CN101359579A - Vacuum chamber for vacuum processing appartaus - Google Patents
Vacuum chamber for vacuum processing appartaus Download PDFInfo
- Publication number
- CN101359579A CN101359579A CNA2007101399292A CN200710139929A CN101359579A CN 101359579 A CN101359579 A CN 101359579A CN A2007101399292 A CNA2007101399292 A CN A2007101399292A CN 200710139929 A CN200710139929 A CN 200710139929A CN 101359579 A CN101359579 A CN 101359579A
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- China
- Prior art keywords
- chamber
- vacuum chamber
- main body
- vacuum
- side frame
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- G—PHYSICS
- G02—OPTICS
- G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
- G02C13/00—Assembling; Repairing; Cleaning
- G02C13/008—Devices specially adapted for cleaning contact lenses
Abstract
A vacuum chamber 1 has the structure of being able to be divided freely into a rectangular chamber main body 2, triangular side frames 3a and 3b detachably and tightly joined to both side faces of the chamber main body 2 by bolting, top plates 5 and 8 joined to respective top faces of the chamber main body 2 and the side frames 3a and 3b each of which has an opening, and bottom plates 7 and 9 joined to respective bottom faces of the chamber main body 2 and the side frames 3a and 3b each of which has an opening. In order to enable the shape or size of a vacuum chamber to be changed even after the installation of the vacuum chamber by a user's request etc.
Description
Present patent application is that application number is 200410071433.2, the applying date is on May 8th, 2004, denomination of invention is divided an application for the patent application of " vacuum chamber that is used for vacuum treatment installation ".
Technical field
The present invention relates to a kind of vacuum chamber that is used for vacuum treatment installation, this vacuum chamber is used for vacuum treatment installation, as sputter deposition apparatus.
Background technology
In recent years, rely on vacuum treatment installation, as on the substrate that constitutes by glass etc., forming the progress of deposition technique in the usefulness sputtering system of metal film such as lead etc., even can on big substrate, also realize high-precision deposition.In addition, in recent years, shown in Fig. 8 and 9, only become main flow with regard to the multicell vacuum treatment installation that carries out a plurality of processing continuously by moving in a vacuum.
Multicell vacuum treatment installation 30 shown in Figure 8 comprises that six are looped around central transfer chamber 32 vacuum processing chamber 33a, 33b, 33c, 33d, 33e and the 33f on every side that substrate automatic conveyor 31 wherein has been installed.In addition, multicell vacuum treatment installation 40 shown in Figure 9 comprises that three are looped around central transfer chamber 42 vacuum processing chamber 43a, 43b and the 43c on every side that substrate automatic conveyor 41 wherein has been installed.
For this reason, the vacuum chamber that is used for vacuum treatment installation increase along with the expansion of sizes of substrate (for example, so-called the 6th generation substrate length and wide be 1800mm * 1500mm, the 7th generation substrate length and wide be 2100mm * 1850mm).Thereby, because also big than routine of the lathe that is used for vacuum chamber, so the manufacturing cost of vacuum chamber raises.
Up to now, for this reason, a kind of preparation method has been proposed, this method can be by being split as a plurality of assemblies to frame-like chamber main body, and weld a plurality of assemblies that separate and obtain big vacuum chamber, and do not increase lathe, reduce manufacturing cost, [for example, seeing patent documentation 1: Japanese patent application publication No. H8-64542 (Fig. 1)].
By the way, this preparation method in the above-mentioned patent documentation 1 can not move each assembly again after manufacturing, because the sidewall of vacuum chamber is to be split as many assembly by welding to obtain.Therefore, can not change the size and the shape of vacuum chamber sidewall after the manufacturing.
In addition, in above-mentioned patent documentation 1, because the top board and the base plate that are installed on vacuum chamber sidewall upper surface and the lower surface are respectively an integral body, rather than separate, so their enormous size, weight is also big.
