TWI349720B - A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same - Google Patents
A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the sameInfo
- Publication number
- TWI349720B TWI349720B TW096119236A TW96119236A TWI349720B TW I349720 B TWI349720 B TW I349720B TW 096119236 A TW096119236 A TW 096119236A TW 96119236 A TW96119236 A TW 96119236A TW I349720 B TWI349720 B TW I349720B
- Authority
- TW
- Taiwan
- Prior art keywords
- plasma
- power
- vapor deposition
- same
- chemical vapor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096119236A TWI349720B (en) | 2007-05-30 | 2007-05-30 | A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
US11/847,316 US7927425B2 (en) | 2007-05-30 | 2007-08-29 | Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096119236A TWI349720B (en) | 2007-05-30 | 2007-05-30 | A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200846493A TW200846493A (en) | 2008-12-01 |
TWI349720B true TWI349720B (en) | 2011-10-01 |
Family
ID=40086729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096119236A TWI349720B (en) | 2007-05-30 | 2007-05-30 | A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
Country Status (2)
Country | Link |
---|---|
US (1) | US7927425B2 (zh) |
TW (1) | TWI349720B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040261712A1 (en) * | 2003-04-25 | 2004-12-30 | Daisuke Hayashi | Plasma processing apparatus |
TWI349720B (en) * | 2007-05-30 | 2011-10-01 | Ind Tech Res Inst | A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
JP5432686B2 (ja) * | 2009-12-03 | 2014-03-05 | 東京エレクトロン株式会社 | プラズマ処理装置 |
CN101992948B (zh) * | 2010-09-30 | 2013-07-31 | 东莞宏威数码机械有限公司 | 基片自动上载装置 |
WO2012046397A1 (ja) * | 2010-10-07 | 2012-04-12 | キヤノンアネルバ株式会社 | 基板処理装置 |
KR102136787B1 (ko) * | 2013-03-14 | 2020-07-23 | 삼성디스플레이 주식회사 | 진공증착기 |
US9957615B2 (en) | 2013-09-13 | 2018-05-01 | Applied Materials, Inc. | Apparatus to improve substrate temperature uniformity |
US10711348B2 (en) * | 2015-03-07 | 2020-07-14 | Applied Materials, Inc. | Apparatus to improve substrate temperature uniformity |
WO2016196105A1 (en) * | 2015-06-05 | 2016-12-08 | Applied Materials, Inc. | Susceptor position and rotation apparatus and methods of use |
CN105483652B (zh) * | 2015-12-07 | 2018-03-30 | 武汉华星光电技术有限公司 | 化学气相沉积装置及其使用方法 |
KR102640172B1 (ko) | 2019-07-03 | 2024-02-23 | 삼성전자주식회사 | 기판 처리 장치 및 이의 구동 방법 |
US20210140035A1 (en) * | 2019-11-08 | 2021-05-13 | Kurt J. Lesker Company | Compound Motion Vacuum Environment Deposition Source Shutter Mechanism |
CN111519169A (zh) * | 2020-05-28 | 2020-08-11 | 深圳市捷佳伟创新能源装备股份有限公司 | 顶升装置和物料加工设备 |
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US5558717A (en) * | 1994-11-30 | 1996-09-24 | Applied Materials | CVD Processing chamber |
JP3238082B2 (ja) | 1996-05-16 | 2001-12-10 | シャープ株式会社 | 電子デバイス製造装置 |
US5772773A (en) * | 1996-05-20 | 1998-06-30 | Applied Materials, Inc. | Co-axial motorized wafer lift |
US6120609A (en) * | 1996-10-25 | 2000-09-19 | Applied Materials, Inc. | Self-aligning lift mechanism |
JP3925566B2 (ja) | 1996-11-15 | 2007-06-06 | キヤノンアネルバ株式会社 | 薄膜形成装置 |
US5911834A (en) * | 1996-11-18 | 1999-06-15 | Applied Materials, Inc. | Gas delivery system |
JPH11302829A (ja) | 1998-04-16 | 1999-11-02 | Ebara Corp | 真空装置の真空室汚染防止装置 |
EP1124252A2 (en) * | 2000-02-10 | 2001-08-16 | Applied Materials, Inc. | Apparatus and process for processing substrates |
KR20010111058A (ko) * | 2000-06-09 | 2001-12-15 | 조셉 제이. 스위니 | 전체 영역 온도 제어 정전기 척 및 그 제조방법 |
EP1174910A3 (en) * | 2000-07-20 | 2010-01-06 | Applied Materials, Inc. | Method and apparatus for dechucking a substrate |
US6935466B2 (en) * | 2001-03-01 | 2005-08-30 | Applied Materials, Inc. | Lift pin alignment and operation methods and apparatus |
KR100422199B1 (ko) * | 2001-05-04 | 2004-03-12 | 주성엔지니어링(주) | 반도체 소자 제조장치 |
US6767176B2 (en) * | 2001-06-29 | 2004-07-27 | Applied Materials, Inc. | Lift pin actuating mechanism for semiconductor processing chamber |
JP2003060012A (ja) * | 2001-08-08 | 2003-02-28 | Asm Japan Kk | 半導体処理用反応チャンバ |
US7189313B2 (en) * | 2002-05-09 | 2007-03-13 | Applied Materials, Inc. | Substrate support with fluid retention band |
AU2003244018A1 (en) * | 2002-07-05 | 2004-01-23 | Tokyo Electron Limited | Method of cleaning substrate-processing device and substrate-processing device |
US7029529B2 (en) * | 2002-09-19 | 2006-04-18 | Applied Materials, Inc. | Method and apparatus for metallization of large area substrates |
US7270713B2 (en) * | 2003-01-07 | 2007-09-18 | Applied Materials, Inc. | Tunable gas distribution plate assembly |
US20040177813A1 (en) * | 2003-03-12 | 2004-09-16 | Applied Materials, Inc. | Substrate support lift mechanism |
JP4152802B2 (ja) | 2003-05-09 | 2008-09-17 | 日本エー・エス・エム株式会社 | 薄膜形成装置 |
JP2005056994A (ja) | 2003-08-01 | 2005-03-03 | Saginomiya Seisakusho Inc | プラズマ処理装置 |
US7292428B2 (en) * | 2005-04-26 | 2007-11-06 | Applied Materials, Inc. | Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
US20060281310A1 (en) * | 2005-06-08 | 2006-12-14 | Applied Materials, Inc. | Rotating substrate support and methods of use |
WO2007016013A2 (en) * | 2005-07-27 | 2007-02-08 | Applied Materials, Inc. | Unique passivation technique for a cvd blocker plate to prevent particle formation |
JP4836512B2 (ja) * | 2005-07-29 | 2011-12-14 | 東京エレクトロン株式会社 | 基板昇降装置および基板処理装置 |
US20070031609A1 (en) * | 2005-07-29 | 2007-02-08 | Ajay Kumar | Chemical vapor deposition chamber with dual frequency bias and method for manufacturing a photomask using the same |
JP4687534B2 (ja) * | 2005-09-30 | 2011-05-25 | 東京エレクトロン株式会社 | 基板の載置機構及び基板処理装置 |
US20070218702A1 (en) | 2006-03-15 | 2007-09-20 | Asm Japan K.K. | Semiconductor-processing apparatus with rotating susceptor |
KR100994470B1 (ko) * | 2006-04-13 | 2010-11-16 | 엘아이지에이디피 주식회사 | 기판 처리장치 |
WO2008106542A1 (en) * | 2007-02-28 | 2008-09-04 | Applied Materials, Inc. | Apparatus and method for deposition over large area substrates |
TWI349720B (en) * | 2007-05-30 | 2011-10-01 | Ind Tech Res Inst | A power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
US8168462B2 (en) * | 2009-06-05 | 2012-05-01 | Applied Materials, Inc. | Passivation process for solar cell fabrication |
-
2007
- 2007-05-30 TW TW096119236A patent/TWI349720B/zh not_active IP Right Cessation
- 2007-08-29 US US11/847,316 patent/US7927425B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7927425B2 (en) | 2011-04-19 |
US20080295771A1 (en) | 2008-12-04 |
TW200846493A (en) | 2008-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |