CN101632991A - Fluid injection device - Google Patents
Fluid injection device Download PDFInfo
- Publication number
- CN101632991A CN101632991A CN200910136428A CN200910136428A CN101632991A CN 101632991 A CN101632991 A CN 101632991A CN 200910136428 A CN200910136428 A CN 200910136428A CN 200910136428 A CN200910136428 A CN 200910136428A CN 101632991 A CN101632991 A CN 101632991A
- Authority
- CN
- China
- Prior art keywords
- backing plate
- gas
- ejection apparatus
- runner
- fluid ejection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/24—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas with means, e.g. a container, for supplying liquid or other fluent material to a discharge device
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
Landscapes
- Nozzles (AREA)
Abstract
The invention relates to a fluid injection device capable of improving efficiency of fluid injection with simple production, which can be applied in substrate processing device for injecting a mixed fluid of liquid DIW and gas CDA onto a substrate for cleaning the substrate. The fluid injection device according to the invention includes a first base plate for forming a gas supply unit; a second base plate for forming a liquid supply unit and combining with the first base plate to compose a main body; a injection unit arranged on extremity of the mutually combined first base plate and second base plate for injecting mixed fluid; and a gap base plate arranged between the first base plate and the second base plate, and a connection flow passage for connecting the liquid supply unit and the injection unit is provided under the gap base plate.
Description
Technical field
The present invention relates to a kind of fluid ejection apparatus, relating in particular to a kind of fluid-mixing that can be applicable in the substrate board treatment liquid (DIW) and gas (CDA) is ejected on the substrate and substrate is cleaned, and make easily, and can improve the fluid ejection apparatus of fluid ejection efficiency.
Background technology
Usually, fluid ejection apparatus can be applicable to be the process of cleaning base plate to substrate jet mixing flow body.In this fluid ejection apparatus, be formed with first backing plate of gas chamber and be formed with the second backing plate overlaid of liquid chamber and mutually combine by attaching parts.And, be formed with the injection pipe that is used to spray the gas (CDA, Clean-dry gas) that supplies to gas chamber between first backing plate and second backing plate.In addition, be formed with the heeling condition setting on second backing plate and be used to connect a plurality of connecting pipes of liquid chamber and injection pipe.
That is, the liquid of liquid chamber (DI water, deionized water) is injected in the injection pipe and forms fluid-mixing through gas and connecting pipe according to the vaporizer principle, is ejected on the substrate then.
Above-mentioned connecting pipe forms slot by operations such as milling (milling) operations and makes.This existing fluid ejection apparatus is adding man-hour to described connecting pipe, and owing to treatment substrate maximizes gradually, it is big that the length of fluid ejection apparatus obviously becomes, and the number increase of connecting pipe, thereby cause process time and processing cost to increase.
And, to the pressure of gas chamber's supply gas greater than pressure to the liquid chamber feed fluid.Gas from gas chamber to the process that injection pipe sprays, there is portion gas not to be ejected into the injection pipe outside on the connecting pipe of liquid chamber side and the position that injection pipe is connected, and the end wall of the connecting pipe that flows out with liquid bumps against, thereby change moving direction, in the more weak liquid chamber of feed pressure, this phenomenon can reduce the ejection efficiency of fluid on the contrary.
And, the bottom surface of existing fluid ejection apparatus is a flat shape, so fluid-mixing can produce negative pressure around the fluid of injection when being ejected on the substrate, thereby the generation substrate is adsorbed to the phenomenon on the fluid ejection apparatus, therefore can cause the bad problem of processing substrate.
Summary of the invention
The present invention does in view of the above problems, the object of the present invention is to provide a kind of flow passage structure that is connected that is used to connect liquid chamber and injection unit that can be easy to process that has, thereby reduce production cost and save the production time, with this fluid ejection apparatus of enhancing productivity.
And another purpose of the present invention is to provide a kind of phenomenon that can prevent gas to the liquid chamber adverse current, to improve the fluid ejection apparatus of fluid ejection efficiency.
In addition, another object of the present invention is to provide a kind of and remove in fluid ejection apparatus, cause substrate to be adsorbed to phenomenon on the fluid ejection apparatus, thereby prevent the fluid ejection apparatus that processing substrate is bad because of producing negative pressure around the fluid-mixing that sprays.
