丄叫183 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種濃縮轉輪高溫活化之再生裝置及方 法，尤其是關於一種處理揮發性有機廢氣之濃縮轉輪線上 高溫活化之再生裝置及方法。 【先前技術】 進來，國際間對於環保議題及工業安全衛生日益重 視’考量工業廢氣對環境及勞工以至於一般大幕身體產生 之危害，對於工業廢氣排放標準曰趨嚴格，國内外法規都 制定出濃度及臭味的排放標準。工業廢氣中對於揮發性有 機氣體的處理，在高濃度時多採用冷凝法收集，而在低濃 度且大風量時則以物理吸附方式濃縮處理後，再送往小型 焚化爐燃燒或以冷凝裝置回收較為經濟有效。以半導體業 晶圓廠產生的有機廢氣成分為例，常含有如二曱基二硫醇 (Dimethyl Sulfoxide)、N-曱基0比口各 _(N-Methyl Pyrolidone )、乙醇録（2-Aminoethanol)、二甲基二硫醇(Dithiolethylene Glycol)、二曱基硫醇(Dimethyl Sulfide)、異丙醇(Isopropyl Alcohol)、丙酮(Acetone)等化合物，以滞石轉輪吸附濃縮廢 氣後’再以焚化爐於攝氏600〜900度以上之溫度燃燒，分 解這些揮發性有機物質以及臭氣和毒氣最有效。目前以吸 附濃縮沸石轉輪處理加上燃燒焚化的方式，進行揮發性有 機氣體的廢氣排放處理，已在半導體及光電業界廣為採用 ：S ) 5 1323183 •工業上常以吸附濃縮沸石轉輪焚化系統處理揮發性有 機廢氣，其處理效率可穩定達到符合揮發性有機廢氣 (volatile organic compounds, VOCs)排放標準。然而，吸附 濃縮沸石轉輪最大之處理問題為廢氣中含多量高沸點物 質、聚合物質、脫附熱能量不足無法有效脫附出、或廢氣 中混排其它粒狀污染物，所導致之整體處理效率下降。光 電業製程及使用之物料與半導體相近，但在含高沸點VOCs 去光阻劑之使用量上遠高於半導體業，故使得其排放廢氣 * 組成上之高沸點VOCs較多；同時這類高沸點物質中，亦 同時是聚合物者佔大多數。這類高沸點VOCs雖容易吸附 於沸石轉輪上，但由於系統設計之安全考量，使得脫附高 沸點VOCs溫度不足，所以往往造成脫附不易，日久後高 沸點VOCs將蓄積其上、佔據吸附位置，影響系統整體效 能，故成為部份光電業應用沸石吸附濃縮焚化系統效能不 彰之因；而以往亦有廠家欲以提高脫附溫度、以增加高沸 φ 點物質脫附效率，但這項操作措施容易造成系統跳機、形 成無通風之密閉狀態，若無緊急處理程序如灑水、喷入冷 卻氮氣等，如此將造成沸石吸附轉輪組合處產生悶熱狀 態，嚴重亦使得其局部溫度異常突升、讓沸石轉輪產生結 構性之永久破壞。 為防止沸石轉輪受到高沸點及（或）聚合物VOCs蓄 積，佔據沸石轉輪活性吸附位置導致系統效能不彰等問 題，沸石轉輪可藉由高溫活化來解決上述問題。 目前工業上一般採用之活化再生方式可分為線上活化 6 1323183 再生或線外活化再生二種，線外活化再生例如於美國專利 案4957721、日本公開特許62-282639及63-156542等所 述，其係將使用一段時間之沸石轉輪拆卸下來，在以更高 溫度（通常為300〜1〇〇〇。〇直接加熱或高溫氣體處理，使 蓄積之高沸點物質因受到一定程度之溫度作用而斷鍵成為 小分子，而被碳化或脫除。然而，沸石轉輪之拆卸程序繁 雜，雖然可將蓄積之高沸點物質有效分解脫除，但沸石轉 輪拆卸過程容易造成轉輪結構損壞及吸附劑孔洞結構破 壞，而失去吸附能力或因劣化粉碎而損失。 線上活化再生例如日本公開昭63-232823、 ⑽0636、英國專利案Bdt. i遍37及德國專利案Ger. OffenMl9827等所述，其優點是可連續操作，避免繁雜之 ^卸程序，但此線上連續轉動轉輪之活化再 益法 效將原蓄狀高軸物質移除，而影響⑽能力。有 改善長期使用之沸石轉輪因高沸點、聚合物 專VOCs佔據吸附劑活祕 剜活陡吸附微孔洞而老化不易活化再生 =且;:::::::轉輪而可直接―石轉 之方案以収進之處麵急迫㈣尋求解決 【發明内容】 種處Ϊ = 3 =技術所面臨的問題，本發明提供. Β古、土 乳之濃縮轉輪線上高溫活化之再生; 置及方法。本發明少杜 敦置及方法可有效活化再生沸石^ 1323183 • 輪，增進吸附濃縮沸石轉輪處理效率及節省維修成本與時 間。 詳而言之，本發明之目的為提供一種處理揮發性有機 廢氣之濃縮轉輪線上高溫活化之再生裝置，其至少包含： (1) 一轉輪，其用以吸附處理揮發性有機廢氣，且至 少包含一再生脫附區及一吸附區； (2) —驅動元件，其可控制該轉輪於一適當時間間隔 以步進方式轉動一適當角度，並停留一適當時 •間； (3) —熱源，其可加熱氣體至活化再生溫度；及 (4) 一風機，其可抽送該經加熱氣體至轉輪之再生脫 附區進行活化再生。 ' 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生裝置中，該熱源為循環式熱源或自源式熱源，該 熱源可加熱風機所提供之氣體，且使經加熱之氣體達到轉 φ 輪之再生脫附區時的活化再生溫度約為150°C至約450 °C。此外，該循環式熱源可由焚化爐系統中之熱交換器提 供，而使活化再生用氣體加熱至活化再生溫度。 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生裝置中，該轉輪進一步包含一冷卻區，該冷卻區 可使再生裝置之溫度下降，避免吸附劑孔洞結構破壞，而 失去吸附能力或因劣化粉碎而損失。 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生裝置中，該轉輪之厚度並無特別限制，通常依再 (S ) 8 1323183 生系統所欲處理廢氣流量而定。厚度較小之轉輪雖在活化 再生處理上較為快速，但其揮發性有機廢氣吸附處理面積 較小，因此處理較不完全。反之，厚度較大之轉輪雖其揮 發性有機廢氣吸附處理面積較大而處理較為完全，但在活 化再生處理上較慢，且可能有活化再生不完全之虞。因此， 較佳的轉輪厚度約為20公分至45公分。 本發明另一目的為提供一種處理揮發性有機廢氣之濃 縮轉輪線上高溫活化之再生方法，其包含下列步驟： (1) 提供一處理揮發性有機廢氣之濃縮轉輪線上高 溫活化之再生裝置，該裝置至少包含一轉輪、一 驅動元件、一熱源及一風機，而該轉輪至少包含 一再生脫附區及一吸附區； (2) 使用該驅動元件控制該轉輪於一適當時間間隔 以步進方式轉動一適當角度，而進入再生脫附 區，並停留一適當時間； (3) 以該風機抽送氣體通過該熱源，氣體經該熱源加 熱後送至轉輪再生脫附區時可達活化再生溫 度，並進行該再生脫附區之活化再生；及 (4) 重複步驟（2)及（3)直至轉輪整體活化再生完 成。 本發明之處理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再生方法中，該熱源為循環式熱源或自源式熱源，且 該熱源可使氣體達到轉輪之再生脫附區時的活化再生溫度 約為150°C至約450°C。此外，該循環式熱源可由焚化爐系 (S ) 9 1323183 熱父換器提供，而使活化再生用氣體加熱至活化再 化之再理揮發性有機廢氣之濃縮轉輪線上高溫活 ==再步包含-冷卻區，即轉輪於 在以熱源加熱前先瘦過區’而由風機抽送之氣體 轉至冷卻區的轉因此，由再生脫附區旋 而硝㈣_ Κ在該讀吹送下可使其溫度下降， ==附劑孔洞結構破壞、失去吸附能力或因劣化粉碎 化之理揮發性有機廢氣之濃縮轉輪線上高溫活 但其揮發性有機廢氣==再i 理幸乂不U &之，厚度較大之 ===r 一==且 2〇公分至45=Γ虞。因此，較佳的轉輪厚度約為 化之性=;!濃縮轉輪線上高㈣ 間並無特別限㈣生時 化，通常約為1〇分鐘==使:之轉輪厚度而變 更佳约㈣分鐘4心鐘’較佳料30分鐘， 化之理揮發性有機廢氣之濃縮轉輪線上高溫活 化之再々中’該轉輪之步進轉動間隔角度並無特別限 1323183 制，通常依系統結構、轉輪厚度、活化再生之氣流溫度及 流速等因素而定，較佳約為10°至約90°。 【實施方式】 本發明以下列實施例進一步說明，惟該實施例不應限 制本發明之範疇，熟習此項技藝者於不背離本發明之範疇 及精神下進行合理的變化。 胃 實施例1 第一圖為習知揮發性有機廢氣淨化裝置的示意圖。