TWI356805B - Control of fluid conditions in bulk fluid delivery - Google Patents
Control of fluid conditions in bulk fluid delivery Download PDFInfo
- Publication number
- TWI356805B TWI356805B TW95107470A TW95107470A TWI356805B TW I356805 B TWI356805 B TW I356805B TW 95107470 A TW95107470 A TW 95107470A TW 95107470 A TW95107470 A TW 95107470A TW I356805 B TWI356805 B TW I356805B
- Authority
- TW
- Taiwan
- Prior art keywords
- fluid
- container
- liquid level
- pressure
- supply line
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims description 187
- 239000007788 liquid Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 46
- 239000011261 inert gas Substances 0.000 claims description 41
- 238000009826 distribution Methods 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002002 slurry Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims 1
- 150000007513 acids Chemical class 0.000 claims 1
- 239000002585 base Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 239000002689 soil Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920001774 Perfluoroether Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/08—Arrangements of devices for controlling, indicating, metering or registering quantity or price of liquid transferred
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
- F04F1/02—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped using both positively and negatively pressurised fluid medium, e.g. alternating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
- B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/72—Devices for applying air or other gas pressure for forcing liquid to delivery point
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2559—Self-controlled branched flow systems
- Y10T137/2564—Plural inflows
- Y10T137/2567—Alternate or successive inflows
- Y10T137/2569—Control by depletion of source
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/27—Liquid level responsive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3127—With gas maintenance or application
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65904705P | 2005-03-04 | 2005-03-04 | |
| US11/367,140 US7810516B2 (en) | 2005-03-04 | 2006-03-03 | Control of fluid conditions in bulk fluid distribution systems |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200710016A TW200710016A (en) | 2007-03-16 |
| TWI356805B true TWI356805B (en) | 2012-01-21 |
Family
ID=36943151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95107470A TWI356805B (en) | 2005-03-04 | 2006-03-06 | Control of fluid conditions in bulk fluid delivery |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7810516B2 (enExample) |
| EP (1) | EP1858795B1 (enExample) |
| JP (1) | JP5024882B2 (enExample) |
| KR (1) | KR101273008B1 (enExample) |
| IL (1) | IL185291A (enExample) |
| TW (1) | TWI356805B (enExample) |
| WO (1) | WO2006096646A2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7640876B2 (en) * | 2007-12-03 | 2010-01-05 | Cnh Canada, Ltd. | Bin level sensor for use with a product dispensing agricultural implement |
| US8037894B1 (en) * | 2007-12-27 | 2011-10-18 | Intermolecular, Inc. | Maintaining flow rate of a fluid |
| US8220502B1 (en) | 2007-12-28 | 2012-07-17 | Intermolecular, Inc. | Measuring volume of a liquid dispensed into a vessel |
| JP5231028B2 (ja) * | 2008-01-21 | 2013-07-10 | 東京エレクトロン株式会社 | 塗布液供給装置 |
| US8215329B2 (en) * | 2008-02-01 | 2012-07-10 | Woodward, Inc. | Digital closed loop proportional hydraulic pressure controller |
| US8646493B2 (en) * | 2009-03-02 | 2014-02-11 | Envirotower Inc. | Method and apparatus for changeover of container in a fluid dispenser |
| TW201117888A (en) * | 2009-11-25 | 2011-06-01 | Hon Hai Prec Ind Co Ltd | Continuous paint supply system and method for continuous paint |
| KR101138403B1 (ko) * | 2010-09-02 | 2012-04-26 | 씨앤지하이테크 주식회사 | 배관 막힘 방지 수단이 마련된 반도체용 슬러리 공급장치 |
| FR2972504B1 (fr) * | 2011-03-09 | 2014-06-27 | Olaer Ind Sa | Installation comportant au moins un accumulateur hydropneumatique a entretien automatise |
| US9623165B2 (en) | 2012-12-13 | 2017-04-18 | Gambro Lundia Ab | Cassette for pumping a treatment solution through a dialyzer |
| US9223319B2 (en) * | 2012-12-21 | 2015-12-29 | Intermolecular, Inc. | High dilution ratio by successively preparing and diluting chemicals |
| US9770804B2 (en) | 2013-03-18 | 2017-09-26 | Versum Materials Us, Llc | Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
| ES2527968B1 (es) * | 2013-08-02 | 2016-02-26 | Eulen, S.A. | Equipo de trasvase de lodos, de ciclo continuo de trabajo. |
| KR101610646B1 (ko) * | 2014-06-26 | 2016-04-11 | 한국생명공학연구원 | 다채널 유량 제어장치 |
| US10030674B2 (en) * | 2015-04-22 | 2018-07-24 | C. Anthony Cox | Sterile liquid pump with single use elements |
| US9765769B2 (en) * | 2015-04-22 | 2017-09-19 | C. Anthony Cox | Sterile liquid pump with single use elements |
| US20170016458A1 (en) * | 2015-07-15 | 2017-01-19 | Materials and Technologies, Corp. | Simple Positive Displacement Pump Suitable for Pharmaceutical, Chemical, Biological, Viscous, Dense, Particulate Laden Fluids and Other Demanding Applications |
| US10184496B2 (en) * | 2016-12-06 | 2019-01-22 | Airgas, Inc. | Automatic pressure and vacuum clearing skid method |
| JP2019129243A (ja) * | 2018-01-25 | 2019-08-01 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
| US11761582B2 (en) * | 2019-09-05 | 2023-09-19 | Dhf America, Llc | Pressure regulation system and method for a fluidic product having particles |
| AU2020210306B2 (en) * | 2020-07-31 | 2023-04-06 | Solidsvac Pty Ltd | Constant flow solids pump |
| TWI809498B (zh) * | 2020-09-18 | 2023-07-21 | 美商慧盛材料美國責任有限公司 | 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法 |
| GB202104739D0 (en) * | 2021-04-01 | 2021-05-19 | Medincell | Device |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61164998A (ja) * | 1985-01-14 | 1986-07-25 | 日本電信電話株式会社 | 薬品の自動供給装置 |
| US4859375A (en) * | 1986-12-29 | 1989-08-22 | Air Products And Chemicals, Inc. | Chemical refill system |
| US5803599A (en) * | 1990-09-17 | 1998-09-08 | Applied Chemical Solutions | Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures |
| US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
| US5370269A (en) * | 1990-09-17 | 1994-12-06 | Applied Chemical Solutions | Process and apparatus for precise volumetric diluting/mixing of chemicals |
| US5417346A (en) * | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
| US6260588B1 (en) * | 1993-04-28 | 2001-07-17 | Advanced Technology Materials, Inc. | Bulk chemical delivery system |
| US5383574A (en) * | 1993-07-19 | 1995-01-24 | Microbar Sytems, Inc. | System and method for dispensing liquid from storage containers |
| US5632866A (en) * | 1994-01-12 | 1997-05-27 | Fsi International, Inc. | Point-of-use recycling of wafer cleaning substances |
| US5522660A (en) * | 1994-12-14 | 1996-06-04 | Fsi International, Inc. | Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid |
| US5924794A (en) * | 1995-02-21 | 1999-07-20 | Fsi International, Inc. | Chemical blending system with titrator control |
| US5632960A (en) * | 1995-11-07 | 1997-05-27 | Applied Chemical Solutions, Inc. | Two-stage chemical mixing system |
| US5653533A (en) * | 1995-11-13 | 1997-08-05 | Abc Techcorp. | Apparatus and method for introducing liquid additives into a concrete mix |
| US5871028A (en) * | 1996-08-06 | 1999-02-16 | United Microelectronics Corporation | Photoresist solution storage and supply device |
| US6019250A (en) * | 1997-10-14 | 2000-02-01 | The Boc Group, Inc. | Liquid dispensing apparatus and method |
| US6006777A (en) * | 1997-10-23 | 1999-12-28 | Hanson Research Corporation | Media dispensing apparatus |
| JP2002513178A (ja) * | 1998-04-30 | 2002-05-08 | エフエスアイ インターナショナル インコーポレイテッド | スラリー調合における伝導度フィードバック制御システム |
| US6170703B1 (en) * | 1998-10-09 | 2001-01-09 | Scp Global Technologies, Inc | Chemical Dispensing system and method |
| JP3679004B2 (ja) * | 1998-12-30 | 2005-08-03 | ザ・ビー・オー・シー・グループ・インコーポレイテッド | 液体化学物質配送システムおよび配送方法 |
| US6098843A (en) * | 1998-12-31 | 2000-08-08 | Silicon Valley Group, Inc. | Chemical delivery systems and methods of delivery |
| US6604555B2 (en) * | 2000-08-04 | 2003-08-12 | Arch Specialty Chemicals, Inc. | Automatic refill system for ultra pure or contamination sensitive chemicals |
| US6953047B2 (en) * | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
| JP3621690B2 (ja) * | 2002-04-16 | 2005-02-16 | 株式会社イワキ | コントロールシステム |
| US20060196541A1 (en) * | 2005-03-04 | 2006-09-07 | David Gerken | Control of fluid conditions in bulk fluid distribution systems |
| US20070244437A1 (en) | 2006-03-31 | 2007-10-18 | Luis Castillo | Fluid delivery system with bulk container and pump assembly |
-
2006
- 2006-03-03 US US11/367,140 patent/US7810516B2/en not_active Expired - Fee Related
- 2006-03-06 WO PCT/US2006/007928 patent/WO2006096646A2/en not_active Ceased
- 2006-03-06 KR KR1020077020104A patent/KR101273008B1/ko active Active
- 2006-03-06 JP JP2007558324A patent/JP5024882B2/ja active Active
- 2006-03-06 EP EP20060737143 patent/EP1858795B1/en active Active
- 2006-03-06 TW TW95107470A patent/TWI356805B/zh active
-
2007
- 2007-08-15 IL IL185291A patent/IL185291A/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| US7810516B2 (en) | 2010-10-12 |
| US20060196884A1 (en) | 2006-09-07 |
| EP1858795B1 (en) | 2013-05-08 |
| TW200710016A (en) | 2007-03-16 |
| JP2008531426A (ja) | 2008-08-14 |
| EP1858795A2 (en) | 2007-11-28 |
| IL185291A (en) | 2011-05-31 |
| IL185291A0 (en) | 2008-02-09 |
| KR20070116805A (ko) | 2007-12-11 |
| JP5024882B2 (ja) | 2012-09-12 |
| EP1858795A4 (en) | 2012-02-01 |
| WO2006096646A3 (en) | 2007-10-04 |
| WO2006096646A2 (en) | 2006-09-14 |
| KR101273008B1 (ko) | 2013-06-10 |
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