JP2002127069A - Method for separating electronic material in electronic material carry using electrostatic attraction plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a separating method for optionally and surely attracting and separating an electronic material in an electrostatic attraction carry of the plate-like electronic material. SOLUTION: In this separating method of the plate-like electronic material attracted to an electrostatic attraction plate containing a counter electrode by impressing high voltage, supply of the high voltage to the counter electrode is stopped, and the counter electrode is short-circuited.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat plate-shaped electronic material used for electric and electronic equipment, particularly an electronic material having a large number of small-diameter holes, such as a printed wiring board, a shadow mask, and an aperture grill, which are conveyed. For smooth desorption of the electronic material adsorbed by the adsorption transport means for the purpose.

[0002]

2. Description of the Related Art In transporting a flat electronic material, for example, a material having many holes even in a thin plate such as a printed wiring board or a shadow mask, a portion having no holes is adsorbed with a small diameter. Means have been adopted in which suction is performed under reduced pressure via a pad for conveyance, or suction and conveyance is performed using a suction surface having a large number of suction ports by using a high flow rate blower.

[0003] In the above-described transfer means, when changing the lot of the electronic material to be transferred, it is necessary to adjust the position of the suction pad or to route a high flow pipe for reducing the pressure. Inconveniences, such as restriction and enlargement of the machine, occurred.

Therefore, a method of transporting a thin plate of electronic material by an electrostatic attraction method has been proposed as an attraction means. Compared to the vacuum suction method, the electrostatic suction method can efficiently adsorb a printed wiring board or a shadow mask having a large number of small-diameter holes, and eliminates the need for routing large-volume pipes. The degree also improves. However, even if the applied voltage is cut off when the adsorbed electronic material is desorbed, the material, mass, and adsorption area of the electronic material, the material and dielectric constant and resistivity of the surface adsorption layer of the electrostatic adsorption plate, or the operating environment Due to factors such as the temperature and humidity below, charges may remain on the adsorption surface, and adsorbed substances such as electronic materials may not be arbitrarily desorbed.

[0005]

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a desorption method for arbitrarily and reliably desorbing a plate-shaped electronic material in electrostatic attraction conveyance. is there.

[0006]

Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have found the following invention.

The present invention is characterized in that, in a method for removing a flat plate-shaped electronic material which has been attracted by applying a high voltage to an electrostatic attracting plate containing the opposed electrode, the opposed electrode is short-circuited.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the desorption method of the present invention, when a flat electronic material, particularly a printed wiring board or a shadow mask is desorbed after being electrostatically attracted, supply of an applied voltage is cut off by a voltage supply circuit. By doing so, it stops and shorts between the counter electrodes.

This is because electric charges are generated by electrostatic induction on the surface of the electrostatic attraction plate corresponding to the counter electrode when voltage is applied.
This is the attraction force. However, even if the voltage application is stopped during desorption, the charge on the surface of the electrostatic attraction plate does not disappear immediately,
Due to the gradual attenuation, a delay occurs before the circuit departs from the circuit interruption. In the present invention, after the voltage application is stopped, the charge on the surface of the adsorbing layer is quickly eliminated by short-circuiting the applied counter electrode, so that the adsorbed layer can be desorbed with good timing.

In order to short-circuit between the opposing electrodes, a short-circuit between the opposing electrodes can be formed by a switch that works in conjunction with the interruption of the voltage supply circuit, or the short-circuit can be established via a relay or SSR (solid state relay). It may be formed.

Next, the electrostatic attraction plate according to the present invention will be described. As described in Japanese Patent Publication No. 57-58872 and Japanese Patent Laid-Open Publication No. Sho 59-108915, for example, the electrostatic attraction plate used in the present invention has a 10
^A structure in which opposing electrodes nested in a comb shape are provided between a plastic sheet having an electric resistivity of about ⁸ to 10 ¹² Ωcm and an insulator having an electric resistivity of 10 ¹⁵ Ωcm or more. It is.

A high-voltage power supply is connected to the opposite electrode of the above-mentioned electrostatic attraction plate, and a high voltage of 100 V to 10 KV is applied between the electrodes so that an electrostatic attraction force (Coulomb force) is developed. . Usually, a self-excited oscillation type DC-DC converter is used for the high-voltage power supply, and the high voltage can be obtained with an input of about several volts. The output voltage is preferably variable, but a plurality of output voltages having a fixed output voltage can be used by switching.

[0013]

EXAMPLES The present invention will be described below in detail with reference to examples, but the present invention is not limited to the following examples unless departing from the gist of the invention.

Example As an electronic material, a double-sided copper-clad laminate (500 × 600 m
Using m), a wiring pattern was formed according to a conventional method to produce a printed wiring board.

As an electrostatic attraction plate, a single-sided copper-clad printed wiring board (copper thickness 1) of a glass epoxy base material (0.1 mm thick) is used.
8 μm) to form a counter electrode by etching the copper foil into a comb shape, and a nylon plate (plate thickness 1 mm) is formed on the upper surface of the counter electrode.
(FIG. 1). A high-voltage output power supply (610B, manufactured by Trek) was connected to the counter electrode.

When the printed wiring board was brought into contact with the electrostatic attraction plate and a voltage of 4 KV was applied to the electrostatic attraction plate, the printed circuit board was attracted. When the switch of the high-voltage output power supply was turned off with the electrostatic chucking plate vertical, the printed wiring board was still sucked and detached after 30 seconds. Next, the switch was cut off after the same suction, and the terminals of the counter electrode were short-circuited. As a result, the printed wiring board immediately fell.

[0017]

As described above, according to the delivery method and the detachment method for transporting electronic materials using the electrostatic chucking plate of the present invention, electronic materials, particularly printed wiring boards and shadow masks having a large number of small-diameter holes, can be used. When the electrostatic adsorption is surely performed and the desorption is desired, the desorption can be arbitrarily and surely performed with good timing. Therefore, the use of the method of the present invention provides an excellent effect that the desorption can be surely performed irrespective of factors such as the temperature and humidity of the atmosphere and the material and surface condition of the electrostatic suction plate and the suction conveyance object.

[Brief description of the drawings]

FIG. 1 is a schematic view showing an example of a comb-shaped counter electrode of an electrostatic suction plate according to the present invention.

[Explanation of symbols]

 1 base material 2a, 2b counter electrode

Claims (1)

[Claims] 1. A method for desorbing a flat plate-shaped electronic material which is applied by applying a high voltage to an electrostatic attraction plate including an opposing electrode, wherein the opposing electrode is short-circuited. A method for detaching an electronic material in transporting the electronic material using a plate.