CN105289203A - Gas molecular pollutant heat treatment unit - Google Patents
Gas molecular pollutant heat treatment unit Download PDFInfo
- Publication number
- CN105289203A CN105289203A CN201510767610.9A CN201510767610A CN105289203A CN 105289203 A CN105289203 A CN 105289203A CN 201510767610 A CN201510767610 A CN 201510767610A CN 105289203 A CN105289203 A CN 105289203A
- Authority
- CN
- China
- Prior art keywords
- zeolite
- treatment unit
- air
- district
- thermal treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention provides a gas molecular pollutant heat treatment unit. The treatment unit comprises an ion adsorption plate, a pump and a freezer, wherein air sequentially passes through the ion adsorption plate, the pump and the freezer, a freezer, an evaporator, a blower set and a filter, the gas molecular pollutant heat treatment unit is characterized in that a zeolite rotating wheel apparatus is arranged, the zeolite rotating wheel apparatus comprises a zeolite zone, a desorption zone and a cooling zone, the zeolite zone is used for introducing the air in the ion adsorption plate, the desorption zone is used for heating partial organic matter-containing air output by the zeolite zone and then desorbing the air, and the cooling zone is used for cooling the partial heated and desorbed air. The gas molecular pollutant heat treatment unit (TAU) is used for supplying the air to the ion adsorption plate in order by the zeolite zone of the zeolite rotating wheel apparatus for filtering the inorganic pollutant, the organic pollutant is filtered through the desorption zone of the zeolite rotating wheel apparatus, the air containing a volatile organic compound (VOC) is filtered, filtering efficiency for the organic matter by TAU is enhanced, and cleanliness factor of the required air in an exposed area is increased.
Description
Technical field
The present invention relates to flexible display screen manufacturing technology field, particularly relate to a kind of gas molecule pollutant thermal treatment unit.
Background technology
At the low temperature polycrystalline silicon (lowtemperaturepoly-silicon of semicon industry, be called for short: LTPS) in processing procedure, in order to keep the high-cleanness, high of clean room, gas molecule pollutant thermal treatment unit (thermalAMCunit need be used, be called for short: TAU) or filter remove the gas molecule pollutant (AirborneMolecularcontamination produced in production, be called for short: AMC), gas molecule pollutant (AMC) comprises inorganic gas pollutant (as NH3, NOx, SOx etc.) and organically propylene glycol monomethyl ether (PGME) and 1-Methoxy-2-propyl acetate (PGMEA).Gas molecule pollutant thermal treatment unit (TAU) general action is in chemical vapour deposition (CVD) (ChemicalVaporDeposition, CVD), Excimer-Laser Crystallization (ExcimerLaserAnnealing be called for short:, ELA) and photo exposure (photoexposure) machine region be called for short:, and exposure area is except having gas molecule pollutant (AMC), (VolatileOrganicCompounds is called for short: VOC) for the volatile matter also having photoresist and organic gel to evaporate and some VOCs.
As shown in Figure 1, 2, at present, the critical piece of gas molecule pollutant thermal treatment unit (TAU) is ionic adsorption plate, and the inorganic acid alkali pollutant of absorption can wash with water and remove, but lower to organic filter efficiency.In existing gas molecule pollutant thermal treatment unit (TAU), air enters from the entrance of gas molecule pollutant thermal treatment unit (TAU), after ionic adsorption plate 1, pump and refrigerator 2 processes, evaporated by evaporimeter 3 again, blower fan group 4 blows to chamber air, by polytetrafluoroethylene (PTFE), (Polytetrafluoroethylene is called for short: PTFE) filter 5 falls particle removal in air, can provide than air cleaner before.VOC) and so on but (VolatileOrganicCompounds is called for short: pollutant can not be removed in a large number through ionic adsorption plate the VOC in clean room.
Summary of the invention
For above-mentioned the deficiencies in the prior art, the invention provides a kind of gas molecule pollutant thermal treatment unit (TAU), zeolite rotary wheel device is added in TAU, gas containing VOC (VOC) is filtered, improve the efficiency of TAU filtering organics, improve the cleanliness factor of exposure area required air.
For achieving the above object, the technical solution used in the present invention is:
The invention provides a kind of gas molecule pollutant thermal treatment unit, comprise for the air successively ionic adsorption plate of process, pump and refrigerator, evaporimeter, fan group and filter, also be provided with zeolite rotary wheel device, described zeolite rotary wheel device comprises zeolite district, desorption district and cooling zone, zeolite district is used for for air by entering ionic adsorption plate, the part that desorption district is used for zeolite district to export is containing desorption after organic air heat, and cooling zone is used for the air that cooling segment adds thermal desorption.
Further, the delivery outlet in described zeolite district is also communicated with the input port of the part exported for heating zeolite district containing the heater of organic air, and the delivery outlet of heater is communicated with the input port in desorption district.
Further, be also provided with catalytic oxidizer, for the waste gas exported after zeolite rotary wheel device desorption is generated pollution-free mass emissions by chemical change.
Further, before the air of fan group extraction enters described zeolite rotary wheel device, also through deduster dedusting and evaporimeter dehumidifying.
Further, the rotating speed of zeolite rotary wheel device regulates as required.
Further, the rotating speed of zeolite rotary wheel device is set to 1-6 and turns per hour.
Further, described evaporimeter is coil evaporator.
Further, described filter is polytetrafluoroethylene filter.
Beneficial effect of the present invention is: gas molecule pollutant thermal treatment unit (TAU) enters ionic adsorption plate filtering inorganic pollutant by the zeolite district of zeolite rotary wheel device successively for air, organic pollution is filtered by the desorption district of zeolite rotary wheel device, because can filtering the gas containing VOC (VOC), improve the efficiency of TAU filtering organics, improve the cleanliness factor of exposure area required air.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing gas molecule pollutant thermal treatment unit (TAU);
Fig. 2 is the enforcement schematic diagram of existing gas molecule pollutant thermal treatment unit (TAU);
Fig. 3 is the structural representation of gas molecule pollutant thermal treatment unit (TAU) of the present invention;
Fig. 4 is the enforcement schematic diagram of gas molecule pollutant thermal treatment unit (TAU) of the present invention;
Fig. 5 is the structural representation of the zeolite rotary wheel device in gas molecule pollutant thermal treatment unit (TAU) of the present invention;
Fig. 6 is the enforcement schematic diagram of the zeolite rotary wheel device in gas molecule pollutant thermal treatment unit (TAU) of the present invention.
Detailed description of the invention
Specifically illustrate embodiments of the present invention below in conjunction with accompanying drawing, accompanying drawing is only for reference and use is described, does not form the restriction to scope of patent protection of the present invention.
As seen in figures 3-6, the present embodiment provides a kind of gas molecule pollutant thermal treatment unit, comprise the ionic adsorption plate 1 for air successively process, pump and refrigerator 2, evaporimeter 3, fan group 4 and filter 5, also be provided with zeolite rotary wheel device 6, described zeolite rotary wheel device 6 comprises zeolite district 61, desorption district 62 and cooling zone 63, zeolite district 61 is for passing through to enter ionic adsorption plate 1 successively for air, pump and refrigerator 2, evaporimeter 3, fan group 4 and filter 5, desorption district 62 for part that zeolite district 61 is exported containing desorption after organic air heat, cooling zone 63 adds the air of thermal desorption for cooling segment.
In the present embodiment, as shown in Figure 3, the delivery outlet in described zeolite district 61 is also communicated with the input port of the part exported for heating zeolite district 61 containing the heater 7 of organic air, and the delivery outlet of heater 7 is communicated with the input port in desorption district 62.
In the present embodiment, also be provided with catalytic oxidizer 8, for the waste gas exported after zeolite rotary wheel device 6 desorption is generated pollution-free material emissions of oxides in air by chemical change (as: by modes such as burnings), the pollution-free material of generation is CO2 and steam.
In the present embodiment, before the air of fan group 10 extraction enters described zeolite rotary wheel device 6, also dehumidify through deduster 11 dedusting and evaporimeter 12.
In the present embodiment, the rotating speed of zeolite rotary wheel device 6 regulates as required.Preferably, the rotating speed of zeolite runner is set to 1-6 and turns per hour.
In the present embodiment, described evaporimeter 3,12 is coil (Coil) evaporimeter.
In the present embodiment, described filter 5 is polytetrafluoroethylene (PTFE) (PTFE) filter.
