TW200744755A - Multi-processing chamber-type vacuum processing apparatus - Google Patents

Multi-processing chamber-type vacuum processing apparatus

Info

Publication number
TW200744755A
TW200744755A TW096125750A TW96125750A TW200744755A TW 200744755 A TW200744755 A TW 200744755A TW 096125750 A TW096125750 A TW 096125750A TW 96125750 A TW96125750 A TW 96125750A TW 200744755 A TW200744755 A TW 200744755A
Authority
TW
Taiwan
Prior art keywords
main body
chamber
vacuum chamber
joined
type vacuum
Prior art date
Application number
TW096125750A
Other languages
Chinese (zh)
Other versions
TWI363658B (en
Inventor
Yasuo Hamada
Yasushi Sakimoto
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200744755A publication Critical patent/TW200744755A/en
Application granted granted Critical
Publication of TWI363658B publication Critical patent/TWI363658B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C13/00—Assembling; Repairing; Cleaning
    • G02C13/008—Devices specially adapted for cleaning contact lenses

Abstract

To enable the shape or size of a vacuum chamber to be changed even after the installation of the vacuum chamber by a user's request etc. A vacuum chamber 1 has the structure of being able to be divided freely into a rectangular chamber main body 2, triangular side frames 3a and 3b detachably and tightly joined to both side faces of the chamber main body 2 by bolting, top plates 5 and 8 joined to respective top faces of the chamber main body 2 and the side frames 3a and 3b each of which has an opening, and bottom plates 7 and 9 joined to respective bottom faces of the chamber main body 2 and the side frames 3a and 3b each of which has an opening. Hence, it is possible to easily change the shape and size of the vacuum chamber by a user's request etc.
TW096125750A 2003-05-08 2004-05-07 Multi-processing chamber -type vacuum processing apparatus TWI363658B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003129754A JP2004335743A (en) 2003-05-08 2003-05-08 Vacuum chamber for vacuum processing apparatus

Publications (2)

Publication Number Publication Date
TW200744755A true TW200744755A (en) 2007-12-16
TWI363658B TWI363658B (en) 2012-05-11

Family

ID=33505463

Family Applications (4)

Application Number Title Priority Date Filing Date
TW096125750A TWI363658B (en) 2003-05-08 2004-05-07 Multi-processing chamber -type vacuum processing apparatus
TW094143418A TWI326715B (en) 2003-05-08 2004-05-07 Vacuum chamber for vacuum processing apparatus and vacuum chamber dividing method
TW093112954A TWI281708B (en) 2003-05-08 2004-05-07 Vacuum chamber for vacuum processing appartaus
TW096125751A TWI417408B (en) 2003-05-08 2004-05-07 Vacuum processing chamber and vacuum processing chamber dividing method

Family Applications After (3)

Application Number Title Priority Date Filing Date
TW094143418A TWI326715B (en) 2003-05-08 2004-05-07 Vacuum chamber for vacuum processing apparatus and vacuum chamber dividing method
TW093112954A TWI281708B (en) 2003-05-08 2004-05-07 Vacuum chamber for vacuum processing appartaus
TW096125751A TWI417408B (en) 2003-05-08 2004-05-07 Vacuum processing chamber and vacuum processing chamber dividing method

Country Status (4)

Country Link
JP (1) JP2004335743A (en)
KR (2) KR100745366B1 (en)
CN (4) CN101359579B (en)
TW (4) TWI363658B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003245592A1 (en) 2002-06-21 2004-01-06 Applied Materials, Inc. Transfer chamber for vacuum processing system
KR100441875B1 (en) 2003-06-02 2004-07-27 주성엔지니어링(주) Separable type transfer chamber
US7784164B2 (en) 2004-06-02 2010-08-31 Applied Materials, Inc. Electronic device manufacturing chamber method
KR100803726B1 (en) * 2005-08-12 2008-02-15 주식회사 아이피에스 Structure of Transfer Module
JP4791110B2 (en) * 2005-09-02 2011-10-12 東京エレクトロン株式会社 Vacuum chamber and vacuum processing equipment
JP4355314B2 (en) * 2005-12-14 2009-10-28 東京エレクトロン株式会社 Substrate processing apparatus and lid fishing support apparatus
WO2007094617A1 (en) * 2006-02-14 2007-08-23 Brooks Automation Asia Ltd. Transfer chamber for vacuum processing apparatus of substrate
KR100981099B1 (en) 2006-04-12 2010-09-09 엘아이지에이디피 주식회사 Flat-panel Display making Apparatus
KR100790797B1 (en) * 2006-06-08 2008-01-02 주식회사 아이피에스 Vacuum Processing Apparatus
US20080025821A1 (en) * 2006-07-25 2008-01-31 Applied Materials, Inc. Octagon transfer chamber
DE102007057644A1 (en) * 2007-11-28 2009-06-04 Oerlikon Trading Ag, Trübbach Vacuum chamber on a frame basis for coating systems
KR100978851B1 (en) * 2008-03-21 2010-08-31 주식회사 아이피에스 Vacuum Processing Apparatus
DE102009007897A1 (en) * 2009-02-08 2010-08-12 Oerlikon Trading Ag, Trübbach Vacuum chamber for coating plants and method for producing a vacuum chamber for coating plants
KR101598176B1 (en) * 2010-03-30 2016-02-26 주식회사 원익아이피에스 Vacuum chamber
CN112295612A (en) * 2020-11-12 2021-02-02 之江实验室 Sectional type vacuum device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2511265A1 (en) * 1981-08-13 1983-02-18 Creusot Loire EXTENSIBLE MODULAR VACUUM CHAMBER
JPH0864542A (en) * 1994-08-25 1996-03-08 Plasma Syst:Kk Vacuum chamber for semiconductor processor and manufacture thereof
JP3723003B2 (en) * 1998-12-18 2005-12-07 三菱重工業株式会社 Vacuum processing system
JP4408520B2 (en) * 2000-03-15 2010-02-03 株式会社アルバック Vacuum processing equipment
JP4253107B2 (en) * 2000-08-24 2009-04-08 キヤノンアネルバ株式会社 Substrate processing apparatus and expansion method thereof
JP4821074B2 (en) * 2001-08-31 2011-11-24 東京エレクトロン株式会社 Processing system
JP2007294997A (en) * 2007-07-06 2007-11-08 Ulvac Japan Ltd Vacuum chamber
JP4843572B2 (en) * 2007-07-06 2011-12-21 株式会社アルバック Multi-chamber type vacuum processing equipment

Also Published As

Publication number Publication date
KR20050113574A (en) 2005-12-02
CN100459048C (en) 2009-02-04
TWI326715B (en) 2010-07-01
TWI417408B (en) 2013-12-01
CN101419902A (en) 2009-04-29
KR100745366B1 (en) 2007-08-02
CN101419902B (en) 2011-04-20
TW200613576A (en) 2006-05-01
KR100736243B1 (en) 2007-07-06
CN1776008A (en) 2006-05-24
TWI363658B (en) 2012-05-11
TW200745364A (en) 2007-12-16
TWI281708B (en) 2007-05-21
CN1776008B (en) 2010-05-05
TW200428495A (en) 2004-12-16
CN101359579A (en) 2009-02-04
CN101359579B (en) 2010-06-23
JP2004335743A (en) 2004-11-25
KR20040090496A (en) 2004-10-25
CN1574232A (en) 2005-02-02

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