200817081 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種濃縮轉輪高溫活化之再生裝置及方 法，尤其是關於一種處理揮發性有機廢氣之濃縮轉輪線上 高溫活化之再生裝置及方法。 【先前技術】 進來，國際間對於環保議題及工業安全衛生日益重 、 視，考量工業廢氣對環境及勞工以至於一般大眾身體產生 之危害，對於工業廢氣排放標準日趨嚴格，國内外法規都 制定出濃度及臭味的排放標準。工業廢氣中對於揮發性有 機氣體的處理，在高濃度時多採用冷凝法收集，而在低濃 度且大風量時則以物理吸附方式濃縮處理後，再送往小型 焚化爐燃燒或以冷凝裝置回收較為經濟有效。以半導體業 晶圓廠產生的有機廢氣成分為例，常含有如二甲基二硫醇 ( (Dimethyl Sulfoxide)、N-甲基口比嘻酮(N-Methyl Pyrolidone )、乙醇铵(2-Aminoethanol)、二甲基二硫醇（Dithiolethylene Glycol)、二甲基硫醇(Dimethyl Sulfide)、異丙醇(Is〇pr〇pyl Alcohol)、丙酮(Acet〇ne)等化合物，以沸石轉輪吸附濃縮廢 氣後’再以焚化爐於攝氏600〜900度以上之溫度燃燒，分 解這些揮發性有機物質以及臭氣和毒氣最有效。目前以吸 • 附濃縮濟石轉輪處理加上燃燒焚化的方式，進行揮發性有 機氣體的廢氣排放處理，已在半導體及光電業界廣為採用 5 200817081 工業上常以吸附濃縮沸石轉輪焚化系統處理揮發性有 機廢氣，其處理效率可穩定達到符合揮發性有機廢氣 (volatile organic compounds, VOCs)排放標準。然而，吸附 濃縮沸石轉輪最大之處理問題為廢氣中含多量高沸點物 質、聚合物質、脫附熱能量不足無法有效脫附出、或廢氣 中混排其它粒狀污染物，所導致之整體處理效率下降。光 電業製程及使用之物料與半導體相近，但在含高沸點VOCs 去光阻劑之使用量上遠高於半導體業，故使得其排放廢氣 組成上之高沸點VOCs較多；同時這類高沸點物質中，亦 同時是聚合物者佔大多數。這類高沸點VOCs雖容易吸附 於沸石轉輪上，但由於系統設計之安全考量，使得脫附高 沸點VOCs溫度不足，所以往往造成脫附不易，日久後高 沸點VOCs將蓄積其上、佔據吸附位置，影響系統整體效 能，故成為部份光電業應用沸石吸附濃縮焚化系統效能不 彰之因；而以往亦有廠家欲以提高脫附溫度、以增加高沸 點物質脫附效率，但這項操作措施容易造成系統跳機、形 成無通風之密閉狀態，若無緊急處理程序如灑水、喷入冷 卻氮氣等，如此將造成沸石吸附轉輪組合處產生悶熱狀 態，嚴重亦使得其局部溫度異常突升、讓沸石轉輪產生結 構性之永久破壞。 為防止沸石轉輪受到高沸點及（或）聚合物VOCs蓄 積，佔據沸石轉輪活性吸附位置導致系統效能不彰等問 題，沸石轉輪可藉由高溫活化來解決上述問題。 目前工業上一般採用之活化再生方式可分為線上活化 200817081 再生或線外活化再生二種，線外活化再生例如於美國專利 案4957721、日本公開特許62-282639及63_156542等所 述’其係將使用一段時間之沸石轉輪拆卸下來，在以更高 溫度（通常為300〜l〇〇〇°C )直接加熱或高溫氣體處理，使 蓄積之高海點物質因受到一定程度之溫度作用而斷鍵成為 小分子’而被碳化或脫除。然而，沸石轉輪之拆卸程序繁 雜’雖然可將蓄積之高沸點物質有效分解脫除，但沸石轉 ^ 輪拆卸過程容易造成轉輪結構損壞及吸附劑孔洞結構破 壞’而失去吸附能力或因劣化粉碎而損失。 線上活化再生例如日本公開昭63-232823、 63-310636、英國專利案Brit· 1546437及德國專利案Ger.200817081 IX. The invention relates to a regenerative device and method for high-temperature activation of a concentrated reel, in particular to a regenerative device and method for high-temperature activation of a concentrated reel line for treating volatile organic waste gas . [Previous technology] In the international arena, environmental issues and industrial safety and health are becoming more and more important. Considering the harm of industrial waste gas to the environment and labor to the general public, the industrial exhaust emission standards are becoming stricter, and domestic and foreign regulations are formulated. Emission standards for concentration and odor. The treatment of volatile organic gases in industrial waste gas is mostly collected by condensation method at high concentration, and concentrated by physical adsorption at low concentration and high air volume, and then sent to small incinerator for combustion or recovered by condensing device. More economical and effective. For example, organic waste gas components produced by semiconductor fabs often contain, for example, Dimethyl Sulfoxide, N-Methyl Pyrolidone, and 2-Aminoethanol. ), dimethyl dithiol (Dithiolethylene Glycol), dimethyl thiol (Dimethyl Sulfide), isopropanol (Is 〇 pr 〇 pyl Alcohol), acetone (Acet 〇 ne) and other compounds, adsorption and concentration by zeolite After the exhaust gas, it is burned at a temperature of 600-900 degrees Celsius or higher in the incinerator. It is most effective in decomposing these volatile organic substances and odors and poisonous gases. At present, it is treated with a concentrated jewel wheel and a combustion incineration method. Exhaust gas emission treatment of volatile organic gases has been widely used in the semiconductor and optoelectronics industry. 5 200817081 Industrially, the volatile organic waste gas is treated by an adsorption-concentrated zeolite wheel incineration system, and the treatment efficiency can be stabilized to meet the requirements of volatile organic waste gas ( Volatile organic compounds (VOCs) emission standards. However, the biggest problem in the adsorption and concentration of zeolite runners is that the exhaust gas contains a large amount of high-boiling substances, polymer substances, and desorption heat energy. Insufficient to be effectively desorbed, or other particulate pollutants mixed in the exhaust gas, resulting in a decrease in overall processing efficiency. The photovoltaic industry process and materials used are similar to semiconductors, but the use of high-boiling VOCs to remove photoresist It is much higher than the semiconductor industry, so it has more high-boiling VOCs in its exhaust gas composition. At the same time, among these high-boiling substances, polymers are also the majority. These high-boiling VOCs are easy to adsorb to zeolite. On the wheel, due to the safety considerations of the system design, the temperature of the desorption high-boiling VOCs is insufficient, so the desorption is often difficult. After a long time, the high-boiling VOCs will accumulate on the adsorption site and affect the overall performance of the system. In the photovoltaic industry, the efficiency of the zeolite adsorption and concentration incineration system is not good. In the past, some manufacturers wanted to increase the desorption temperature to increase the desorption efficiency of high-boiling substances. However, this operation method easily caused the system to jump and form no ventilation. In the closed state, if there is no emergency treatment procedure such as watering, spraying nitrogen gas, etc., this will cause the zeolite adsorption wheel combination to be stuffy. The state is severe, and the local temperature is abnormally raised, causing structural permanent damage to the zeolite runner. In order to prevent the zeolite runner from being accumulating high boiling point and/or polymer VOCs, occupying the active position of the zeolite runner leads to system efficiency. Inadequate problems, the zeolite runner can solve the above problems by high temperature activation. At present, the activated regeneration method generally used in the industry can be divided into two types: online activation 200817081 regeneration or off-line activation regeneration, and off-line activation regeneration such as US patent. Case 4957721, Japanese Laid-Open Patent Publication Nos. 62-282639 and 63_156542, etc., which are used to disassemble the zeolite wheel for a period of time, and directly heat or high-temperature gas at a higher temperature (usually 300 to l ° ° C). The treatment is such that the accumulated high sea point substance is carbonized or removed by being broken into a small molecule by a certain degree of temperature. However, the disassembly procedure of the zeolite runner is complicated. Although the accumulated high-boiling substances can be effectively decomposed and removed, the removal process of the zeolite rotor is likely to cause damage to the structure of the runner and structural damage of the adsorbent pores, and lose the adsorption capacity or deteriorate. Smash and lose. On-line activation regeneration such as Japanese Patent Publication No. 63-232823, 63-310636, British Patent Case Brit 1546437, and German Patent Case Ger.
Offen2419827等所述，其優點是可連續操作，避免繁雜之 拆卸程序，但此線上連續轉動轉輪之活化再生往往無法有 效將原蓄積之高沸點物質移除，而影響吸附能力。 因此’為改善長期使用之沸石轉輪因高沸點、聚合物 、等VOCs佔據吸附劑活性吸附微孔洞而老化不易活化再生 的缺點，如何不需拆卸彿石轉輪而可直接於線上㈣石轉 輪迅速且有效活化再生係為相關業者所急迫有待尋求解決 之方案以及改進之處。 、 【發明内容】 為了改善上述習知技術所面臨的問題， 種處理揮發性有機廢氣之，…絲仏綠卜古π、、一 ;^之/辰备s轉輪線上南溫活化之真吐驶 置及方法。本發明之壯$Ώ ^; 行王衣 乃之衣置及方法可有效活化再生沸石轉 7 200817081 =。’增進_漢㈣石轉輪處理效率及節絲修成本舆時 ⑴其〜處=有t 夕包含-再生稅附區及一吸附區； 至 =:轉於-適當時間間隔 間；㈣適當角度’並停留—適當時 ((4)) —5, ’其可加熱氣體至活化再生溫度;及 附麵加減體轉輪之再生脫 化之機廢氣之濃縮轉輪線上高溫活 熱源可加熱風機所;^^環式熱源或自源式熱源，該 輪之再生脫附區日^且使經加熱之氣體達到轉 ^〇c.^450 供，而使活化再焚化爐线巾之熱交換器提 太癸明夕老體熱至活化再生溫度。 化之再繼農縮轉輪線上高溫活 可使再生裝置之溫产下^纟包合一冷部區’該冷卻區 失去吸附能力相碎附航洞結構破壞，而 化之理:::有機廢氣之濃縮轉輪線上高溫活 該轉輪之厚度並無特別限制，通常依再 200817081 生系統所欲處理廢氣流量而定。厚度較小之轉輪雖在活化 再生處理上較為快速，但其揮發性有機廢氣吸附處理面積 較小，因此處理較不完全。反之，厚度較大之轉輪雖其揮 發性有機廢氣吸附處理面積較大而處理較為完全，但在活 化再生處理上較慢，且可能有活化再生不完全之虞。因此， 較佳的轉輪厚度約為20公分至45公分。 本發明另一目的為提供一種處理揮發性有機廢氣之濃 縮轉輪線上高溫活化之再生方法，其包含下列步驟： 〇)提供一處理揮發性有機廢氣之濃縮轉輪線上高 溫活化之再生裝置，該裝置至少包含一轉輪、一 驅動元件、一熱源及一風機，而該轉輪至少包含 一再生脫附區及一吸附區； (2) 使用該驅動元件控制該轉輪於一適當時間間隔 以步進方式轉動一適當角度，而進入再生脫附 區，並停留一適當時間； (3) 以該風機抽送氣體通過該熱源，氣體經該熱源加 熱後送至轉輪再生脫附區時可達活化再生溫 度，並進行該再生脫附區之活化再生；及 (4) 重複步驟（2)及（3)直至轉輪整體活化再生完 成。 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生方法中，該熱源為循環式熱源或自源式熱源，且 =熱源可使氣體達到轉輪之再生脫附區時的活化再生溫度 '、、勺為150C至約45〇t：。此外，該循環式熱源可由焚化爐系 9 200817081 統中之熱交換器提供 生溫度。 而使活化再生用氣體加熱至活化再 有钱廢乳之濃縮轉輪線上高溫活 化之再生方法中，該轉輪進一 + 步包含一冷卻區，即轉輪於 再生脫附區活化再生後進入 7部而由風機抽送之氣體 在以熱源加熱㈣經過該冷卻區，因此，由再生脫附區旋 轉至冷卻區_輪雜錢_錢何使其溫度下降， 而避免吸附劑孔洞結構破壞、生 義、失去吸附能力或因劣化粉碎 而損失。 柄明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生方法巾，_輪之厚度並無特別關，通常依系 統所欲處理廢氣流量蚊。厚錄奴轉齡在活化再生 處理上較為快速’但其揮發性有機廢氣處理面積較小，處 理較不完全。反之，厚度較大之轉輪在揮發性有機廢氣處 理面積較大而處理較為完全’但其活化再生處理較慢，且 可能有活化再生不完全之虞。因此，較佳的轉輪厚度約為 20公分至45公分。 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生方法及裝置中，轉輪持續高溫加熱之活化再生時 間亚無特別限制，其依㈣統巾所使用之轉輪厚度而變 化，通常約為1〇分鐘至約120分鐘，較佳約為3〇分鐘， 更佳約為00分鐘。 本發明之處理揮發性有機廢氣之滚縮轉輪線上高溫活 化之再生方法中’該轉輪之步進轉動間隔角度並無特別限 200817081 制，通常依系統結構、轉輪厚度、活化再生之氣流溫度及 流速等因素而定，較佳約為10°至約90°。 【實施方式】 本發明以下列實施例進一步說明，惟該實施例不應限 制本發明之範疇，熟習此項技藝者於不背離本發明之範疇 及精神下進行合理的變化。 實施例1 第一圖為習知揮發性有機廢氣淨化裝置的示意圖。如 圖所示，一般處理揮發性有機廢氣之方法如下所述，當載 入上述裝置後，揮發性有機廢氣經由第一風機11抽送至濃 縮轉輪31，其包括有一吸附區311以及一再生脫附區312 ，導入之揮發性有機廢氣經由該吸附區311中的吸附劑吸 附，則經吸附後之乾淨氣流可經由第二風機21導入煙囪 91排放。已吸附揮發性有機廢氣的吸附劑會被送至再生脫 附區312。鼓風機61抽送經第一熱交換器73所加熱至再 生溫度的氣流通過該再生脫附區312。因此，被吸附的揮 發性有機物質受熱脫附到氣流中，該氣流再被導引至第二 熱交換器74預熱，之後導入一焚化爐81燃燒成水及二氧 化碳為主的物質，再經由第二熱交換器74及第一熱交換器 73後，由煙1¾ 92排放。 第二圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上高溫活化之再生裝置示意圖。如圖所示，該裝置包含一 11 200817081 轉輪32、一驅動元杜^ 牛33及一熱源75，其中該轉輪32包含 一吸，區321、—再生脫_ 322及-冷卻區323。 >第―® 本發明之處理揮發性有機廢氣之濃縮轉輪線 以溫活化之再生方法較佳實施例示意圖 。配合第二及第 三圖，在將揮發性有機廢氣淨化系統載出後，進行活化再 生€序即開啟豉風機62，此時乾淨线會由進氣口 U =入:通過轉輪32之冷卻㊣323後送至熱交換器76，熱 ^換器76將乾淨空氣加熱至所設定之活化再生溫度並輸 再生脫附區322進行轉輪之活化再生，活化再生一設 疋％•間後，轉元件33可鶴轉輪—設定肖度，使轉輪 已活化之#分進入冷卻區323進行冷卻，同時吸附區工 I未活化再生之部分進入再生脫附區322進行活化再生。 二此，藉由驅動元件33驅動轉輪32轉動，使轉輪32以此 二進方式於一適當時間間隔轉動一適當角度，並停留一適 田盼間，即可完成轉輪整體之活化再生。 實施例2 ^ 為檢測本發明之再生裝置及方法的活化再生效果，進 行失活蜂巢狀沸石轉輪高溫活化再生效能實驗。以活化再 生前後之沸石轉輪樣品進行ΒΕΊΓ微孔比表面積測試與新沸 石轉輪樣本作比較。新轉輪樣品來源為曰本西部技研公 司’使用過之轉輪樣品來自某第五代TFT-LCD製造廠。本 研究以Micromeritic ASAP2400分析儀於液態氮溫度下，進 行凡不同分壓之吸脫附分率，而以bet吸附方程式進行 12 200817081 計算而測得，其結果顯示於表i。 效果比較。 ( m2/g ) _ 107.7_ __185.8_ 217.4Offen2419827 and the like have the advantages of continuous operation and avoiding complicated disassembly procedures. However, the activation and regeneration of the continuous rotating wheel on the line often cannot effectively remove the high-boiling substance accumulated in the original, thereby affecting the adsorption capacity. Therefore, in order to improve the long-term use of zeolite runners due to high boiling point, polymer, and other VOCs occupying the adsorbent activity to adsorb micropores, the aging is not easy to activate and regenerate. How to remove the Buddha wheel without directly disassembling the stone wheel The rapid and effective activation of the regenerative system is a solution and improvement that the relevant operators are eager to seek. [Explanation] In order to improve the problems faced by the above-mentioned conventional techniques, the treatment of volatile organic waste gas, ... silk green green gu, π, ^ / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / Driving and methods. The invention is capable of effectively activating the regenerated zeolite by using the clothes and methods of the king clothes. 