Active carbon and zeolite runner two kinds of methods can be adopted at present to organic filtration.Activated charcoal strainer adopts the aluminium honeycomb of through-hole structure, plastic honeycomb, paper honeycomb to be carrier, and because air drag is little, energy consumption is low, can deodorizing under certain air quantity, eliminate the unusual smell, environment purification, has good clean-up effect.But when the adsorption capacity of active carbon is saturated time, just must change.The service life of active carbon is generally 3 to 6 months.Zeolite runner also can adsorb organic compound effectively, and can will continue after organic matter desorption to use.The organic matter absorbed can be delivered in catalytic oxidizing equipment and convert CO2 and moisture discharge to in air.Therefore, the present invention adds zeolite rotary wheel device 6 and carrys out filtering organics in gas molecule pollutant thermal treatment unit TAU, can improve gas molecule pollutant thermal treatment unit TAU to organic filter efficiency, and not need frequently to change parts.
The course of work of gas molecule pollutant thermal treatment unit TAU of the present invention is:
Fan group 10 is first by air suction, and after deduster 11 removes dust, coil (Coil) evaporimeter 12 dries.As shown in Figure 5,6, zeolite rotary wheel device 6 has three pieces of regions, one to be 61, one, normal zeolite district be adsorbed 62, one, organic desorption district be desorption complete after cooling zone 63.From normal zeolite district 61, gas out successively through ionic adsorption plate 1, pump and refrigerator 2, evaporimeter 3, fan group 4 and filter 5, can complete the normal flow of gas molecule pollutant thermal treatment unit TAU parts process.Part in the gas that normal zeolite district 61 exports can be divided to flow through after heater 7 heats containing the gas of organic pollution and arrived desorption district 63 again, for desorption organic pollution.The air-flow that sub-cooled district 63 cools is that desorption district 62 conversion is come, because there is the air-flow of heating to pass through before, so need cooling.The air that refrigerating gas extracts by fan group 10.Generate CO2 and H2O from zeolite rotary wheel device 6 desorption waste gas out through catalytic oxidizer 8 (incinerator) change to be discharged into air.
Above disclosedly be only preferred embodiment of the present invention, the scope of the present invention can not be limited with this, therefore according to the equivalent variations that the present patent application the scope of the claims is done, still belong to the scope that the present invention is contained.
Claims (8)
1. a gas molecule pollutant thermal treatment unit, comprise for the air successively ionic adsorption plate of process, pump and refrigerator, evaporimeter, fan group and filter, it is characterized in that: be also provided with zeolite rotary wheel device, described zeolite rotary wheel device comprises zeolite district, desorption district and cooling zone, zeolite district is used for for air by entering ionic adsorption plate, the part that desorption district is used for zeolite district to export is containing desorption after organic air heat, and cooling zone is used for the air that cooling segment adds thermal desorption.
2. gas molecule pollutant thermal treatment unit according to claim 1, is characterized in that:
The delivery outlet in described zeolite district is also communicated with the input port of the part exported for heating zeolite district containing the heater of organic air, and the delivery outlet of heater is communicated with the input port in desorption district.
3. gas molecule pollutant thermal treatment unit according to claim 1, is characterized in that:
Also be provided with catalytic oxidizer, for the waste gas exported after zeolite runner desorption is generated pollution-free mass emissions by chemical change.
4. gas molecule pollutant thermal treatment unit according to claim 1, is characterized in that:
Before the air of fan group extraction enters described zeolite rotary wheel device, also through deduster dedusting and evaporimeter dehumidifying.
5. gas molecule pollutant thermal treatment unit according to claim 1, is characterized in that:
The rotating speed of zeolite rotary wheel device regulates as required.
6., according to gas molecule pollutant thermal treatment unit according to claim 5, it is characterized in that:
The rotating speed of zeolite rotary wheel device is set to 1-6 and turns per hour.
7. the gas molecule pollutant thermal treatment unit according to claim 1 or 4, is characterized in that:
Described evaporimeter is coil evaporator.
