201238653 六、發明說明： 【發明所屬之技術領域】 本發明係關於〜插絲认 方法，尤其是關於輪南溫活化之再生裝置及其再生 上高溫活化之改良再廢氣之濃縮轉輪線 【先前技術】 視，進考量來：以 之彦宝，斟於工豐由兄及勞工以至於—般大眾身體產生 制定瞻及臭味4:::準曰趨嚴格，國内外法規都 機氣㈣處理，在工業廢氣中對於揮發性有 ^ ^ ^ θ ± 農度時夕採用冷凝法收集，而在低濃 度且大風里時則以物理吸附方式濃縮處理後，再送往小型 焚化爐燃燒或以冷凝裝置时較為經濟有效。以半導體業 晶圓廠產生的有機廢氣成分為例，常含有如二甲基二硫醇 (Dimethyl Sulfoxide) 、Ν-甲基 η比口各酮（N_Methyl201238653 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method of inserting a wire, in particular, a regenerative device for activating the wheel south temperature and a concentrated regenerative reel line for regenerating the high temperature activation of the regeneration [previously Technology] Depending on the amount of consideration: Yan Bao, 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工 工In the industrial waste gas, when the volatility is ^ ^ ^ θ ± agricultural degree, it is collected by condensation method, and in low concentration and high wind, it is concentrated by physical adsorption, and then sent to a small incinerator for combustion or The condensing unit is more economical and efficient. For example, the organic waste gas component produced by the semiconductor fab often contains, for example, Dimethyl Sulfoxide, