TWI340110B - Cassette for substrate - Google Patents

Cassette for substrate

Info

Publication number
TWI340110B
TWI340110B TW093140286A TW93140286A TWI340110B TW I340110 B TWI340110 B TW I340110B TW 093140286 A TW093140286 A TW 093140286A TW 93140286 A TW93140286 A TW 93140286A TW I340110 B TWI340110 B TW I340110B
Authority
TW
Taiwan
Prior art keywords
cassette
substrate
Prior art date
Application number
TW093140286A
Other languages
English (en)
Other versions
TW200528368A (en
Inventor
Geun-Soo An
Jae-Nam Cho
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW200528368A publication Critical patent/TW200528368A/zh
Application granted granted Critical
Publication of TWI340110B publication Critical patent/TWI340110B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • G06F1/18—Packaging or power distribution
    • G06F1/181—Enclosures
    • G06F1/182—Enclosures with special features, e.g. for use in industrial environments; grounding or shielding against radio frequency interference [RFI] or electromagnetical interference [EMI]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • G06F1/1601—Constructional details related to the housing of computer displays, e.g. of CRT monitors, of flat displays
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2200/00—Indexing scheme relating to G06F1/04 - G06F1/32
    • G06F2200/16—Indexing scheme relating to G06F1/16 - G06F1/18
    • G06F2200/161—Indexing scheme relating to constructional details of the monitor
    • G06F2200/1612—Flat panel monitor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
TW093140286A 2003-12-23 2004-12-23 Cassette for substrate TWI340110B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030095417A KR100973816B1 (ko) 2003-12-23 2003-12-23 대형 기판용 카세트

Publications (2)

Publication Number Publication Date
TW200528368A TW200528368A (en) 2005-09-01
TWI340110B true TWI340110B (en) 2011-04-11

Family

ID=34793194

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093140286A TWI340110B (en) 2003-12-23 2004-12-23 Cassette for substrate

Country Status (5)

Country Link
US (1) US20050167318A1 (zh)
JP (1) JP2005184002A (zh)
KR (1) KR100973816B1 (zh)
CN (1) CN100501963C (zh)
TW (1) TWI340110B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101659341B (zh) * 2009-09-27 2012-08-29 友达光电股份有限公司 基板卡匣
CN102583050B (zh) * 2012-02-07 2014-05-21 深圳市华星光电技术有限公司 液晶面板基材的运输控制设备及其控制方法
CN103448048B (zh) 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN106428916B (zh) * 2016-10-27 2018-10-19 武汉华星光电技术有限公司 一种基板承载件和基板中转箱
CN113178409B (zh) * 2021-04-07 2023-04-07 深圳市华星光电半导体显示技术有限公司 承载装置及物料搬运系统

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863113A (en) * 1974-01-04 1975-01-28 Llyd G Ward Modular formed wire cardcage
US4248352A (en) * 1979-04-27 1981-02-03 Nashville Wire Products Manufacturing Co. Wire pocket display device
US4385781A (en) * 1981-02-20 1983-05-31 Metropolitan Wire Corporation Carrier for printed circuit boards
CA2011580A1 (en) * 1989-03-13 1990-09-13 Michael J. Ricard Support mounting system
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
US5429251A (en) * 1993-09-22 1995-07-04 Legacy Systems, Inc. Semiconductor wafer end effector
US5607068A (en) * 1995-02-01 1997-03-04 B-O-F Corporation Gravity flow shelving system
KR100188137B1 (ko) * 1995-09-07 1999-06-01 김광호 액정 표시 장치 글래스 적재용 카세트
US5823361A (en) * 1996-02-06 1998-10-20 Progressive System Technologies, Inc. Substrate support apparatus for a substrate housing
JP3307555B2 (ja) * 1996-09-04 2002-07-24 三星電子株式会社 表示装置用基板の積載用カセットおよびこれを用いた静電破壊防止方法
JPH10203584A (ja) * 1997-01-22 1998-08-04 Nec Corp 基板用カセット
JP3977491B2 (ja) * 1997-07-16 2007-09-19 淀川ヒューテック株式会社 基板用カセット
US6133121A (en) * 1997-10-15 2000-10-17 Kabushiki Kaisha Toshiba Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus
KR100361464B1 (ko) * 2000-05-24 2002-11-18 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
JP2003201148A (ja) * 2001-10-31 2003-07-15 Nippon Sheet Glass Co Ltd 情報記録媒体用ガラス基板の化学強化用ホルダー
JP4764584B2 (ja) * 2001-12-18 2011-09-07 株式会社大真空 ウェハの支持方法およびウェハ支持治具およびウェハ処理装置
JP3989736B2 (ja) * 2002-01-11 2007-10-10 株式会社ニックス 板材収納枠
KR100870661B1 (ko) * 2002-03-15 2008-11-26 엘지디스플레이 주식회사 기판 수납용 카세트
US6729484B2 (en) * 2002-08-21 2004-05-04 Chicago Display Marketing Corporation Multi-position display rack
KR100675627B1 (ko) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
KR101010481B1 (ko) * 2003-12-13 2011-01-21 엘지디스플레이 주식회사 기판 거치대
TWI268265B (en) * 2004-08-13 2006-12-11 Au Optronics Corp Glass substrate cassette

Also Published As

Publication number Publication date
US20050167318A1 (en) 2005-08-04
KR100973816B1 (ko) 2010-08-03
JP2005184002A (ja) 2005-07-07
KR20050064129A (ko) 2005-06-29
CN1636840A (zh) 2005-07-13
TW200528368A (en) 2005-09-01
CN100501963C (zh) 2009-06-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees