TWI355424B - Process for producing niobium suboxide - Google Patents

Process for producing niobium suboxide Download PDF

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TWI355424B
TWI355424B TW93121672A TW93121672A TWI355424B TW I355424 B TWI355424 B TW I355424B TW 93121672 A TW93121672 A TW 93121672A TW 93121672 A TW93121672 A TW 93121672A TW I355424 B TWI355424 B TW I355424B
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patent application
temperature
reaction
nboy
metal
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TW93121672A
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TW200516157A (en
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Christoph Schnitter
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Starck H C Gmbh
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Description

九、發明說明: 【技術領域】
本發明涉及-㈣造近她成為腦的低氧祕的方法 低氧化鈮特別適合於固體電解質電容器陽極的生產。 L 【背景技術】 固體電解質電容器具有非常大的有效電容器表面積,因而具 較小的整體結構,適合用於移動通信電子器件,其主要是具有應 於相應導電基底上的鈮或鎢的五氧化物阻擋層的電容器,並且其 用了攻些化合物(“閥金屬”)的穩定性、相對高的介電常數以及通 過電化學方法可以製造出層厚非常均句的絕緣五氧化物層的事 實。所用的基底是金屬或相應五氧化物的導電的低氧化物(低氧化 物)前體。基底,其同時構成了電容器電極(陽極),包含通過燒 結那些已經是類海綿狀形式的極細微粒初級或次級結構而產生的 高度多孔的、類海雜的結構。基底結構的表面被電解氡化(“成 形”)來產生五氧化物,且五氧化物層厚度由最大的電解氧化電壓 (“成形電壓”)確定《»反電極通過向_雜結構注人魏猛而製 得,硝酸Μ加熱轉變成二氧條,或者注人聚合物電解質的液態前 體並接著進行聚合。對電極的電接觸—方面由在基底結構製造過程 中燒結而成驗或齡屬線來產生H面㈣所述金屬線絕緣 的金屬電容器護層構成。 電容器電容通過下列方程計算: C = (F-£)/(d-VF) 式中F表示電容器表面積,ε為介電常數,d為每乂成形電壓 的絕緣層厚度,並且Vf為成形電壓。由於五氡化二城五氧化二 銳的介電常數ε分別是27.6或4卜但其每伏特成形電壓的層厚度
Sd ::二6: Γ〜種五氧化物擁有幾乎相同的s/d 關的⑽m〜 具有相同的電容。關於與重量相 5 --〇.-"::>:r ; :rr'·3: 的優點,當::= 音,2 母克重量的節省都是優先的。考相費用的因 有利/%極結構的某些體積由氧來提供,因此Nb0*比Nb更為 10 =化銳粉末使用標準的冶金反應和合金方法來生產,據此通# 氧化銳和金屬銳在氫的存在下暴露於氧濃度達到平衡的溫 又下而產生平均氧化物含量,請參閱例子w〇⑻/i55m · 2Nb205+3Nb 5NbO ⑴ 15 一因此該方法包括商業上可得的高純五氧化二朗使用及其與 高純金屬銳的混合,二者皆為粉末狀且按照化學計量比例混合在 溫度為80(TC-160(rC的含氫氣氛中加工處理二者數小時,該氣氛中 優選應至多含氫1G% 〇對於五氧化物和金屬物,在氧平衡發生後, ’、有所期望的(小於或稍大於(最小)截面尺寸的初始粒度的& 優選。 零 20 在該方法中,用鈮或钽做成的坩堝内充滿了五氧化二鈮和金屬 鈮粉末,然後在含氫氣氛下在爐中被加熱到反應溫度。 需要與五氧化二鈮進行氧交換的金屬鈮最好由高純度的五氧 化一銳還原形成金屬而產生。 這可以通過鋁熱作用來實現,即點燃Nb2〇5/A1的混合物,並清 洗掉所形成的鋁的氧化物,然後用電子束淨化鈮金屬塊錠。還原以 及電子束熔化後得到的鈮金屬塊可以通過已知的方法用氫使其脆 化,並被磨細以產生薄層片晶狀粉末。 -6 - 25 1355424 Λ 依照與WOOO/67936A1相一致的生產金屬鈮的優選方法,首 先用氫在1000-16001還原高純度的五氧化二鈮粉末以形成分子式 近似為Nb〇2的銳的二氧化物,然後用鎂蒸汽在75〇_11〇(rc還原成 ,屬。在該方法中形成的氧化鎂用酸來清洗掉。上述後一種的方法 疋特別優選的,這疋由於其能量要求相當低,以及大致上保持了五 氧化二_初始粒度和被對電容H特財害的㈣污染的風險 低的事實。 依照反應方程式(1)反應的-個缺點是五氧化二銳體積收縮 在轉變成低氧化鈮的過程中大約等於50%,這導致了 一個相當鬆散 10 #低氧化物晶體微結構,該晶體微結構只能在具有加人晶體缺陷的 風險的條件下被壓實,並且因此可能最終對電容器特性產生負面影 響。低氧化物不良的晶體性質也是其流動特性不足的一個原因。〜 在電谷器生產中,電容器粉末良好的流動特性代表了一個重要 的加工參數’這是由於粉末通過自動高速擠壓機而被擠壓而要被 15擠壓的粉末是通過儲存容器供給到高速擠壓機的。良好的流動特性 2表了規定的粉末量以滿足當代要求的精度流入壓榨模具的一個 前提條件’例如+/_〇.5mg的精度。 【發明内容】 20 本發明的目的是克服現有技術的缺點。 本發明進一步的目 粉末》 的是提供具有改良的流動特性的低氧化鈮 本發明的另外一個目的是減少高純鎂的消耗和氧化鎂的 生’以及同時減少涉及氧化鎂清洗的費用。 、 此外’顯著增加爐容量也是本發明的目的。 屬 本發明另-個目的是進-步減少在生產低氧化銳所需的金 银的生產過程中發生污染的風險。 25 1355424 因此,根據本發明,近似組成為Nb〇2的鈮的二氧化物用作起 始氧化物以和金屬鈮粉末達到冶金氧平衡。優選在1〇〇(rc到 1600C的溫度下通入氫,還原五氧化二銳製備銳的二氧化物。 因此本發明的主題是一種製造Nb〇x的方法,其中〇 7<χ<1 3, 5 優選Ο·%〆1·1〗,特別優選1<χ<1·〇5,通過NbOy與按化學計量所 需的金屬銳在風的存在下反應,其中l_8<y<2.i,優選。在 能使所發生的反應基本上完全進行的前提下來確定的反應溫度和 時間。 本發明的另一個主題是分子式NbOx的低氧化鈮粉末,其中 10 0.7<x<1.3,優選〇.9<x<1.15 ’特別優選ι<χ<ι.05,此低氧化鈮粉 末具有根據ASTM B213最大60s/25g的流動特性,優選最大 50s/25g,特別優選最大4〇s/25g。 根據本發明,該方法的反應溫度優選從900°C到160(TC。反應 時間可以選擇0.5-4小時,取決於反應溫度和起始物質的成分和瀨 15 粒結構,以及最終產品的成分。 根據本發明,用於該方法的起始銳的二氧化物優選通過通入氫 還原五氧化二銳來製備。優選在5〇到u〇〇mbar的氫分壓下發生反 應。可以發現,當氫流中沒有水蒸汽時,反應已綠完成。反應完成 後,為了穩定及壓實NbOy晶格,優選地產品仍在9〇〇。〇到1600°C, 20 優選從1200°C到1600°C的溫度下保持一定的時間,如〇·ΐ-〇.5小時。 而且,在還原五氧化物以形成二氧化物時,優選地,溫度逐漸 地從950C-1100°C範圍的起始溫度增加到13〇〇。〇1600。(:範圍的最 高溫度’特別優選從l〇〇〇tM〇5〇t:範圍的起始溫度到 1350C-1600C範圍的最高溫度。並且,使還原在逐步降低的溫度 25 中繼續進行,如果適當的話,可以先在最高溫度停留一段時考 慮到在初始還原價段中氧濃度的降低’可以通過增加溫度在基本上 對還原速率加以維持,或通過使用更低的起始溫度來避免過快的還 1355424 原速率所導致的過快的晶格擴展。然後’將高的最終溫度在 1300°C-1600°C範圍内保持一段時間’這樣晶格能夠缴密化而且晶 格缺陷被在很大程度上退火。 另一方面’通過急速加熱到1450°C-1600°C的還原溫度,可能 會在初始時發生非常急速的還原,從而導致早在二氧化物產生期間 晶格就急速擴展’這樣晶格變得很不穩定,並產生相對強的初始粒 子增長。如果目的是生產30000-70000pFV/g的中容量電容器,並 用超細顆粒五氧化二銳做起始物質’這可能是令人滿意的。如果這 樣的話’為了鞏固二氧化物的晶格,將溫度保持在丨2〇〇。〇4600。0 是有益的® 所需的還原時間依賴於使用的五氧化二銳的粒度以及選擇的 還原溫度。當五氧化物的初始粒度為〇.3-〇.5μηι的情況下,20-40 分鐘的還原時間一般足夠、 由於相對高的還原溫度(包括第一個例子中的最高溫度),燒 結的帶有極高強度的跨接甚至在鈮的二氧化物中形成。· 通過鎮蒸>飞,可以在相對低的溫度下,例如90(^(0-11001,實 現二氧化物的進一步還原,以形成金屬。在這些低的溫度下,僅發 生最小的初始微粒粗化》結果,由於二氧化物和金屬的初始微粗和 團聚物的尺寸沒有差別,尤其是氧平衡後彼此幾乎相同,因此,對 於來源單一的鈮的二氧化物來說,可能一方面部分的被進一步還原 以形成金屬物,而另一方面未經進一步處理而同金屬物混合,然後 達到氧平衡以形成低氧化物。 因此’根據本發明’低氧化物依照下列方程式產生:
Nb02+Nb 2NbO ⑺ 體積收縮在Nb〇2轉變成NbO的過程中大約僅為13%。雖然 五氧化物42%的體積收縮中的多數已轉移到Nb〇2的生產中但這 沒有相反的作用,因為在氫還原期間它可能會影響作為的晶 -9- 1355424 體微結構的中間穩定。 一個另外的優勢是,依照本發明的方法,鎂的消耗、沖洗費用 以及生產金屬鈮所需產生的氧化鎂的比例均減少了 2〇%(基於Nb〇 的最終產量) 本發明另一個優勢是增加了用於形成Nb〇的反應爐的容量。 依照反應方程(1) ’從起始混合物到產品的體積收縮為23 5%,而 依照本發明的反應方程式體積的增加僅有6%(理論上),其在實際 中被燒結收縮所彌補《依照方程式(丨),溶爐掛祸最初丨被充 滿’反應結束後僅有81%被NbO充滿。 因此’就依照本發明所對應的方程式(2)的反應來說’容量 能(在理論上)增加(19%/81%=) 23% ^實際上,考慮到燒結收 縮,容量的增加甚至更大。 【具體實施方式】 15 實施例 實施例1 a)鈮的二氧化物NbOy的製造 使用部分團聚的高純度的球狀五氧化二鈮,此五氧化二鈮經過 300μιη篩格尺寸的篩子篩濾,具有直徑大約為0.7μιη的初始粒度 2〇 .以及依照BET(ASTM D 3663)測定的2.4m2/g的比表面積。 在如下所述的溫度條件下通入氫,使五氧化物被還原成鈮的二 氧化物,其中溫度在40分鐘的時間内從950°C升到1300°C,爲後 保持在1300°C下30分鐘,接下來在30分鐘内降溫至120(TC,然 後保持此溫度1小時。 25 鈮的二氧化物具有對應於式Nb02.G1的組成;初始粒度被粗化 到接近0.9μηι(從SEM圖像中觀測),並且BET表面積為l.lm2/g。 通過300μπι篩格尺寸的篩子之後,使用Malvern(ASTM B 822, -10· 1355424 濕潤劑Daxad 11)生產的MastersizerSp測量粒度分佈’得到32μιη 的 D10 值,164μπι 的 D50 值’和 247μπι 的 D90 值。 b) 金屬鈮的製造 5 在反應器中,部分在a)中獲得的鈮的二氧化物被放置在鈮線篩 子上。1.1倍於按化學反應計量所索的鎂(基於二氧化物中氧的量), 被放置在坩堝中篩子下面》反應器用氬氣從下而上清洗。然後,反 應器被加熱到1050°C。8小時後,冷卻反應器並且空氣緩慢的進入 以鈍化金屬表面、
1〇 獲得的金屬妮粉末具有0.85μηι的初始粒度,1.32m2/g的BET 面積,並且通過300μιη篩格尺寸的篩子之後,具有33μπι的D10 值,176μιη 的 D50 值,和 263μιη 的 D90 值。 c) 低氧化銳NbOx的製造. 15 按重量計,將43份在b>中獲得的銳、粉末以及57份在a)中獲 得的鈮的二氧彳匕物粉末混合並導入坩堝令,填充到坩堝邊緣。然後-’ 在2.5小時期間内,在爐中將坩堝加熱到丨38.〇。〇,咚熔爐用含85% 體積氬氣和15%體積氫氣的混合氣清洗過。 冷卻之後’獲得對應於式Nb〇(>96的低氧化鈮粉末。此低氧化 20 物粉末具有〇·95μηι的初始粒度以及l.lm2/g的BET面積。通過 300μήι _格尺寸的篩子之後,m〇值為41卿,D5〇值為182μπι, D90 值為 258μιη。 d)電容器製造 在每個實例中’ l〇3mg根據c)所得的低氧化錕粉末被導入擠 壓模具中’以包圍銳接觸線,然後其被擠壓以形成壓制密度為2.8g/ cm3的壓縮體。 • 11 - 1355424 此壓縮體被隨意放置在銳平臺上,在10-3pa的高真空中在 1450C’皿度下燒結20分鐘。在85〇c溫度下,在含有〇 1%強度鱗酸 的電解質中形成陽極’成型電流為並且成型電愿可高達 3〇V,該成型電壓在電流衰退後維持2小時。 / 5 陽極體的電容和殘餘電流’其由通過成形而得的五氧化二銳阻 擔層所提供’並通過用18%強度的濃硫酸在坑下模擬的反電極 來加以測定。3分鐘的充電時間之後,這些測量在21V (成型電壓 的70%)電壓’ 120Hz的頻率以及1〇v的偏壓下進行^測定平均、 比電容為75 158pFV/g並且殘餘電流為〇 76ηΑ/μ]ρν。 10 實施例2 a) 鈮的二氧化物NbOy的製造: 所使用的起始物質是部分團聚的、高純度的、實際上為球狀的 Nb2〇5,經過篩濾使其小於300μιη,並且其依照BET(ASTMD3663)、 15 測定的比表面積為2.3m2/g。通入氫氣,這些Nb205部分被還原為 組成為Nb〇2〇2的氧;化物,在其中溫度在6〇分鐘的時間内從1〇〇〇。匚. 升到1450°C,然後在1450°C下保持200分鐘。此二氧化物比表面 積為0.32m2/g ’通過鐳射衍射(ASTM B 822)測定,具有D10值為 67μιη,D50值為176μπι以及D90值為284μιη的粒度分佈。 20 b) 金屬鈮的製造 部分在a)中製造的鈮的二氧化物被放置在反應器_金屬絲網 上。在金屬絲網下面,有1.2倍於按化學反應計量所需的鎂(基於 二氧化物中氧的量)。將反應器在通入氬氣下加熱4小時,到 25 900°C。在此期間,鎂蒸發並且把其上面的鈮的二氧化物還原成金 屬。冷卻和鈍化之後,通過反復的用硫酸再用水清洗,從形成的金 屬銳中移除形成的氧化鎂。 • 12· 1355424
形成的金屬銳粉末具有0·4-0.6μιη的初始粒度(從SEM圖像中 觀測)’ 3.87m2/g的比表面積以及通過鐳射衍射測定(ASTm D 3663 ’ Malvern Mastersizer)的 54μιη 的 Dl〇 值,ΐ61μπι 的 D50 值, 和 272μιη 的 D90 值。 5 ( c)低氧化鈮NbOx的製造 1·依照現有技術的程序 在b)中製造的金屬铌的一半與在a)中所描述的Nb2〇5按重量 比1 : 0.95混合。然後在67mbar的絕對氫分壓下,在爐中加熱到 10 1400°C並維持3小時◊然後使粉末通過3〇〇μιη篩格尺寸的篩子。 用該方法獲得的低氧化鈮(粉末Α)的組成為NbOui並具有 0.95-1.1μιη的初始粒度(從SEM圖像中觀測)。比表面積為 1.07m2/g,以及經鐳射衍射測定的D1O值為71μιη,D50值為 165μιη ’ D90 值為 263μιη。 15 2.依照本發明的程序 另一半在b)中製造的金屬鈮同在a)中產生的部分按重 量比1:1.34混合《然後在67mbar絕對氫分壓下,在爐中加熱2小 時,到1210°C。獲得的低氧化鈮(粉末B)具有>^〇()98的組成以_ 及1.13m/g的比表面積。從SEM圖像中觀測的初始粒度平均為 20 丨.^111’並且經鐳射衍射測定的粒度分佈為62μηι的D10值,Ι58μηι 的D50值’和269μιη的D90值。 兩種粉末的流動特性根據ASTM Β213測定。 結果如下: 粉末 A: 65s/25g 25 粉末 B: 26s/25g. 因此’與按傳統方法所得的產品相比,本發明的程序製得的低 氧化鈮的區別在於其進步的流動特性。

Claims (1)

  1. 專利申請案第93121672號 ROC Patent Application No. 93121672 修正之申請專利範圍中文本-附件(二) Amended Claims in Chinese-Encl. ΠΠ (民國100年7月20日送呈) (Submitted on July 20,2011) 年7肋日修正本 '申請專利範圍: l —種製造NbOx的方法,其中〇.7<x<1.3,優選〇 9<χ<1 15,特 別優選1<χ<1.〇5,該方法通過將NbOy與化學計量數的金屬鈮在 氫的存在下進行反應’其中1.8<y<2.1,優選,來製造 所述的NbOx。 2·根據申請專利範圍第丨項的方法,其特徵在於,反應的溫度和 時間按照使反應基本完全發生的方式來選擇。 3. 根據申請專利範圍第2項的方法,其特徵在於,反應的溫度是 9〇〇°C-1600°C ’以及反應的時間是0.5-4小時。 4. 根據申請專利範圍第丨至3項中任一項的方法,其特徵在於, 起始物質鈮的二氧化物NbOy是通過通入氫還原五氧化二鈮而 製得的。 5. 根據申請專利範圍第4項的方法,其特徵在於,所述還原是在 1〇〇0°C-1600°C的溫度下進行的。 6. 根據申請專利範圍第5項的方法,其特徵在於,反應結束後, 反應產物仍在90(rc-1600t:的溫度下保持一段時間以穩定和壓 實NbOy晶格。 〜 7. 根據申睛專利範圍第6項中任一項的方法,其特徵在於,使用 由平均最小粒度〇.4-2μιη的初始微粒的團聚物形成的粉末狀五 氧化二鈮。. .刀 8. 根據申睛專利範圍第1至3項中任一項的方法,其特汽在於, 使用按照申請專利範圍第4至6項中任一項的方法用鎮蒸汽還 原NbOy所獲得的金屬鈮粉末。 9. 根據申請專利範圍第8項的方法,其特徵在於,在75〇它_11別。c 的溫度下還原NbOy以形成所述金屬。 10. —種分子式為Nb〇x的低氧化物,其中Θ 3,優選 93320申請專利範圍 • 14· 1355424 0.9<χ<1·15,特別優選1<χ<1.05,具有依照ASTM B213最大 60s/25g的流動特性。 11.一種電容器,其包含根據申請專利範圍第10項所述燒結的粉末 狀陽極。
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