200428495 (1) 玖、發明說明 【發明所屬之技術領域】 本發明係關於一種真空處理設備之真空室 濺射沉澱設備的真空處理設備。 【先前技術】 近年來，藉由在沉澱技術上的進步，已經 射系統的真空處理設備中，在即使很大的基底 精確的沉澱，其中上述濺射系統是用以在玻璃 基底上形成佈線用的金屬模。此外，近年來， 所示，僅藉由在真空中的移動，用以連續執行 多室真空處理設備早已成爲主流。 圖8所示的多室真空處理設備3 0包含六 室 33a，33b，33c，33d，33e 及 33f，係圍繞 送室32，在此運送室內安裝有一基底運送機老 外，圖9所示的多室真空處理設備40包含三 室43a，43b及43c，係圍繞著一中央運送室 送室內安裝有一基底運送機器人41。 因此，隨著基底的尺寸加大（例如所謂第 長度與寬度爲 I800 mmxl5〇〇 mm，第七代基 寬度爲2100 mmx 1 8 5 0 mm)真空處理設備用 會隨之擴大。藉此’由於真空室所用的機器工 從前還要大，所以真空室的製造成本當然會變; 因此，提出了 一種製造方法，可以藉由降 ，係用於如 可以在如濺 上執行高度 等製成的一 如圖8及9 多重處理的 個真空處理 著一中央運 春人 3 1。此 個真空處理 42，在此運 六代基底的 底的長度與 的真空室也 具也變得比 奇。 低製造成本 -5- (2) (2)200428495 而獲得大型真空室，卻不需要擴大機器工具，此乃藉由將 一框狀內室主體分割成多數零件，然後將這些多數零件予 以焊接與連接（請參閱日本先行公開專利第H 8 - 64 5 42號 案一專利文件一）。 順便一提，上述專利文件一所揭示的製造方法在製造 之後並無法再次移除每個零件，這是因爲真空室的側壁均 藉由焊接零件而成。因此，在製造之後，無法改變真空室 的側壁之尺寸與形狀。 此外，由於安裝到真空室的側壁之上下表面的頂板與 底板在上述專利文件一中是一體的，無法分割，所以其尺 寸仍舊大而沉重。 因此，需要一大型吊車設備來吊起頂板與底板，因此 製造成本也會變得很高。而且，由於頂板與底板的尺寸仍 舊很大，所以當欲以成品或組裝前的產品之狀態將真空室 運送至一安裝地點時，則需要特殊的大型拖車。 因此，本發明的目的是要提供一種真空處理用的真空 室，在製造之後，其尺寸與形狀仍然可以輕易改變。 此外，本發明的目的是要提供一種真空處理設備所用 的真空室，不需要大型吊車設備，即使在組裝後的尺寸很 大，但是在運送時仍不需要大型特殊拖車。 【發明內容】 爲了達成上述目的，本發明的特徵在於：在真空處理 設備所用之真空室內，真空室可以自由地分割成一框狀多 -6- (3) (3)200428495 角形內室主體；一多角形側框架，其具有一開口且可拆卸 地緊密連結至具開口的內室主體之至少一側上；每一頂板 ’係連結到內室主體的每一頂面及具有一開口的側框架上 ;及每一底板，係連接到內室主體的每一底面及具有一開 口的側框架上。 此外，本發明的特徵在於內室主體中安裝有一基底運 送機器人，可將一基底從設置於機器人外部的多數真空處 理室中拿進拿出。 【實施方式】 以下將根據顯示的實施例來說明本發明。 (第一實施例） 圖1是一立體圖’顯不本發明第一實施例的真空室， 而圖2是其分解立體圖。在此實施例中真空處理設備所用 之真空處理室（以下稱爲真空室），例如，可作爲一運送 室’其中具有一基底運送機器人’此機器人係設置在具有 六個處理室的多室單基板型濺射沉澱設備（以下稱爲沉澱 設備）之中心部位內。 如圖1所示’本發明第一實施例的真空室1藉由連結 一剖面爲矩形的中央內室主體2及剖面爲三角形的側框架 3a，3b，在內室主體2的兩邊上形成六角形。用以將一基 底（未顯示）拿進拿出之開口 4是形成於內室主體2與側 框架3 a，3 b的每一側面上（總共六面）。內室主體2與 (4) (4)200428495 側框架3 a，3 b是由鋁與不銹鋼等金屬材質製成。 安裝有基底運送機器人的頂板5與底板7，其中連接 的開口是分別形成於框架狀矩形內室主體2之頂面與底面 上。此外，也在作爲長邊且連結到側框架3 a，3 b上的內 室主體2之兩側面內形成開口。而且，用以將基底（未顯 示）拿進拿出的開口會形成在作爲短邊的內室主體2之兩 側面上。 此外，頂板8與底板9相連的開口分別形成於框架狀 三角側框架的頂面與下面中。而且，連接到內室主體2的 側面之開口是形成於作爲長邊的側框架3 a與3 b之兩側邊 上。而且，用以將基底（未顯示）拿進拿出的開口會形成 在作爲短邊的內室主體2之兩側面上。， 其次，將說明上述實施例的真空室內1之製造方法。 底板7分別以螺栓（未顯示）透過〇環（未顯示） 而連接到內室主體2的底部，且底板9分別以螺栓（未顯 示）透過Ο環（未顯示）而連接到側框架3 a與3 b的底部 。然後，這些側框架3 a，3 b分別以螺栓1 1 a，1 1 b透過〇 環1 0a，1 Ob而連接到內室主體2的兩側面上。 然後，基底運送機器人6是被安裝於連接至內室主體 2的底板7上，之後頂板5是藉由螺栓1 1 c透過〇環1 〇 c 而連接到內室主體2的上部。然後，圖1所示的六角真空 室1是分別藉由螺栓Π d，1 1 e透過0環1 〇 d，1 0 e而連接 到側框架3 a，3 b的每一上部。 根據上述製成的真空室1是被安裝於具六個處理室的 -8- (5) (5)200428495 沉澱設備之中心部位內，以便作爲設置有基底運送機器人 6的一運送室。未顯示的六個處理室（載入/載出室、預 熱室、膜形成室、基底冷卻室等）則是安裝於每個開口 4 的周圍，且經由閘閥（未顯示）而安裝於真空室1的側面 中 〇 因此，在本實施例中，真空室是藉螺栓來組裝個別的 三個零件（安裝有基底運送機器人的內室主體2，以及在 其兩側上的側框架3 a，3 b )。因此，即使製造出來的真 空室1已經安裝好了之後，當基底上的沉澱作用產生修改 時，仍可以改變真空室（運送室）的形狀，可根據處理室 的增加或減少，藉由將三角形側框架3 a，3 b與其他形狀 的側框架執行交換，從內室主體2旋開螺栓1 1 a，1 1 b而 得。因此，本案的彈性可對應於使用者的需求。 此外，由於能將內裝有基底運送機器人6的內室主體 2當成共同零件，此共同零件也可以作爲其他真空室的內 室主體，可事先執行大量製造，因此，可減少生產成本。 此外，在此實施例中，真空室是藉由組裝個別的三個 零件（安裝有基底運送機器人的內室主體2，以及在其兩 側上的側框架 3 a，3 b )。因此，即使當使用大型基底來 製造大型真空室時，也仍然可以使內室主體2與側框架 3 a，3 b的尺寸保持得很小。因此，由於藉習知機器工具 不需要使用大型定製機器工具，就能輕易產生大型真空室 ，因此能減少生產成本。 而且，即使當使用大型基底來製造大型真空室時，也 -9- (6) (6)200428495 可以抑制頂板5的尺寸’其中頂板係連接到分割好的內室 主體2上。因此，可以減輕頂板5的重量，也可以輕易從 一塊金屬來製作頂板5。 此外，在此實施例中，真空室1是以分割成三個零件 (安裝有基底運送機器人的內室主體2，以及在其兩側上 的側框架3 a，3 b )而製成的。因此，即使當使用大型基 底來製造大型真空室時，也仍然可以使個別零件（內室主 體2與側框架3 a，3 b )的尺寸保持得很小。因此，可以 一正常拖車輕易運送這些分割好的零件到安裝場所，所以 可輕易在安裝場所予以組裝。 (第二實施例） 在第一實施例中，具有六角形真空室結構之真空室是 藉由螺栓將三角形側框架3 a，3 b裝配於連接至矩形內室 主體2的兩邊上，且使矩形內室主體2作爲中心而製成的 。然而，在此實施例中，如圖3所示，具有正方形真空室 結構之真空室1 3是藉由螺栓將矩形側框架1 2a，1 2b裝配 於連接至矩形內室主體2的兩邊上，且使矩形內室主體2 作爲中心而製成的。由於此真空室與第一實施例的真空室 是相同的，除了使用矩形側框架12a，12b而已，因此遂 省略重複的說明。 在此實施例中的正方形真空室1 3在個別側面上均具 有開口，在這些開口周圍總共可以安裝四個處理室（未顯 示）。 -10- (7) (7)200428495 (第三實施例） 在第二實施例中，具有正方形真空室結構之真空室是 藉由螺栓將矩形側框架1 2 a，12 b裝配於連接至矩形內室 主體2的兩邊上，且使矩形內室主體2作爲中心而製成的 。在此實施例中，如圖4所示，具有八角形真空室結構之 真空室是藉由螺栓將三角形側框架1 4 a，1 4 b，1 4 c，1 4 d 裝配於連接至正方形真空室1 3的兩邊上。 在此實施例中的八角形真空室1 5在個別側面上均具 有開口，在這些開口周圍總共可以安裝四個處理室（未顯 示）。 (第四實施例） 在上述的每個實施例中，具有矩形內室主體2結構之 真空室是藉由螺栓將三角形側框架3 a，3 b裝配於連接至 矩形內室主體2的兩邊上，且使矩形內室主體2作爲中心 。但是，在此實施例中，如圖5所示，具有五角形真空室 結構之真空室1 7是藉由螺栓將三角形側框架1 6裝配於梯 形內室主體2 a的長邊上，且使內室主體2 a作爲中心。 在此實施例中的五角形真空室1 7在個別側面上均具 有開口，在這些開口周圍總共可以安裝五個處理室（未顯 示）。 (第五實施例） -11 - (8) (8)200428495 在此實施例中，如圖6所示，具有七邊形結構之真空 室2 0是藉由螺栓將梯形側框架丨8 (形狀小於內室主體2 b )裝配於內室主體2 b的一長邊上，且藉由螺栓將三角形 側框架1 9裝配於梯形內室主體2 b的另一短邊上，使梯形 內室主體2b作爲中心。 在此貫施例中的七邊形真空室2 〇在個別側面上均具 有開口，在這些開口周圍總共可以安裝七個處理室（未顯 示）。 (第六實施例） 在此實施例中，如圖7所示，具有八邊形結構的真空 室22是藉由螺栓將三角形側框架2丨a，2〗b，2 1 c裝配於 其個別側面上’且使一正方形內室住體2c作爲中心。 在此實施例中的八邊形真空室2 2在個別側面上均具 有開口’在這些開口周圍總共可以安裝八個處理室（未顯 示）。 在圖3到7所示的第二至第六實施例中，可以將安裝 在側面上一正方形或三角形側框架以〜四邊形（矩形、正 方形、梯形等）內室主體2，2a，2b，2c進行替換，宜中 內室主體安裝有一基底運送機器人，即使在安裝了真空室 之後’仍可根據使用者的要求而進行替換組裝。因此，可 以輕易將真空室的形狀改變成任意多角形。 此外，在圖4所示的第三實施例中，可以將許多側框 架12a’ 12b’】4a’ 14b’ 14c’ 14d藉由螺栓而連接到四 (9) (9)200428495 邊形內室主體2的側面上，其中內室主體安裝有基底運送 器人。因此，即使基底很大，本發明亦能提出快速對應措 施。 如上所述，本發明的真空室可以自由地分割成一框狀 多角形內室主體；一多角形側框架，其具有一開口且可拆 卸地緊密連結至具開口的內室主體之至少一側上；每一頂 板，係連結到內室主體的每一頂面及具有一開口的側框架 上；及每一底板，係連接到內室主體的每一底面及具有一 開口的側框架上。因此，即使在真空室已經組裝與安裝完 成織後，由於可根據使用者的要求輕易地將側框架替換成 其他多角形側框架，所以能改變真空室的形狀。 此外，根據本發明，可以藉由組裝一內室主體、一側 框架、一頂板及一底板而獲得一真空室。因此，即使當使 用大型基底製造大型真空室時，仍可以保持小巧質輕，這 是因爲內室主體、側框架、頂板與底板是個別分割的。因 此，由於藉習知機器工具不需要使用大型定製機器工具， 就能輕易產生大型真空室，因此能減少生產成本。 而且，即使當使用大型基底來製造大型真空室時，仍 可以保持小巧質輕，這是因爲內室主體、側框架、頂板與 底板是個別分割的。因此，可以一普通拖車輕易運送這些 分割好的零件到安裝場所，所以可輕易在安裝場所組裝起 來。 [圖式簡單說明】 -13- (10) 200428495 圖1是一立體圖，顯示本發明 圖2是一槪略立體圖，顯不 室； 圖3顯示本發明第二實施例的 圖4顯示本發明第三實施例的 圖5顯示本發明第四實施例的 圖6顯示本發明第五實施例的 圖7顯示本發明第六實施例的 圖8是一槪略平面圖，顯示習 理設備； 圖9是一槪略平面圖，顯示習 理設備。 元件符號對照表 第一實施例的真空室； 發明第一實施例的真空 真空室之製造程序； 真空室之製造程序； 真空室之形狀； 真空室之形狀； 真空室之形狀； φ 知範例中的多室真空處 知範例中的多室真空處 1，1 3， 15，17 ，20 ， 22 真空 2，2a， 2b，2c 內室主體 3a，3b ，1 2 a， 12b ， 14a ， 14b，1 ^ 21a， 21 b，2 1c ，2 1 d 側框 5，8 頂板 6 基底運送機器人 7，9 底板 室 c， 14d， 16， 18， 19， 架 -14-200428495 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to a vacuum processing equipment for a vacuum chamber, a vacuum chamber, and a sputtering deposition equipment. [Previous technology] In recent years, with the advancement in precipitation technology, in the vacuum processing equipment of the injection system, accurate precipitation can be achieved even on a large substrate. The above-mentioned sputtering system is used to form wiring on a glass substrate. Metal mold. In addition, in recent years, as shown, only by moving in a vacuum, a multi-chamber vacuum processing apparatus for continuous execution has long been mainstream. The multi-chamber vacuum processing equipment 30 shown in FIG. 8 includes six chambers 33a, 33b, 33c, 33d, 33e, and 33f, which surround the conveying chamber 32. A substrate conveyer foreigner is installed in the conveying chamber. The chamber vacuum processing equipment 40 includes three chambers 43a, 43b, and 43c. A substrate transport robot 41 is installed around a central transport chamber transport chamber. Therefore, as the size of the substrate increases (for example, the so-called first length and width is I800 mm × 1500 mm, and the seventh-generation base width is 2100 mm × 1 850 mm), the use of vacuum processing equipment will increase. By this, 'the vacuum chamber's manufacturing cost will of course change because the machinery used in the vacuum chamber was larger in the past; therefore, a manufacturing method has been proposed, which can be used to lower the height of the spray, etc. A multi-processed vacuum as shown in Figures 8 and 9 was processed for a central Yunchun person 31. The vacuum processing 42, the length of the bottom of the sixth generation substrate and the vacuum chamber also become bizarre. Low manufacturing cost-5- (2) (2) 200428495 To obtain a large vacuum chamber without expanding the machine tools, this is achieved by dividing a frame-shaped inner chamber body into a plurality of parts, and then welding and welding these majority parts. Connection (please refer to Japanese Patent Publication No. H 8-64 5 42, Patent Document 1). Incidentally, the manufacturing method disclosed in the above-mentioned patent document 1 cannot remove each part again after manufacturing, because the side wall of the vacuum chamber is made by welding the parts. Therefore, the size and shape of the side wall of the vacuum chamber cannot be changed after manufacturing. In addition, since the top plate and the bottom plate installed on the upper and lower surfaces of the side walls of the vacuum chamber are integrated in the above-mentioned Patent Document 1, and cannot be separated, their dimensions are still large and heavy. Therefore, a large crane equipment is needed to lift the top and bottom plates, so the manufacturing cost also becomes high. In addition, since the size of the top plate and the bottom plate is still large, when a vacuum chamber is to be transported to an installation site in the state of a finished product or a product before assembly, a special large trailer is required. Therefore, an object of the present invention is to provide a vacuum chamber for vacuum processing, whose dimensions and shapes can be easily changed after manufacturing. In addition, it is an object of the present invention to provide a vacuum chamber for a vacuum processing equipment, which does not require large crane equipment, and even if the size after assembly is large, large special trailers are not required for transportation. [Summary of the Invention] In order to achieve the above object, the present invention is characterized in that: in the vacuum chamber used by the vacuum processing equipment, the vacuum chamber can be freely divided into a frame-shaped multi--6- (3) (3) 200428495 angled inner chamber body; A polygonal side frame having an opening and detachably tightly connected to at least one side of the inner chamber main body with an opening; each top plate is connected to each top surface of the inner chamber main body and a side frame having an opening And each bottom plate is connected to each bottom surface of the inner chamber body and a side frame having an opening. In addition, the present invention is characterized in that a substrate transport robot is installed in the main body of the inner chamber, and a substrate can be taken in and out of most vacuum processing chambers provided outside the robot. [Embodiment] The present invention will be described below based on the embodiment shown. (First Embodiment) Fig. 1 is a perspective view showing a vacuum chamber according to a first embodiment of the present invention, and Fig. 2 is an exploded perspective view thereof. The vacuum processing chamber (hereinafter referred to as a vacuum chamber) used by the vacuum processing equipment in this embodiment can be used as a transport chamber 'with a substrate transport robot therein'. This robot is provided in a multi-chamber unit with six processing chambers. In the center of a substrate-type sputtering deposition equipment (hereinafter referred to as a precipitation equipment). As shown in FIG. 1 ', the vacuum chamber 1 of the first embodiment of the present invention is formed by connecting a central inner chamber body 2 having a rectangular cross section and side frames 3a and 3b having a triangular cross section. Six sides of the inner chamber body 2 are formed. Angular. An opening 4 for taking in and out a substrate (not shown) is formed on each side of the inner chamber body 2 and the side frames 3a, 3b (a total of six sides). The inner chamber body 2 and (4) (4) 200428495 side frames 3a, 3b are made of metal materials such as aluminum and stainless steel. The top plate 5 and the bottom plate 7 on which the substrate transport robot is mounted, and the openings connected to them are formed on the top surface and the bottom surface of the frame-shaped rectangular inner chamber body 2, respectively. In addition, openings are formed in both sides of the inner chamber body 2 which is a long side and connected to the side frames 3a, 3b. Moreover, openings for taking in and out a substrate (not shown) are formed on both sides of the inner chamber body 2 as short sides. Further, openings connecting the top plate 8 and the bottom plate 9 are formed in the top surface and the bottom surface of the frame-shaped triangular side frame, respectively. Further, openings connected to the side surfaces of the inner chamber body 2 are formed on both sides of the side frames 3a and 3b which are long sides. Moreover, openings for taking in and out a substrate (not shown) are formed on both sides of the inner chamber body 2 as short sides. Next, the manufacturing method of the vacuum chamber 1 of the above embodiment will be described. The bottom plate 7 is connected to the bottom of the inner chamber body 2 with bolts (not shown) through the 0 ring (not shown), and the bottom plate 9 is connected to the side frame 3 a with bolts (not shown) through the 0 ring (not shown). With 3 b at the bottom. Then, these side frames 3 a and 3 b are connected to both sides of the inner chamber body 2 through bolts 1 1 a and 1 1 b through the 0 rings 10 a and 1 Ob, respectively. Then, the substrate transfer robot 6 is mounted on the bottom plate 7 connected to the inner chamber body 2, and then the top plate 5 is connected to the upper portion of the inner chamber body 2 by the bolts 1 1 c through the 0 ring 1 0 c. Then, the hexagonal vacuum chamber 1 shown in Fig. 1 is connected to each of the upper portions of the side frames 3a, 3b by bolts Π d, 1 1 e through 0 rings 10 d, 1 0 e, respectively. The vacuum chamber 1 manufactured as described above is installed in the center of the precipitator with six processing chambers (5) (5) 200428495 so as to serve as a transport chamber provided with the substrate transport robot 6. Six processing chambers (loading / unloading chamber, preheating chamber, film forming chamber, substrate cooling chamber, etc.) not shown are installed around each opening 4 and installed in a vacuum through a gate valve (not shown) In the side of the chamber 1, therefore, in this embodiment, the vacuum chamber is assembled with three individual parts by bolts (the inner chamber body 2 on which the substrate transport robot is mounted, and the side frames 3a on both sides thereof, 3 b). Therefore, even after the manufactured vacuum chamber 1 has been installed, when the precipitation on the substrate is modified, the shape of the vacuum chamber (transport chamber) can still be changed, and the triangle can be changed according to the increase or decrease of the processing chamber. The side frames 3 a and 3 b are exchanged with side frames of other shapes and are obtained by unscrewing the bolts 1 1 a and 1 1 b from the inner chamber body 2. Therefore, the flexibility of the case can correspond to the needs of users. In addition, since the inner chamber main body 2 containing the substrate transport robot 6 can be regarded as a common part, this common part can also be used as the inner chamber main body of other vacuum chambers, and mass production can be performed in advance, thereby reducing production costs. Further, in this embodiment, the vacuum chamber is constructed by assembling individual three parts (the inner chamber body 2 on which the substrate transport robot is mounted, and the side frames 3a, 3b on both sides thereof). Therefore, even when a large vacuum chamber is manufactured using a large substrate, the dimensions of the inner chamber body 2 and the side frames 3a, 3b can be kept small. Therefore, since conventional machine tools can be used to produce large vacuum chambers without using large custom machine tools, production costs can be reduced. Moreover, even when a large-sized substrate is used to manufacture a large-sized vacuum chamber, the size of the top plate 5 can be suppressed ', wherein the top plate is connected to the divided inner chamber body 2. Therefore, the weight of the top plate 5 can be reduced, and the top plate 5 can be easily manufactured from a piece of metal. Further, in this embodiment, the vacuum chamber 1 is made by being divided into three parts (the inner chamber main body 2 on which the substrate transport robot is mounted, and side frames 3a, 3b on both sides thereof). Therefore, even when a large vacuum chamber is manufactured using a large substrate, the dimensions of the individual parts (the inner chamber body 2 and the side frames 3a, 3b) can be kept small. Therefore, these divided parts can be easily transported to the installation site by a normal trailer, so they can be easily assembled at the installation site. (Second Embodiment) In the first embodiment, a vacuum chamber having a hexagonal vacuum chamber structure is equipped with triangular side frames 3 a, 3 b on both sides connected to a rectangular inner chamber body 2 by bolts, and The rectangular inner chamber body 2 is made as a center. However, in this embodiment, as shown in FIG. 3, the vacuum chamber 13 having a square vacuum chamber structure is assembled with rectangular side frames 12a, 12b by bolts on both sides connected to the rectangular inner chamber body 2, The rectangular inner chamber main body 2 is made as a center. Since this vacuum chamber is the same as the vacuum chamber of the first embodiment, except that rectangular side frames 12a, 12b are used, the repeated description is omitted. The square vacuum chambers 13 in this embodiment each have openings on individual sides, and a total of four processing chambers (not shown) can be installed around these openings. -10- (7) (7) 200428495 (Third Embodiment) In the second embodiment, a vacuum chamber having a square vacuum chamber structure is a rectangular side frame 1 2 a, 12 b assembled to a rectangle by bolts. The inner chamber main body 2 is formed on both sides with a rectangular inner chamber main body 2 as a center. In this embodiment, as shown in FIG. 4, a vacuum chamber having an octagonal vacuum chamber structure is assembled with a triangular side frame 1 4 a, 1 4 b, 1 4 c, 1 4 d by bolts and connected to a square vacuum. Room 1 3 on both sides. The octagonal vacuum chamber 15 in this embodiment has openings on individual sides, and a total of four processing chambers (not shown) can be installed around these openings. (Fourth embodiment) In each of the above embodiments, the vacuum chamber having the structure of the rectangular inner chamber body 2 is a triangular side frame 3 a, 3 b assembled to both sides connected to the rectangular inner chamber body 2 by bolts. With the rectangular inner chamber body 2 as the center. However, in this embodiment, as shown in FIG. 5, the vacuum chamber 17 having a pentagonal vacuum chamber structure is a triangular side frame 16 fitted to the long side of the trapezoidal inner chamber body 2a by bolts, and the inner side The chamber main body 2a serves as the center. The pentagonal vacuum chamber 17 in this embodiment has openings on individual sides, and a total of five processing chambers (not shown) can be installed around these openings. (Fifth embodiment) -11-(8) (8) 200428495 In this embodiment, as shown in FIG. 6, the vacuum chamber 20 having a heptagonal structure is a trapezoidal side frame by a bolt 8 (shape Smaller than the inner chamber body 2 b) is assembled on one long side of the inner chamber body 2 b, and the triangular side frame 19 is assembled on the other short side of the trapezoidal inner chamber body 2 b by bolts, so that the trapezoidal inner chamber body 2b as the center. The heptagonal vacuum chamber 20 in this embodiment has openings on individual sides, and a total of seven processing chambers can be installed around these openings (not shown). (Sixth Embodiment) In this embodiment, as shown in FIG. 7, the vacuum chamber 22 having an octagonal structure is assembled with triangular side frames 2 丨 a, 2〗 b, 2 1c by individual bolts. On the side 'and a square inner chamber dwelling 2c is used as the center. The octagonal vacuum chamber 22 in this embodiment has openings on individual sides', and a total of eight processing chambers (not shown) can be installed around these openings. In the second to sixth embodiments shown in Figs. 3 to 7, a square or triangular side frame mounted on the side can be made into a quadrilateral (rectangular, square, trapezoidal, etc.) inner chamber body 2, 2a, 2b, 2c For replacement, a substrate transport robot is installed in the main body of Yizhong. Even after the vacuum chamber is installed, it can still be replaced and assembled according to the user's requirements. Therefore, the shape of the vacuum chamber can be easily changed to an arbitrary polygon. In addition, in the third embodiment shown in FIG. 4, many side frames 12a '12b'] 4a '14b' 14c '14d can be connected to four (9) (9) 200428495 side-shaped inner chamber bodies by bolts. On the side of 2, a base carrier person is installed in the main body of the inner chamber. Therefore, even if the substrate is large, the present invention can propose a quick response. As described above, the vacuum chamber of the present invention can be freely divided into a frame-shaped polygonal inner chamber body; a polygonal side frame having an opening and detachably closely connected to at least one side of the inner chamber body having an opening Each top plate is connected to each top surface of the inner chamber body and a side frame having an opening; and each bottom plate is connected to each bottom surface of the inner chamber body and a side frame having an opening. Therefore, even after the vacuum chamber has been assembled and installed and knitted, the shape of the vacuum chamber can be changed because the side frame can be easily replaced with another polygonal side frame according to the user's requirements. In addition, according to the present invention, a vacuum chamber can be obtained by assembling an inner chamber body, a side frame, a top plate, and a bottom plate. Therefore, even when a large vacuum chamber is manufactured using a large substrate, it can be kept small and light because the inner chamber main body, side frame, top plate and bottom plate are separately divided. Therefore, since conventional machine tools do not require the use of large custom machine tools, large vacuum chambers can be easily generated, thereby reducing production costs. Furthermore, even when a large vacuum chamber is manufactured using a large substrate, it can be kept small and light, because the inner chamber body, side frame, top plate and bottom plate are separately divided. Therefore, these divided parts can be easily transported to the installation site by an ordinary trailer, so they can be easily assembled at the installation site. [Brief description of the drawings] -13- (10) 200428495 Fig. 1 is a perspective view showing the present invention. Fig. 2 is a schematic perspective view showing a room. Fig. 3 shows a second embodiment of the present invention. Fig. 4 shows a second embodiment of the present invention. FIG. 5 of the three embodiments shows a fourth embodiment of the present invention. FIG. 6 shows a fifth embodiment of the present invention. FIG. 7 shows a sixth embodiment of the present invention. FIG. 8 is a schematic plan view showing a conventional device. A brief plan view shows the conventional equipment. Component symbol comparison table vacuum chamber of the first embodiment; manufacturing process of the vacuum chamber of the first embodiment of the invention; manufacturing process of the vacuum chamber; shape of the vacuum chamber; shape of the vacuum chamber; shape of the vacuum chamber; In the example of multi-chamber vacuum processing, the multi-chamber vacuum at 1, 1, 3, 15, 17, 20, 22 vacuum 2, 2a, 2b, 2c inner chamber body 3a, 3b, 1 2a, 12b, 14a, 14b, 1 ^ 21a, 21 b, 2 1c, 2 1 d Side frame 5, 8 Top plate 6 Base conveying robot 7, 9 Floor room c, 14d, 16, 18, 19, shelf -14-