7 200817081 =. 'Enhancement_Han (four) stone runner processing efficiency and wire repair cost 舆 (1) its ~ place = there is t eve inclusion - regeneration tax zone and an adsorption zone; to =: turn - appropriate time interval; (four) appropriate angle 'And stay - when appropriate ((4)) -5, 'it can heat the gas to the activation regeneration temperature; and the surface of the regenerative desulfurization of the surface of the regenerative desulfurization machine on the concentrated reel line high temperature active heat source can be heated fan ;^^Circular heat source or self-source heat source, the regeneration and desorption zone of the wheel is used to make the heated gas reach the turn of the heat, and the heat exchanger of the activated re-incinerator line towel is provided. The old body is hot to the activation temperature. After the high temperature of the re-circulation of the regenerative plant, the temperature of the regenerative plant can be combined with the cold zone of the regenerative zone. The cooling zone loses its adsorption capacity and the structure of the cavern is destroyed. The rationale:::Organic The thickness of the regenerator on the concentrated reel line is not particularly limited, and is usually determined by the flow rate of the exhaust gas to be processed by the system. Although the runner with a smaller thickness is faster in the activation regeneration treatment, the volatile organic waste gas adsorption treatment area is smaller, so the treatment is less complete. On the other hand, the runner with a larger thickness has a larger treatment area for the volatile organic waste gas treatment and is more completely treated, but it is slower in the activation and regeneration treatment, and may have incomplete activation and regeneration. Therefore, the preferred runner thickness is about 20 cm to 45 cm. Another object of the present invention is to provide a method for regenerating high temperature activation of a concentrated rotor line for treating volatile organic waste gas, comprising the steps of: 〇 providing a high temperature activated regeneration device for treating a volatile organic waste gas on a concentrated rotor line, The device comprises at least one rotating wheel, a driving component, a heat source and a fan, and the rotating wheel comprises at least a regeneration desorption zone and an adsorption zone; (2) using the driving component to control the reel at an appropriate time interval Stepping mode to rotate an appropriate angle, and enter the regeneration desorption zone, and stay for a suitable time; (3) pumping gas through the fan through the heat source, the gas is heated by the heat source and sent to the regenerative desorption zone of the runner Activating the regeneration temperature and performing activation regeneration of the regeneration desorption zone; and (4) repeating steps (2) and (3) until the entire activation regeneration of the rotor is completed. In the method for regenerating the high temperature activation of the concentrated rotating wheel on the volatile organic waste gas of the present invention, the heat source is a circulating heat source or a self-source heat source, and = the heat source can activate the regeneration when the gas reaches