TWI324673B - - Google Patents

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Publication number
TWI324673B
TWI324673B TW96120246A TW96120246A TWI324673B TW I324673 B TWI324673 B TW I324673B TW 96120246 A TW96120246 A TW 96120246A TW 96120246 A TW96120246 A TW 96120246A TW I324673 B TWI324673 B TW I324673B
Authority
TW
Taiwan
Prior art keywords
clean room
purification device
micro
circulating air
gas
Prior art date
Application number
TW96120246A
Other languages
English (en)
Chinese (zh)
Other versions
TW200848669A (en
Original Assignee
Desiccant Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Desiccant Technology Corp filed Critical Desiccant Technology Corp
Priority to TW96120246A priority Critical patent/TW200848669A/zh
Publication of TW200848669A publication Critical patent/TW200848669A/zh
Application granted granted Critical
Publication of TWI324673B publication Critical patent/TWI324673B/zh

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  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
TW96120246A 2007-06-06 2007-06-06 Internal circulation air purification device for clean room TW200848669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96120246A TW200848669A (en) 2007-06-06 2007-06-06 Internal circulation air purification device for clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96120246A TW200848669A (en) 2007-06-06 2007-06-06 Internal circulation air purification device for clean room

Publications (2)

Publication Number Publication Date
TW200848669A TW200848669A (en) 2008-12-16
TWI324673B true TWI324673B (ja) 2010-05-11

Family

ID=44823910

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96120246A TW200848669A (en) 2007-06-06 2007-06-06 Internal circulation air purification device for clean room

Country Status (1)

Country Link
TW (1) TW200848669A (ja)

Also Published As

Publication number Publication date
TW200848669A (en) 2008-12-16

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