To achieve these goals, the invention provides a kind of fluid ejection apparatus, it comprises: first backing plate, and it is used to form the gas feed unit; Second backing plate, it is used to form fluid supply unit, and combines with described first backing plate and constitute main body; Injection unit, it is arranged on described first backing plate that mutually combines and the end of described second backing plate, and is used for the jet mixing flow body; And the gap backing plate, it is arranged between described first backing plate and described second backing plate, and is provided with the runner that is connected that is used to connect described fluid supply unit and described injection unit below it.
Described gas feed unit preferably includes gas chamber; And gas supply runner, the one end is connected with described gas chamber, and the other end is connected with described injection unit, thereby makes gas flow.
Described fluid supply unit preferably includes liquid chamber; And liquid supply runner, the one end is connected with described liquid chamber, and the other end connects with the described runner that is connected, thereby makes liquid flow.
The following preset distance of preferably being separated by of described gap backing plate is provided for forming a plurality of grooves of described connection runner.
The width of described injection unit is supplied with the width of runner more preferably greater than described gas.
Preferably place described gap backing plate between described first backing plate and described second backing plate, and both facing sides are formed with gas chamber and liquid chamber respectively.
The leading section of described first backing plate and second backing plate is the inclined plane preferably.
Be preferably formed as the extension that extends towards the described first backing plate direction on the leading section of described second backing plate.
Aforesaid the present invention separates with same distance in the bottom of gap backing plate to form and connects runner and it is attached between first backing plate and second backing plate, and described connection runner is made up of a plurality of grooves that liquid are transported on the injection pipe.So its handling ease, low production cost can be enhanced productivity.
And the width of injection unit is supplied with the spacing of runner greater than gas among the present invention, therefore supplies with runner in portion gas that injection unit is supplied with can not the incoming fluid chamber from gas, and whole injected going out, thereby has improved the ejection efficiency of fluid.
In addition, the leading section of first backing plate of fluid ejection apparatus and second backing plate is the inclined plane among the present invention, therefore can prevent the fluid-mixing that sprays from injection unit around produce negative pressure, and avoid substrate to be adsorbed to phenomenon on the fluid ejection apparatus, thereby the processing that prevents substrate is bad.
Description of drawings
Fig. 1 be an embodiment of fluid ejection apparatus of the present invention appearance assumption diagram.
Fig. 2 is the exploded perspective view of major part among Fig. 1.
Fig. 3 be among Fig. 1 III-III to profile.
Fig. 4 is the enlarged drawing of A part among Fig. 3.
Fig. 5 is the schematic diagram that is used to illustrate embodiment of the invention effect.
The specific embodiment
Below preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 be used to illustrate an embodiment of fluid ejection apparatus of the present invention appearance assumption diagram.
Fluid ejection apparatus has long slit, and it can be ejected into the liquid (DI Water) that mixes and the fluid-mixing of gas (CDA, Clean Dry Air) on the substrate G in treatment trough, and substrate G is cleaned.First backing plate 1 and second backing plate 3 interconnect by attaching parts 5 in the described fluid ejection apparatus.As shown in Figures 2 and 3, dispose gap backing plate 7 between above-mentioned first backing plate 1 and second backing plate 3.
Be formed with gas feed unit 2 on first backing plate 1.Gas feed unit 2 can comprise the 1a of gas chamber, be used for carrying the gas of the 1a of gas chamber gas to supply with runner 1b.The 1a of gas chamber is formed on first backing plate 1, and can temporarily store from gas supply device (omitting diagram) gas supplied.
And, be formed with fluid supply unit 4 on second backing plate 3.Fluid supply unit 4 can comprise liquid chamber 3a, be used for carrying the liquid of liquid chamber 3a liquid to supply with runner 3b.Liquid chamber 3a is formed on second backing plate 3, and can temporarily store the liquid of supplying with from fluid Supplying apparatus (omitting diagram).
As shown in Figure 3, first backing plate 1 and second backing plate 3 mutually combine, and are provided with gap backing plate 7 betwixt, and first backing plate 1 and second backing plate, 3 opposed facing sides are formed with 1a of gas chamber and liquid chamber 3a respectively.
And, be formed with the gas that is connected with the 1a of gas chamber between first backing plate 1 and the gap backing plate 7 and supply with runner 1b.In addition, be formed with the liquid that is connected with liquid chamber 3a between second backing plate 3 and the gap backing plate 7 and supply with runner 3b.
In addition, be formed with the injection unit 13 that passes through for fluid-mixing on the front end between first backing plate 1 and second backing plate 3.That is, the front end of first backing plate 1 and first backing plate 3 has a determining deviation (gap), thereby but having formed the space of jet mixing flow body, this space is injection unit 13.
In other words, it is the zone of being passed through by gas chamber's 1a effluent air that gas is supplied with runner 1b, injection unit 13 be by the fluid-mixing of the 1a of gas chamber effluent air and liquid by and be ejected into zone on the substrate G.
The width b (as shown in Figure 4) of described injection unit 13 supplies with the width a (as shown in Figure 4) of runner 1b more preferably greater than above-mentioned gas.
In addition, the leading section of second backing plate 3 extends and the extension 3c of the outstanding shape of formation towards the direction of first backing plate 1.
And as shown in Figure 2, gap backing plate 7 is formed with equally spaced a plurality of groove 7a in its lower end, and described groove 7a has peristome down.Described a plurality of groove 7a be used to connect liquid chamber 3a and injection unit 13 be connected runner 9 (as shown in Figure 4), thereby the liquid in injection unit 13 atomizing of liquids chamber 3a.That is, gap backing plate 7 is with after second backing plate 3 combines, and a plurality of groove 7a below the gap backing plate 7 become the connection runner 9 of carrying liquid.
As mentioned above, gap backing plate 7 can be made by a plurality of groove 7a that separate formation with uniform distances in its bottom and make liquid flow to the connection runner 9 of injection unit 13.So, by the bottom to gap backing plate 7 process make a plurality of grooves form the mode that connects runner 9 have processability outstanding, reduce production cost and time, thereby the effect that can enhance productivity.
In addition, the bottom of first backing plate 1 and second backing plate 3 is formed with towards inclined plane 1e, the 3e of both sides inclination.When fluid-mixing with high pressure conditions when injection unit 13 is ejected into substrate G and goes up, can form sufficient idle space around described inclined plane 1e, the 3e, thereby produce negative pressure around the fluid-mixing that prevents to spray.
Specify aforesaid effect of the present invention with reference to the accompanying drawings.And describe process in detail to the substrate G jet mixing flow body that is transplanted on treatment trough inside by conveying device.
Supply with runner 1b and injection unit 13 injections by the gas that gas supply device supplies in the 1a of gas chamber via gas.At this moment, the liquid in the liquid chamber 3a flows through liquid supplies with runner 3b, and the connection runner 9 that constitutes along the groove 7a by gap backing plate 7 is ejected on the injection unit 13.That is, according to the principle of vaporizer, when gas was supplied with runner 1b and injection unit 13 outflows from gas, liquid will be with gas by connecting runner 9, and the fluid-mixing that this moment, liquids and gases mixed is injected on the substrate G.
At this moment, as shown in Figure 5, gas sprays runner 1b from gas and flows through injection unit 13.And,, can prevent that gas is to the phenomenon of liquid jet road 3b adverse current in the prior art along with the expansion of injection unit 13.
When certainly gas flow through injection unit 13, the liquid of liquid chamber 3a flows through when connecting runner 9 became fluid-mixing, is ejected into then on the substrate G.
As mentioned above because the leading section of first backing plate 1 and second backing plate 3 is constituted as inclined- plane 1e, 3e, therefore be ejected into fluid-mixing on the substrate G around can form sufficient space, thereby prevent to be ejected into fluid-mixing on the substrate G around produce negative pressure.Therefore, can avoid substrate G to be adsorbed on the fluid ejection apparatus or rock, thereby prevent the phenomenon that processing substrate is bad.
Claims (8)
1. a fluid ejection apparatus is characterized in that, comprising:
First backing plate, it is used to form the gas feed unit;
Second backing plate, it is used to form fluid supply unit, and combines with described first backing plate and constitute main body;
Injection unit, it is arranged on described first backing plate that combines and the end of described second backing plate, is used for the jet mixing flow body; And
The gap backing plate, it is arranged between described first backing plate and described second backing plate, and is provided with the runner that is connected that is used to connect described fluid supply unit and described injection unit below it.
2. fluid ejection apparatus according to claim 1 is characterized in that, described gas feed unit comprises:
Gas chamber, it is arranged on described first backing plate and is used for temporarily storing gas; And
Gas is supplied with runner, and the one end is connected with described gas chamber, and the other end is connected with described injection unit, thereby makes gas flow.
3. fluid ejection apparatus according to claim 1 is characterized in that, described fluid supply unit comprises:
Liquid chamber, it is arranged on described second backing plate and is used for temporary transient storage of liquids; And
Liquid is supplied with runner, and the one end is connected with described liquid chamber, and the other end connects with the described runner that is connected, thereby makes liquid flow.
4. fluid ejection apparatus according to claim 1 is characterized in that:
The preset distance of being separated by below the backing plate of described gap is provided with a plurality of grooves that are used to form described connection runner.
5. fluid ejection apparatus according to claim 1 is characterized in that:
The width of described injection unit is supplied with the width of runner greater than described gas.
6. fluid ejection apparatus according to claim 1 is characterized in that:
Be placed with described gap backing plate between described first backing plate and described second backing plate, and both facing sides are formed with gas chamber and liquid chamber respectively.
7. fluid ejection apparatus according to claim 1 is characterized in that:
The leading section of described first backing plate and second backing plate is the inclined plane.
8. fluid ejection apparatus according to claim 1 is characterized in that:
The leading section of described second backing plate is formed with the extension that extends towards the described first backing plate direction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080072456 | 2008-07-24 | ||
| KR1020080072456A KR100969359B1 (en) | 2008-07-24 | 2008-07-24 | Apparatus for jetting fluid |
| KR10-2008-0072456 | 2008-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101632991A true CN101632991A (en) | 2010-01-27 |
| CN101632991B CN101632991B (en) | 2011-11-09 |
Family
ID=41592417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101364288A Active CN101632991B (en) | 2008-07-24 | 2009-05-08 | Fluid injection device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100969359B1 (en) |
| CN (1) | CN101632991B (en) |
| TW (1) | TWI357359B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107008696A (en) * | 2015-11-16 | 2017-08-04 | 显示器生产服务株式会社 | Liquid injection apparatus |
| CN114622367A (en) * | 2020-12-14 | 2022-06-14 | 广东美的白色家电技术创新中心有限公司 | Function board and clothes processing device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5859922B2 (en) * | 2012-06-18 | 2016-02-16 | 日立マクセル株式会社 | Nebulizer |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100586239B1 (en) * | 2002-04-19 | 2006-06-02 | 주식회사 디엠에스 | Cleaning apparatus having fluid mixing nozzle for manufacturing flat panel display |
| KR100648411B1 (en) | 2003-10-17 | 2006-11-24 | 주식회사 디엠에스 | Injection nozzle |
| JP4649214B2 (en) * | 2005-01-12 | 2011-03-09 | 株式会社いけうち | Two-fluid slit nozzle |
| KR101145851B1 (en) * | 2005-10-28 | 2012-05-17 | 주식회사 케이씨텍 | Jet nozzle for washing substrate |
| KR101164062B1 (en) * | 2005-12-23 | 2012-07-12 | 주식회사 케이씨텍 | Two-fluid jet module for cleaning substrate and cleaning device using thereof |
-
2008
- 2008-07-24 KR KR1020080072456A patent/KR100969359B1/en active IP Right Grant
-
2009
- 2009-05-07 TW TW098115098A patent/TWI357359B/en active
- 2009-05-08 CN CN2009101364288A patent/CN101632991B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107008696A (en) * | 2015-11-16 | 2017-08-04 | 显示器生产服务株式会社 | Liquid injection apparatus |
| CN107008696B (en) * | 2015-11-16 | 2019-10-22 | 显示器生产服务株式会社 | Liquid injection apparatus |
| CN114622367A (en) * | 2020-12-14 | 2022-06-14 | 广东美的白色家电技术创新中心有限公司 | Function board and clothes processing device |
| CN114622367B (en) * | 2020-12-14 | 2023-12-29 | 广东美的白色家电技术创新中心有限公司 | Function board and clothes treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201004710A (en) | 2010-02-01 |
| KR100969359B1 (en) | 2010-07-09 |
| KR20100011304A (en) | 2010-02-03 |
| CN101632991B (en) | 2011-11-09 |
| TWI357359B (en) | 2012-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140226 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140226 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |