed wiring board 101 Electrostatic adsorption plate 102 Pallet 103 Electrostatic adsorption means 104 Moving means 105 Belt conveyor 106 Solder resist coating device

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3F061 AA01 CA00 DB04 DB06 DC03 DD03 3F101 LA16 LB10

Claims (3)

[Claims] 1. An electrostatic attraction plate used for at least a plate-like electronic material attraction and conveyance means, wherein a groove or a hole shape other than a portion which is in close contact with an object to be attracted in at least an effective attraction area in which electrodes are arranged. An electrostatic attraction plate for transporting electronic materials, characterized by having a void. 2. The electrostatic attraction plate for transporting electronic materials according to claim 1, further comprising detection means for confirming whether or not electronic materials are adsorbed in said gaps. 3. A device according to claim 1, further comprising means for accelerating the detachment of the electronic material adsorbed in said gap.
Or the electrostatic attraction plate for transporting electronic materials according to any of 2.