the regeneration desorption zone of the runner The temperature ', the spoon is from 150C to about 45〇t:. In addition, the circulating heat source can be supplied by a heat exchanger in the incinerator system 9 200817081. In the regeneration method for heating the activated regeneration gas to the high temperature activation of the concentrated revolving wheel on the activated and replenished waste milk, the runner further comprises a cooling zone, that is, the runner is activated and regenerated in the regeneration desorption zone and enters 7 The gas pumped by the fan is heated by the heat source (4) through the cooling zone, and therefore, the regeneration desorption zone is rotated to the cooling zone _ wheel miscellaneous money _ money to make its temperature drop, and avoid the destruction of the pore structure of the adsorbent Loss of adsorption capacity or loss due to deterioration. The thickness of the _ wheel is not particularly critical for the treatment of the high temperature activation of the concentrated reel on the volatile organic waste gas. It is usually treated according to the system. The age of the recorded slaves is relatively fast in the activation and regeneration treatment. However, the volatile organic waste gas treatment area is small and the treatment is less complete. On the contrary, the runner with a larger thickness has a larger treatment area of the volatile organic waste gas and is more completely treated, but its activation and regeneration treatment is slower, and there may be an incomplete activation regeneration. Therefore, the preferred runner thickness is about 20 cm to 45 cm. In the method and apparatus for regenerating high temperature activation of the concentrated rotating wheel line of the volatile organic waste gas of the present invention, the activation regeneration time of the continuous high temperature heating of the rotating wheel is not particularly limited, and varies according to the thickness of the runner used by the (4) towel. It is usually from about 1 minute to about 120 minutes, preferably about 3 minutes, more preferably about 00 minutes. In the method for regenerating the high temperature activation of the rolling reel line on the volatile organic waste gas of the present invention, the step rotation angle of the rotating wheel is not particularly limited to 200817081, and generally depends on the system structure, the thickness of the runner, and the activated regeneration airflow. Depending on factors such as temperature and flow rate, it is preferably from about 10° to about 90°. The invention is further illustrated by the following examples, which are not intended to limit the scope of the invention, and the skilled artisan can make a reasonable change without departing from the scope and spirit of the invention. Embodiment 1 The first figure is a schematic view of a conventional volatile organic waste gas purification device. As shown in the figure, the method for generally treating volatile organic waste gas is as follows. After loading the above device, the volatile organic waste gas is pumped through the first blower 11 to the concentration runner 31, which includes an adsorption zone 311 and a regeneration zone. In the zone 312, the introduced volatile organic waste gas is adsorbed by the adsorbent in the adsorption zone 311, and the cleaned airflow after the adsorption can be discharged into the chimney 91 via the second fan 21. The adsorbent which has adsorbed the volatile organic waste gas is sent to the regeneration desorption zone 312. The blower 61 pumps the airflow heated to the regeneration temperature by the first heat exchanger 73 through the regeneration desorption zone 312. Therefore, the adsorbed volatile organic substance is thermally desorbed into the gas stream, and the gas stream is further guided to the second heat exchanger 74 for preheating, and then introduced into an incinerator 81 to be burned into water and carbon dioxide-based substances, and then After the second heat exchanger 74 and the first heat exchanger 73, they are discharged by the smoke 126. The second figure is a schematic diagram of a regenerating apparatus for high temperature activation on a concentrated reel line for treating volatile organic waste gas of the present invention. As shown, the apparatus includes a 11 200817081 runner 32, a drive unit, a bull 33 and a heat source 75, wherein the runner 32 includes a suction zone 321 , a regeneration _ 322 and a cooling zone 323 . > - The schematic diagram of a preferred embodiment of the regeneration process for treating volatile organic waste gas of the present invention. In conjunction with the second and third figures, after the volatile organic waste gas purification system is carried out, the activation regeneration is performed, that is, the blower fan 62 is turned on, and the clean line is then passed from the intake port U=in: through the cooling of the runner 32. After positive 323, it is sent to the heat exchanger 76, and the heat exchanger 76 heats the clean air to the set activation regeneration temperature and the regeneration desorption zone 322 to activate and regenerate the rotor, and after the activation regeneration is set to •%•, The rotating element 33 can be set to the steering wheel, so that the activated wheel of the rotating wheel enters the cooling zone 323 for cooling, and the portion of the adsorption zone I that is not activated and regenerated enters the regeneration desorption zone 322 for activation regeneration. In this way, the driving member 33 drives the rotating wheel 32 to rotate, so that the rotating wheel 32 can be rotated by an appropriate angle at an appropriate time interval in this two-way manner, and the active rotation of the rotating wheel can be completed. . Example 2 ^ In order to examine the activation regeneration effect of the regeneration apparatus and method of the present invention, a high temperature activation regeneration performance experiment of the inactivated honeycomb zeolite runner was carried out. The microporous specific surface area test of the zeolite wheel sample before and after activation was compared with the new zeolite wheel sample. The source of the new runner sample was from the Shunben Western Technology Research Institute's used runner samples from a fifth-generation TFT-LCD manufacturing plant. In this study, the Micromeritic ASAP 2400 analyzer was used to calculate the adsorption and desorption rates of different partial pressures at liquid nitrogen temperature, and was measured by the bet adsorption equation 12 200817081. The results are shown in Table i. The effect is compared. ( m2/g ) _ 107.7_ __185.8_ 217.4
