KR20080057960A - Vacuum chamber, fabricating apparatus and method thereof - Google Patents

Abstract

A vacuum chamber, a manufacturing apparatus therefor, and a manufacturing method therefor are provided to remove problems such as thermal modification and residual stress. A vacuum chamber includes a bottom plate(12), a side wall(14), and a joining part. A face of the bottom plate is processed. A face of the side wall is processed. The joining part is formed by friction mixing welding to join the bottom plate with the side wall. The bottom plate and the side wall are formed of an aluminum plate. The side wall is joined to an edge of the bottom plate.

Description

Vacuum chamber, its manufacturing apparatus and manufacturing method {VACUUM CHAMBER, FABRICATING APPARATUS AND METHOD THEREOF}

1 is a perspective view showing a schematic configuration of a vacuum chamber according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating a schematic configuration of a manufacturing apparatus for manufacturing the vacuum chamber of FIG. 1.

3 is a cross-sectional view taken along line III-III of FIG. 2.

4 is a perspective view of a joining tool used for friction stir welding in accordance with an embodiment of the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chamber, a manufacturing apparatus and a manufacturing method thereof, and more particularly, to a vacuum chamber used for manufacturing a flat panel display, a vacuum chamber manufacturing apparatus and a manufacturing method using friction stir welding.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes. Such flat panel displays include Liquid Crystal Display (LCD), Field Emission Display (FED), Plasma Display Panel (PDP) and Organic Light Emitting Display (PDP), etc. There is this.

Among these, the liquid crystal display typically includes a first substrate in which gate wirings and data wirings are arranged in a matrix, and a thin film transistor is formed at an intersection thereof, a second substrate bonded to the first substrate, and the two substrates. It comprises a liquid crystal layer filled in.

In the liquid crystal display of such a configuration, in order to manufacture a gate wiring, a data wiring, and a thin film transistor, unit process technologies such as thin film deposition, photography, etching, and cleaning are repeatedly used. It is done internally.

As described above, in order to manufacture a flat panel display including a liquid crystal display, a plurality of vacuum chambers are required. The vacuum chamber is mainly manufactured using aluminum materials through processes such as precision processing and anodizing surface treatment.

For example, conventionally, the entire inside of the thick aluminum plate was manufactured by digging, and such a manufacturing method is excessive in processing time, low effective utilization rate of the aluminum plate material, and vacuum in manufacturing a large vacuum chamber required for the enlargement of the display device. There was a problem that it is impossible to manufacture an aluminum raw material of the ultra-thick plate thickness corresponding to the height of the chamber.

As another example of manufacturing a vacuum chamber, Korean Patent Application No. 2002-87406 manufactures a first processing ingot from a first ingot and a second ingot, and manufactures a second processing ingot having the same side portion as the first processing ingot. A chamber fabrication method is disclosed in which the side portions of a first processed ingot and a second processed ingot are aligned, welded, and joined together.

According to this method, since the vacuum chamber is manufactured by joining two processed aluminum ingots, a large vacuum chamber can be manufactured by overcoming the size limitation of the aluminum ingot, but the first and second processing ingots are manufactured. In the case of using a method of still digging the entire inside of the thick aluminum plate, there is a problem that the effective utilization rate of the aluminum plate material is low.

In order to eliminate the problems of the prior arts, Korean Patent Application No. 2004-110164 discloses a manufacturing method for manufacturing a vacuum chamber by joining a faceted bottom plate and four faceted sidewalls by an electron beam welding method. .

According to this method, the effective utilization rate of the aluminum sheet can be improved, but many difficulties arise due to the use of a high-power electron beam apparatus and the bonding in a vacuum atmosphere, and problems that occur during melt bonding (heat deformation and residual stress). , Economical efficiency, etc.) has a problem of low quality of the vacuum chamber.

The present invention has been made to solve the above problems, and an object thereof is to provide a high quality vacuum chamber in which problems such as thermal deformation and residual stress are eliminated.

Another object of the present invention is to provide a manufacturing method and apparatus capable of effectively manufacturing the above-described vacuum chamber.

The first object of the present invention described above,

Faceted base plate; And

Faceted sidewalls; And

A joint formed by friction stir welding to join the bottom plate and the side wall

It can be achieved by a vacuum chamber comprising a.

According to an embodiment of the present invention, the bottom plate and the side wall may be formed of aluminum, the side wall may be bonded to the edge of the bottom plate.

Since the vacuum chamber of such a configuration is manufactured by friction stir welding, which is a solid state joining method, no melting occurs in the welded portion, so that an extruded structure of fine crystal grains remains, and a problem arises in the melt bonding method including electron beam welding (from liquid to solid phase). Pore, solidification crack, residual stress, heat deformation, etc. caused by the transformation are eliminated to improve the quality.

In order to manufacture a vacuum chamber of such a configuration, the present invention,

Welding table;

A fixing jig for fixing a bottom plate and a side wall to the welding table; And

Joining tools to form joints by friction stir welding the base and sidewalls

It provides a vacuum chamber manufacturing apparatus comprising a.

According to an embodiment of the present invention, the joining tool includes a shoulder and a pin member provided at an end of the shoulder. The bonding tool of this configuration is rotationally driven by the rotating unit and can be conveyed along the joint of the base plate and the side wall by the conveying unit.

Using the vacuum chamber manufacturing apparatus of such a configuration,

Preparing a faceted base plate and sidewalls;

Fixing the bottom plate and the sidewall to the welding table using a fixing jig; And

Friction stir welding the joint between the base and sidewalls while transferring a bonding tool

The vacuum chamber may be manufactured by a method of manufacturing a vacuum chamber including a.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

1 is a perspective view showing a schematic configuration of a vacuum chamber according to an embodiment of the present invention, Figure 2 is a diagram showing a schematic configuration of a manufacturing apparatus for manufacturing the vacuum chamber of FIG.

3 is a sectional view taken along line III-III of FIG. 2, and FIG. 4 is a perspective view of a joining tool used for friction stir welding according to an embodiment of the present invention.

First, as shown in FIG. 1, the vacuum chamber 10 according to the embodiment of the present invention includes a bottom plate 12 and sidewalls 14 bonded to edges of the bottom plate 12. Here, the bottom plate 12 and the side wall 14 may be manufactured by roughing an aluminum plate, and the side wall 14 may be prepared in the same number as the number of corners of the bottom plate 12.

At this time, the bottom plate 12 and the side wall 14 are joined by the joining tool 130 shown in FIG. 4 in a state of being installed on the welding table 120 by the fixing jig 110 shown in FIG.

The joining tool 130 is used for friction stir welding the bottom plate 12 and the side wall 14, and although not shown in detail, the shoulder 132 and the shoulder 132 that rotate at a set speed by a rotating unit. It may include a pin 134 provided at the end.

In addition, the shoulder 132 may be transported along a welding portion (WP) by a transfer unit (not shown), and the pin 134 may be formed with screw-shaped grooves to effectively generate plastic flow. have.

Bonding tool 130 of this configuration is friction stir at the joining interface of the base plate 12 and the side wall 14 while the shoulder 132 and the pin 134 is rotated at a constant speed and transported along the joining portion WP. The joining by welding occurs.

The friction stir welding using the joining tool 130 described above can work in one pass to a thickness of about 75 mm. Therefore, the above-mentioned friction stir welding enables the manufacture of an enlarged vacuum chamber.

Hereinafter, the method of manufacturing a vacuum chamber using the vacuum chamber manufacturing apparatus of the said structure is demonstrated.

First, the bottom plate 12 and the side wall 14 which were face-processed are prepared. As described above, the bottom plate 12 and the side wall 14 may be made of an aluminum plate.

Subsequently, the bottom plate 12 and the side wall 14 are fixed to the welding table 120 using the fixing jig 110.

Then, the joint part WP of the vacuum chamber 10 is joined by friction stir welding using the joining tool 130 which can move up and down.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

According to the embodiment of the present invention as described above, since the vacuum chamber is formed only by the bottom plate and the side wall, the effective utilization rate of the aluminum sheet can be improved, and a large vacuum chamber can be manufactured.

In addition, in the embodiment of the present invention, since the bottom plate and the sidewall are joined by friction stir welding, problems occurring during melt bonding including electron beam welding, for example, pores, solidification cracks, Problems such as residual stress and heat deformation can be eliminated.

Therefore, there is an effect that can produce a high quality vacuum chamber.

Claims (6)

Faceted base plate; Faceted sidewalls; And A joint formed by friction stir welding to join the bottom plate and the side wall Vacuum chamber comprising a. The method of claim 1, The bottom plate and the side wall is formed of an aluminum plate vacuum chamber. The method according to claim 1 or 2, The side wall is joined to an edge of the base plate. Welding table; A fixing jig for fixing the base plate and sidewalls manufactured by roughing an aluminum plate to the welding table; And A joining tool for forming a joint by friction stir welding the bottom plate and the side wall. Vacuum chamber manufacturing apparatus comprising a. The method of claim 4, wherein The joining tool is a vacuum chamber manufacturing apparatus including a shoulder and a pin member provided at the end of the shoulder. Preparing a base plate and sidewalls prepared by roughing an aluminum plate; Fixing the base plate and sidewalls to a welding table using a fixing jig; And Friction stir welding the joint between the base and sidewalls while transferring a bonding tool Method of manufacturing a vacuum chamber comprising a.

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