TWI326715B - Vacuum chamber for vacuum processing apparatus and vacuum chamber dividing method - Google Patents

Description

1326,715

[Technical Field] The present invention relates to a vacuum chamber of a vacuum processing apparatus for use in a vacuum processing apparatus such as a sputtering sedimentation apparatus. [Prior Art] In recent years, by advancement in precipitation technology, it has been possible to perform highly accurate precipitation on even a large substrate in a vacuum processing apparatus such as a sputtering system in which the above sputtering system is used A metal mold for wiring is formed on a substrate made of glass or the like. Further, in recent years, as shown in Figs. 8 and 9, the multi-chamber vacuum processing apparatus for continuously performing the multi-processing by the movement only in the vacuum has long been the mainstream. The multi-chamber vacuum processing apparatus 30 shown in Fig. 8 includes six vacuum processing chambers 33a, 33b, 33c, 33d, 33e and 33f surrounding a central transport chamber 32 in which a substrate transport robot 31 is mounted. Further, the multi-chamber vacuum processing apparatus 40 shown in Fig. 9 includes three vacuum processing chambers 43a' 43b and 43c surrounding a central transport chamber 42 in which a substrate transport robot 41 is mounted. Therefore, as the size of the substrate increases (for example, the so-called sixth generation substrate has a length and width of 1800 mm x 150 mm, and the seventh generation substrate has a length and width of 2100 mm x 850 mm), the vacuum chamber for vacuum processing equipment will follow. expand. Thereby, since the machine tool used in the vacuum chamber is also larger than before, the manufacturing cost of the vacuum chamber is of course high. Therefore, a manufacturing method is proposed which can reduce manufacturing costs by 1326715

$ 6. Amendment I

L Supplement I to obtain a large vacuum chamber without expanding the machine tool by dividing a frame-shaped chamber body into a plurality of parts, and then soldering and joining these many parts (please refer to Japanese Laid-Open Patent No. H8- Case No. 64542, Patent Document 1). Incidentally, the manufacturing method disclosed in the above Patent Document 1 cannot remove each part again after manufacture because the side walls of the vacuum chamber are formed by welding parts. Therefore, the size and shape of the side walls of the vacuum chamber cannot be changed after manufacture. Further, since the top plate and the bottom plate which are attached to the lower surface of the side wall of the vacuum chamber are integrated in the above-mentioned Patent Document 1, they cannot be divided, so the size thereof is still large and heavy. Therefore, a large crane device is required to lift the top plate and the bottom plate, so the manufacturing cost becomes high. Moreover, since the size of the top and bottom plates is still large, a special large trailer is required when the vacuum chamber is to be transported to a mounting location in the state of the finished product or the product before assembly. Accordingly, it is an object of the present invention to provide a vacuum chamber for vacuum processing which can be easily changed in size and shape after manufacture. Further, it is an object of the present invention to provide a vacuum chamber for a vacuum processing apparatus which does not require a large crane apparatus and which does not require a large special trailer for transportation even if it is large in size after assembly. SUMMARY OF THE INVENTION In order to achieve the above object, the present invention is characterized in that a vacuum chamber can be freely divided into a frame shape in a vacuum chamber used in a vacuum processing apparatus. -6-1326715

Sat 4 correction _______ angular chamber body; a polygonal side frame having an opening and detachably tightly coupled to at least one side of the chamber body having an opening; each top plate being coupled to each of the tops of the chamber body And a side frame having an opening; and each bottom plate is connected to each bottom surface of the chamber body and a side frame having an opening. Further, the present invention is characterized in that a substrate transport robot is mounted in the chamber main body, and a substrate can be taken in and taken out from a plurality of vacuum processing chambers provided outside the robot. [Embodiment] Hereinafter, the present invention will be described based on the embodiments shown. (First Embodiment) Fig. 1 is a perspective view showing a vacuum chamber of a first embodiment of the present invention, and Fig. 2 is an exploded perspective view thereof. The vacuum processing chamber (hereinafter referred to as a vacuum chamber) used in the vacuum processing apparatus in this embodiment can be used, for example, as a transport chamber having a substrate transport robot. This robot is disposed in a multi-room single having six processing chambers. The center portion of the substrate type sputtering deposition device (hereinafter referred to as a deposition device). As shown in FIG. 1, the vacuum chamber 1 of the first embodiment of the present invention is connected to the two sides of the chamber main body 2 by a central main body 2 having a rectangular cross section and side frames 3a and 3b having a triangular cross section. A hexagon is formed on it. An opening 4 for taking a substrate (not shown) into and out is formed on each side of the chamber main body 2 and the side frames 3a, 3b (total six sides 1326715 ___

__MU ). The chamber body 2 and the side frames 3a, 3b are made of a metal material such as aluminum or stainless steel. The top plate 5 and the bottom plate 7 of the substrate transport robot are mounted, and the openings for connection are formed on the top and bottom surfaces of the frame-shaped rectangular chamber main body 2, respectively. Further, openings are also formed in both side faces of the chamber main body 2 which are long sides and are joined to the side frames 3a, 3b. Further, an opening for taking in and taking out the substrate (not shown) is formed on both side faces of the chamber main body 2 as a short side. Further, openings connecting the top plate 8 and the bottom plate 9 are respectively formed in the frame-like triangular side frame 3a. And the top surface of 3b and below. Further, the opening connected to the side of the chamber main body 2 is formed on both sides of the long sides of the side frames 3a and 3b. Further, an opening 4 for taking in and taking out a substrate (not shown) is formed on both side faces of the short sides of the side frames 3a and 3b. Next, a method of manufacturing the vacuum chamber 1 of the above embodiment will be explained. The bottom plates 7 are respectively connected to the bottom of the chamber body 2 by bolts (not shown) through a 〇-shaped ring (not shown), and the bottom plates 9 are respectively connected to the side frames 3a through bolts (not shown) through a 〇 ring (not shown). With the bottom of 3b. Then, the side frames 3a, 3b are connected to both side faces of the chamber body 2 by bolts 1 1 a, 1 1 b through the 0-rings 10 a, 10 b, respectively. Then, the substrate transfer robot 6 is attached to the bottom plate 7 connected to the chamber main body 2, and then the top plate 5 is joined to the upper portion of the chamber main body 2 by the bolt 11C passing through the ring-shaped ring i〇c. Then, the hexagonal vacuum chamber 1 shown in Fig. 1 is formed by respectively joining the bolts Hd'lie through the ring-shaped rings i〇d and i〇e for bonding the top plate 8 to each of the upper portions of the side frames 3a, 3b. . -8 - 1326.715 6. -I correction Year, month, and day._Supplement The vacuum chamber 1 prepared as described above is installed in a central portion of the six-precipitation apparatus to serve as a transport chamber provided with the substrate 6. Six processing chambers (loading/heating chamber, film forming chamber, substrate cooling chamber, etc.) not shown are mounted around and mounted in a vacuum via a gate valve (not shown). Therefore, in the present embodiment, the vacuum chamber is three parts by means of bolts (the side frames 3a, 3b on both sides of the chamber main body 2 on which the substrate transport robot is mounted). Therefore, even after the manufacturing chamber 1 has been mounted, the shape of the vacuum chamber (transport chamber) can be changed by the precipitation on the substrate, which can be increased or decreased by performing the triangular side frames 3a, 3b and the side frames. Exchanging, the bolt 1 1 a is unscrewed from the chamber body 2, and therefore, the elasticity of the present case can correspond to the needs of the user. Further, since the built-in substrate transport robot 6 can be regarded as a common component, the common component can also be used as another real body, and mass production can be performed in advance, and therefore, production can be reduced, and further, in this embodiment, the vacuum chamber is borrowed. The assembled parts (the chamber body 2 to which the substrate transport robot is mounted, and the above side frames 3a, 3b) are assembled. Therefore, even when a large vacuum chamber is used, the size of the chamber main body 2 and the very large 3b can be kept small. Therefore, because of the use of large-scale custom machine tools, it is easy to generate large scales, which can reduce production costs. The transport robots of the processing chambers, the front side of each of the openings 4, and the side of each of the chambers 1 are assembled individually, and the vacuum is modified according to the other shapes of the processing chamber. The main cost of the room main body 2 empty room. The individual three and the two sides of the substrate are used to make the frame 3 a, the tool does not need a vacuum chamber, because 9- 1326715 -4 repair. 5 I Μ and even when using a large substrate to manufacture a large vacuum chamber It is also possible to suppress the size of the top plate 5, wherein the top plate is attached to the divided chamber main body 2. Therefore, the weight of the top plate 5 can be reduced, and the top plate 5 can be easily fabricated from a piece of metal. Further, in this embodiment, the vacuum chamber 1 is formed by dividing into three parts (the chamber main body 2 on which the substrate transport robot is mounted, and the side frames 3a, 3b on both sides thereof). Therefore, even when a large substrate is used to manufacture a large vacuum chamber, the size of the individual parts (the chamber body 2 and the side frames 3a, 3b) can be kept small. Therefore, it is possible to easily transport the divided parts to the installation site with a normal trailer, so that it can be easily assembled at the installation site. (Second Embodiment) In the first embodiment, the vacuum chamber having the hexagonal vacuum chamber structure is fitted with the triangular side frames 3a, 3b by bolts to both sides of the rectangular chamber main body 2, and the rectangular chamber main body is made 2 made as a center. However, in this embodiment, as shown in FIG. 3, the vacuum chamber 13 having a square vacuum chamber structure is fitted with the rectangular side frames 12a, 12b by bolts to both sides of the rectangular chamber main body 2, and the rectangular chamber is made The main body 2 is made as a center. Since this vacuum chamber is the same as the vacuum chamber of the first embodiment, except that the rectangular side frames 12a, 12b are used, the overlapping description will be omitted. The square vacuum chambers 13 in this embodiment have openings on individual sides, and a total of four processing chambers can be installed around these openings (not shown -10- 1326715.

Show). (Third Embodiment) In the second embodiment, 'the vacuum chamber having the square vacuum chamber structure is to mount the rectangular side frames 12a, 12b to both sides of the rectangular chamber main body 2 by bolts' and to make the rectangular chamber main body 2 Made as a center. In this embodiment, as shown in Fig. 4, the vacuum chamber having the octagonal vacuum chamber structure is fitted with the triangular side frames 14a, 14b, 14c, 14d by bolts to both sides of the square vacuum chamber 13. The octagonal vacuum chamber 15 in this embodiment has openings on the individual sides, and a total of four processing chambers (not shown) can be installed around the openings. (Fourth Embodiment) In each of the above embodiments, the vacuum chamber having the structure of the rectangular chamber main body 2 is fitted with the triangular side frames 3a, 3b by bolts on both sides of the rectangular chamber main body 2 and made a rectangle The chamber body 2 serves as a center. However, in this embodiment, as shown in Fig. 5, the vacuum chamber 17 having the pentagonal vacuum chamber structure is such that the triangular side frame 16 is fitted to the long side of the trapezoidal chamber main body 2a by bolts, and the chamber main body 2a is centered. . The pentagonal vacuum chamber 17 in this embodiment has openings on the individual sides, and a total of five processing chambers (not shown) can be installed around the openings. -11 - 1326715 __ sa g. -4 Fix!

Θ月Θ I (Fifth Embodiment) In this embodiment, as shown in Fig. 6, the vacuum chamber 20 having a heptagonal structure is fitted with a trapezoidal side frame 18 (shape smaller than the chamber body 2b) by bolts. On one long side of the chamber main body 2b, the triangular side frame 19 is fitted to the other short side of the trapezoidal chamber main body 2b by a bolt, and the trapezoidal chamber main body 2b is centered. The heptagonal vacuum chamber 20 in this embodiment has openings on the individual sides, and a total of seven processing chambers (not shown) can be installed around the openings. (Sixth embodiment) In this embodiment, as shown in Fig. 7, the vacuum chamber 22 having an octagonal structure is fitted with the triangular side frames 21a, 21b, 21c on the individual side faces thereof by bolts, and one is made The square inner chamber body 2 c serves as a center. The octagonal vacuum chamber 22 in this embodiment has openings on individual sides. A total of eight processing chambers (not shown) can be installed around these openings. In the second to sixth embodiments shown in Figs. 3 to 7, a square or triangular side frame mounted on the side may be made in a quadrangular (rectangular, square, trapezoidal, etc.) chamber main body 2, 2a, 2b, 2c. Alternatively, in which the chamber body is mounted with a substrate transport robot, even after the vacuum chamber is installed, the replacement assembly can be performed according to the requirements of the user. Therefore, the shape of the vacuum chamber can be easily changed to an arbitrary polygonal shape. In addition, in the third embodiment shown in FIG. 4, a plurality of side frames -12- 1326715 9& 6. -i can be modified by the bolts _ supplementary brackets 12a, 12b, 14a, 14b, 14c, 14d by bolts And connected to the side of the quadrangular chamber body 2, wherein the chamber body is mounted with a substrate carrier person. Therefore, even if the substrate is large, the present invention can propose a quick response measure. As described above, the vacuum chamber of the present invention can be freely divided into a frame-shaped polygonal chamber body; a polygonal side frame having an opening and detachably tightly coupled to at least one side of the chamber body having an opening; A top plate is coupled to each of the top surfaces of the chamber body and the side frame having an opening; and each of the bottom plates is coupled to each of the bottom surfaces of the chamber body and the side frame having an opening. Therefore, even after the vacuum chamber has been assembled and installed, the shape of the vacuum chamber can be changed since the side frame can be easily replaced with other polygonal side frames according to the user's request. Further, according to the present invention, a vacuum chamber can be obtained by assembling a chamber main body, a side frame 'a top plate, and a bottom plate. Therefore, even when a large vacuum chamber is used to manufacture a large vacuum chamber, it can be kept small and light, because the chamber main body, the side frame, the top plate and the bottom plate are individually divided. Therefore, since it is known that the machine tool does not need to use a large size By making machine tools, large vacuum chambers can be easily produced, thus reducing production costs. Moreover, even when a large substrate is used to manufacture a large vacuum chamber, it can be kept small and light because the chamber body, the side frame, the top plate and the bottom plate are individually divided. Therefore, it is easy to transport these divided parts to the installation site with a normal trailer, so it can be easily assembled at the installation site. [Simple description] -13-

The vacuum chamber of the first embodiment of the present invention is shown in a vacuum diagram of the first embodiment of the present invention, and the vacuum chamber of the second embodiment of the present invention is shown in FIG. Figure 4 shows a manufacturing process of a vacuum chamber of a third embodiment of the present invention; Figure 5 shows the shape of a vacuum chamber of a fourth embodiment of the present invention; Figure 6 shows the shape of a vacuum chamber of a fifth embodiment of the present invention;

Figure 7 is a view showing the shape of a vacuum chamber of a sixth embodiment of the present invention; Figure 8 is a schematic plan view showing a multi-chamber vacuum processing apparatus in a conventional example; Figure 9 is a schematic plan view showing a plurality of conventional examples The equipment is buried in the vacuum chamber. [Description of main component symbols] 1 5 13, 15, 17, 20, 22: Vacuum chamber 2 ' 2a, 2b, 2c : Chamber main body 3a, 3b, 12a» 12b, 14a, 14b, 14c, 14d, 16, 18 , 19, 21a > 21b > 21c > 21d : side frame 5, 8 : top plate 6 : substrate transport robot 7, 9 : bottom plate - 14

Claims (1)

1326715 Patent Application No. 94 1 434 1 8 Patent Application Revision of the Chinese Patent Application Revision of the Republic of China on March 4, 1999. 1. A vacuum chamber, characterized in that: the vacuum chamber can be divided into a chamber main body and a side frame (side face frame), wherein a substrate carrying device is disposed in the chamber body; Wherein the side frame is joined to the opening of the chamber body by a bolt and a ring-shaped ring sandwiched between the side frame and the chamber body; further, the side frame is connected to the opening of the chamber body An opening other than the opening is provided in a place other than the opening. 2. The vacuum chamber of claim 1, wherein the vacuum chamber has at least one cover. 3. If you apply for the vacuum chamber in item 1 of the patent scope, Wherein the substrate transport device is disposed at a substantial central point of the chamber body. 4. The vacuum chamber of claim 2, wherein the substrate transporting device is disposed at a substantially central point of the chamber body. 5. The vacuum chamber according to any one of claims 1 to 4, wherein the bolt is inserted from the side of the chamber main body to the side frame side and fixed 1326715. 6. In the scope of claims 1 to 4 Any - , wherein the side frame is divided into a plurality of pieces. 7. A vacuum chamber dividing method, characterized in that the vacuum chamber is constituted by a chamber main face frame, wherein an opening of the substrate conveying device is difficult to be provided, and the side frame 3 is The chamber body has a small opening portion other than the main body connection; the vacuum chamber is divided by means of a bolt and a 〇-shaped ring interposed between the side surface tE bodies to join the side frame to the _. The vacuum chamber body) and the side chamber body have an opening that is connected to the main body of the chamber to be connected to the opening. -2- 1326715 七正正爹 "Poor / L ·, Mingtu said) Single 2 Jane C number is The map of the generation of the map is represented by the table: the case, the table, the generation, the lys, the second and the second, the V/IV, the second, the main body, the main body, 3 a, 3 b: the side frame 4, the opening 5, the top plate, the 6 substrate. Shipping robot 7 Base plate 8 Top plate 9 Base plate 10a '10b, 10c, lOd: O-rings 11a, lib, 11c, lid: Bolts 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: