CN101304818A - Dust collecting device - Google Patents

Dust collecting device Download PDF

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Publication number
CN101304818A
CN101304818A CNA2006800414890A CN200680041489A CN101304818A CN 101304818 A CN101304818 A CN 101304818A CN A2006800414890 A CNA2006800414890 A CN A2006800414890A CN 200680041489 A CN200680041489 A CN 200680041489A CN 101304818 A CN101304818 A CN 101304818A
Authority
CN
China
Prior art keywords
air
air suction
chamber
dust removal
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800414890A
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Chinese (zh)
Inventor
管野盛利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hugle Electronics Inc
Original Assignee
Hugle Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hugle Electronics Inc filed Critical Hugle Electronics Inc
Publication of CN101304818A publication Critical patent/CN101304818A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026Using sound waves
    • B08B7/028Using ultrasounds

Abstract

The present invention provides a dust collector which enhances the dust removing performance of the recessed and protruded part of a workpiece. The dust collector includes a dust removing head (100) for protrusion, which has air discharge chambers (104, 105), an air suction chamber (106), a nozzle hood (114) having an internal space communicating with the air discharge chambers (104, 105), and an air suction tube (115) concentrically placed inside the nozzle hood (114) and having an air suction opening (116) communicating with the air suction chamber (106). An air discharge opening (118) is formed by a gap between the forward end of the nozzle hood (114) and the forward end of the air suction tube (115). A protrusion (301) of a workpiece (300) is placed inside the air suction opening (116), air is discharged toward the protrusion (301) from the air discharge opening (118), and the air is sucked from the air suction opening (116). Except a discharge nozzle (220), a dust removing head (200) for recess is similarly formed and the dust removing heads (100, 200) constitute a dust removing device.

Description

Dust arrester
Technical field
The present invention relates to a kind of optimum dust arrester that is used to remove workpiece (dedusting object) jog dust.
Background technology
Provide various dust arresters now, for example in the manufacturing process of the various thin plates of liquid crystal panel or Plasmia indicating panel etc., make the air of pure air or the ultrasonic vibration surface of the work that spues, suck and also remove the particles such as dust that break away from from surface of the work.In addition, the well-known dedusting neutralizer that surface of the work is carried out dedusting and remove electricity that makes in addition after the described air ionization.
For example, patent documentation 1 disclosed dust arrester has: the air cavity that spues, and it has the air discharge opening that is built-in with the ultrasonic generator; And air sucks cavity, and it is adjacent to spue cavity and have air suction inlet of described air; Spue cavity and air of air sucks cavity and disposes along the workpiece moving direction, and, the interval that between air discharge opening and air suction inlet and workpiece, has regulation, described dust arrester is characterised in that, spue and use the pipe arrangement hole at spue the roughly upper end central portion configuration air of cavity of the air of seeing from the workpiece moving direction, and the pipe arrangement hole is used in the roughly upper end central portion configuration air suction that sucks cavity at air, make along the power that spues and the attraction of the air of workpiece lateral flow roughly even thus, even the workpiece big to width such as glass substrates also can obtain even and stable dusting.
In addition, patent documentation 2 disclosed substrates are with carrying dust arrester, has the dust removing units that comprises at least each 1 air suction chamber and air ejection chamber, this substrate with carry dust arrester for by conveying roller to dust removing units direction substrate conveying, spray pure air from air ejection chamber to substrate surface, suck the dust that disperses by the air suction chamber, this substrate is with carrying dust arrester to be characterised in that, only at conveying roller side configuration dust removing units, make substrate abut to conveying roller by venturi effect, the suction that will produce by venturi effect makes this substrate abut to conveying roller reliably in substrate, collides etc. to prevent to produce.
Patent documentation 1 TOHKEMY 2000-5715 communique (paragraph [0005], [0016], Fig. 1, Fig. 2 etc.)
Patent documentation 2 TOHKEMY 2003-332401 communiques (paragraph [0010], [0061], Fig. 1, Fig. 2 etc.)
Above-mentioned existing dust arrester has can be evenly and stably remove the effect of surface of the work dust, and still, but being set at workpiece itself is tabular or sheet, and the dedusting object surface also is the situation on plane.
For on the surface or inner face have the workpiece of jog, because becoming obstacle, these jogs can not make the distance between dust removal head and dedusting object surface keep certain, and, because of jog causes producing the turbulent flow of air, so there is the problem that can't obtain effective dust removing effects.Especially, when this workpiece when clean room such as dust free room are used, exist the dust be attached to jog can be attached on the part of making line and the goods and reduce the problem of accepted product percentage.
Summary of the invention
Therefore, the problem that the present invention solves provides the dust removal performance of a kind of raising for the workpiece jog, and part can be shared and the dust arrester that can reduce cost.
In order to solve above-mentioned problem, the described invention of claim 1 is a kind of dust arrester, by sucking the air that spues to surface of the work from dust removal head, suck and remove attached to described lip-deep dust, it is characterized in that, comprise the protuberance dust removal head, described protuberance has with dust removal head: the air chamber that spues; The air suction chamber; Nozzle casing, its inner space are communicated to the described air chamber that spues; And air suction tube, itself and described nozzle casing are configured in described nozzle casing inboard with one heart, and have the air suction inlet that is connected with described air suction chamber; This protuberance forms the air discharge opening with dust removal head by the gap that described nozzle casing point and described air suck between the tube point, and, the protuberance that described workpiece is had is configured in described air suction inlet inboard, and from described air discharge opening to the described protuberance direction air that spues, suck described air from described air suction inlet to described air suction chamber then.
The described invention of claim 2, on the basis of the described dust arrester of claim 1, described protuberance has first air in described air suction chamber both sides configurations chamber and second air chamber that spues that spues with dust removal head.
The described invention of claim 3 is a kind of dust arrester, by the air that attracts to spue to surface of the work from dust removal head, suck and remove attached to described lip-deep dust, it is characterized in that, comprise the recess dust removal head, described recess has with dust removal head: the air chamber that spues; The air suction chamber; Nozzle casing, its inner space are communicated to described air suction chamber; And the nozzle that spues, itself and described nozzle casing are configured in described nozzle casing inboard with one heart, and have the air discharge opening that is connected with the described air chamber of spuing; When this recess forms air suction inlet with dust removal head by described nozzle casing and the described space that spues between the nozzle, make recess arrangement that described workpiece has near described air discharge opening, and from described air discharge opening to the described recess direction air that spues, suck described air from described air suction inlet to described air suction chamber then.
The described invention of claim 4, on the basis of the described dust arrester of claim 3, described recess has at described air the spue first air suction chamber and the second air suction chamber of both sides, chamber configurations with dust removal head.
The described invention of claim 5 is a kind of dust arrester, has protuberance as claimed in claim 1 or 2 simultaneously with dust removal head and as claim 3 or 4 described recess dust removal heads.
According to the present invention as constituted above,, can suck and remove protuberance or recess adhered dust reliably at workpiece by having protuberance with dust removal head and recess dust removal head.
In addition, if shared formation protuberance with dust removal head or recess with parts such as the cavity of dust removal head or nozzle casings, then need not to use the part of each dust removal head special use and can reduce cost.
Description of drawings
Figure 1A is the part sectioned view of the protuberance of embodiment of the present invention with dust removal head;
Figure 1B is the part sectioned view of the recess of embodiment of the present invention with dust removal head;
Fig. 2 A is the vertical view of the protuberance of embodiment of the present invention with dust removal head;
Fig. 2 B is the upward view of the recess of embodiment of the present invention with dust removal head;
Fig. 3 is the upward view of the protuberance of embodiment of the present invention with dust removal head.
Fig. 4 is the front view of the user mode of expression embodiment of the present invention.
Fig. 5 is the side view of the user mode of expression embodiment of the present invention.
Description of reference numerals
100 protuberance dust removal heads; 101 cavitys; 102,103 partition walls; 104, the 105 air chamber that spues; 106 air suction chambers; 107,110 substrates; 108,109 through holes; 111~113 connectors; 114 nozzle casings; 115 air suck tube; 116 air suction inlets; 117 periphery walls; 118 air discharge openings; 119 spaces; 200 recess dust removal heads; 201 cavitys; 202,203 partition walls; 204,205 air suction chambers; The 206 air chamber that spues; 207,210 substrates; 208,209 through holes; 211~213 connectors; 214 nozzle casings; 217 periphery walls; 219 spaces; 220 nozzles that spue; 221 tubes that spue; 222 nozzle bodies; 223 air discharge openings; 300 workpiece; 301 protuberances; 302 recesses.
The specific embodiment
Below, explanation is used to implement preferred dust arrester of the present invention with reference to figure.
At first, Figure 1A is the figure of major part of the dust arrester of expression embodiment of the present invention, is to be used to represent to remove the part sectioned view of the protuberance of workpiece protuberance dust with dust removal head 100; Figure 1B is that expression is used to remove the part sectioned view of the recess of workpiece recess dust with dust removal head 200.
At the protuberance of Figure 1A with in the dust removal head 100, the 101st, roughly be the cavity of cuboid, portion is formed with first air spue chamber 104, second air spue chamber 105 and air suction chamber 106 respectively by partition wall 102,103 within it.
The air chamber 104 that spues, 105 constitute: be communicated to cylindric connector 111 via the through hole (not shown) that forms on the substrate 110 of cavity 101 1 sides, 112 inside, by being arranged on air outside supply pump etc. via connector 111,112 pure airs are transported to the air chamber 104,105 that spues.In addition, air suction chamber 106 constitutes: be communicated to the inside of cylindric connector 113 via the through hole (not shown) that forms at described substrate 110, by being arranged on the air that air outside suction pump etc. sucks in the air suction chambers 106 via connector 113.
In Figure 1A, at the spue inlet of air of symbol " P " expression of each connector 111~113 next door mark, " V " expression sucks the outlet of air.
In addition, on the substrate 107 of cavity 101 opposite sides, be respectively equipped with and the air through hole 108,109 that the inner space 119 of chamber 104,105 and nozzle casing described later 114 is communicated with that spues.
Below described substrate 107, be fixed with along the nozzle casing 114 of the axial opening of both ends up and down.Described nozzle casing 114 inner concentric dispose and roughly be air cylindraceous and suck tube 115, be fixed on the bottom inner peripheral surface of described air suction chamber 106 with bolt along this axial upper end outer peripheral face.
Its diameter of the past more below of through hole (peristome of nozzle casing 114) that air sucks tube 115 is big more, and described through hole works as the air suction inlet 116 of suction attached to the dust of workpiece protuberance described later.
In addition, the peristome periphery and the air of the mortar shape periphery wall 117 by nozzle casing 114 sucks the gap formation air discharge opening 118 between the bottom of tube 115, described air discharge opening 118 is via space 119 and described through hole 108 between nozzle casing 114 and the air suction tube 115,109 are communicated with spue chamber 104,105 of air.
At this, by Figure 1A clearly as seen, air in the embodiment of the present invention sucks the bottom of tube 115, is configured in than nozzle casing 114 periphery walls 117 bottoms a little to the position of air suction chamber 106 side indentations.And though not shown, it is contour also can to make air suck periphery wall 117 bottoms of the height of tube 115 bottoms and nozzle casing 114.
Fig. 2 A is a protuberance with the vertical view of dust removal head 100, disposes 1 respectively with the air described connector 111,112 that chamber 104,105 is communicated with that spues, and the described connector 113 that is communicated with air suction chamber 106 disposes 2 at fore-and-aft direction.
In addition, Fig. 3 is the upward view of protuberance with dust removal head 100.
By above-mentioned structure, the air of supplying with from the outside is through connector 111,112 → air chamber 104 that spues, 105 → through hole 108, the path of 109 → space, 119 → air discharge opening 118, the central shaft that sucks tube 115 along air spues to the outside, and contains from the air of the dust of workpiece protuberance disengaging, and the path of process air suction inlet 116 → air suction chamber 106 → connector 113 is inhaled into and is discharged to the outside.
Then, with reference to Figure 1B the structure of recess with dust removal head 200 is described.
With in the dust removal head 200, the structure of cavity 201 and nozzle casing 214 is identical with nozzle casing 114 with the cavity 101 of dust removal head 100 with described protuberance in fact at described recess.Promptly in Figure 1B, cavity 201 has partition wall 202,203, the first air suction chamber 204, the second air suction chamber 205, air spue chamber 206, substrate 207,210 and through hole 208,209,214 of nozzle casings have periphery wall 217 along axial both ends up and down opening the time.
Recess with dust removal head 200 and protuberance with dust removal head 100 differences mainly be the to spue structure of nozzle 220.
Described spue nozzle 220 by the upper end inner peripheral surface of the chamber 206 that spues at air with the tubular of bolting spue tube 221 and thereon the profile that connects coaxially of end roughly be cone shape nozzle body 222 and constitute.Be formed with at described nozzle body 222 centers via the inner space of the tube 221 that spues and the air air discharge opening 223 that chamber 206 is communicated with that spues.
In addition, the air chamber 206 that spues constitutes: via the internal communication of the through hole (not shown) that forms on the substrate 210 of cavity 201 1 sides with cylindric connector 213, carry pure airs via connector 213 to the air chamber 206 that spues by the air supply pump that externally is provided with etc.And air suction chamber 204,205 constitutes: via the through hole (not shown) and cylindric connector 211 that form at described substrate 210,212 internal communication, the air that sucks in the air suction chambers 204,205 via connector 211,212 by the air suction pump that externally is provided with etc.
In Figure 1B, at the spue inlet of air of symbol " P " expression of the next door of each connector 211~213 mark, " V " expression sucks the outlet of air.
In addition, Fig. 2 B is a recess with the upward view of dust removal head 200, and the described connector 211,212 that is communicated with air suction chamber 204,205 disposes 2 respectively at fore-and-aft direction, disposes 1 with air 213 of the described connectors that chamber 206 is communicated with that spue.
By above-mentioned structure, the air of supplying with from the outside is through the spue path of inner space → air discharge opening 223 in the chamber 206 → hole 221 that spues of connector 213 → air, spue to nozzle body 222 central axis directions, and contain from the air of the dust of workpiece recess disengaging, through nozzle casing 214 and space (air suction inlet) 219 → through hole 208 between the nozzle 220 of spuing, the path of 209 → air suction chamber, 204,205 → connector 211,212 is inhaled into and is discharged to the outside.
The user mode of embodiment of the present invention then, is described.
At this, dust arrester of the present invention can have protuberance and supply with sucker mechanism with air such as dust removal head 100 and connected pumps, also can have recess and use air such as dust removal head 200 and connected pump to supply with sucker mechanism, also can have protuberance and reach air such as the pump supply sucker mechanism that is connected with these with dust removal head 200 with dust removal head 100, recess.
That is,, then use to have protuberance is supplied with sucker mechanism with dust removal head 100 and connected air dust arrester for the workpiece that only has protuberance; For the workpiece that only has recess, then use to have recess is supplied with sucker mechanism with dust removal head 200 and connected air dust arrester; And for the workpiece that has protuberance and recess simultaneously, then use to have protuberance reaches the air supply sucker mechanism that is connected with these with dust removal head 200 with dust removal head 100, recess dust arrester.
Fig. 4 and Fig. 5 are for having protuberance 301 on the surface and having the workpiece use protuberance usefulness dust removal head 100 that roughly is cuboid of recess 302 overleaf and recess is removed protuberances and recess dust with dust removal head 200 schematic diagram.
Protuberance can make on its protuberance that is close to workpiece 300 301 or the recess 302 by staff with dust removal head 100 and recess dust removal head 200, also can move by mechanicalnesses such as mechanical arms it is close on protuberance 301 or the recess 302.In addition, protuberance can be distinguished independent formation with dust removal head 100 and recess with dust removal head 200, also can constitute: after connecting both by suitable connecting elements, to be toward or away from workpiece 300 surfaces as shown in Figure 4, the direction at the back side moves.
As Fig. 4 and shown in Figure 5, protuberance 301 sides at workpiece 300, after the air that spues with the described air discharge opening 118 of dust removal head 100 from protuberance collides protuberance 301 base end parts, suck tube 115 central axis directions along the outer peripheral face of protuberance 301 towards air and move and be inhaled into air suction chamber 106.Therefore, become negative pressure near the upper surface of protuberance 301, the air of near surface also is inhaled into to air suction chamber 106 directions thereon.
By these a series of actions, after adhered dust such as protuberance 301 base end parts or outer peripheral face, upper surface break away from, be inhaled into and remove by the air outside suction pump via air suction chamber 106.
In addition, to form the internal diameter that can accommodate protuberance 301, shape etc. be self-evident to nozzle casing 114 peristomes or the air internal diameter, shape etc. that suck the air suction inlet 116 of tube 115.And the shape of protuberance 301 etc. is not limited to illustrated example.
In addition, recess 302 sides at workpiece 300, after the air that spues with the described air discharge opening 223 of dust removal head 200 from recess collides the bottom surface of recess 302, move to nozzle casing 214 inner space 219 (air suction inlet) directions along the inner peripheral surface of recess 302 and be inhaled into air suction chamber 204,205.
Therefore, after adhered dust such as the bottom surface of recess 302 or inner peripheral surface break away from, be inhaled into and remove via air suction chamber 204,205 and by the air outside suction pump.
In addition, self-evident, the internal diameter of nozzle casing 214 peristomes and shape etc. should be suitable for the internal diameter of recess 302 and shape etc.And the shape of recess 302 etc. is not limited to illustrated example.
As mentioned above, according to embodiment of the present invention, can make reliably attached near the dust protuberance 301 and the recess 302 with dust removal head 200 with dust removal head 100 and recess by protuberance to break away from and the suction removal.
In addition, because protuberance uses the major part (cavity 101,201 or nozzle casing 114,214 etc.) of dust removal head 200 to have same configuration with dust removal head 100 and recess, so can shared part, the situation of using parts peculiar respectively with each dust removal head specific energy mutually reduces manufacturing cost.
In addition, if on the air that spues to workpiece 300, apply the ultrasonic vibration, can further improve efficiency of dust collection.

Claims (5)

1. a dust arrester by the air that attracts to spue to surface of the work from dust removal head, sucks and removes attached to described lip-deep dust, it is characterized in that,
Comprise the protuberance dust removal head, described protuberance has with dust removal head: the air chamber that spues; The air suction chamber; Nozzle casing, its inner space are communicated to the described air chamber that spues; And air suction tube, itself and described nozzle casing are configured in described nozzle casing inboard with one heart, and have the air suction inlet that is connected with described air suction chamber;
When forming the air discharge opening by the gap between described nozzle casing point and the described air suction tube point,
The protuberance that described workpiece is had is configured in described air suction inlet inboard,
And from described air discharge opening to the described protuberance direction air that spues, suck described air from described air suction inlet to described air suction chamber then.
2. dust arrester as claimed in claim 1 is characterized in that, described protuberance has first air that is configured in described air suction chamber both sides chamber and second air chamber that spues that spues with dust removal head.
3. a dust arrester by the air that attracts to spue to surface of the work from dust removal head, sucks and removes attached to described lip-deep dust, it is characterized in that,
Comprise the recess dust removal head, described recess has with dust removal head: the air chamber that spues; The air suction chamber; Nozzle casing, its inner space are communicated to described air suction chamber; And the nozzle that spues, itself and described nozzle casing are configured in described nozzle casing inboard with one heart, and have the air discharge opening that is connected with the described air chamber of spuing;
When forming air suction inlet by described nozzle casing and the described space that spues between the nozzle,
Make recess arrangement that described workpiece has near described air discharge opening,
And from described air discharge opening to the described recess direction air that spues, suck described air from described air suction inlet to described air suction chamber then.
4. dust arrester as claimed in claim 3 is characterized in that, described recess has with dust removal head and is configured in described air the spue first air suction chamber and the second air suction chamber of both sides, chamber.
5. a dust arrester is characterized in that, comprises that simultaneously protuberance as claimed in claim 1 or 2 is with dust removal head and as claim 3 or 4 described recess dust removal heads.
CNA2006800414890A 2006-09-05 2006-09-21 Dust collecting device Pending CN101304818A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006239668A JP2008062122A (en) 2006-09-05 2006-09-05 Dust collector
JP239668/2006 2006-09-05

Publications (1)

Publication Number Publication Date
CN101304818A true CN101304818A (en) 2008-11-12

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CNA2006800414890A Pending CN101304818A (en) 2006-09-05 2006-09-21 Dust collecting device

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JP (1) JP2008062122A (en)
KR (1) KR20090047382A (en)
CN (1) CN101304818A (en)
TW (1) TW200812714A (en)
WO (1) WO2008029490A1 (en)

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CN102039613A (en) * 2009-10-22 2011-05-04 株式会社伸兴 Dust-removing device
CN105032841A (en) * 2015-07-23 2015-11-11 熊一凡 High-pressure airflow hand for removing harmful dust
CN111299245A (en) * 2018-12-11 2020-06-19 韶阳科技股份有限公司 Gas circulation device
CN115250861A (en) * 2022-07-20 2022-11-01 四平市鹏华园林绿化工程有限公司 Gardens grass and trees root system equipment for packing of environmental protection

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WO2013152984A1 (en) * 2012-04-10 2013-10-17 Tetra Laval Holdings & Finance S.A. Edge cleaner
JP6058312B2 (en) * 2012-08-06 2017-01-11 ヒューグル開発株式会社 Cleaning head
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KR101627823B1 (en) * 2014-05-22 2016-06-07 문상호 Web Cleaner
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102039613A (en) * 2009-10-22 2011-05-04 株式会社伸兴 Dust-removing device
CN102039613B (en) * 2009-10-22 2014-04-30 株式会社伸兴 Dust-removing device
CN105032841A (en) * 2015-07-23 2015-11-11 熊一凡 High-pressure airflow hand for removing harmful dust
CN111299245A (en) * 2018-12-11 2020-06-19 韶阳科技股份有限公司 Gas circulation device
CN115250861A (en) * 2022-07-20 2022-11-01 四平市鹏华园林绿化工程有限公司 Gardens grass and trees root system equipment for packing of environmental protection

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WO2008029490A1 (en) 2008-03-13
KR20090047382A (en) 2009-05-12
JP2008062122A (en) 2008-03-21
TW200812714A (en) 2008-03-16

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Open date: 20081112