GB2458776B - Chemical vapour deposition process - Google Patents

Chemical vapour deposition process

Info

Publication number
GB2458776B
GB2458776B GB0905047A GB0905047A GB2458776B GB 2458776 B GB2458776 B GB 2458776B GB 0905047 A GB0905047 A GB 0905047A GB 0905047 A GB0905047 A GB 0905047A GB 2458776 B GB2458776 B GB 2458776B
Authority
GB
United Kingdom
Prior art keywords
deposition process
vapour deposition
chemical vapour
chemical
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0905047A
Other versions
GB0905047D0 (en
GB2458776A (en
Inventor
Christopher Ochayi Agboh
Leslie Graeme Stringer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of GB0905047D0 publication Critical patent/GB0905047D0/en
Publication of GB2458776A publication Critical patent/GB2458776A/en
Application granted granted Critical
Publication of GB2458776B publication Critical patent/GB2458776B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/164—Preparation involving continuous processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/133—Apparatus therefor
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
    • D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
    • D06M11/74—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof with carbon or graphite; with carbides; with graphitic acids or their salts
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
    • D06M2101/40—Fibres of carbon
GB0905047A 2008-03-31 2009-03-25 Chemical vapour deposition process Expired - Fee Related GB2458776B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0805837.2A GB0805837D0 (en) 2008-03-31 2008-03-31 Chemical Vapour Deposition Process

Publications (3)

Publication Number Publication Date
GB0905047D0 GB0905047D0 (en) 2009-05-06
GB2458776A GB2458776A (en) 2009-10-07
GB2458776B true GB2458776B (en) 2010-06-02

Family

ID=39522477

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB0805837.2A Ceased GB0805837D0 (en) 2008-03-31 2008-03-31 Chemical Vapour Deposition Process
GB0905047A Expired - Fee Related GB2458776B (en) 2008-03-31 2009-03-25 Chemical vapour deposition process

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB0805837.2A Ceased GB0805837D0 (en) 2008-03-31 2008-03-31 Chemical Vapour Deposition Process

Country Status (2)

Country Link
GB (2) GB0805837D0 (en)
WO (1) WO2009122139A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8969225B2 (en) 2009-08-03 2015-03-03 Applied Nano Structured Soultions, LLC Incorporation of nanoparticles in composite fibers
US10808321B2 (en) 2010-02-08 2020-10-20 Graphene Square Inc. Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same

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US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US20100086703A1 (en) 2008-10-03 2010-04-08 Veeco Compound Semiconductor, Inc. Vapor Phase Epitaxy System
WO2010141130A1 (en) * 2009-02-27 2010-12-09 Lockheed Martin Corporation Low temperature cnt growth using gas-preheat method
US20100224129A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation System and method for surface treatment and barrier coating of fibers for in situ cnt growth
BRPI1010288A2 (en) * 2009-04-10 2016-03-22 Applied Nanostructured Sols apparatus and method for producing carbon nanotubes on a continuously moving substrate
WO2010120581A1 (en) 2009-04-17 2010-10-21 Noyes Dallas B Method for producing solid carbon by reducing carbon oxides
WO2011087526A1 (en) * 2010-01-15 2011-07-21 Applied Nanostructured Solutions Llc Apparatus and method for the production of carbon nanotubes on a continuously moving substrate
WO2011106624A1 (en) * 2010-02-26 2011-09-01 Alliance For Sustainable Energy, Llc Hot wire chemical vapor deposition (hwcvd) with carbide filaments
US20120058352A1 (en) * 2010-09-02 2012-03-08 Applied Nanostructured Solutions, Llc Metal substrates having carbon nanotubes grown thereon and methods for production thereof
CA2808242A1 (en) * 2010-09-14 2012-03-22 Applied Nanostructured Solutions, Llc Glass substrates having carbon nanotubes grown thereon and methods for production thereof
CN103118975A (en) * 2010-09-22 2013-05-22 应用奈米结构公司 Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
KR101168259B1 (en) 2012-03-05 2012-07-30 한국기계연구원 Apparatus for composing graphene continuously using roll-to-roll process
JP6379085B2 (en) 2012-04-16 2018-08-22 シーアストーン リミテッド ライアビリティ カンパニー Method for treating off-gas containing carbon oxides
WO2013158156A1 (en) 2012-04-16 2013-10-24 Seerstone Llc Methods and structures for reducing carbon oxides with non-ferrous catalysts
JP2015514669A (en) 2012-04-16 2015-05-21 シーアストーン リミテッド ライアビリティ カンパニー Method for producing solid carbon by reducing carbon dioxide
NO2749379T3 (en) 2012-04-16 2018-07-28
JP6242858B2 (en) 2012-04-16 2017-12-06 シーアストーン リミテッド ライアビリティ カンパニー Method and system for capturing and sequestering carbon and reducing the mass of carbon oxide in a waste gas stream
US9896341B2 (en) 2012-04-23 2018-02-20 Seerstone Llc Methods of forming carbon nanotubes having a bimodal size distribution
WO2014011631A1 (en) 2012-07-12 2014-01-16 Seerstone Llc Solid carbon products comprising carbon nanotubes and methods of forming same
US10815124B2 (en) 2012-07-12 2020-10-27 Seerstone Llc Solid carbon products comprising carbon nanotubes and methods of forming same
MX2015000580A (en) 2012-07-13 2015-08-20 Seerstone Llc Methods and systems for forming ammonia and solid carbon products.
US9779845B2 (en) 2012-07-18 2017-10-03 Seerstone Llc Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same
CN103103493B (en) * 2012-11-07 2015-05-06 山东鑫汇铜材有限公司 Production device of graphene copper wire
DE102012111484A1 (en) * 2012-11-27 2014-05-28 Aixtron Se Apparatus and method for processing strip-shaped substrates
US9650251B2 (en) 2012-11-29 2017-05-16 Seerstone Llc Reactors and methods for producing solid carbon materials
EP3113880A4 (en) 2013-03-15 2018-05-16 Seerstone LLC Carbon oxide reduction with intermetallic and carbide catalysts
WO2014151898A1 (en) 2013-03-15 2014-09-25 Seerstone Llc Systems for producing solid carbon by reducing carbon oxides
US9783416B2 (en) 2013-03-15 2017-10-10 Seerstone Llc Methods of producing hydrogen and solid carbon
EP3129321B1 (en) 2013-03-15 2021-09-29 Seerstone LLC Electrodes comprising nanostructured carbon
US10086349B2 (en) 2013-03-15 2018-10-02 Seerstone Llc Reactors, systems, and methods for forming solid products
CN104641028B (en) * 2013-06-18 2016-08-31 Lg化学株式会社 The device preparing carbon nano-tube fibre and the method utilizing described device to prepare carbon nano-tube fibre
DE102014104009A1 (en) 2014-03-24 2015-09-24 Aixtron Se On its two wegweisenden broadsides each substrate carrying substrate carrier
DE102014104011A1 (en) 2014-03-24 2015-09-24 Aixtron Se Device for separating nanotubes
GB201412656D0 (en) 2014-07-16 2014-08-27 Imp Innovations Ltd Process
WO2017055618A1 (en) * 2015-10-02 2017-04-06 O'flynn Donal Paul Method of producing graphene structures
US11752459B2 (en) 2016-07-28 2023-09-12 Seerstone Llc Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same
TWI682047B (en) * 2018-10-02 2020-01-11 大永真空科技股份有限公司 Cavity suitable for yarn coating

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JPH0835069A (en) * 1994-07-22 1996-02-06 Kao Corp Film forming device
GB2385864A (en) * 2002-02-28 2003-09-03 Qinetiq Ltd Production of nanocarbons
US20060083927A1 (en) * 2004-10-15 2006-04-20 Zyvex Corporation Thermal interface incorporating nanotubes
WO2006099156A2 (en) * 2005-03-10 2006-09-21 Tailored Materials Corporation Thin film production method and apparatus

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US20060118242A1 (en) * 2001-02-12 2006-06-08 Anthony Herbert Atmospheric pressure plasma system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0835069A (en) * 1994-07-22 1996-02-06 Kao Corp Film forming device
GB2385864A (en) * 2002-02-28 2003-09-03 Qinetiq Ltd Production of nanocarbons
US20060083927A1 (en) * 2004-10-15 2006-04-20 Zyvex Corporation Thermal interface incorporating nanotubes
WO2006099156A2 (en) * 2005-03-10 2006-09-21 Tailored Materials Corporation Thin film production method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8969225B2 (en) 2009-08-03 2015-03-03 Applied Nano Structured Soultions, LLC Incorporation of nanoparticles in composite fibers
US10808321B2 (en) 2010-02-08 2020-10-20 Graphene Square Inc. Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same

Also Published As

Publication number Publication date
GB0805837D0 (en) 2008-06-04
GB0905047D0 (en) 2009-05-06
GB2458776A (en) 2009-10-07
WO2009122139A1 (en) 2009-10-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130325