TWM640890U - Substrate Alignment Device - Google Patents

Abstract

A substrate aligning device includes a carrying unit, a first aligning unit and a second aligning unit. The carrying unit includes a carrier, and a square area is set on the carrier, and a centerline passing through the center of the square area and a diagonal line passing through two diagonal corners of the square area are defined. The first alignment unit is arranged on the platform and includes two first abutting modules. The first abutting modules are arranged at intervals along the center line, and can be driven relatively close along the center line so as to align a circular substrate or move away relatively. The second alignment unit is arranged on the platform and includes two second abutting modules. The second abutting modules are arranged at intervals along the diagonal, and can be driven relatively close to each other along the diagonal to align or relatively separate a square substrate.

Description

Substrate Alignment Device

The present invention relates to a substrate aligning device, in particular to a substrate aligning device which can be used together for circular substrates and square substrates.

In the semiconductor manufacturing process, steps such as lithography, etching, deposition, and planarization are included. In each step, the substrate needs to be aligned, so that the predetermined processing can be performed on the corresponding position on the substrate in each procedure.

With the development of substrate manufacturing technology, there are currently circular substrates and square substrates. An existing process equipment includes multiple working chambers, some of which are suitable for square substrates and others for circular substrates. To transport square substrates into the working chambers suitable for square substrates, use square The alignment device of the substrate, and if the circular substrate is to be transported into the working chamber suitable for the circular substrate, the alignment device suitable for the circular substrate must be used. In other words, two kinds of alignment devices need to be provided in the process equipment, so as to be suitable for square substrates and circular substrates respectively.

Therefore, one purpose of the present invention is to provide a substrate alignment device applicable to both circular substrates and square substrates.

Therefore, in some embodiments, the substrate alignment device of the present invention is suitable for carrying a circular substrate or a square substrate to align the circular substrate or the square substrate. The substrate alignment device includes a carrying unit, a A first alignment unit and a second alignment unit. The bearing unit includes a platform, a square area is set on the platform, and a centerline perpendicular to a pair of first sides of the square area and passing through the center of the square area is defined, and two sides passing through the square area are defined. Diagonal to Diagonal. The first sides are parallel to a conveying direction for conveying the substrate into the square area. The first alignment unit is arranged on the platform and includes two first abutting modules. The first abutting modules are spaced apart from each other along the center line, and can be driven relatively close to or relatively far away from each other along the center line, and are used for aligning the circular substrate when relatively close. The second alignment unit is arranged on the platform and includes two second abutting modules. The second abutting modules are spaced apart from each other along the diagonal, and can be driven relatively close to or relatively far away from each other along the diagonal, and used for aligning the square substrate when relatively close.

In some implementation aspects, the carrying unit further includes a plurality of supporting columns arranged on the stage and located in the square area for jointly supporting the circular substrate or the square substrate.

In some implementations, each first abutment module has a first linkage part and two first abutment parts, and the first linkage part is used to connect with a driving mechanism to be driven to move along the centerline, The first abutting portions are connected to the first interlocking portion, are arranged parallel to the conveying direction, and are respectively located on two sides of the centerline, for abutting against the periphery of the circular substrate.

In some implementations, each second abutment module has a second linkage part and two second abutment parts, and the second linkage part is used to connect with a driving mechanism to be driven to move along the diagonal , the second abutting portions are connected to the second linkage portion and are respectively located on both sides of the diagonal line for respectively abutting against adjacent two sides of the square substrate.

The new model has the following effects: the first alignment unit can align the circular substrate and the second alignment unit can align the square substrate, and the user can choose to use the first alignment according to the use requirements unit or the second alignment unit to align the circular substrate or the square substrate. It can not only increase the flexibility of operation, but also reduce the cost of equipment compared with the alignment devices using circular substrates and square substrates respectively.

1 and 2, one embodiment of the new substrate alignment device is suitable for carrying a circular substrate S1 (see FIG. 3) or a square substrate S2 (see FIG. 4) so that the circular substrate S1 or the The square substrate S2 is aligned, and the substrate alignment device includes a carrying unit 1 , a first alignment unit 2 and a second alignment unit 3 .

The carrying unit 1 includes a platform 11 and a plurality of support columns 12 . Set a square area A on the stage 11, and define a pair of first sides A1 perpendicular to the square area A and a centerline L1 passing through the center of the square area A, and two pairs of sides passing through the square area A. Diagonal line L2 of the corner. The first sides A1 are parallel to a conveying direction D for conveying the substrate into the square area A. The supporting pillars 12 are arranged on the stage 11 and located in the square area A for supporting the circular substrate S1 or the square substrate S2 together.

The first alignment unit 2 is arranged on the stage 11 and includes two first abutting modules 21, the first abutting modules 21 are spaced apart from each other along the center line L1, and can be driven along the center The line L1 is relatively close (as shown in FIG. 3 ) or relatively far away (as shown in FIG. 4 ), and is used for aligning the circular substrate S1 when relatively close. Each first abutting module 21 has a first interlocking part 211 and two first abutting parts 212, and the first interlocking part 211 is used to connect a first driving mechanism 22, such as a cylinder, to be driven along the Centerline L1 moves. The first abutting portions 212 are connected to the first interlocking portion 211 and are arranged parallel to the conveying direction D and respectively located on both sides of the centerline L1 for abutting against the periphery of the circular substrate S1 . Specifically, each first abutting portion 212 is cylindrical, and the first abutting portions 212 of the first abutting modules 21 are respectively adjacent to the first sides A1.

As shown in Figure 4, when the first abutting modules 21 are relatively far away, the distance between the first abutting parts 212 on the left side and the first abutting parts 212 on the right side is far, and The distance is greater than the outer diameter of the circular substrate S1 and the side length of the square substrate S2 for a robot arm F to place the circular substrate S1 or the square substrate S2 into the square area A. As shown in FIG. 3, when the robot arm F is placed between the first abutting parts 212 on the circular substrate S1, the first abutting modules 21 are driven relatively close to the The first abutting portion 212 abuts against the peripheral edge of the circular substrate S1 to align the circular substrate S1.

In this embodiment, the first abutting modules 21 are only shifted in two positions, one of which is relatively close to the holding of the first abutting parts 212 against the periphery of the circular substrate S1 The other position is an open position that is relatively far away so that the first abutting portions 212 will not contact the circular substrate S1 or the square substrate S2. That is, when the first abutting modules 21 are in the open position, they can be driven to move to the holding position, and when in the holding position, they can be driven to move to the open position.

Referring to FIG. 1 and FIG. 2 again, the second alignment unit 3 is disposed on the stage 11 and includes two second abutting modules 31 . The second abutment modules 31 are spaced apart from each other along the diagonal line L2, and can be driven relatively close (as shown in FIG. 4 ) or relatively far away (as shown in FIG. 3 ) along the diagonal line L2. It is used to align the square substrate S2 when it is relatively close. Each second abutting module 31 has a second interlocking portion 311 and two second abutting portions 312 . The second linkage part 311 is used to connect with a second driving mechanism 32 , such as a cylinder, so as to be driven to move along the diagonal line L2 . The second abutting portions 312 are connected to the second interlocking portion 311 and are respectively located on both sides of the diagonal line L2 for respectively abutting against adjacent two sides of the square substrate S2. In this embodiment, the second abutting portions 312 are integrally formed on an L-shaped block. In a variant embodiment, the second abutting portions 312 can also be independently formed into a cylindrical shape.

The same mechanism as the first abutment modules 21, in this embodiment, the second abutment modules 31 only change in two positions, one of which is relatively close to make the second abutment modules 31 Part 312 abuts against the holding position of the periphery of the square substrate S2 (as shown in FIG. 4 ), and the other position is relatively far away so that the second abutting parts 312 will not contact the circular substrate S1 or the square substrate The open position of S2 (as shown in Figure 3). That is, when the second abutting modules 31 are in the open position, they can be driven to move to the holding position, and when in the holding position, they can be driven to move to the open position.

In the open position, as shown in FIG. 3 , the distance between the second abutting portions 312 in the upper left corner and the second abutting portions 312 in the lower right corner is relatively far, and on the diagonal line L2 The upper distance is greater than the outer diameter of the circular substrate S1, and the distance between the second abutment parts 312 on the upper and lower sides in the up and down direction and the second abutment parts on the left and right sides The distance between the portion 312 in the left and right direction is larger than the side length of the square substrate S2 for the robot arm F to place the circular substrate S1 or the square substrate S2 into the square area A. As shown in FIG. 4 , when the robot arm F places the square substrate S2 between the second abutting parts 312, the second abutting modules 31 are driven relatively close to the holding position, The square substrate S2 is aligned by abutting the second abutting portions 312 against the peripheral edge of the square substrate S2. When the substrate is not inserted, the first abutting modules 21 and the second abutting modules 31 are both in open positions.

In this embodiment, the first abutting modules 21 are connected to the same first driving mechanism 22 , and the second abutting modules 31 are respectively connected to a second driving mechanism 32 . However, in a modified embodiment, the first abutting modules 21 can be connected to a first driving mechanism 22 respectively, and the second abutting modules 31 can be connected to the same second driving mechanism 32, or, the second abutting modules 31 can be connected to the same second driving mechanism 32, or Each abutting module 21 can be connected to a first driving mechanism 22 , and each of the second abutting modules 31 is also connected to a second driving mechanism 32 .

In summary, the first alignment unit 2 can align the circular substrate S1 and the second alignment unit 3 can align the square substrate S2, and users can choose to use the second alignment unit 2 according to their needs. The alignment unit 2 or the second alignment unit 3 is used to align the circular substrate S1 or the square substrate S2. It can not only increase the flexibility of operation, but also reduce the cost of equipment compared with the alignment devices using circular substrates and square substrates respectively.

But the above-mentioned ones are only embodiments of the present invention, and should not limit the scope of implementation of the present invention with this. All simple equivalent changes and modifications made according to the patent scope of the present application and the content of the patent specification are still within the scope of the present invention. Within the scope covered by this patent.

1: Bearing unit 11: Carrier 12: Support column 2: The first alignment unit 21: The first contact module 211: The first linkage department 212: The first abutment part 22: The first driving mechanism 3: The second alignment unit 31: The second abutment module 311: The second linkage department 312: the second abutment part 32: Second drive mechanism A : square area A1: First side D : conveying direction F : mechanical arm L1: Centerline L2: Diagonal S1: Round substrate S2: Square substrate

Other features and functions of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a three-dimensional schematic view of an embodiment of the new substrate alignment device; Fig. 2 is a schematic top view of this embodiment; Fig. 3 is a schematic plan view of the state where the embodiment is placed into a circular substrate and aligned; and FIG. 4 is a schematic top view of the embodiment in which a square substrate is placed and aligned.

1: Bearing unit

11: Carrier

12: Support column

2: The first alignment unit

21: The first contact module

211: The first linkage department

212: The first abutment part

22: The first driving mechanism

3: The second alignment unit

31: The second abutment module

311: The second linkage department

312: the second abutment part

32: Second drive mechanism

A: square area

A1: First side

D: conveying direction

L1: Centerline

L2: Diagonal

Claims (4)

A substrate alignment device, suitable for carrying a circular substrate or a square substrate to align the circular substrate or the square substrate, the substrate alignment device includes: A carrying unit, including a carrier, a square area is set on the carrier, and a centerline that is perpendicular to a pair of first sides of the square area and passes through the center of the square area is defined, and two sides that pass through the square area a diagonal of two diagonals, the first sides are parallel to a conveying direction in which substrates are conveyed into the square area; A first alignment unit is arranged on the stage and includes two first abutment modules, the first abutment modules are arranged at intervals along the center line, and can be driven to relatively approach or move along the center line Relatively far away, used to align the circular substrate when relatively close; and A second alignment unit is arranged on the platform and includes two second abutting modules, the second abutting modules are arranged at intervals along the diagonal, and can be driven to face each other along the diagonal Close or relatively far away, used to align the square substrate when relatively close. The substrate alignment device according to claim 1, wherein the carrying unit further includes a plurality of support columns, and the support columns are arranged on the stage and located in the square area to jointly support the circular substrate or the square substrate. substrate. The substrate alignment device according to claim 1, wherein each first abutment module has a first linkage part and two first abutment parts, and the first linkage part is used to be connected to a driving mechanism to be driven Moving along the centerline, the first abutting parts are connected to the first interlocking part and are arranged parallel to the conveying direction and respectively located on both sides of the centerline for abutting against the periphery of the circular substrate. The substrate alignment device according to claim 1, wherein each second abutment module has a second linkage part and two second abutment parts, and the second linkage part is used to connect a driving mechanism to be driven Moving along the diagonal, the second abutting portions are connected to the second linkage portion and are respectively located on both sides of the diagonal for abutting against adjacent two sides of the square substrate.

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