下表1為沸石轉輪高溫活化再生 表1 轉輪樣品 活化再生前 活化再生後 新樣品 氺與新樣品（100% )比較 由表1可知’在高溫活化再生前及高溫活化再生後之 轉輪樣品與新轉輪樣品比較下，使用過之蜂巢狀彿石轉輪 樣品於高溫活化再生後之比表面積（BET)可達到約8娜 ，因此本發明之再生裝置及方法可達到良好之再生活化再 生效果。 實施例3 為檢測本發明之再生裝置及方法的活化再生效果，進 行失活蜂巢狀沸石轉輪咼溫活化再生效能實驗。以實施例 2之某第五代TFT-LCD製造廠之活化再生後沸石轉輪樣品 與新/弗石轉輪樣本（日本西部技研公司）比較其吸附異丙 醇（IPA)(於l〇〇ppmv)之飽和吸附量。使用熱天平以熱 重量分析法（Thermogravimetric Analysis ; TGA)分析及使用 示差熱分析裝置以示差熱分析法（Differential Thermal Analysis ; DTA)分析，其結果顯示於第四圖。 13 200817081Table 1 below shows the high-temperature activation regeneration of zeolite runners. Table 1 Comparison of new sample 氺 and new sample (100%) after activation regeneration before activation and regeneration of the runner sample. It can be seen from Table 1 that the runner is activated before high temperature activation regeneration and after high temperature activation regeneration. Compared with the new runner sample, the specific surface area (BET) of the used honeycomb-shaped Buddha stone runner sample after high temperature activation regeneration can reach about 8 nanometers, so the regeneration device and method of the invention can achieve a good life. Regeneration effect. Example 3 In order to examine the activation regeneration effect of the regeneration apparatus and method of the present invention, an inactivated regeneration efficiency experiment of the inactivated honeycomb zeolite was carried out. The activated regenerated post-zeolite wheel sample of a fifth-generation TFT-LCD manufacturing plant of Example 2 was compared with the new/Furstone wheel sample (Western Japan Institute of Technology) for its adsorption of isopropanol (IPA). The saturated adsorption amount of ppmv). The thermogravimetric analysis (TGA) analysis using a thermobalance and the differential thermal analysis (DTA) analysis using a differential thermal analysis device are shown in the fourth graph. 13 200817081
' F 、由第四圖可知’以200、300及權。c之活化再生溫度 =1小％後與新沸石轉輪樣本作比較，經由*⑽。c活化工 小時之蜂巢狀滞石轉輪可恢復至約⑽之吸附能力，因此 本發明之再生裝置及方法可達到良好之活化再生效果，且 不會破壞吸附劑孔洞結構而失去吸附能力或因劣化粉碎而 才貝失。 【圖式簡單說明】 第一圖為習知揮發性有機廢氣淨化裝置的示意圖。 &第二圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上高溫活化之再生裝置示意圖。 &第二圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上高溫活化之再生方法較佳實施例示意圖。 第四圖為本發明之再生裝置及方法於蜂巢狀沸石轉輪 之活化再生效果。 【主要元件符號說明】 11 第一風機 21 第二風機 211 變頻器 31、32 激縮轉輪 33 驅動元件 311 、 321 吸附區 312 、 322 再生脫附區 200817081 323 冷卻區 41 旁通風管 42 進氣口 54 自動風門 61、62 鼓風機 73 第一熱交換器 74 第二熱交換器 75 熱源 76 ^ 77 熱交換器 81 > 82 焚化爐 91 、 93 、 93 煙囪 15'F, as can be seen from the fourth figure' with 200, 300 and rights. The activation regeneration temperature of c is =1 small % and compared with the new zeolite runner sample via *(10). c The honeycomb-shaped stagnation wheel of the activation hour can be restored to the adsorption capacity of about (10), so the regeneration device and method of the invention can achieve a good activation regeneration effect without breaking the pore structure of the adsorbent and losing the adsorption capacity or Deterioration and smashing. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram of a conventional volatile organic waste gas purification device. & The second figure is a schematic diagram of a high temperature activated regeneration device for treating a volatile organic gas stream on a concentrated rotor line of the present invention. The second figure is a schematic view of a preferred embodiment of the regeneration method for high temperature activation on a concentrated rotor line for treating volatile organic waste gas of the present invention. The fourth figure is the activation regeneration effect of the regeneration apparatus and method of the present invention on the honeycomb zeolite runner. [Main component symbol description] 11 First fan 21 Second fan 211 Inverter 31, 32 Retractor wheel 33 Drive element 311, 321 Adsorption zone 312, 322 Regeneration desorption zone 200817081 323 Cooling zone 41 Side air duct 42 Intake air Port 54 automatic damper 61, 62 blower 73 first heat exchanger 74 second heat exchanger 75 heat source 76 ^ 77 heat exchanger 81 > 82 incinerator 91 , 93 , 93 chimney 15