JP2020076123A - Film deposition device, manufacturing system, and organic el panel manufacturing system - Google Patents

Abstract

To provide a light film deposition device, in which it is difficult to give influences on an operation of an alignment mechanism even when a film deposition chamber is deformed and vibration occurs inside and outside the film deposition chamber.SOLUTION: A film deposition device (100) comprises: a vacuum chamber; an alignment driving part (15) arranged outside the vacuum chamber, and adjusting a relative position of a mask and a substrate arranged in the vacuum chamber; and a frame body fixed on the vacuum chamber via a leg part (22) arranged on a side wall (1S) of the vacuum chamber. The frame body has plural beams (23, 24, 25) parallel to the side wall of the vacuum chamber, and the alignment driving part (15) is fixed to a support plate (21) fixed to the plural beams and supported at an interval from a top plate of the vacuum chamber.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a film forming apparatus, a manufacturing system, and an organic EL panel manufacturing system. In particular, the present invention relates to a film forming apparatus including a vacuum chamber and a substrate / mask alignment mechanism.

In recent years, organic EL elements that are self-luminous and have excellent viewing angles, contrasts, and response speeds have been widely applied to various display devices such as wall-mounted televisions.
The organic EL element is manufactured by a method in which the substrate is carried into a depressurized chamber, the substrate and the mask are accurately aligned (aligned), and an organic film having a predetermined pattern is formed on the substrate through the mask. It is often seen.

  FIG. 9 is a schematic cross-sectional view showing the configuration of a film forming apparatus used for conventional film forming. A film forming chamber, which is an airtight container capable of depressurizing, is composed of an outer wall 110 and a top plate 110b joined to 110a which is a part of the outer wall. Inside the film forming chamber, a substrate 111, a film forming mask 113, A vapor deposition source 116 of organic material is arranged. The substrate 111 is supported by the substrate support 112 from both sides (or four sides), and the film formation mask 113 is supported by the mask support 114 from both sides (or four sides). Each of the axes of the substrate support 112 and the mask support 114 communicates with the atmosphere side via a metal bellows (not shown) so as to be vertically movable in a state where airtightness is ensured.

  An alignment mechanism 115 and an alignment camera 132 are installed on the atmosphere side of the top plate 110b. The alignment camera 132 takes an image of the alignment mark between the substrate 111 and the film formation mask 113 in the vacuum chamber through the airtight window 133 provided on the top plate 110b. The alignment mechanism 115 is a mechanism for performing alignment (alignment) between the substrate 111 and the film formation mask 113 based on the image pickup result of the alignment camera 132.

Recently, since display devices using organic EL elements have large screens and high definition, there is a demand for a film forming device capable of forming an organic film on a large-area substrate with high patterning accuracy. .. In a film forming apparatus that handles a large-area substrate, the volume of the film forming chamber needs to be larger than in the past, but the ceiling and wall surfaces of the film forming chamber are easily deformed due to the pressure difference between the inside and the outside. When the positions of the alignment mechanism 115 and the alignment camera 132 are displaced due to this deformation, the substrate 111 and the film formation mask 113 are likely to be displaced relative to each other. For example, the optical axis of the alignment camera 132 is displaced, the reproducibility of the operation of the alignment mechanism 115 is deteriorated, and the alignment accuracy of the substrate 111 and the film formation mask 113 is deteriorated.
When the alignment accuracy between the substrate 111 and the film formation mask 113 is lowered, the patterning accuracy of the organic film is lowered, and there is a possibility that the organic EL element having a desired image quality cannot be mass-produced with a high yield.

  Therefore, if the thickness of the outer wall of the film forming chamber and the top plate are increased, the deformation due to the pressure difference may be suppressed, but the weight of the device is increased, and the manufacturing cost and transportation cost of the device are increased. Will increase the load on the floor of the building where the film deposition apparatus is installed. This leads to an increase in the total cost of the manufacturing facility for the organic EL element.

Patent Document 1 discloses a film forming apparatus in which a support plate separated from the top plate is provided on a top plate of a film forming chamber, and at least a part of the support plate uses a vibration damping material for converting vibration into heat energy. Is disclosed. In this device, the alignment mechanism is mounted on this support plate.
With this configuration, even if the top plate is deformed due to the pressure difference between the inside and outside of the film forming apparatus, the support plate is separated from the top plate, and the vibration is converted into thermal energy. Can be reduced.

JP, 2012-33468, A

  However, not only the deformation and vibration of the top plate due to the pressure difference but also vibration due to various causes may be transmitted to the alignment mechanism of the film forming apparatus. However, in the apparatus described in Patent Document 1, the operation of the alignment mechanism It may not be possible to sufficiently suppress the impact on This is because there is a possibility that the effect of vibration transmitted from the inside and outside of the chamber may not be completely absorbed only by the damping property of the material of the support plate. If the thickness of the support plate that converts vibrations into heat energy is increased to improve the vibration control performance, the weight of the device increases, which increases the manufacturing cost and transportation cost of the device. The floor load of the building to be installed also increases. This leads to an increase in the total cost of the manufacturing facility for the organic EL element.

  Therefore, even if the film forming chamber is deformed or vibrations are generated inside and outside the film forming chamber, the operation of the alignment mechanism is not easily affected and a lightweight film forming apparatus has been demanded.

  The present invention provides a vacuum chamber, an alignment driver that is disposed outside the vacuum chamber and adjusts a relative position of a mask and a substrate that is disposed in the vacuum chamber, and is disposed on a sidewall of the vacuum chamber. A frame body fixed on the vacuum chamber via leg portions, the frame body having a plurality of beams parallel to the side wall of the vacuum chamber, and being fixed to the plurality of beams. In the film forming apparatus, the alignment drive unit is fixed to a support plate supported at a distance from a top plate of the vacuum chamber.

  According to the present invention, even if the film forming chamber is deformed or vibration is generated inside and outside the film forming chamber, the operation of the alignment mechanism is not easily affected, and a lightweight film forming apparatus can be provided. ..

3 is a schematic perspective view of the film forming apparatus according to the first and second embodiments. FIG. 3 is a schematic top view of the film forming apparatus of Embodiments 1 and 2. FIG. 3 is a schematic cross-sectional view of the film forming apparatus of Embodiment 1. FIG. 3 is a schematic cross-sectional view of the film forming apparatus of Embodiments 1 and 2. FIG. FIG. 3 is a schematic top view of the frame body according to the first and second embodiments. (A) Sectional drawing of the beam 25 of Embodiment 1. FIG. (B) A sectional view of the beam 23 of the first embodiment. (C) A sectional view of the beam 25 of the second embodiment. (D) A cross-sectional view of the beam 23 of the second embodiment. 5 is a schematic cross-sectional view of the film forming apparatus of Embodiment 2. FIG. The schematic block diagram of the manufacturing system of Embodiment 3. The typical sectional view of the conventional film-forming device.

  A film forming apparatus and a manufacturing system according to an embodiment of the present invention will be described with reference to the drawings. In the plurality of drawings referred to in the following description, components having the same function are denoted by the same reference numerals unless otherwise specified.

[Embodiment 1]
(Structure of film forming apparatus)
The configuration of the film forming apparatus according to the first embodiment will be described with reference to a plurality of drawings. Regarding the film forming apparatus 100, FIG. 1 is a schematic perspective view, FIG. 2 is a schematic top view, and FIGS. 3 and 4 are schematic sectional views. Note that FIG. 3 is a cross-sectional view of the device cut along a C1 plane parallel to the YZ plane in FIG. 1 or a cross-sectional view taken along the line C1-C1 of FIG. 4 is a cross-sectional view of the device cut along the line C2-C2 in FIG.

The film forming apparatus 100 includes a vacuum chamber 1 as an envelope of a film forming chamber, and the inside of the vacuum chamber 1 can be depressurized to a pressure region of, for example, 10 ⁻³ Pa or less by a vacuum pump (not shown). As shown in FIG. 1, the vacuum chamber 1 is typically a hexahedron in outline shape, and as shown in FIG. 3, is a hermetic container in which a bottom plate 1B, four side walls 1S, and a top plate 1R are joined. .. The four side walls 1S include two side walls parallel to the XZ plane and two side walls parallel to the YZ plane. The top plate 1R may be configured by joining plate members on the center side and the side wall side as shown in FIG. 3, or may be configured by a single plate member.

  As shown in FIGS. 1, 2, and 4, the film forming apparatus 100 includes two vapor deposition stages arranged side by side along the X direction. In the film forming apparatus of the embodiment, while performing vapor deposition on one vapor deposition stage, substrate exchange and alignment can be performed on the other vapor deposition stage.

  The structure of the vapor deposition stage will be described with reference to FIG. On the vapor deposition stage, a mask 13 and a substrate 11 are arranged in order from the bottom in the vacuum chamber 1, and a magnet plate (not shown) is arranged on the substrate 11.

  The mask 13 is a thin plate-shaped member having an opening for patterning, and particularly for a large-sized substrate, a mask in which a thin film mask is formed in a region surrounded by a highly rigid frame member such as Invar is used. Often. The mask 13 is supported from both sides (or four sides) by a pair of mask support portions 14.

As the substrate 11, a glass substrate, a plastic substrate, or the like is appropriately selected and used according to the target product to be manufactured. The substrate 11 is supported by the pair of substrate support portions 12 from both sides (or four sides).
The axis of the mask support portion 14 and the axis of the substrate support portion 12 communicate with the atmosphere side through a metal bellows (not shown) so that they can move up and down while ensuring airtightness.

  Reference numeral 15 is an alignment drive unit provided on the vacuum chamber. In the present embodiment, when the substrate 11 and the mask 13 are aligned, the alignment driving unit 15 moves the substrate support unit 12, moves the substrate 11 in the X-axis direction, moves in the Y-axis direction, and rotates by θ to move the mask 13 to the mask 13. Relative alignment of.

  An alignment camera 32 is provided on the vacuum chamber. The alignment camera 32 can image the alignment marks provided on each of the substrate 11 and the mask 13 through the airtight window 33 provided on the top plate 1R and the window (opening hole) provided on the support plate 21. The alignment driving unit 15 aligns the substrate 11 and the mask 13 based on the image pickup result of the alignment camera 32. That is, as shown in FIG. 3, the relative positional relationship of the alignment marks formed on the substrate 11 and the mask 13 is adjusted while the substrate 11 and the mask 13 are separated from each other.

  An evaporation source device 16 is arranged in the vacuum chamber, an organic material that is a film forming material is stored inside the evaporation source device 16, and the organic material is heated by a controlled heater and evaporated at a predetermined rate. Or sublimate. On the upper surface of the vapor deposition source device 16, an opening for discharging the vaporized organic material toward the substrate and a shutter for blocking the opening as needed are provided.

The vapor deposition source device 16 can be moved in the X and Y directions by an X-axis slide mechanism and a Y-axis slide mechanism (not shown). The vapor deposition source device 16 can be moved to either side of the two vapor deposition stages by the X-axis slide mechanism.
Further, the vapor deposition source device 16 can perform reciprocal scanning in the Y direction along the substrate 11 by the Y-axis slide mechanism at each vapor deposition stage, and can form a highly uniform film on the substrate 11.

(Support structure for alignment drive unit)
Next, a supporting structure that supports the alignment driving unit 15 will be described as a characteristic part of the film forming apparatus of the first embodiment. FIG. 5 is a schematic plan view showing an extracted support structure.

  As shown in FIG. 3, in the present embodiment, the alignment driving unit 15 and the alignment camera 32 are not directly supported by the top plate 1R of the vacuum chamber, but a support plate installed at a distance from the top plate 1R. It is fixed at 21. As shown in FIG. 5, the support plate 21 is surrounded by and fixed to a beam 23 extending in the X direction and a beam 25 extending in the Y direction. That is, the support plate 21 is fixed to the two beams 23 and the two beams 25 parallel to the side walls of the vacuum chamber. Both ends of the beam 23 are connected to the beam 25, and the beam 23 and the beam 25 form a ladder-shaped frame and surround and fix the support plate 21. The frame further includes a pair of beams 24 extending in the X direction to increase the strength, and the ends of the beams 24 and the beams 25 are joined to each other. That is, the beam 23, the beam 24, and the beam 25 are joined together to form a frame body for fixing the support plate 21. A member having high rigidity is used for each beam, and specifically, a metal member having a large section modulus, such as an H-shaped steel having an H-shaped cross section cut in a direction orthogonal to the longitudinal direction or an I-shaped I-shaped steel, is used. It is preferably used. 6A and 6B show cross-sectional shapes obtained by cutting the beam 25 and the beam 23 forming the ladder-shaped frame along the line C3-C3 and the line C4-C4 in FIG. In the present embodiment, the beams 25 and 23 are made of I-shaped steel having an I-shaped cross section. Further, the beam 24 is also made of the same type I steel.

  As shown in FIG. 1, three sides of the outer edge of the frame body, that is, two beams 24 and one beam 25 are arranged on the side wall 1S of the vacuum chamber 1. As shown in FIGS. 1 and 3, the frame body is fixed on the vacuum chamber 1 via the leg portions 22 arranged on the side wall 1S of the vacuum chamber 1. The frame body is fixed to the side wall 1S of the vacuum chamber 1 by the legs 22 at least at the four corners. However, in the present embodiment, in order to enhance the fixing strength, the central portion of the beam 24 is further connected to the vacuum chamber via the legs 22. It is fixed on the side wall 1S of 1. The shape, number, and arrangement position of the legs can be changed as appropriate.

  The vacuum chamber 1 may be deformed or vibrated due to the pressure difference between the inside and the outside when the inside pressure is reduced, and in particular, the top plate is pressed by the atmospheric pressure and the central portion is vertically downwardly dented. In the present embodiment, the alignment driving unit 15 and the alignment camera 32 are not directly supported on the central portion of the top plate 1R of the vacuum chamber, but are fixed to the support plate 21 installed at a distance from the top plate 1R. ing. Therefore, the positions and orientations of the alignment driving unit 15 and the alignment camera 32 are not directly affected by the deformation of the top plate.

  Further, in the present embodiment, the support plate 21 is supported by a ladder-shaped frame body composed of the beam 23 and the beam 25 having a large section coefficient, and the four corners of the frame body have the end portions of the side wall of the vacuum chamber. It is fixed above the vacuum chamber via the legs arranged above. Further, a beam 24 made of a metal member having a large section modulus is further connected to the frame body, and the beam 24 is also fixed on the side wall of the vacuum chamber via legs. As described above, the support plate 21 to which the alignment driving unit 15 and the alignment camera 32 are fixed is lightweight and strong, and is supported by the frame body that is not easily affected by external deformation or vibration.

  As described above, in the present embodiment, the frame is fixed on the side wall of the vacuum chamber via the leg through the leg, but the upper portion of the side wall is connected to the outer peripheral portion of the top plate 1R. , It can be said that this part is structurally highly earthquake resistant. Since the ends of at least the four corners of the frame body are fixed to this portion by the legs, the alignment driving unit 15 and the alignment camera 32 are less likely to be affected by vibrations having a small frequency. For example, vibration caused by the operation of the vapor deposition stage of its own, vibration caused by the vapor deposition operation at the adjacent vapor deposition stage, vibration caused by various equipment such as a door valve of a vacuum chamber or an exhaust device, vibration transmitted from outside the device, etc. Less susceptible to impact. Further, in the present embodiment, the support plate 21 is supported by the ladder-shaped frame body composed of the beam 23 and the beam 25 having a large section modulus, so that the structure having a large strength against vibration can be realized extremely lightweight. ..

As a result, in the present embodiment, since the alignment error between the substrate and the mask can be reduced, it is possible to manufacture, for example, an organic EL element or an organic EL device having a pattern of an organic compound layer with good dimensional accuracy. Become. Further, it is possible to prevent the detection accuracy of the alignment mark recognized by the camera from being lowered, reduce the number of retries, and shorten the time required to reach a predetermined accuracy.
According to the present embodiment, it is possible to suppress the influence on the alignment mechanism due to the deformation of the film forming chamber and the vibration from inside and outside the film forming chamber while suppressing the increase in the weight of the film forming apparatus.

[Embodiment 2]
Although the film forming apparatus of the second embodiment will be described, the present embodiment is different from the first embodiment in a part of the support structure of the alignment driving unit. Descriptions of portions common to the first embodiment will be omitted.
FIG. 7 is a schematic cross-sectional view of the film forming apparatus of the second embodiment, and like FIG. 3 in the description of the first embodiment, a cross-sectional view of the apparatus cut along a C1 plane parallel to the YZ plane in FIG. Alternatively, it is a cross-sectional view of the device taken along line C1-C1 of FIG.

In the first embodiment, the beam 23, the beam 24, and the beam 25 are made of I-shaped steel having an I-shaped cross section, but in the present embodiment, as shown in FIG. 7, each beam has an H-shaped H-shaped cross section. The difference is that it uses shaped steel.
6C and 6D show cross-sectional shapes obtained by cutting the beam 25 and the beam 23 forming the ladder-shaped frame along the line C3-C3 and the line C4-C4 in FIG. In the present embodiment, the beams 25 and 23 are made of H-shaped steel having an H-shaped cross section. The beam 24 also uses the same H-shaped steel.

  Also in the present embodiment, the alignment driving unit 15 and the alignment camera 32 are not directly supported by the central portion of the top plate 1R of the vacuum chamber, but are fixed to the support plate 21 installed at a distance from the top plate 1R. Has been done. Therefore, the positions and orientations of the alignment driving unit 15 and the alignment camera 32 are not directly affected by the deformation of the top plate.

  Further, in the present embodiment, the support plate 21 is supported by a ladder-shaped frame body composed of an H-shaped steel beam 23 and a beam 25 having a large section modulus, and an end portion of the frame body is a side wall of the vacuum chamber. Is fixed on the vacuum chamber via the legs arranged above. Further, the frame body further has a beam 24 made of H-shaped steel having a large section modulus, and the beam 24 is also fixed on the side wall of the vacuum chamber via legs. That is, the alignment driving unit 15 and the alignment camera 32 are supported by a frame body that is lightweight but strong and is not easily affected by external deformation or vibration.

  Also in this embodiment, the frame is fixed on the side wall of the vacuum chamber via the leg through the leg, but the upper portion of the side wall is connected to the outer peripheral portion of the top plate 1R, and this portion is It can be said that it is structurally highly earthquake resistant. Therefore, the alignment driving unit 15 and the alignment camera 32 are less likely to be affected by the vibration having a particularly small frequency. For example, vibration caused by the operation of the vapor deposition stage of its own, vibration caused by the vapor deposition operation at the adjacent vapor deposition stage, vibration caused by various equipment such as a door valve of a vacuum chamber or an exhaust device, vibration transmitted from outside the device, etc. Less susceptible to impact. Further, in the present embodiment, the support plate 21 is supported by the ladder-shaped frame body composed of the beam 23 and the beam 25 having a large section modulus, so that the structure having a large strength against vibration can be realized extremely lightweight. ..

As a result, in the present embodiment as well, the alignment error between the substrate and the mask can be reduced, so that it is possible to manufacture, for example, an organic EL element or an organic EL device in which a pattern of an organic compound layer with high dimensional accuracy is formed. Become. Further, it is possible to prevent the detection accuracy of the alignment mark recognized by the camera from being lowered, reduce the number of retries, and shorten the time required to reach the predetermined accuracy.
Also in the present embodiment, it is possible to suppress the influence of the deformation of the film forming chamber and the vibration from the inside and outside of the film forming chamber on the alignment mechanism while suppressing the increase in the weight of the film forming apparatus.

[Third Embodiment]
Next, a manufacturing system embodying the present invention will be described. FIG. 8 is a schematic configuration diagram of a manufacturing system embodying the present invention, and illustrates a manufacturing system 300 for manufacturing an organic EL panel.

  The manufacturing system 300 includes a plurality of film forming apparatuses 100, a transfer chamber 1101, a transfer chamber 1102, a transfer chamber 1103, a substrate supply chamber 1105, a mask stock chamber 1106, a delivery chamber 1107, a glass supply chamber 1108, a bonding chamber 1109, and an extraction. A room 1110 and the like are provided. The film forming apparatus 100 can be used for forming different functional layers such as a light emitting layer, a hole injecting layer, a hole transporting layer, an electron transporting layer, and an electrode layer of an organic EL panel. Materials and masks may differ. Each film forming apparatus 100 may be an apparatus including two vapor deposition stages as described in the first embodiment, or may be an apparatus including a single vapor deposition stage. When two vapor deposition stages are provided, the vapor deposition substrate is unloaded and the vapor deposition substrate is unloaded on the other vapor deposition stage until the vapor deposition on one vapor deposition stage is completed. The alignment can be completed and the film formation position can be set.

  A substrate is supplied to the substrate supply chamber 1105 from the outside. A robot 1120 as a transfer mechanism is arranged in each of the transfer chamber 1101, the transfer chamber 1102, and the transfer chamber 1103. The robot 1120 transfers the substrate between the chambers. At least one of the film forming apparatuses 100 included in the manufacturing system 300 of the present embodiment includes an organic material vapor deposition source. The plurality of film forming apparatuses 100 included in the manufacturing system 300 may be apparatuses that form the same material, or apparatuses that form different materials. For example, in each film forming apparatus, organic materials having different emission colors may be vapor-deposited. In the manufacturing system 300, an organic material is deposited on the substrate supplied from the substrate supply chamber 1105, or a film of an inorganic material such as a metal material is formed to manufacture an organic EL panel.

  In the mask stock chamber 1106, the mask used in each film forming apparatus 100 and having a film deposited thereon is conveyed by the robot 1120. The mask can be washed by collecting the mask transported to the mask stock chamber 1106. Further, it is also possible to store a cleaned mask in the mask stock chamber 1106 and set it in the film forming apparatus 100 by the robot 1120.

  A glass material for sealing is supplied to the glass supply chamber 1108 from the outside. In the bonding chamber 1109, an organic EL panel is manufactured by bonding a glass material for sealing to the film-formed substrate. The manufactured organic EL panel is taken out from the take-out chamber 1110.

  The film forming apparatus included in the present manufacturing system is, as already described in the first and second embodiments, a frame body fixed on the vacuum chamber via the legs arranged on the side wall of the vacuum chamber. And the frame has a plurality of beams parallel to the side walls of the vacuum chamber. A support plate to which the alignment drive unit and the alignment camera are fixed is fixed to the plurality of beams of the frame body, and the support plate is supported at a distance from the top plate of the vacuum chamber.

Therefore, in the film forming apparatus included in the present manufacturing system, the alignment drive unit and the alignment camera are isolated from the deformation of the apparatus itself due to the pressure difference between the inside and the outside, and the vibration transmitted from the adjacent transfer chamber or the film forming apparatus. The operation is extremely stable and speeds up. In the present manufacturing system, since it is possible to form a film on a large-area substrate with high precision, it is possible to manufacture an organic EL panel with high image quality at a high yield. Moreover, since the weight increase of each film forming apparatus is suppressed, the total weight of the manufacturing system can be suppressed. As described above, the present invention can be suitably implemented in a manufacturing system for manufacturing an organic EL element, but may be implemented in a manufacturing system for manufacturing other devices.
According to the present embodiment, even if the film forming chamber is deformed or vibrates inside and outside the film forming chamber, the operation of the alignment mechanism is not easily affected, and the film forming apparatus is provided with a light weight. A system can be provided.

[Other Embodiments]
The present invention is not limited to the embodiment described above, and many modifications can be made within the technical idea of the present invention.
For example, the plurality of beams forming the frame body do not have to have the same cross-sectional shape. Although the beam having the I-shaped cross section is used in the first embodiment and the beam having the H-shaped cross section is used in the second embodiment, one frame may be configured by combining the I-shaped and H-shaped beams. Further, the cross-sectional shape is not limited to the I-shape or the H-shape as long as it has a large section modulus.

  Further, the alignment drive unit is not limited to a mechanism that moves the substrate support unit to perform alignment. It may be one that moves the mask support, or a mechanism that moves both the substrate support and the mask support. That is, the mask 13 may be left at a predetermined position and the substrate 11 may be moved. Alternatively, the substrate 11 may be left at a predetermined position and the mask 13 may be moved to perform alignment, or the substrate 11 may be moved. Both the mask 13 and the mask 13 may be moved. For example, when the weight of the mask is larger than that of the substrate, the alignment accuracy may be improved by moving the substrate. In addition, it may be possible to shorten the alignment time by moving both the substrate and the mask to adjust the relative positional relationship. The selection of the object to be moved in this way can be arbitrarily designed according to the form and purpose of the device.

  Further, the arrangement and the number of the substrate supporting portion for supporting the substrate, the mask supporting portion for supporting the mask, or the alignment camera are not limited to those in the above-described embodiments. It can be appropriately changed depending on the size and weight of the substrate, the size and weight of the mask, the number of alignment marks, the layout position, and the like.

  Further, the film forming apparatus of Embodiment 1 is provided with two vapor deposition stages, and two sets of the alignment drive unit, the support plate and the frame are independently arranged on the vacuum chamber, but the number of vapor deposition stages is two. The number is not limited to one and may be one or three or more. Also in the case of three or more units, it is desirable to dispose a set including the alignment drive unit, the support plate and the frame body independently on the vacuum chamber for each vapor deposition stage.

  Further, instead of a device in which one vapor deposition source device moves between two vapor deposition stages to alternately vapor deposit, a vapor deposition device in which each vapor deposition stage includes a dedicated vapor deposition source device may be used. The form of the vapor deposition source device may be a single vapor deposition source or an array of a plurality of vapor deposition sources. Further, a rate control sensor for controlling or controlling the evaporation rate from the vapor deposition source may be arranged in the film forming chamber. Further, when the organic material is formed on the substrate 11, the relative position between the substrate 11 and the vapor deposition source device 16 may be in the form of scanning as in the embodiment, or may be fixed. ..

  Further, in the first embodiment, the mask 13 is arranged below the substrate 11 for the purpose of making the surface of the substrate 11 on which the film is to be formed face down. The arrangement of the substrate, the mask and the arrangement is not limited to this as long as the arrangement can be patterned. For example, the substrate 11 and the mask 13 may be vertically arranged along the vertical direction, or the film formation surface of the substrate 11 may be arranged upward.

  Further, the present invention can be suitably applied to an apparatus for forming an organic film that constitutes an organic EL element, but it can be applied to an apparatus for forming a film other than the organic EL element or a film of a device other than the organic EL element. You can use it.

  1 ... Vacuum chamber / 1B ... Bottom plate / 1S ... Side wall / 1R ... Top plate / 11 ... Substrate / 12 ... Substrate support / 13 ... Mask / 14 ... Mask support part / 15 ... Alignment drive part / 16 ... Deposition source device / 21 ... Support plate / 22 ... Leg parts / 23, 24, 25 ... Beam / 32 ... Alignment camera / 33 ... Airtight window / 100 ... Film forming apparatus / 110 ... Outer wall / 110a ... Part of outer wall / 110b ... Top plate / 111 ... Substrate / 113 ... Film formation Mask / 132 ... Alignment camera / 133 ... Airtight window / 300 ... Manufacturing system for manufacturing organic EL panel / 1101, 1102, 1103 ... Transfer chamber / 1105 ... Substrate supply chamber / 1106・ ・ ・ Mask stock room / 1107 ・ ・ ・ Transfer room / 1108 ・ ・ ・ Glass supply room / 1109 ・ ・ ・ Laminating room / 1110 ・ ・ ・ Ejecting room / 1120 ・ ・ ・ Robot

Claims (10)

A vacuum chamber,
An alignment drive unit arranged outside the vacuum chamber, for adjusting the relative position of the mask and the substrate arranged inside the vacuum chamber,
A frame body fixed on the vacuum chamber via legs arranged on the side wall of the vacuum chamber,
The frame has a plurality of beams parallel to the side wall of the vacuum chamber,
The alignment drive unit is fixed to a support plate that is fixed to the plurality of beams and is supported at a distance from a top plate of the vacuum chamber,
A film forming apparatus characterized by the above. The frame body is a ladder-shaped frame body in which a plurality of beams parallel to the side wall of the vacuum chamber are connected.
The film forming apparatus according to claim 1, wherein: The plurality of beams included in the frame body are beams having a H-shaped or I-shaped cross section taken in a direction orthogonal to the longitudinal direction,
The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus. Two sets of the alignment drive unit, the support plate, and the frame are arranged on the vacuum chamber.
The film forming apparatus according to any one of claims 1 to 3, characterized in that. The alignment drive unit adjusts a relative position between a mask support unit supporting the mask and a substrate support unit supporting the substrate,
The film forming apparatus according to any one of claims 1 to 4, characterized in that. An alignment camera for capturing an image of the alignment mark of the mask and the substrate is fixed to the support plate,
The film forming apparatus according to any one of claims 1 to 5, wherein The support plate is provided with a window for the alignment camera to capture an image of the alignment mark of the mask and the substrate,
The film forming apparatus according to claim 6, wherein A plurality of film forming apparatuses according to any one of claims 1 to 7 are provided,
A manufacturing system characterized by the above. A plurality of film forming apparatuses according to any one of claims 1 to 7 are provided, and at least one of the film forming apparatuses is provided with an evaporation source of an organic material.
A manufacturing system for an organic EL panel, which is characterized in that An organic EL panel is manufactured using the organic EL panel manufacturing system according to claim 9.
A method of manufacturing an organic EL panel, comprising:

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