KR20200052810A - Film forming apparatus, manufacturing system, and manufacturing system of organic el panel - Google Patents

Abstract

Even if deformation of the deposition chamber occurs or vibration occurs inside and outside the deposition chamber, the operation of the alignment mechanism is less likely to be affected and a lightweight deposition apparatus has been required. A film forming apparatus (100) comprises: a vacuum chamber; an alignment driver (15) disposed outside the vacuum chamber and adjusting a relative position between a mask and a substrate disposed in the vacuum chamber; and a frame fixed on the vacuum chamber via the leg portion (22) disposed on the side wall (1S) of the vacuum chamber. The frame has a plurality of girders (23, 24, 25) parallel to the side walls of the vacuum chamber. The alignment driver (15) is fixed to the support plate (21) fixed to the plurality of girders and spaced from the top plate of the vacuum chamber.

Description

Film forming apparatus, manufacturing system, manufacturing system of organic EL panel {FILM FORMING APPARATUS, MANUFACTURING SYSTEM, AND MANUFACTURING SYSTEM OF ORGANIC EL PANEL}

The present invention relates to a film forming apparatus, a manufacturing system, and a manufacturing system of an organic EL panel. In particular, it relates to a film forming apparatus comprising a vacuum chamber and an alignment mechanism between a substrate and a mask.

2. Description of the Related Art Recently, organic EL devices that are self-emission type, and have excellent viewing angle, contrast, and response speed have been actively applied to various display devices including wall-mounted TVs.

The production of the organic EL element is often performed by bringing a substrate into a depressurized chamber, positioning (aligning) the substrate and the mask with high precision, and depositing an organic film of a predetermined pattern onto the substrate over the mask.

9 is a schematic cross-sectional view showing a configuration of a film forming apparatus used for conventional film forming. The film forming chamber which is a pressure-sensitive hermetic container is formed by the outer wall 110 and the top plate 110b bonded to the "110a" which is a part of the outer wall, and in the film forming chamber, the substrate 111, the film forming mask 113, An organic material evaporation source 116 is disposed. The substrate 111 is supported from both sides (or 4 sides) by the substrate support 112, and the film forming mask 113 is supported from both sides (or 4 sides) by the mask support 114. . Each axis of the substrate support 112 and the mask support 114 is in communication with the atmosphere so that vertical movement is possible in a state where airtightness is secured through a metal bellows (not shown).

On the atmospheric side on the top plate 110b, an alignment mechanism 115 and an alignment camera 132 are provided. The alignment camera 132 photographs the alignment marks of the substrate 111 and the film-forming mask 113 in the vacuum chamber through the airtight window 133 provided on the top plate 110b. The alignment mechanism 115 is a mechanism for performing alignment (alignment) of the substrate 111 and the film-forming mask 113 based on the photographing result of the alignment camera 132.

In recent years, since a display device using an organic EL element has a large screen or a high definition, a film forming apparatus capable of forming an organic film with high patterning precision on a large area substrate has been demanded. In a film-forming apparatus for handling a large-area substrate, it is necessary to increase the volume of the film-forming chamber, but the ceiling and wall surfaces of the film-forming chamber are likely to be deformed due to pressure difference between inside and outside. By this deformation, when displacement occurs at the position of the alignment mechanism 115 or the alignment camera 132, the substrate 111 and the film-forming mask 113 are liable to cause a relative positional shift. For example, misalignment of the optical axis of the alignment camera 132 or deterioration of reproducibility of the operation of the alignment mechanism 115 occurs, thereby reducing the alignment accuracy between the substrate 111 and the film forming mask 113.

If the alignment accuracy of the substrate 111 and the film-forming mask 113 decreases, the patterning precision of the organic film decreases, and there is a possibility that the organic EL device of a desired image quality cannot be mass produced.

Accordingly, if the thickness of the outer wall and the top plate of the film formation chamber is increased, deformation due to a pressure difference may be suppressed, but the weight of the device increases, which increases the manufacturing cost and transport cost of the device, and furthermore, installs a film forming device. The load on the floor of the building increases. This leads to an increase in the total cost of the manufacturing equipment of the organic EL element.

Patent Document 1 discloses a film forming apparatus using a vibration damping material that converts vibration into thermal energy on at least a part of the support plate by providing a support plate separated from the top plate on the top plate of the deposition chamber. In this apparatus, the alignment mechanism is mounted on this support plate.

With this configuration, even if the top plate is deformed by a pressure difference inside or outside the film forming apparatus, the support plate is separated from the top plate, and vibration is converted into thermal energy, so that the effect of deformation or vibration on the operation of the alignment mechanism can be reduced. .

Japanese Patent Publication No. 2012-33468

However, in the alignment mechanism of the film forming apparatus, there is a possibility that vibration due to various causes as well as deformation and vibration of the top plate due to the pressure difference may be transmitted, but in the apparatus described in Patent Document 1, the effect on the operation of the alignment mechanism is sufficiently fulfilled. There is a possibility that it cannot be suppressed. This is because there may be cases in which the effect of vibration transmitted from inside and outside the chamber cannot be fully absorbed only by the vibration damping property of the support plate material. When the thickness of the support plate that converts vibration into thermal energy is increased to improve the vibration damping property, the weight of the device increases, and the manufacturing cost and transportation cost of the device increase, and further, the load on the floor of the building where the film forming device is installed increases. . This leads to an increase in the total cost of the manufacturing equipment of the organic EL element.

Therefore, even if deformation of the deposition chamber occurs or vibration occurs inside and outside the deposition chamber, the operation of the alignment mechanism is less likely to be affected, and a lightweight deposition apparatus has been demanded.

The present invention provides a vacuum chamber, an alignment driving unit disposed outside the vacuum chamber and adjusting a relative position of a mask and a substrate disposed in the vacuum chamber, and a leg portion disposed on a side wall of the vacuum chamber. A frame fixed to the frame, the frame having a plurality of girders parallel to the sidewalls of the vacuum chamber, fixed to the plurality of girders and supported at a distance from the top plate of the vacuum chamber, the alignment driving unit Is a film forming apparatus characterized by being fixed.

ADVANTAGE OF THE INVENTION According to this invention, even if deformation | transformation of a film-forming chamber occurs or a vibration arises in and out of a film-forming chamber, operation of an alignment mechanism is hard to be influenced, and a lightweight film-forming apparatus can be provided.

1 is a schematic overview perspective view of the film forming apparatuses of the first and second embodiments.
2 is a schematic top view of the film forming apparatuses of the first and second embodiments.
3 is a schematic cross-sectional view of the film forming apparatus according to the first embodiment.
4 is a schematic cross-sectional view of the film forming apparatuses of the first and second embodiments.
5 is a schematic top view of the frames of Embodiment 1 and Embodiment 2.
Fig. 6 (a) Cross-sectional view of the girder 25 of the first embodiment. (b) Cross-sectional view of the girder 23 of the first embodiment. (c) Cross-sectional view of the girder 25 of the second embodiment. (d) Cross-sectional view of the girder 23 of the second embodiment.
7 is a schematic cross-sectional view of the film forming apparatus according to the second embodiment.
8 is a schematic configuration diagram of a manufacturing system according to a third embodiment.
9 is a schematic cross-sectional view of a conventional film forming apparatus.

A film forming apparatus and a manufacturing system according to an embodiment of the present invention will be described with reference to the drawings. In addition, in the plurality of drawings referred to in the following description, unless otherwise indicated, components of the same function are denoted by the same number.

[Embodiment 1]

(Composition of film forming apparatus)

The configuration of the film forming apparatus of the first embodiment will be described with reference to a plurality of drawings. Regarding the film forming apparatus 100, FIG. 1 is a schematic overview perspective view, FIG. 2 is a schematic top view, and FIGS. 3 and 4 are schematic cross-sectional views. In addition, FIG. 3 is a cross-sectional view of the device cut along the C1 plane parallel to the YZ plane in FIG. 1 or a cross-sectional view of the device cut along the line C1-C1 in FIG. 4 is a cross-sectional view of the device taken along line C2-C2 in FIG. 2.

The film forming apparatus 100 includes a vacuum chamber 1 as a container surrounding the outside of the film forming chamber, and the inside of the vacuum chamber 1 is a vacuum pump (not shown), for example, 10 ^-3 Pressure can be reduced to a pressure region of Pa or less. As shown in Fig. 1, the vacuum chamber 1 has a generally hexagonal shape in a schematic shape, and as shown in Fig. 3, the bottom plate 1B and the side walls 1S and the top plate 1R on the four sides are joined. It is an airtight container. The four-sided side wall 1S includes two side walls parallel to the XZ plane and two side walls parallel to the YZ plane. As shown in FIG. 3, the top plate 1R may be formed by joining a plate material on a center side and a side wall side, or may be composed of a single plate material.

1, 2, and 4, the film forming apparatus 100 includes two deposition stages arranged side by side in the X direction. In the film forming apparatus of the embodiment, the substrate can be exchanged and aligned in the other deposition stage while the deposition is performed in one deposition stage.

The structure of the deposition stage will be described with reference to FIG. 3. In the deposition stage, the mask 13 and the substrate 11 are arranged in order from the bottom in the vacuum chamber 1, and a magnet plate (not shown) is arranged on the substrate 11.

The mask 13 is a thin plate-shaped member having an opening for patterning, and particularly for a large-sized substrate, when a mask in the form of a thin film mask is used in an area surrounded by a frame material having high rigidity such as invar, etc. There are many. The mask 13 is supported from both sides (or four sides) by a pair of mask support portions 14.

As the substrate 11, a glass substrate, a plastic substrate, or the like is appropriately selected and used depending on the product to be manufactured. The substrate 11 is supported from both sides (or four sides) by a pair of substrate support portions 12.

The axis of the mask support portion 14 and the axis of the substrate support portion 12 are in communication with the atmosphere so that vertical movement is possible in a state where airtightness is secured through a metal bellows (not shown).

"15" is an alignment driver provided on the vacuum chamber. In the present embodiment, when the substrate 11 and the mask 13 are aligned, the alignment driver 15 moves the substrate support 12, and the substrate 11 moves in the X-axis direction, moves in the Y-axis direction, and By rotating θ, relative positioning with the mask 13 is performed.

On the vacuum chamber, an alignment camera 32 is provided. The alignment camera 32 captures the alignment marks provided on each of the substrate 11 and the mask 13 through an airtight window 33 provided on the top plate 1R and a window (opening hole) provided on the support plate 21. Can be. The alignment driver 15 aligns the substrate 11 and the mask 13 based on the imaging results of the alignment camera 32. That is, as shown in FIG. 3, the relative positional relationship of the alignment marks formed on the substrate 11 and the mask 13 is adjusted while the substrate 11 and the mask 13 are separated.

An evaporation source device 16 is disposed in a vacuum chamber, and an organic material as a film-forming material is stored inside the evaporation source device 16, and the organic material is heated by a controlled heater to evaporate or sublimate at a predetermined rate. do. On the upper surface of the evaporation source device 16, an opening for discharging the vaporized organic material toward the substrate and a shutter for shielding the opening, if necessary, are provided.

The evaporation source device 16 can be moved in the X-direction and the Y-direction by an X-axis slide mechanism and a Y-axis slide mechanism (not shown). The evaporation source device 16 can be moved to either of the two evaporation stages by an X-axis slide mechanism.

In addition, in each deposition stage, the evaporation source device 16 is capable of reciprocating scanning in the Y direction along the substrate 11 by the Y-axis slide mechanism, and depositing a highly uniform film on the substrate 11. Can be.

(Support structure of alignment drive)

Next, a supporting structure that supports the alignment driving unit 15 as a characteristic part of the film forming apparatus of the first embodiment will be described. 5 is a schematic plan view showing a support structure extracted.

As shown in FIG. 3, in this embodiment, the alignment drive part 15 and the alignment camera 32 are not directly supported by the top plate 1R of the vacuum chamber, but the support plate provided at a distance from the top plate 1R ( 21). As shown in FIG. 5, the support plate 21 is surrounded by and fixed to the girder 23 extending in the X direction and the girder 25 extending in the Y direction. That is, the support plate 21 is fixed to two girders 23 and two girders 25 parallel to each side wall of the vacuum chamber. Both ends of the girder 23 are connected to the girder 25, and the girder 23 and the girder 25 constitute a ladder-shaped frame to surround and fix the support plate 21. The frame further includes a pair of girders 24 extending in the X direction to increase strength, and the ends of the girders 24 and the ends of the girders 25 are joined. That is, the girder 23, the girder 24, and the girder 25 are joined to form a frame for fixing the support plate 21. A member having high rigidity is used for each girder, and specifically, a metal member having a large cross-section coefficient, such as H-shaped H-shaped steel or I-shaped I-shaped steel having a cross-sectional shape cut in a direction perpendicular to the long longitudinal direction is preferable. Is used. The cross-sectional shape of the girder 25 and the girder 23 constituting the ladder-shaped frame are cut along lines C3-C3 and C4-C4 in Fig. 5, respectively, in Figs. 6 (a) and 6 (b). . In the present embodiment, I-beams having an I-shape having a cross-sectional shape are used for the girder 25 and the girder 23. In addition, the same I-shaped steel is used for the girder 24.

As shown in FIG. 1, three sides of the outer edge of the frame, that is, two girders 24 and one girder 25 are arranged to be positioned on the side walls 1S of the vacuum chamber 1. 1 and 3, the frame is fixed on the vacuum chamber 1 via a leg portion 22 disposed on the side wall 1S of the vacuum chamber 1. The frame secures the ends of at least four corners to the side walls 1S of the vacuum chamber 1 by the leg portions 22, but in order to increase the fixing strength in this embodiment, the center portion of the girder 24 is also a leg portion ( It is further fixed on the side wall 1S of the vacuum chamber 1 via 22). The shape, number, and arrangement position of the leg portions can be appropriately changed.

When the inside of the vacuum chamber 1 is depressurized, the vacuum chamber 1 may deform or vibrate due to pressure difference between inside and outside. In particular, the top plate is pressed against the atmospheric pressure, and the central portion is recessed vertically downward. In the present embodiment, the alignment drive unit 15 and the alignment camera 32 are not directly supported at the center of the top plate 1R of the vacuum chamber, but are fixed to the support plate 21 provided at a distance from the top plate 1R. have. For this reason, the position and posture of the alignment driver 15 and the alignment camera 32 are not directly affected by deformation of the top plate.

In the present embodiment, the support plate 21 is supported by a ladder-shaped frame composed of a girder 23 and a girder 25 having a large cross-section coefficient, and the ends of the four corners of the frame are on the side walls of the vacuum chamber. It is fixed on the vacuum chamber via the placed leg. In addition, a girder 24 made of a metal member having a large cross-section coefficient is further connected to the frame, and the girder 24 is also fixed over the side wall of the vacuum chamber via a leg. As described above, the support plate 21 to which the alignment driver 15 and the alignment camera 32 are fixed is supported by a frame that is lightweight and strong, and is resistant to external deformation or vibration.

As described above, in the present embodiment, the frame is fixed via the leg portion over the side wall of the vacuum chamber via the leg portion, but the upper portion of the side wall is connected to the outer peripheral portion of the top plate 1R, and this portion can be said to be structurally high in vibration resistance. have. Since the ends of the at least four corner portions of the frame are fixed to the portions with legs, it is difficult for the alignment driver 15 and the alignment camera 32 to be particularly affected by vibrations with a small frequency. For example, vibrations caused by the operation of their own deposition stage, vibrations caused by deposition operations in adjacent deposition stages, vibrations caused by various devices such as door valves and exhaust devices in vacuum chambers, and transmission from outside the device. It becomes difficult to be affected by vibration, etc. Further, in the present embodiment, since the support plate 21 is supported by a ladder-shaped frame composed of a girder 23 and a girder 25 having a large cross-section coefficient, a structure having a high strength against vibration can be realized extremely lightly. have.

As a result, in this embodiment, since the alignment error between the substrate and the mask can be reduced, it becomes possible to manufacture, for example, an organic EL element or an organic EL device in which a pattern of an organic compound layer having good dimensional accuracy is formed. In addition, it is possible to prevent a decrease in the detection accuracy of the alignment mark recognized by the camera, and the number of retry times is reduced, and the time required to achieve a predetermined precision can be shortened.

According to this embodiment, while suppressing the increase in the weight of the film forming apparatus, it is possible to suppress the effect of the deformation of the film forming chamber and the alignment mechanism due to vibration from inside and outside the film forming chamber.

[Embodiment 2]

Although the film forming apparatus of the second embodiment will be described, this embodiment differs from the first embodiment in part of the support structure of the alignment driver. About the part common with Embodiment 1, description is abbreviate | omitted.

7 is a schematic cross-sectional view of the film forming apparatus according to the second embodiment, and similarly to FIG. 3 in the description of the first embodiment, a cross-sectional view of the apparatus cut from the C1 plane parallel to the YZ plane in FIG. 1 or FIG. It is a sectional view taken along line C1-C1 of 2.

In the first embodiment, I-beams having an I-shape having a cross-sectional shape are used for the girder 23, the girder 24, and the girder 25, but in this embodiment, as shown in FIG. The difference between using this H-shaped H-shaped steel.

The cross-sectional shape of the girder 25 and the girder 23 constituting the ladder-shaped frame are cut along lines C3-C3 and C4-C4 in Fig. 5, respectively, in Figs. 6 (c) and 6 (d). . In the present embodiment, H-beams having a cross-sectional H-shape are used for the girder 25 and the girder 23. In addition, the same H-shaped steel is used for the girder 24.

Also in this embodiment, the alignment drive part 15 and the alignment camera 32 are not directly supported by the center part of the top plate 1R of the vacuum chamber, but are fixed to the support plate 21 provided at a distance from the top plate 1R. It is. For this reason, the position and posture of the alignment driver 15 and the alignment camera 32 are not directly affected by deformation of the top plate.

In this embodiment, the supporting plate 21 is supported by a ladder-shaped frame composed of a girder 23 and a girder 25 of H-shaped steel having a large cross-section coefficient, and the end of the frame is on the side wall of the vacuum chamber. It is fixed on the vacuum chamber via the placed leg. In addition, the frame further has a girder 24 made of H-shaped steel having a large cross-section coefficient, and the girder 24 is also fixed over the side wall of the vacuum chamber via a leg. That is, the alignment drive unit 15 and the alignment camera 32 are lightweight and strong, and are supported by a frame that is hardly affected by external deformation or vibration.

Also in this embodiment, the frame is fixed via the leg portion over the side wall of the vacuum chamber via the leg portion, but the upper portion of the side wall is connected to the outer periphery of the top plate 1R, and this portion can be said to be structurally high in earthquake resistance. For this reason, the alignment driver 15 and the alignment camera 32 are less likely to be affected by vibrations having a small frequency. For example, vibrations caused by the operation of one's own deposition stage, vibrations caused by deposition operations in adjacent deposition stages, vibrations caused by various devices such as door valves and exhaust devices in vacuum chambers, and transmission from outside the device. It becomes difficult to be affected by vibrations. Further, in the present embodiment, since the support plate 21 is supported by a ladder-shaped frame composed of a girder 23 and a girder 25 having a large cross-section coefficient, a structure having a high strength against vibration can be realized at extremely light weight. Can be.

As a result, the present embodiment can also reduce the alignment error between the substrate and the mask, so that it is possible to manufacture, for example, an organic EL element or an organic EL device in which a pattern of an organic compound layer having good dimensional accuracy is formed. In addition, it is possible to prevent a decrease in the detection accuracy of the alignment mark recognized by the camera, and the number of retries is reduced, and the time required to achieve a predetermined precision can be shortened.

Also in this embodiment, while suppressing an increase in the weight of the film-forming apparatus, it is possible to suppress the influence of the deformation of the film-forming chamber or the alignment mechanism due to vibration from inside and outside the film-forming chamber.

[Embodiment 3]

Next, the manufacturing system which implemented this invention is demonstrated. 8 is a schematic configuration diagram of a manufacturing system in which the present invention is implemented, and illustrates a manufacturing system 300 for manufacturing an organic EL panel.

The manufacturing system 300 includes a plurality of film forming apparatuses 100, a transfer chamber 1101, a transfer chamber 1102, a transfer chamber 1103, a substrate supply chamber 1105, a mask stock chamber 1106, and a pass chamber 1107. ), A glass supply chamber 1108, a joining chamber 1109, a takeout chamber 1110, and the like. Since the film forming apparatus 100 can be used for film formation of other functional layers such as a light emitting layer, a hole injection layer, a hole transporting layer, an electron transporting layer, and an electrode layer of an organic EL panel, when the film forming material or mask is different for each film forming apparatus, There is. Each film forming apparatus 100 may be a device having two deposition stages as described in Embodiment 1, or a device having a single deposition stage. In the case where two deposition stages are provided, the deposition deposition substrate is taken out and the undeposited substrate is carried out in the other deposition stage, until deposition in one deposition stage is completed. The alignment of the mask can be completed and set in the film formation position.

The substrate is supplied from the outside to the substrate supply chamber 1105. The robot 1120 which is a conveyance mechanism is arrange | positioned in the conveyance room 1101, the conveyance room 1102, and the conveyance room 1103. The robot 1120 transfers the substrate between the chambers. At least one of the film forming apparatuses 100 provided by the manufacturing system 300 of the present embodiment is provided with an evaporation source of an organic material. The plurality of film forming apparatuses 100 included in the manufacturing system 300 may be devices that form the same material with each other, or may be devices that form different materials. For example, in each film forming apparatus, organic materials of different emission colors may be deposited. In the manufacturing system 300, an organic EL panel is manufactured by depositing an organic material on a substrate supplied from the substrate supply chamber 1105 or by forming a film of an inorganic material such as a metal material.

The mask stock chamber 1106 is used in each film forming apparatus 100, and the mask on which the film is deposited is conveyed by the robot 1120. The mask can be cleaned by recovering the mask conveyed to the mask stock chamber 1106. Further, the cleaned mask may be stored in the mask stock chamber 1106 and set in the film forming apparatus 100 by the robot 1120.

Glass material for sealing is supplied from the outside to the glass supply chamber 1108. In the bonding chamber 1109, an organic EL panel is produced by pasting a glass material for sealing onto a formed substrate. The produced organic EL panel is taken out from the take-out chamber 1110.

The film forming apparatus included in the present manufacturing system has a frame fixed on the vacuum chamber via a leg portion disposed on the side wall of the vacuum chamber, as described in the first and second embodiments, and the frame is parallel to the side wall of the vacuum chamber. It has multiple girder beams. Further, a support plate to which the alignment driver and the alignment camera are fixed is fixed to a plurality of girders of the frame, and the support plate is supported at a distance from the top plate of the vacuum chamber.

For this reason, in the film-forming apparatus included in this manufacturing system, the alignment drive part and the alignment camera are isolated from vibrations transmitted from adjacent deformation chambers or film-forming apparatus or the like due to internal / external pressure differences, and the alignment operation is extremely high. It is stable and speeds up. In this production system, since it is possible to form a film on a large area substrate with high precision, it is possible to manufacture a high-quality organic EL panel with high yield. Moreover, since the increase in weight of each film forming apparatus is suppressed, the total weight of the production system can be suppressed. As described above, the present invention can be preferably implemented in a manufacturing system for manufacturing an organic EL element, but may be implemented in a manufacturing system for manufacturing other devices.

According to the present embodiment, even if deformation of the deposition chamber occurs or vibration occurs inside or outside the deposition chamber, the operation of the alignment mechanism is hardly affected, and a deposition system with a lightweight deposition apparatus can be provided. .

[Other embodiments]

In addition, the present invention is not limited to the embodiments described above, and various modifications are possible within the technical spirit of the present invention.

For example, the plurality of girders constituting the frame must have the same cross-sectional shape. In the first embodiment, a girder having an I-shape cross section is used, and in the second embodiment, an H-shaped girder cross section is used, but one frame may be configured by combining an I-shape and an H-shape girder. Moreover, if it is a member with a large cross-sectional coefficient, the cross-sectional shape is not limited to an I-shape or an H-shape.

In addition, the alignment drive unit is not limited to a mechanism that performs alignment by moving the substrate support. The mask support may be moved, or a mechanism for moving both the substrate support and the mask support may be used. That is, the configuration in which the mask 13 is left at a predetermined position and the substrate 11 is moved may be employed, or the configuration in which the substrate 11 is fixed at a predetermined position and the mask 13 is moved to perform positioning is achieved. Alternatively, both the substrate 11 and the mask 13 may be moved. For example, when the weight of the mask is larger than that of the substrate, the alignment accuracy may be increased by moving the substrate. In addition, the alignment time may be shortened by moving both the substrate and the mask to adjust the relative positional relationship. The selection of the object to be moved in this way can be arbitrarily designed according to the type and purpose of the device.

In addition, the arrangement and number of the substrate support portion for supporting the substrate, the mask support portion for supporting the mask, or the alignment camera are not limited to the examples of the above-described embodiments. The size and weight of the substrate, the size and weight of the mask, the number of alignment marks and the layout position can be appropriately changed.

In addition, the film forming apparatus of Embodiment 1 was provided with two deposition stages, and two sets of tanks made of an alignment driver, a support plate, and a frame were independently arranged on a vacuum chamber, but the number of deposition stages is not limited to two, but one. Or three or more may be sufficient. Even in the case of three or more, it is preferable to arrange the jaw made of the alignment drive, the supporting plate and the frame independently on the vacuum chamber for each deposition stage.

Further, even if one evaporation source device is not a device that alternately deposits by moving between two evaporation stages, each evaporation stage may be a film deposition device having a dedicated evaporation source device. The form of the evaporation source device may be a single evaporation source or a plurality of evaporation sources arranged. Further, a rate management sensor for the purpose of managing or controlling the evaporation rate from the evaporation source may be disposed in the film formation chamber. In addition, when the organic material is formed on the substrate 11, the relative position between the substrate 11 and the evaporation source device 16 may be in the form of scanning or fixed.

Further, in the first embodiment, the mask 13 is disposed under the substrate 11 for the purpose of lowering the surface to be formed of the substrate 11, but the film-forming material is a film forming surface of the substrate 11. The arrangement of the substrate and the mask is not limited to this, as long as it is an arrangement capable of patterning on the image. For example, the substrate 11 and the mask 13 may be arranged in a vertical arrangement along the vertical direction, or the film-formed surfaces of the substrate 11 may be arranged upward.

Further, the present invention can be preferably implemented in an apparatus for forming an organic film constituting an organic EL element, but it can also be used in an apparatus for forming a film other than the organic EL element or a film of a device other than the organic EL element. none.

1: vacuum chamber
1B: Bottom plate
1S: sidewall
1R: Top plate
11: Substrate
12: substrate support
13: mask
14: mask support
15: alignment driver
16: Evaporation source device
21: support plate
22: leg
23, 24, 25: Girder
32: alignment camera
33: confidential window
100: film forming apparatus
110: outer wall
110a: part of the outer wall
110b: top plate
111: substrate
113: deposition mask
132: alignment camera
133: confidential window
300: manufacturing system for manufacturing organic EL panels
1101, 1102, 1103: Transfer room
1105: substrate supply room
1106: mask stock room
1107: Pass room
1108: glass supply room
1109: Junction room
1110: take-out room
1120: robot

Claims (10)

As a film forming apparatus,
A vacuum chamber,
An alignment driver disposed outside the vacuum chamber and adjusting a relative position of a mask and a substrate disposed in the vacuum chamber;
A frame fixed to the vacuum chamber is provided through a leg portion disposed on a sidewall of the vacuum chamber,
The frame has a plurality of girders parallel to the side wall of the vacuum chamber,
The alignment driver is fixed to a support plate fixed to the plurality of girders and spaced apart from the top plate of the vacuum chamber,
The film forming apparatus, characterized in that. According to claim 1,
The film forming apparatus is characterized in that the frame is a ladder-shaped frame to which a plurality of girders parallel to the side wall of the vacuum chamber are connected. The method according to claim 1 or 2,
The plurality of girders of the frame, the film forming apparatus, characterized in that the cross section cut in the direction perpendicular to the long longitudinal direction is H-shaped or I-shaped girders. The method according to any one of claims 1 to 3,
The film forming apparatus, characterized in that the tank formed of the alignment driving part, the support plate and the frame is arranged in two sets on the vacuum chamber. The method according to any one of claims 1 to 4,
The alignment driving unit, the film forming apparatus, characterized in that for adjusting the relative position of the mask support for supporting the mask and the substrate support for supporting the substrate. The method according to any one of claims 1 to 5,
An alignment camera for imaging an alignment mark of the mask and the substrate is fixed to the support plate. The method of claim 6,
A film forming apparatus characterized in that the support plate is provided with a window for the alignment camera to image the alignment mark of the mask and the substrate. As a manufacturing system,
A plurality of film forming apparatuses according to any one of claims 1 to 7, comprising:
Manufacturing system characterized in that. As a manufacturing system of an organic EL panel,
A plurality of film forming apparatuses according to any one of claims 1 to 7, and at least one of the film forming apparatuses comprises a deposition source of an organic material,
The organic EL panel manufacturing system, characterized in that. As a method of manufacturing an organic EL panel,
Manufacturing an organic EL panel using the manufacturing system of the organic EL panel according to claim 9,
A method of manufacturing an organic EL panel, characterized in that.

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