CN101352640A - Exhaust air deodorization device and method - Google Patents

Exhaust air deodorization device and method Download PDF

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Publication number
CN101352640A
CN101352640A CNA2007101298395A CN200710129839A CN101352640A CN 101352640 A CN101352640 A CN 101352640A CN A2007101298395 A CNA2007101298395 A CN A2007101298395A CN 200710129839 A CN200710129839 A CN 200710129839A CN 101352640 A CN101352640 A CN 101352640A
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China
Prior art keywords
runner
waste gas
heat
zeolite layer
exhaust air
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CNA2007101298395A
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Chinese (zh)
Inventor
郑石治
田磊
徐瑞珠
刘邦昱
洪守铭
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Huamao Science & Technology Co ltd
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Huamao Science & Technology Co ltd
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Priority to CNA2007101298395A priority Critical patent/CN101352640A/en
Publication of CN101352640A publication Critical patent/CN101352640A/en
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  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)

Abstract

The invention provides a waste gas deodorization device which is provided with an air inlet pipeline, a rotation wheel, a heat source device, a burning furnace and an exhausting pipeline; the waste gas enters from the air inlet pipeline; the rotation wheel is provided with a frame which is provided with a zeolite layer which is provided with an internal zeolite layer and an external zeolite layer used for adsorbing the waste gas entering from the air inlet pipeline; furthermore, the rotation wheel is provided with an adsorption area, a regeneration desorption area and a separation cooling area; the waste gas is adsorbed by the adsorption area of the rotation wheel and is de-adsorbed by the regeneration desorption area so as to form concentrated waste gas; furthermore, after the rotation wheel de-adsorbs the concentrated waste gas, the waste gas is sent to the separation cooling area so as to reduce the temperature of the zeolite layer; the heat source device provides the heat of the regeneration desorption area so as to be used by the waste gas desorption by the rotation wheel; the burning furnace leads the concentrated waste gas at the regeneration desorption area to be removed by high-temperature burning reaction; the exhausting pipeline can exhaust the gas in the adsorption area in the rotation wheel and the gas disposed by the burning furnace, and the zeolite layer in the rotation wheel can dehumidify and deodorize the waste gas, thus improving the exhausting quality.

Description

Exhaust air deodorization device and method
Technical field
The present invention is relevant a kind of exhaust air deodorization device and method, refer in particular to a kind of design that is provided with interior zeolite layer, outer zeolite layer by the zeolite layer in the runner, make the present invention have the effect of dehumidifying, deodorizing, and be suitable for being applied in the place of various semiconductor industries, opto-electronics, other chemistry/chemical industry related industry and related request air quality.
Background technology
Along with the TaiWan, China high-tech industry flourish down, semiconductor industry is day by day grown up rapidly, wherein semiconductor industry can include IC industry and opto-electronics, economic development had great influence power, but many waste liquids of in semiconductor subassembly and photoelectric subassembly preparation technology, thereupon having derived, waste water, relevant environmental issue such as waste gas, for example: semiconductor factory has cleaning respectively in gold-tinted preparation technology, linging, photoresistance covers, soft roasting, exposure, baking, develop, hard roasting or the like step, can use various cleaning fluid, organic solvents such as photoresistance liquid have caused volatile organic matter VOCs (Volatile Organic Compounds; Be meant that generally under standard state, its vapour pressure is greater than the organic compound more than the 0.1mmHg) generation, and the exhausted major part of these VOCs belongs to air pollutants (the Hazardous Air Pollutants of harmfulness; HAPs), the human body long term exposure has reactions such as producing poisoning and carcinogenicity tumour in the environment that contains high concentration VOCs.In addition, the VOCs meeting photochemical reaction in the atmosphere causes ozone concentration rising and generation high oxidation contact scar thing in the atmosphere.Therefore, the organic solvent steam that these emit must be handled, and can not let alone directly to be discharged in the atmosphere.
And TaiWan, China is also in issue on January 6th, 1999 " semiconductor manufacturing industry air pollution control and discharge standard ", according to this standard code, be engaged in operators such as IC wafers manufacturing and encapsulation, crystalline substance of heap of stone, light shield manufacturing and lead frame manufacturing in the semiconductor manufacturing industry of TaiWan, China, inorganic acid year such as its full factory volatile organic matter (VOCs) and nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, hydrofluoric acid, use amount surpassed prescribed limits person, all should include control in, wherein its reduction rate of volatile organic waste gas mandatory requirement should greater than 90% or total release less than 0.6kg/hr.
At present at TaiWan, China, generally be engaged in the integrated circuit manufacturing industry of manufacturing and foundry, the VOCs prevention and cure of air pollution equipment of implementing running mainly contains the active carbon adsorption tower, runner concentrates incineration, cold plan recovery, wet scrubbing, activated carbon fluidized bed etc., and kind can be said too numerous to enumerate.And known emission-control equipment has real-world operation experience and mature and stable, how its treatment efficiency can meet the empty dirty rules VOCs exhaust-gas treatment efficient of present semiconductor greater than the requirement more than 90%, even also can meet the requirement of discharge capacity less than 0.6kg/hr simultaneously.
So, handle its volatile organic matter VOCs at present, except itself belonging to harmfulness air pollutants, after mixing, easily can produce stink because of wherein being entrained with chemical substance, to human body and be discharged in the atmosphere all bad, and known emission-control equipment uses, though have the function of Purge gas, but because can only purifying exhaust air, even therefore its volatile organic matter VOCs contains a large amount of stinks, behind emission-control equipment, reach discharge standard, its gas frowzy also can be expelled in the atmosphere, so known emission-control equipment need be designed, could increase deodorizing, the effect of Purge gas.
Summary of the invention
The object of the present invention is to provide a kind of by the zeolite layer in the runner with waste gas dehumidifying, deodorizing, promote the exhaust air deodorization device and the method for air quality.
For achieving the above object, exhaust air deodorization device provided by the invention includes an air inlet pipeline, a runner, a heat power supply device, a combustion furnace and a gas exhaust piping; This waste gas is entered by air inlet pipeline, and this runner is provided with framework, this framework is provided with zeolite layer, zeolite layer and outer zeolite layer in this zeolite layer is provided with, for adsorbing the waste gas that enters from air inlet pipeline, and runner has a binding domain, one regeneration desorption zone and one isolates cooled region, its waste gas is after the binding domain absorption of runner, make waste gas form concentrated waste gas by desorption by regeneration desorption zone again, and runner is attached with the thickened waste qi exhaustion, change the isolation cooled region over to and make the zeolite layer cooling, this heat power supply device provides the heat in regeneration desorption zone, use for runner desorption waste gas, to the regenerate concentrated waste gas in desorption zone of this combustion furnace is removed through high-temp combustion reaction, and the gas after this gas exhaust piping can be handled the gas in the binding domain in the runner and combustion furnace is discharged, with this, by the zeolite layer in the runner waste gas is dehumidified, deodorizing, and promote exhaust quality.
Described exhaust air deodorization device, wherein, this runner is a honeycomb type structure.
Described exhaust air deodorization device, wherein, zeolite layer and outer zeolite layer are formed by the zeolite piece storehouse of different proportion in this, and outer zeolite layer is dehumidifying usefulness, and interior zeolite layer is that deodorizing is used.
Described exhaust air deodorization device, wherein, this runner is provided with sealing gasket, in order to binding domain, regeneration desorption zone and isolation cooled region are isolated separately mutually, disengages clean gas after handling waste gas and processing.
Described exhaust air deodorization device wherein, is provided with cooling line in the regeneration desorption zone of this runner, is water in this cooling line, utilizes the nozzle mode to form the fine mist shape, with the too high and breaking out of fire of prevention desorption temperature.
Described exhaust air deodorization device wherein, is provided with cooling line in the regeneration desorption zone of this runner, is nitrogen in this cooling line, utilizes the high pressure nozzle mode to spray nitrogen, with the too high and breaking out of fire of prevention desorption temperature.
Described exhaust air deodorization device, wherein, this combustion furnace front end is provided with an air exhauster, delivers to combustion furnace high-temp combustion reaction removal so that the concentrated waste gas in the regeneration desorption zone of runner is extracted out.
Described exhaust air deodorization device, wherein, this heat power supply device is a heat-exchange apparatus, and heat-exchange apparatus is that clean gas is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent in the regeneration desorption zone of this runner, so that the heat of runner desorption waste gas to be provided, and the heat energy of this combustion furnace reaction back high-temperature gas is stored, form cycling for using of heat-exchange apparatus, and promote the thermal source quality.
Described exhaust air deodorization device, wherein, this heat power supply device is a steam equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of steam.
Described exhaust air deodorization device, wherein, this heat power supply device is a heating equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of heating equipment.
Exhaust air deodorization method provided by the invention, it comprises the following step:
Step 1, from air inlet pipeline, adsorb waste gas by the binding domain of runner;
Step 2, come adsorption and dehumidification via the outer zeolite layer of the zeolite layer of runner;
Step 3, come absorbing and deodorizing via the interior zeolite layer of the zeolite layer of runner again;
Step 4 and make waste gas form concentrated waste gas by desorption through regeneration desorption zone provide the heat in regeneration desorption zone by heat power supply device, and runner is attached with the thickened waste qi exhaustion, changes over to isolate cooled region and make the zeolite layer cooling;
Step 5 and through combustion furnace so that the concentrated waste gas in the regeneration desorption zone of runner is removed through the high-temp combustion reaction; And
Gas after step 6, the gas in gas exhaust piping can be with runner in the binding domain and combustion furnace are handled is discharged.
Described exhaust air deodorization method, wherein, this runner is a honeycomb type structure.
Described exhaust air deodorization method, wherein, zeolite layer and outer zeolite layer are formed by the zeolite piece storehouse of different proportion in this, and outer zeolite layer is dehumidifying usefulness, and interior zeolite layer is that deodorizing is used.
Described exhaust air deodorization method, wherein, this runner is provided with sealing gasket, in order to binding domain, regeneration desorption zone and isolation cooled region are isolated separately mutually, disengages clean gas after handling waste gas and processing.
Described exhaust air deodorization method wherein, is provided with cooling line in the regeneration desorption zone of this runner, is water in this cooling line, utilizes the nozzle mode to form the fine mist shape, with the too high and breaking out of fire of prevention desorption temperature.
Described exhaust air deodorization method wherein, is provided with cooling line in the regeneration desorption zone of this runner, is nitrogen in this cooling line, utilizes the high pressure nozzle mode to spray nitrogen, with the too high and breaking out of fire of prevention desorption temperature.
Described exhaust air deodorization method, wherein, this combustion furnace front end is provided with an air exhauster, delivers to combustion furnace high-temp combustion reaction removal so that the concentrated waste gas in the regeneration desorption zone of runner is extracted out.
Described exhaust air deodorization method, wherein, this heat power supply device is a heat-exchange apparatus, and heat-exchange apparatus is that clean gas is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent in the regeneration desorption zone of this runner, so that the thermal source of runner desorption waste gas to be provided, and the heat energy of this combustion furnace reaction back high-temperature gas is stored, form cycling for using of heat-exchange apparatus, and promote the thermal source quality.
Described exhaust air deodorization method, wherein, this heat power supply device is a steam equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of steam.
Described exhaust air deodorization method, wherein, this heat power supply device is a heating equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of heating equipment.
By enforcement of the present invention, have following practical advantage:
1, zeolite layer outside zeolite layer reaches in zeolite layer is provided with, wherein should in zeolite layer and outer zeolite layer be that zeolite piece storehouse by different proportion forms, its outer zeolite layer is the usefulness that dehumidifies, interior zeolite layer is a deodorizing usefulness, waste gas for absorption enters from air inlet pipeline adsorbs optimized effect to reach.
2, this device and by the combustion furnace concentrated waste gas that burns reaches and saves the energy and the efficient of removing waste gas, to promote exhaust quality.
Description of drawings
Fig. 1 is the structural representation of exhaust air deodorization device of the present invention.
Fig. 2 is the runner schematic diagram of exhaust air deodorization device of the present invention.
Fig. 3 is the floor map that is provided with of exhaust air deodorization device of the present invention.
Fig. 4 is the block flow diagram of body frame structure of the present invention.
Primary clustering symbol description in the accompanying drawing:
10, air inlet pipeline
11, waste gas
12, concentrate waste gas
13, clean gas
20, runner
21, framework
22, zeolite layer
221, interior zeolite layer
222, outer zeolite layer
23, binding domain
24, regeneration desorption zone
25, isolate cooled region
26, cooling line
30, heat power supply device
40, combustion furnace
41, air exhauster
50, gas exhaust piping
60, step 1
61, step 2
62, step 3
63, step 4
64, step 5
65, step 6
The specific embodiment
The present invention includes an air inlet pipeline, a runner, a heat power supply device, a combustion furnace and a gas exhaust piping; This waste gas is entered by air inlet pipeline, and this runner is provided with framework, this framework is provided with zeolite layer, zeolite layer and outer zeolite layer in this zeolite layer is provided with, for adsorbing the waste gas that enters from air inlet pipeline, and runner has a binding domain, one regeneration desorption zone and one isolates cooled region, its waste gas is after the binding domain absorption of runner, make waste gas form concentrated waste gas by desorption by regeneration desorption zone again, and runner is attached with the thickened waste qi exhaustion, change the isolation cooled region over to and make the zeolite layer cooling, this heat power supply device provides the heat in regeneration desorption zone, use for runner desorption waste gas, this combustion furnace is that the concentrated waste gas in regeneration desorption zone is removed through the high-temp combustion reaction, and this gas exhaust piping can be discharged the gas after gas in the binding domain in the runner and the combustion furnace processing, with this, by the zeolite layer in the runner waste gas is dehumidified, deodorizing, and promote exhaust quality.
Other characteristics of the present invention and specific embodiment can further be understood in the detailed description of following conjunction with figs..
Please refer to Fig. 1, shown in Figure 2, be exhaust air deodorization device of the present invention, consist predominantly of an air inlet pipeline 10, a runner 20, a heat power supply device 30, a combustion furnace 40 and a gas exhaust piping 50; This waste gas 11 is entered by air inlet pipeline 10, and this runner 20 is provided with framework 21, wherein this runner 20 is a honeycomb type structure, this framework 21 is provided with zeolite layer 22, zeolite layer 221 and outer zeolite layer 222 in its zeolite layer 22 is provided with, for adsorbing the waste gas 11 that enters from air inlet pipeline 10, and runner 20 has a binding domain 23, one regeneration desorption zone 24 and isolates cooled region 25, its waste gas 11 is after binding domain 23 absorption of runner 20, make waste gas 11 form concentrated waste gas 12 by desorption by regeneration desorption zone 24 again, and after runner 20 will concentrate waste gas 12 desorptions, change isolation cooled region 25 over to and make zeolite layer 22 coolings with cleaned air, change binding domain 23 after the cooling again over to and proceed to adsorb waste gas 11 actions, this heat power supply device 30 provides the heat in regeneration desorption zone 24, for runner 20 desorption waste gas 11 usefulness, to the regenerate concentrated waste gas 12 in desorption zone 24 of this combustion furnace 40 is removed through high-temp combustion reaction, and the gas after this gas exhaust piping 50 can be handled the gas in the binding domains 23 in the runner 20 and combustion furnace 40 is discharged.
Please refer to shown in Figure 2, this runner 20 is a honeycomb type structure, and this runner 20 is provided with framework 21, wherein this framework 21 is provided with zeolite layer 22, and it is that zeolite piece storehouse by different proportion forms that zeolite layer 221 and outer zeolite layer 222 in its zeolite layer 22 is provided with, the interior zeolite layer 221 of zeolite layer 22 reach outer zeolite layer 222, to reach the optimized effect of absorption, its China and foreign countries' zeolite layer 222 is dehumidifying usefulness, and interior zeolite layer 221 is deodorizing usefulness, the waste gas 11 that supplies absorption to enter from air inlet pipeline 10; This runner 20 is provided with three sealing gaskets (figure does not show) in addition, in order to binding domain 23, regeneration desorption regional 24 and isolation cooled region 25 are isolated separately mutually, disengages clean gas after handling waste gas and processing.
Please refer to Fig. 1~shown in Figure 3, this heat power supply device 30 is a heat-exchange apparatus, and heat-exchange apparatus is that clean gas 13 is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent in the regeneration desorption zone 24 of this runner 20, so that the heat of runner 20 desorption waste gas 11 to be provided, and the heat energy of these combustion furnace 40 reaction back high-temperature gases is stored, and heat energy also can provide heat power supply device 30 to come to form cycling for runner 20 desorption waste gas 11 for concentrating using of waste gas 12, wherein this heat power supply device 30 also can be steam equipment or heating equipment (figure does not show), is provided regeneration desorption zone 24 desorption waste gas to use by the heat of steam equipment and heating equipment.Being to be provided with cooling line 26 in the regeneration desorption zone 24 of runner 20 in addition, be water or nitrogen in this cooling line 26, utilizes the high pressure nozzle mode to form the fine mist shape, to prevent the too high and breaking out of fire person of desorption temperature.Its combustion furnace 40 front ends are provided with an air exhauster 41, so that being extracted out, the concentrated waste gas in the regeneration desorption zone 24 of runner 20 12 delivers to combustion furnace 40, remove through the high-temp combustion reaction and concentrate waste gas 12, the heat energy of reaction back high-temperature gas is stored, and heat energy provides heat power supply device 30 to come to make the formation cycling for runner 20 usefulness.
Please refer to shown in Figure 4ly, be the block flow diagram of body frame structure of the present invention, a kind of exhaust air deodorization method, it comprises the following step:
Step 1 60, from air inlet pipeline, adsorb waste gas by the binding domain of runner;
Step 2 61, come adsorption and dehumidification via the outer zeolite layer of the zeolite layer of runner;
Step 3 62, come absorbing and deodorizing via the interior zeolite layer of the zeolite layer of runner again;
Step 4 63 and make waste gas form concentrated waste gas by desorption through regeneration desorption zone provide the heat in regeneration desorption zone by heat power supply device, and runner is attached with the thickened waste qi exhaustion, changes over to isolate cooled region and make the zeolite layer cooling;
Step 5 64 and through combustion furnace so that the concentrated waste gas in the regeneration desorption zone of runner is removed through the high-temp combustion reaction; And
Gas after step 6 65, the gas in gas exhaust piping can be with runner in the binding domain and combustion furnace are handled is discharged.
The above person only is preferred embodiment of the present invention, and the impartial design variation of being done according to the present patent application claim all should be claim scope of the present invention and contains such as.