8. gas molecule pollutant thermal treatment unit according to claim 1, is characterized in that:
Described filter is polytetrafluoroethylene filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510767610.9A CN105289203A (en) | 2015-11-10 | 2015-11-10 | Gas molecular pollutant heat treatment unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510767610.9A CN105289203A (en) | 2015-11-10 | 2015-11-10 | Gas molecular pollutant heat treatment unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105289203A true CN105289203A (en) | 2016-02-03 |
Family
ID=55187432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510767610.9A Pending CN105289203A (en) | 2015-11-10 | 2015-11-10 | Gas molecular pollutant heat treatment unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105289203A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106178935A (en) * | 2016-07-12 | 2016-12-07 | 广州同胜环保科技有限公司 | Waste gas cleaning system |
| CN106669417A (en) * | 2017-01-04 | 2017-05-17 | 佛山市顺德区阿波罗环保器材有限公司 | Device for removing gaseous pollutants through heating |
| CN106853315A (en) * | 2017-03-21 | 2017-06-16 | 上海兰宝环保科技有限公司 | Low-concentration organic exhaust gas recovery and processing system |
| CN109453614A (en) * | 2018-12-12 | 2019-03-12 | 江苏楚锐环保科技有限公司 | Zeolite runner Adsorption Concentration device |
| CN110652801A (en) * | 2018-06-28 | 2020-01-07 | 江苏中远环保科技有限公司 | Waste gas recovery device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101352640A (en) * | 2007-07-27 | 2009-01-28 | 华懋科技股份有限公司 | Exhaust air deodorization device and method |
| CN104096450A (en) * | 2013-04-07 | 2014-10-15 | 王汉培 | Efficient rotating wheel adsorption device for waste gas treatment |
-
2015
- 2015-11-10 CN CN201510767610.9A patent/CN105289203A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101352640A (en) * | 2007-07-27 | 2009-01-28 | 华懋科技股份有限公司 | Exhaust air deodorization device and method |
| CN104096450A (en) * | 2013-04-07 | 2014-10-15 | 王汉培 | Efficient rotating wheel adsorption device for waste gas treatment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106178935A (en) * | 2016-07-12 | 2016-12-07 | 广州同胜环保科技有限公司 | Waste gas cleaning system |
| CN106178935B (en) * | 2016-07-12 | 2019-01-25 | 广州同胜环保科技有限公司 | Waste gas cleaning system |
| CN106669417A (en) * | 2017-01-04 | 2017-05-17 | 佛山市顺德区阿波罗环保器材有限公司 | Device for removing gaseous pollutants through heating |
| CN106853315A (en) * | 2017-03-21 | 2017-06-16 | 上海兰宝环保科技有限公司 | Low-concentration organic exhaust gas recovery and processing system |
| CN110652801A (en) * | 2018-06-28 | 2020-01-07 | 江苏中远环保科技有限公司 | Waste gas recovery device |
| CN109453614A (en) * | 2018-12-12 | 2019-03-12 | 江苏楚锐环保科技有限公司 | Zeolite runner Adsorption Concentration device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105289203A (en) | Gas molecular pollutant heat treatment unit | |
| CN205886514U (en) | Paint spraying waste gas treatment device | |
| CN105169886A (en) | Efficient energy-saving large-air-quantity low-concentration organic waste gas recovery and treatment device and method | |
| CN102512902B (en) | Method and device for purifying organic waste gas and utilizing residual heat in printing ink workshop | |
| JP2012225588A (en) | Air cleaning apparatus | |
| CN206082073U (en) | System for adsorbent circulation demercuration of can regenerating is retrieved with mercury | |
| CN107694282A (en) | Utilize the technique and device of activated carbon processing organic exhaust gas | |
| CN103196188A (en) | Dehumidification device with rotating wheel | |
| CN107816752A (en) | Except the compound new return air processing unit of wet purification | |
| CN106247449A (en) | The using method of rotary-type removing indoor harmful gas device | |
| CN204017604U (en) | Novel indoor air purifier | |
| CN104353325A (en) | Device and method for removing mercury from boiler flue gas of power station | |
| JP2003181242A (en) | Carbon dioxide removing apparatus integrated with desulfurization device and boiler equipment equipped with carbon dioxide removing apparatus | |
| CN105251312A (en) | Air purifying system and control method thereof | |
| CN106123128A (en) | A kind of indoor harmful gas removal device based on low temperature cold source | |
| CN101352640A (en) | Exhaust air deodorization device and method | |
| CN205379766U (en) | Organic waste gas adsorbs concentrated thermolysis processing system | |
| CN205815448U (en) | A kind of flue gas processing device of heat-recoverable | |
| CN205042306U (en) | Flue gas dust removal SOx/NOx control integration system | |
| CN101862547B (en) | Rotary solvent recovery device and method | |
| CN203190534U (en) | Rotary-wheel dehumidification device | |
| CN109966875A (en) | A kind of dry process technique of high temperature VOC- mix dust exhaust gas | |
| CN105056683B (en) | A kind of flue-gas dust-removing and desulfurization denitrification integral system and method | |
| CN210145785U (en) | Deep dehumidification purification system for wet flue gas | |
| CN106178832A (en) | The device of rotary-type removing indoor harmful gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160203 |