For this reason, need huge lifting facility to promote this top board and base plate, so manufacturing cost also uprise.And, because the size of top board and base plate is still huge, so when the state with finished product or the preceding product of assembling is transported to the installation position with vacuum chamber, need special-purpose large scale trailer etc.
Summary of the invention
So purpose of the present invention is for providing a kind of vacuum chamber that is used for vacuum treatment installation, its size and shape can easily change after manufacturing.
In addition, purpose of the present invention is for providing a kind of vacuum chamber that is used for vacuum treatment installation, and this vacuum chamber does not need large-sized lifting facility and large-sized exclusive trail car to wait to transport, even the size after it is installed is very big.
In order to achieve the above object, the invention is characterized in: in a kind of vacuum chamber that is used by vacuum treatment installation, this vacuum chamber can freely be split as the polygon chamber main body of frame-like; Has opening and firmly and be detachably connected to the polygon side frame of at least one side of chamber main body with opening; Be connected to the chamber main body and have each top board on each end face of side frame of opening; Be connected to the chamber main body and have each base plate on each bottom surface of side frame of opening.
In addition, the invention is characterized in: a substrate automatic conveyor is installed in the main body of chamber, its substrate is put into a plurality of vacuum processing chambers of being located at its outside and with substrate from wherein taking out.
Description of drawings
Fig. 1 is the perspective view of the vacuum chamber of first embodiment of explanation the present invention;
Fig. 2 is the perspective illustration of the vacuum chamber of first embodiment of explanation the present invention;
Fig. 3 is the figure of the manufacture process of the vacuum chamber of second embodiment of explanation the present invention;
Fig. 4 is the figure of the manufacture process of the vacuum chamber of the 3rd embodiment of explanation the present invention;
Fig. 5 is the figure of the shape of the vacuum chamber of the 4th embodiment of explanation the present invention;
Fig. 6 is the figure of the shape of the vacuum chamber of the 5th embodiment of explanation the present invention;
Fig. 7 is the figure of the shape of the vacuum chamber of the 6th embodiment of explanation the present invention;
Fig. 8 is the schematic plan view of multicell vacuum treatment installation in the explanation conventional embodiment; With
Fig. 9 is the schematic plan view of multicell vacuum treatment installation in the explanation conventional embodiment.
Description of reference numerals
1,13,15,17,20,22 vacuum chambers
2,2a, 2b, 2c chamber main body
3a, 3b, 12a, 12b, 14a, 14b, 14c, 14d, 16,18,19,21a, 21b, 21c, 21d side frame
5,8 top boards
6 substrate automatic conveyors
7,9 base plates
Embodiment
Below, will based on shown in embodiment explanation the present invention.
(embodiment 1)
Fig. 1 is the perspective view of the vacuum chamber of first embodiment of explanation the present invention, and Fig. 2 is its decomposition diagram.For example, can use the vacuum chamber that is used for vacuum treatment installation (hereinafter referred to as vacuum chamber) in the present embodiment as transfer chamber, this transfer chamber has the substrate automatic conveyor in the centre that is contained in the multicell monocrepid type sputter deposition apparatus (hereinafter referred to as precipitation equipment) that has six process chambers.
As shown in Figure 1, the central compartment's main body 2 that forms coffin by the cross section that separates in its both sides is connected with 3b with the side frame 3a that each cross section forms triangle space, and the vacuum chamber 1 of first embodiment of the present invention forms hexagon.On each side of chamber main body 2 and side frame 3a and 3b (six faces), be formed for putting into and taking out the opening 4 of substrate (not shown) totally.Chamber main body 2 and side frame 3a and 3b are by making such as aluminium and the such metal of stainless steel.
On the end face of frame-like rectangular chamber main body 2 and bottom surface, form the opening that is connected with top board 5 and base plate 7 respectively, wherein, substrate automatic conveyor 6 is installed on base plate 7.In addition, also on the long limits of chamber main body 2 and be connected with on two sides of side frame 3a and 3b and form opening.And, on two sides of chamber main body 2 minor faces, be formed for putting into and taking out the opening 4 of substrate (not shown).
In addition, on the end face of frame-like triangle side frame 3a and 3b and bottom surface, form the opening that is connected with top board 8 and base plate 9 respectively.And, at the opening that forms on two sides on the long limit of side frame 3a and 3b on the side that is connected to chamber main body 2.Further, on two sides of side frame 3a and 3b minor face, be formed for putting into and taking out the opening 4 of substrate (not shown).
Below, the manufacture method of the vacuum chamber 1 of above-mentioned the present embodiment is described.
Then, substrate automatic conveyor 6 is installed on the base plate 7 of linking chamber main body 2, after this top of top board 5 being linked chamber main body 2 by O shape ring 10c with bolt 11c.Then, make hexagon vacuum chamber 1 shown in Figure 1 with bolt 11d and 11e by each top that O shape ring 10d and 10e link side frame 3a and 3b respectively with top board 8.
The vacuum chamber of as above making 1 is installed in the central authorities of the precipitation equipment of six process chambers, as the transfer chamber that is equipped with substrate automatic conveyor 6.Six process chambers (load/unload chamber, preheating chamber, film formation chamber, substrate cooling chamber etc.) that will not show by the gate valve (not shown) be installed in vacuum chamber 1 side each opening 4 around.
Like this, in the present embodiment, assemble the assembly that is divided into three groups respectively (the chamber main body 2 of substrate automatic conveyor wherein is housed, and the side frame 3a and the 3b on both sides) by bolt and make vacuum chamber.Therefore, for example, even the deposition process on vacuum chamber 1 meron that installation makes etc. changes, still can be according to the increase of process chamber/reduce, by opening bolt 11a and 11b, remove triangle side frame 3a and 3b from chamber main body 2, and easily triangle side frame 3a and 3b are changed the shape that changes this vacuum chamber (transfer chamber) for the side frame of other shape.Therefore, can respond user's particular demands neatly.
In addition, owing to can use the chamber main body 2 that substrate automatic conveyor 6 wherein is housed,, can realize that therefore cost reduces so can realize in advance producing in enormous quantities as also can be used as the general purpose module of the chamber main body of other vacuum chamber.
In addition, in the present embodiment, be divided into three groups assembly (the chamber main body 2 of substrate automatic conveyor wherein is housed, and the side frame 3a and the 3b of both sides) respectively and make vacuum chamber 1 by assembling.So,, can keep still that chamber main body 2 separately and side frame 3a and 3b's is small-sized even when make using the large scale vacuum chamber of large size substrate.Therefore, owing to can need not easily make large-sized vacuum chamber by large-sized lathe customized, reduce so can realize cost by conventional lathe.
And, even when making the large scale vacuum chamber that uses large size substrate, still can compress the size of the top board 5 of linking chamber main body 2 separately.So, can alleviate the weight of top board 5, and further can be easily by metal derby processing top board 5.
In addition, in the present embodiment, by being split as three groups of assemblies (the chamber main body 2 of substrate automatic conveyor wherein is housed, and the side frame 3a and the 3b of both sides) and make vacuum chamber 1.So, even when making the large scale vacuum chamber that uses large size substrate, still can keep the small-sized of each assembly (chamber main body 2 and side frame 3a and 3b).Therefore, can easily be transported to the installation site, and can easily assemble them in the installation site by assemblies that these separate each such as common trailers.
(embodiment 2)
In first embodiment, vacuum chamber has such structure: connect the both sides that leg-of- mutton side frame 3a and 3b are connected to as the rectangular chamber main body 2 of center (core) by bolt and be assembled into hexagonal vacuum chamber.But in the present embodiment, as shown in Figure 3, vacuum chamber has such structure: connect the both sides that the side frame 12a of rectangle and 12b are connected to as the rectangular chamber main body 2 of center (core) by bolt and be assembled into foursquare vacuum chamber 13.Because this vacuum chamber is except identical with first embodiment the side frame 12a that uses rectangle and the 12b, so will omit the description of repetition.
(embodiment 3)
In second embodiment, foursquare vacuum chamber has such structure: connect the both sides that the side frame 12a of rectangle and 12b are connected to as the rectangular chamber main body 2 of center (core) by bolt and be assembled into foursquare vacuum chamber.In the present embodiment, as shown in Figure 4, vacuum chamber has such structure: by the bolt connection each face that leg-of-mutton side frame 14a, 14b, 14c and 14d are connected to the square vacuum chamber 13 that obtains in second embodiment is assembled into octagonal vacuum chamber 15.
Octagon vacuum chamber 15 in the present embodiment all has opening on each side, round these openings eight process chamber (not shown)s altogether can be installed.
(embodiment 4)
In above-mentioned each embodiment, vacuum chamber all has the structure of rectangular chamber main body 2 as center (core).But, in the present embodiment as shown in Figure 5, pentagonal vacuum chamber 17 has such structure: connect long also the going up that leg-of-mutton side frame 16 is connected to as the trapezoidal chamber main body 2a of center (core) by bolt and be assembled into the pentagon vacuum chamber.
(embodiment 5)
In the present embodiment, as shown in Figure 6, heptagonal vacuum chamber 20 has such structure: connect by bolt trapezoidal side frame 18 (shape is less than the shape of chamber main body 2b) is connected on the long limit as the chamber main body 2b of center (core), and by the bolt connection leg-of-mutton side frame 19 is connected on its another minor face and is assembled into heptagon vacuum chamber 20.
(embodiment 6)
In the present embodiment, as shown in Figure 7, octagonal vacuum chamber 22 has such structure: connect each side that leg-of- mutton side frame 21a, 21b, 21c and 21d are connected to as the square chamber main body 2c of center (core) by bolt and be assembled into octagon vacuum chamber 22.
For second shown in Fig. 3-7 to the 6th embodiment, even after vacuum chamber is installed, also can be according to user's transposing square or leg-of-mutton side frames such as demand, this side frame connects by bolt and is connected with 2c as the quadrangle of center (core) (rectangle, square, trapezoidal etc.) chamber main body 2,2a, 2b, wherein in the main body of chamber the substrate automatic conveyor is housed.Therefore, can easily change into vacuum chamber the shape of arbitrary polygon.
In addition, particularly for the 3rd embodiment shown in Figure 4, can connect many side frame 12a, 12b, 14a, 14b, 14c and 14d be connected on the side of quadrangle (rectangle) the chamber main body 2 that the substrate automatic conveyor wherein is housed by bolt and obtain bigger vacuum chamber.Therefore, also can easily respond bigger substrate.
As mentioned above, vacuum chamber of the present invention can freely be split as the polygon chamber main body of frame-like; Has opening and firmly and be detachably connected to the polygon side frame of at least one side of chamber main body with opening; Be connected to the chamber main body and have each top board on each end face of side frame of opening; Be connected to the chamber main body and have each base plate on each bottom surface of side frame of opening.So, after vacuum chamber assembling and installing, because can be according to user's demand etc., by easily the side frame transposing being changed the shape of vacuum chamber for other polygon side frame, so can respond user's particular requirement specification neatly.
In addition, according to the present invention, can obtain vacuum chamber by assembling chamber main body, side frame, top board and base plate separately.Therefore, even when making the large scale vacuum chamber that uses large size substrate, still can keep each assembly both little light again, because chamber main body, side frame, top board and base plate separate separately.So,, reduce so can realize cost owing to can not use large-sized lathe customized easily to make large-sized vacuum chamber by conventional lathe.
And, even when making the large scale vacuum chamber that uses large size substrate, still can keep each assembly both little light again, because chamber main body, side frame, top board and base plate separate separately.So, can be transported to the installation site by assemblies that easily these separate each such as common trailers, and can easily assemble them in the installation site.
Claims (2)
1. vacuum chamber that is used for vacuum treatment installation, wherein vacuum chamber can freely be split as the polygon chamber main body of frame-like; Has opening and firmly and be detachably connected to the polygon side frame of at least one side of chamber main body with opening; Be connected to the chamber main body and have each top board on each end face of side frame of opening; Be connected to the chamber main body and have each base plate on each bottom surface of side frame of opening.
2. according to the vacuum chamber of claim 1, a substrate automatic conveyor is installed in the main body of chamber wherein, this automatic conveyor substrate is put into a plurality of vacuum processing chambers of being located at its outside and with substrate from wherein taking out.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003129754A JP2004335743A (en) | 2003-05-08 | 2003-05-08 | Vacuum chamber for vacuum processing apparatus |
| JP129754/2003 | 2003-05-08 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100714332A Division CN100459048C (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber for vacuum processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101359579A true CN101359579A (en) | 2009-02-04 |
| CN101359579B CN101359579B (en) | 2010-06-23 |
Family
ID=33505463
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101399288A Expired - Lifetime CN101419902B (en) | 2003-05-08 | 2004-05-08 | Multi-chamber vacuum processing apparatus |
| CNB2004100714332A Expired - Lifetime CN100459048C (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber for vacuum processing device |
| CN2007101399292A Expired - Lifetime CN101359579B (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber |
| CN2005101285606A Expired - Lifetime CN1776008B (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber and dividing method thereof |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101399288A Expired - Lifetime CN101419902B (en) | 2003-05-08 | 2004-05-08 | Multi-chamber vacuum processing apparatus |
| CNB2004100714332A Expired - Lifetime CN100459048C (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber for vacuum processing device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005101285606A Expired - Lifetime CN1776008B (en) | 2003-05-08 | 2004-05-08 | Vacuum chamber and dividing method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2004335743A (en) |
| KR (2) | KR100745366B1 (en) |
| CN (4) | CN101419902B (en) |
| TW (4) | TWI281708B (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100682209B1 (en) | 2002-06-21 | 2007-02-12 | 어플라이드 머티어리얼스, 인코포레이티드 | Transfer chamber for vacuum processing system |
| KR100441875B1 (en) | 2003-06-02 | 2004-07-27 | 주성엔지니어링(주) | Separable type transfer chamber |
| US7784164B2 (en) | 2004-06-02 | 2010-08-31 | Applied Materials, Inc. | Electronic device manufacturing chamber method |
| KR100803726B1 (en) * | 2005-08-12 | 2008-02-15 | 주식회사 아이피에스 | Structure of Transfer Module |
| JP4791110B2 (en) * | 2005-09-02 | 2011-10-12 | 東京エレクトロン株式会社 | Vacuum chamber and vacuum processing equipment |
| JP4355314B2 (en) * | 2005-12-14 | 2009-10-28 | 東京エレクトロン株式会社 | Substrate processing apparatus and lid fishing support apparatus |
| KR20070082056A (en) * | 2006-02-14 | 2007-08-20 | 브룩스오토메이션아시아(주) | Transfer chamber for vacuum processing apparatus of substrate |
| KR100981099B1 (en) | 2006-04-12 | 2010-09-09 | 엘아이지에이디피 주식회사 | Flat-panel Display making Apparatus |
| KR100790797B1 (en) * | 2006-06-08 | 2008-01-02 | 주식회사 아이피에스 | Vacuum Processing Apparatus |
| US20080025821A1 (en) * | 2006-07-25 | 2008-01-31 | Applied Materials, Inc. | Octagon transfer chamber |
| DE102007057644A1 (en) * | 2007-11-28 | 2009-06-04 | Oerlikon Trading Ag, Trübbach | Vacuum chamber on a frame basis for coating systems |
| KR100978851B1 (en) * | 2008-03-21 | 2010-08-31 | 주식회사 아이피에스 | Vacuum Processing Apparatus |
| DE102009007897A1 (en) * | 2009-02-08 | 2010-08-12 | Oerlikon Trading Ag, Trübbach | Vacuum chamber for coating plants and method for producing a vacuum chamber for coating plants |
| KR101598176B1 (en) * | 2010-03-30 | 2016-02-26 | 주식회사 원익아이피에스 | Vacuum chamber |
| CN112295612A (en) * | 2020-11-12 | 2021-02-02 | 之江实验室 | Sectional type vacuum device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2511265A1 (en) * | 1981-08-13 | 1983-02-18 | Creusot Loire | EXTENSIBLE MODULAR VACUUM CHAMBER |
| JPH0864542A (en) * | 1994-08-25 | 1996-03-08 | Plasma Syst:Kk | Vacuum chamber for semiconductor processor and manufacture thereof |
| JP3723003B2 (en) * | 1998-12-18 | 2005-12-07 | 三菱重工業株式会社 | Vacuum processing system |
| JP4408520B2 (en) * | 2000-03-15 | 2010-02-03 | 株式会社アルバック | Vacuum processing equipment |
| JP4253107B2 (en) * | 2000-08-24 | 2009-04-08 | キヤノンアネルバ株式会社 | Substrate processing apparatus and expansion method thereof |
| JP4821074B2 (en) * | 2001-08-31 | 2011-11-24 | 東京エレクトロン株式会社 | Processing system |
| JP4843572B2 (en) * | 2007-07-06 | 2011-12-21 | 株式会社アルバック | Multi-chamber type vacuum processing equipment |
| JP2007294997A (en) * | 2007-07-06 | 2007-11-08 | Ulvac Japan Ltd | Vacuum chamber |
-
2003
- 2003-05-08 JP JP2003129754A patent/JP2004335743A/en active Pending
-
2004
- 2004-05-07 TW TW093112954A patent/TWI281708B/en active
- 2004-05-07 TW TW096125751A patent/TWI417408B/en active
- 2004-05-07 TW TW096125750A patent/TWI363658B/en active
- 2004-05-07 TW TW094143418A patent/TWI326715B/en active
- 2004-05-07 KR KR1020040032383A patent/KR100745366B1/en active IP Right Grant
- 2004-05-08 CN CN2007101399288A patent/CN101419902B/en not_active Expired - Lifetime
- 2004-05-08 CN CNB2004100714332A patent/CN100459048C/en not_active Expired - Lifetime
- 2004-05-08 CN CN2007101399292A patent/CN101359579B/en not_active Expired - Lifetime
- 2004-05-08 CN CN2005101285606A patent/CN1776008B/en not_active Expired - Lifetime
-
2005
- 2005-11-09 KR KR1020050106829A patent/KR100736243B1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| TW200613576A (en) | 2006-05-01 |
| CN1574232A (en) | 2005-02-02 |
| KR100745366B1 (en) | 2007-08-02 |
| TW200428495A (en) | 2004-12-16 |
| TWI363658B (en) | 2012-05-11 |
| TW200744755A (en) | 2007-12-16 |
| TWI326715B (en) | 2010-07-01 |
| KR100736243B1 (en) | 2007-07-06 |
| TWI417408B (en) | 2013-12-01 |
| CN1776008A (en) | 2006-05-24 |
| CN100459048C (en) | 2009-02-04 |
| TW200745364A (en) | 2007-12-16 |
| CN1776008B (en) | 2010-05-05 |
| CN101359579B (en) | 2010-06-23 |
| JP2004335743A (en) | 2004-11-25 |
| KR20050113574A (en) | 2005-12-02 |
| CN101419902A (en) | 2009-04-29 |
| TWI281708B (en) | 2007-05-21 |
| KR20040090496A (en) | 2004-10-25 |
| CN101419902B (en) | 2011-04-20 |
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