如 圖所示，一般處理揮發性有機廢氣之方法如下所述，當載 入上述裝置後，揮發性有機廢氣經由第一風機11抽送至濃 縮轉輪31，其包括有一吸附區311以及一再生脫附區312 ，導入之揮發性有機廢氣經由該吸附區311中的吸附劑吸 附，則經吸附後之乾淨氣流可經由第二風機21導入煙囪 φ 91排放。已吸附揮發性有機廢氣的吸附劑會被送至再生脫 附區312。鼓風機61抽送經第一熱交換器73所加熱至再 生溫度的氣流通過該再生脫附區312。因此，被吸附的揮 發性有機物質受熱脫附到氣流中，該氣流再被導引至第二 熱交換器74預熱，之後導入一焚化爐81燃燒成水及二氧 化碳為主的物質，再經由第二熱交換器74及第一熱交換器 73後，由煙1¾ 92排放。 第二圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上高溫活化之再生裝置示意圖。如圖所示，該裝置包含一 11 1323183 轉輪32、一驅動元件33及—熱源75,其中該轉輪32包含 —吸附區321、—再生脫附區322及-冷卻區323。 古11為本發明之處理揮發性有機廢氣之濃縮轉輪線 —⑴皿活化之再生方法較佳實施例示意圖。配合第二及第 二圖，在㈣發性麵廢氣淨㈣統載出後 ’進行活化再BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a regenerative apparatus and method for high temperature activation of a concentrated reel, and more particularly to a regenerative apparatus for high temperature activation of a concentrated reel line for treating volatile organic waste gas. And methods. [Previous technology] In addition, the international community has paid more and more attention to environmental issues and industrial safety and health. 'Considering the harm caused by industrial waste gas to the environment and labor and the general curtain body, the industrial exhaust emission standards are becoming stricter, and domestic and foreign regulations are formulated. Emission standards for concentration and odor. The treatment of volatile organic gases in industrial waste gas is mostly collected by condensation method at high concentration, and concentrated by physical adsorption at low concentration and high air volume, and then sent to small incinerator for combustion or recovered by condensing device. More economical and effective. For example, the organic waste gas component produced by the semiconductor fab often contains, for example, Dimethyl Sulfoxide, N-Methyl Pyrolidone, and 2-Aminoethanol. ), dimethyl dithiol (Dithiolethylene Glycol), Dimethyl Sulfide, Isopropyl Alcohol, Acetone, etc., after adsorption of concentrated exhaust gas by a stagnation wheel The incinerator burns at temperatures above 600 to 900 degrees Celsius, and it is most effective in decomposing these volatile organic substances as well as odors and poisonous gases. At present, the exhaust gas treatment of volatile organic gases is carried out by adsorption-concentrated zeolite rotor treatment plus combustion incineration, which has been widely used in the semiconductor and optoelectronic industries: S) 5 1323183 • Industrially, it is incinerated by adsorption-concentrated zeolite runners. The system processes volatile organic waste gas, and its treatment efficiency can be stabilized to meet the requirements of volatile organic compounds (VOCs). However, the biggest problem in the adsorption and concentration of zeolite runners is that the exhaust gas contains a large amount of high-boiling substances, polymer materials, insufficient desorption of thermal energy, can not be effectively desorbed, or other particulate pollutants are mixed in the exhaust gas, resulting in overall treatment. The efficiency is declining. The photoelectric industry process and materials used are similar to those of semiconductors, but the use of high-boiling VOCs to remove photoresist is much higher than that of the semiconductor industry, so that the exhaust gas* composition has higher high-boiling VOCs; Among the boiling substances, it is also the majority of polymers. Although such high-boiling VOCs are easily adsorbed on the zeolite runner, due to the safety considerations of the system design, the temperature of the desorption high-boiling VOCs is insufficient, so the desorption is often difficult, and the high-boiling VOCs will accumulate on the surface after a long time. The adsorption position affects the overall performance of the system, so it has become the cause of the inefficiency of the zeolite adsorption and concentration incineration system in some optoelectronic industries. In the past, some manufacturers wanted to increase the desorption temperature to increase the desorption efficiency of high boiling φ point materials, but This operation method is easy to cause the system to trip and form a closed state without ventilation. If there is no emergency treatment procedure such as watering, spraying nitrogen, etc., this will cause the sultry state of the zeolite adsorption runner combination to be severe, which also makes it partially The temperature rises abnormally, causing structural permanent damage to the zeolite runner. In order to prevent the zeolite runner from being subjected to high boiling point and/or polymer VOCs accumulation, occupying the active adsorption position of the zeolite runner leads to inefficiency of the system, and the zeolite runner can solve the above problem by high temperature activation. At present, the activation regeneration method generally employed in the industry can be divided into two types: on-line activation 6 1323183 regeneration or off-line activation regeneration, and the off-line activation regeneration is described in, for example, U.S. Patent No. 4,497,721, Japanese Patent Publication No. 62-282639, and No. 63-156542. It will be disassembled for a period of time using a zeolite wheel, at a higher temperature (usually 300~1 〇〇〇. 〇 direct heating or high temperature gas treatment, so that the accumulated high-boiling substances are subject to a certain degree of temperature The broken bond becomes a small molecule and is carbonized or removed. However, the removal process of the zeolite runner is complicated, and although the accumulated high-boiling substance can be effectively decomposed and removed, the removal process of the zeolite runner easily causes damage and adsorption of the runner structure. The pore structure of the agent is destroyed, and the adsorption capacity is lost or is lost due to the deterioration of the pulverization. The on-line activation regeneration is described in, for example, Japanese Patent Publication No. Sho 63-232823, (10) 0636, British Patent Application Bdt. i. 37, and German Patent Case Ger. Offen Ml9827. It can be operated continuously to avoid complicated handling procedures, but the activation of the continuous rotating wheel on this line will reproduce the original high-axis material. Remove, and affect (10) ability. There are improved long-term use of zeolite runners due to high boiling point, polymer-specific VOCs occupying adsorbent active secrets, steep adsorption of micropores and aging is not easy to activate regeneration = and;:::::: :The reel can be directly-stone-turning scheme to meet the urgent situation of the income (4) seeking to solve the problem [inventive content] 种 Ϊ = 3 = the problem faced by the technology, the present invention provides. Β古,土乳的浓缩轮Regeneration of on-line high-temperature activation; method of application. The invention can effectively activate the regenerated zeolite ^ 1323183 • wheel to improve the treatment efficiency of the adsorption-concentrated zeolite runner and save maintenance cost and time. In detail, the invention The purpose of the invention is to provide a regeneration device for treating high temperature activation of a concentrated rotating wheel on a volatile organic waste gas, which comprises at least: (1) a rotating wheel for adsorbing volatile organic waste gas and comprising at least one regeneration desorption zone And an adsorption zone; (2) a driving component that controls the wheel to rotate at an appropriate angle in a stepwise manner at an appropriate time interval and stays at an appropriate time; (3) - a heat source that can heat the gas Up to the activation regeneration temperature; and (4) a fan that can pump the heated gas to the regeneration desorption zone of the rotor for activation regeneration. The regeneration device for high temperature activation of the concentrated rotor line of the volatile organic waste gas of the present invention The heat source is a circulating heat source or a self-source heat source, and the heat source can heat the gas provided by the fan, and the activated regeneration temperature when the heated gas reaches the regeneration desorption zone of the rotating wheel is about 150 ° C. About 450 ° C. In addition, the circulating heat source can be provided by a heat exchanger in the incinerator system, and the activated regeneration gas is heated to an activation regeneration temperature. The high temperature activation of the concentrated rotor line of the volatile organic waste gas of the present invention is activated. In the regenerative device, the revolving wheel further comprises a cooling zone, which can lower the temperature of the regenerative device, avoid damage to the pore structure of the adsorbent, and lose the adsorption capacity or be lost due to degraded pulverization. In the regenerating apparatus for the high-temperature activation of the concentrated reel line of the volatile organic waste gas of the present invention, the thickness of the reel is not particularly limited, and is usually determined according to the flow rate of the exhaust gas to be treated by the (S) 8 1323183 system. Although the runner with a smaller thickness is faster in the activation regeneration treatment, the volatile organic waste gas adsorption treatment area is smaller, so the treatment is less complete. On the other hand, the runner with a larger thickness has a larger treatment area for the volatile organic waste gas treatment and is more completely treated, but it is slower in the activation and regeneration treatment, and may have incomplete activation and regeneration. Therefore, the preferred runner thickness is about 20 cm to 45 cm. Another object of the present invention is to provide a method for regenerating high temperature activation of a concentrated rotor line for treating volatile organic waste gas, comprising the following steps: (1) providing a high temperature activated regeneration device for treating a volatile organic waste gas on a concentrated rotor line; The device comprises at least one rotating wheel, a driving component, a heat source and a fan, and the rotating wheel comprises at least a regeneration desorption zone and an adsorption zone; (2) using the driving component to control the reel at an appropriate time interval Rotating a proper angle in a stepwise manner, and entering the regeneration desorption zone, and staying for an appropriate time; (3) pumping gas through the heat source through the fan, and the gas is heated by the heat source and sent to the regeneration and desorption zone of the runner. Activating the regeneration temperature and performing the activation regeneration of the regeneration desorption zone; and (4) repeating steps (2) and (3) until the entire activation regeneration of the runner is completed. In the method for regenerating high temperature activation of a concentrated rotating wheel of a volatile organic waste gas according to the present invention, the heat source is a circulating heat source or a self-source heat source, and the heat source can activate the regeneration when the gas reaches the regeneration desorption zone of the runner. The temperature is from about 150 ° C to about 450 ° C. In addition, the circulating heat source can be supplied by the incinerator system (S) 9 1323183 hot parent converter, and the activated regeneration gas is heated to the regenerative regenerative volatile organic waste gas on the concentrated rotor line. Including - cooling zone, that is, the runner is thinned before the heat source is heated, and the gas pumped by the fan is transferred to the cooling zone, so that the regeneration desorption zone is rotated and the nitrate (4) _ Κ can be blown under the reading The temperature is lowered, == the structure of the pores of the attached agent is destroyed, the adsorption capacity is lost, or the volatility of the volatile organic waste gas is degraded by the high temperature of the volatile organic waste gas, but its volatile organic waste gas == re-fortunately not U & The larger thickness ===r === and 2〇 cm to 45=Γ虞. Therefore, the thickness of the preferred runner is about Δ==! There is no special limit between the height (4) of the concentrated runner line. (4) The time is normal, usually about 1 = minutes ==: The thickness of the runner is changed. (4) Minutes of 4 heart clocks 'better 30 minutes, the rationale for the high-temperature activation of the volatile organic waste gas on the concentrated rotor line'. The step rotation angle of the runner is not limited to 1,323,183, usually according to the system structure. The thickness of the runner, the temperature of the gas stream for activating the regeneration, and the flow rate are preferably from about 10° to about 90°. The invention is further illustrated by the following examples, which are not intended to limit the scope of the invention, and the skilled artisan can make a reasonable change without departing from the scope and spirit of the invention. Stomach Example 1 The first figure is a schematic view of a conventional volatile organic waste gas purification device. As shown in the figure, the method for generally treating volatile organic waste gas is as follows. After loading the above device, the volatile organic waste gas is pumped through the first blower 11 to the concentration runner 31, which includes an adsorption zone 311 and a regeneration zone. In the zone 312, the introduced volatile organic waste gas is adsorbed by the adsorbent in the adsorption zone 311, and the cleaned airflow after the adsorption can be discharged into the chimney φ 91 via the second fan 21. The adsorbent which has adsorbed the volatile organic waste gas is sent to the regeneration desorption zone 312. The blower 61 pumps the airflow heated to the regeneration temperature by the first heat exchanger 73 through the regeneration desorption zone 312. Therefore, the adsorbed volatile organic substance is thermally desorbed into the gas stream, and the gas stream is further guided to the second heat exchanger 74 for preheating, and then introduced into an incinerator 81 to be burned into water and carbon dioxide-based substances, and then After the second heat exchanger 74 and the first heat exchanger 73, they are discharged by the smoke 126. The second figure is a schematic diagram of a regenerating apparatus for high temperature activation on a concentrated reel line for treating volatile organic waste gas of the present invention. As shown, the apparatus includes an 11 1323183 runner 32, a drive member 33, and a heat source 75, wherein the runner 32 includes an adsorption zone 321, a regeneration desorption zone 322, and a cooling zone 323. Gu 11 is a concentrated rotor line for treating volatile organic waste gas of the present invention - (1) Schematic diagram of a preferred embodiment of a regeneration method for dish activation. In conjunction with the second and second figures, after (4) the surface of the exhaust gas (4) is carried out, the activation is carried out.
生程序，即開啟鼓風機62，此時乾淨空氣會由進氣口 42 ，入通過轉輪32之冷卻區323後送至熱交換器％，熱 =換器76將乾淨空氣加熱至所設定之活化再生溫度並輸 再生脫附區322進行轉輪之活化再生，活化再生一設 ^時間後，驅動元件33可驅動轉輪一設定角度，使轉輪 32已活化之部分進入冷卻區323進行冷卻，同時吸附區321 中未活化再生之部分進入再生脫附區 322進行活化再生。 因此，藉由驅動元件33驅動轉輪32轉動，使轉輪32以此 二進方式於一適當時間間隔轉動一適當角度，並停留一適 田h•間，即可完成轉輪整體之活化再生。 實施例2 為檢測本發明之再生裝置及方法的活化再生效果，進 行失〉舌蜂巢狀沸石轉輪高溫活化再生效能實驗。以活化再 生前後之沸石轉輪樣品進行B E T微孔比表面積測試與新沸 石轉輪樣本作比較。新轉輪樣品來源為日本西部技研公 司’使用過之轉輪樣品來自某第五代TFT-LCD製造廠。本 研究以Micromeritic ASAP24〇〇分析儀於液態氮溫度下，進 行不同分壓之吸脫附分率，而以BET吸附方程式進行 12 13231^3 計算而測得，其結果顯示於表卜 1為4石轉輪高溫活化再生效果比較 轉輪樣品The program is to open the blower 62. At this time, the clean air is sent to the heat exchanger % through the air inlet 42 and into the cooling zone 323 of the runner 32. The heat=replacer 76 heats the clean air to the set activation. The regeneration temperature is sent to the regeneration desorption zone 322 for activation regeneration of the runner. After the activation regeneration is set for a period of time, the driving component 33 can drive the rotor to set a certain angle, so that the activated portion of the runner 32 enters the cooling zone 323 for cooling. At the same time, the unactivated portion of the adsorption zone 321 enters the regeneration desorption zone 322 for activation regeneration. Therefore, by rotating the rotating wheel 32 by the driving element 33, the rotating wheel 32 is rotated by an appropriate angle at an appropriate time interval in this two-way manner, and staying in an appropriate field can complete the activation regeneration of the whole rotating wheel. . Example 2 In order to test the activation regeneration effect of the regeneration apparatus and method of the present invention, a high temperature activation regeneration experiment of the loss of the honeycomb honeycomb rotor was carried out. The B E T micropore specific surface area test was compared with the new zeolite run wheel sample by a sample of the zeolite runner before and after activation. The source of the new runner sample was from the Western Japan Technician Company. The used runner samples were from a fifth-generation TFT-LCD manufacturing plant. In this study, the Micromeritic ASAP24〇〇 analyzer was used to calculate the adsorption and desorption rates of different partial pressures at liquid nitrogen temperature, and the BET adsorption equation was used to calculate 12 13231^3. The results are shown in Table 1 for 4 Comparison of high temperature activation regeneration effect of stone runner