Claims (20)

1, a kind of exhaust air deodorization device includes an air inlet pipeline, a runner, a heat power supply device, a combustion furnace and a gas exhaust piping; This waste gas is entered by air inlet pipeline, and this runner is provided with framework, this framework is provided with zeolite layer, zeolite layer and outer zeolite layer in this zeolite layer is provided with, for adsorbing the waste gas that enters from air inlet pipeline, and runner has a binding domain, one regeneration desorption zone and one isolates cooled region, its waste gas is after the binding domain absorption of runner, make waste gas form concentrated waste gas by desorption by regeneration desorption zone again, and runner is attached with the thickened waste qi exhaustion, change the isolation cooled region over to and make the zeolite layer cooling, this heat power supply device provides the heat in regeneration desorption zone, use for runner desorption waste gas, to the regenerate concentrated waste gas in desorption zone of this combustion furnace is removed through high-temp combustion reaction, and the gas after this gas exhaust piping can be handled the gas in the binding domain in the runner and combustion furnace is discharged, with this, by the zeolite layer in the runner waste gas is dehumidified, deodorizing, and promote exhaust quality.
2, exhaust air deodorization device as claimed in claim 1, wherein, this runner is a honeycomb type structure.
3, exhaust air deodorization device as claimed in claim 1, wherein, zeolite layer and outer zeolite layer are formed by the zeolite piece storehouse of different proportion in this, and outer zeolite layer is dehumidifying usefulness, and interior zeolite layer is that deodorizing is used.
4, exhaust air deodorization device as claimed in claim 1, wherein, this runner is provided with sealing gasket, in order to binding domain, regeneration desorption zone and isolation cooled region are isolated separately mutually, disengages clean gas after handling waste gas and processing.
5, exhaust air deodorization device as claimed in claim 1 wherein, is provided with cooling line in the regeneration desorption zone of this runner, is water in this cooling line, utilizes the nozzle mode to form the fine mist shape, with the too high and breaking out of fire of prevention desorption temperature.
6, exhaust air deodorization device as claimed in claim 1 wherein, is provided with cooling line in the regeneration desorption zone of this runner, is nitrogen in this cooling line, utilizes the high pressure nozzle mode to spray nitrogen, with the too high and breaking out of fire of prevention desorption temperature.
7, exhaust air deodorization device as claimed in claim 1, wherein, this combustion furnace front end is provided with an air exhauster, delivers to combustion furnace high-temp combustion reaction removal so that the concentrated waste gas in the regeneration desorption zone of runner is extracted out.
8, exhaust air deodorization device as claimed in claim 1, wherein, this heat power supply device is a heat-exchange apparatus, and heat-exchange apparatus is that clean gas is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent in the regeneration desorption zone of this runner, so that the heat of runner desorption waste gas to be provided, and the heat energy of this combustion furnace reaction back high-temperature gas is stored, form cycling for using of heat-exchange apparatus, and promote the thermal source quality.
9, exhaust air deodorization device as claimed in claim 1, wherein, this heat power supply device is a steam equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of steam.
10, exhaust air deodorization device as claimed in claim 1, wherein, this heat power supply device is a heating equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of heating equipment.
11, a kind of exhaust air deodorization method, it comprises the following step:
Step 1, from air inlet pipeline, adsorb waste gas by the binding domain of runner;
Step 2, come adsorption and dehumidification via the outer zeolite layer of the zeolite layer of runner;
Step 3, come absorbing and deodorizing via the interior zeolite layer of the zeolite layer of runner again;
Step 4 and make waste gas form concentrated waste gas by desorption through regeneration desorption zone provide the heat in regeneration desorption zone by heat power supply device, and runner is attached with the thickened waste qi exhaustion, changes over to isolate cooled region and make the zeolite layer cooling;
Step 5 and through combustion furnace so that the concentrated waste gas in the regeneration desorption zone of runner is removed through the high-temp combustion reaction; And
Gas after step 6, the gas in gas exhaust piping can be with runner in the binding domain and combustion furnace are handled is discharged.
12, exhaust air deodorization method as claimed in claim 11, wherein, this runner is a honeycomb type structure.
13, exhaust air deodorization method as claimed in claim 11, wherein, zeolite layer and outer zeolite layer are formed by the zeolite piece storehouse of different proportion in this, and outer zeolite layer is dehumidifying usefulness, and interior zeolite layer is that deodorizing is used.
14, exhaust air deodorization method as claimed in claim 11, wherein, this runner is provided with sealing gasket, in order to binding domain, regeneration desorption zone and isolation cooled region are isolated separately mutually, disengages clean gas after handling waste gas and processing.
15, exhaust air deodorization method as claimed in claim 11 wherein, is provided with cooling line in the regeneration desorption zone of this runner, is water in this cooling line, utilizes the nozzle mode to form the fine mist shape, with the too high and breaking out of fire of prevention desorption temperature.
16, exhaust air deodorization method as claimed in claim 11 wherein, is provided with cooling line in the regeneration desorption zone of this runner, is nitrogen in this cooling line, utilizes the high pressure nozzle mode to spray nitrogen, with the too high and breaking out of fire of prevention desorption temperature.
17, exhaust air deodorization method as claimed in claim 11, wherein, this combustion furnace front end is provided with an air exhauster, delivers to combustion furnace high-temp combustion reaction removal so that the concentrated waste gas in the regeneration desorption zone of runner is extracted out.
18, exhaust air deodorization method as claimed in claim 11, wherein, this heat power supply device is a heat-exchange apparatus, and heat-exchange apparatus is that clean gas is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent in the regeneration desorption zone of this runner, so that the thermal source of runner desorption waste gas to be provided, and the heat energy of this combustion furnace reaction back high-temperature gas is stored, form cycling for using of heat-exchange apparatus, and promote the thermal source quality.
19, exhaust air deodorization method as claimed in claim 11, wherein, this heat power supply device is a steam equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of steam.
20, exhaust air deodorization method as claimed in claim 11, wherein, this heat power supply device is a heating equipment, is provided regeneration desorption zone desorption waste gas to use by the heat of heating equipment.
CNA2007101298395A 2007-07-27 2007-07-27 Exhaust air deodorization device and method Pending CN101352640A (en)

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Application Number Priority Date Filing Date Title
CNA2007101298395A CN101352640A (en) 2007-07-27 2007-07-27 Exhaust air deodorization device and method

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Application Number Priority Date Filing Date Title
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CN101352640A true CN101352640A (en) 2009-01-28

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105233626A (en) * 2015-11-13 2016-01-13 青岛华世洁环保科技有限公司 Bi-functional adsorption rotating wheel achieving dehumidifying and VOCs removing
CN105289203A (en) * 2015-11-10 2016-02-03 信利(惠州)智能显示有限公司 Gas molecular pollutant heat treatment unit
CN106475069A (en) * 2015-07-23 2017-03-08 阿特拉斯·科普柯空气动力股份有限公司 For processing adsorptive agent and its manufacture method and the adsorbent equipment for being provided with such adsorptive agent of compressed gas
CN108187448A (en) * 2018-02-27 2018-06-22 江苏安琪尔废气净化有限公司 A kind of highly enriched organic waste gas concentrating device and method light-dutyer than high temperature resistant
CN114832582A (en) * 2022-06-02 2022-08-02 光大环境科技(中国)有限公司 Deodorization system and deodorization method for garbage power plant
CN115318064A (en) * 2022-07-21 2022-11-11 安徽华梦环保工程技术有限公司 Zeolite runner adsorption equipment

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106475069A (en) * 2015-07-23 2017-03-08 阿特拉斯·科普柯空气动力股份有限公司 For processing adsorptive agent and its manufacture method and the adsorbent equipment for being provided with such adsorptive agent of compressed gas
CN106475069B (en) * 2015-07-23 2019-08-23 阿特拉斯·科普柯空气动力股份有限公司 For handling the adsorptive agent and its manufacturing method and the adsorbent equipment for being provided with such adsorptive agent of compressed gas
CN105289203A (en) * 2015-11-10 2016-02-03 信利(惠州)智能显示有限公司 Gas molecular pollutant heat treatment unit
CN105233626A (en) * 2015-11-13 2016-01-13 青岛华世洁环保科技有限公司 Bi-functional adsorption rotating wheel achieving dehumidifying and VOCs removing
CN105233626B (en) * 2015-11-13 2018-09-07 青岛纳博科环保科技有限公司 It is a kind of to dehumidify, except the difunctional adsorption runner of VOCs
CN108187448A (en) * 2018-02-27 2018-06-22 江苏安琪尔废气净化有限公司 A kind of highly enriched organic waste gas concentrating device and method light-dutyer than high temperature resistant
CN108187448B (en) * 2018-02-27 2023-12-15 江苏安琪尔废气净化有限公司 High-concentration-ratio high-temperature-resistant light organic waste gas concentration device and method
CN114832582A (en) * 2022-06-02 2022-08-02 光大环境科技(中国)有限公司 Deodorization system and deodorization method for garbage power plant
CN115318064A (en) * 2022-07-21 2022-11-11 安徽华梦环保工程技术有限公司 Zeolite runner adsorption equipment
CN115318064B (en) * 2022-07-21 2023-09-22 安徽华梦环保工程技术有限公司 Zeolite runner adsorption equipment

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