*與新樣品（100%)比較 由表1可知，在高溫活化再生前及高溫活化再生後之 輪樣，與新轉輪樣品比較τ，使用過之蜂巢料石轉輪 …於问溫活化再生後之比表面積（ΒΕτ)可達到約祕 ，因此本發明之再生裝置及方法可達到良好之再生活化再 生效果。 • 實施例3 為檢測本發明之再生裝置及方法的活化再生效果，進 行失/舌蜂巢狀沸石轉輪高溫活化再生效能實驗。以實施例 2之某第五代TFT-LCD製造廠之活化再生後沸石轉輪樣品 與新沸石轉輪樣本（日本西部技研公司）比較其吸附異丙 醇（ΙΡΑ)(於i〇〇ppmv)之飽和吸附量。使用熱天平以熱 重置分析法(Thermogravimetric Analysis ; TGA)分析及使用 • 示差熱分析裝置以示差熱分析法（Differential Thermal Analysis ; DTA)分析，其結果顯示於第四圖。 13 1323183 由第四圖可知，以200、300及400°C之活化再生溫度 活化1小時後與新沸石轉輪樣本作比較，經由400°C活化1 小時之蜂巢狀沸石轉輪可恢復至約83%之吸附能力，因此 本發明之再生裝置及方法可達到良好之活化再生效果，且 不會破壞吸附劑孔洞結構而失去吸附能力或因劣化粉碎而 損失。 【圖式簡單說明】 第一圖為習知揮發性有機廢氣淨化裝置的示意圖。 第二圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上ifj溫活化之再生裝置不意圖。 第三圖為本發明之處理揮發性有機廢氣之濃縮轉輪線 上高溫活化之再生方法較佳實施例示意圖。 第四圖為本發明之再生裝置及方法於蜂巢狀沸石轉輪 之活化再生效果。 【主要元件符號說明】 11 第一風機 21 第二風機 211 變頻器 31、32 濃縮轉輪 33 驅動元件 311 、 321 吸附區 312 、 322 再生脫附區 ( 14 1323183 323 冷卻區 41 旁通風管 42 進氣口 54 自動風門 61 ' 62 鼓風機 73 第一熱交換器 74 第二熱交換器 75 熱源 76、77 熱交換器 81 ' 82 焚化爐 91 、 93 ' 93 煙囪 ) 15*Compared with the new sample (100%), it can be seen from Table 1 that the sample before the high-temperature activation regeneration and after the high-temperature activation regeneration is compared with the new runner sample τ, the used honeycomb stone runner... The specific surface area (ΒΕτ) can be achieved, so that the regeneration apparatus and method of the present invention can achieve a good regeneration-activated regeneration effect. • Example 3 To test the activation regeneration effect of the regeneration apparatus and method of the present invention, a high temperature activation regeneration performance experiment of the loss/tongue honeycomb zeolite runner was carried out. The activated regenerated post-zeolite rotor sample of a fifth-generation TFT-LCD manufacturing plant of Example 2 was compared with the new zeolite runner sample (Western Japan Institute of Technology) for its adsorption of isopropanol (ΙΡΑ) (at i〇〇ppmv) The amount of saturated adsorption. The thermogravimetric analysis (TGA) analysis and use were performed using a thermobalance. The differential thermal analysis device was analyzed by differential thermal analysis (DTA), and the results are shown in the fourth figure. 13 1323183 As can be seen from the fourth figure, after activation of the activation regeneration temperature of 200, 300 and 400 ° C for 1 hour, compared with the new zeolite runner sample, the honeycomb zeolite rotor activated by 400 ° C for 1 hour can be restored to about With an adsorption capacity of 83%, the regenerating apparatus and method of the present invention can achieve a good activation regeneration effect without losing the adsorption pore structure and losing the adsorption capacity or pulverizing due to deterioration. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram of a conventional volatile organic waste gas purification device. The second figure is not intended to be a regeneration device for the ifj temperature activation on a concentrated reel line for treating volatile organic waste gas. The third figure is a schematic view of a preferred embodiment of the regeneration method for high temperature activation on a concentrated rotor line for treating volatile organic waste gas of the present invention. The fourth figure is the activation regeneration effect of the regeneration apparatus and method of the present invention on the honeycomb zeolite runner. [Main component symbol description] 11 First fan 21 Second fan 211 Inverter 31, 32 Concentrated reel 33 Drive element 311, 321 Adsorption zone 312, 322 Regeneration desorption zone (14 1323183 323 Cooling zone 41 Side air duct 42 Air port 54 automatic damper 61 ' 62 blower 73 first heat exchanger 74 second heat exchanger 75 heat source 76, 77 heat exchanger 81 '82 incinerator 91, 93 '93 chimney) 15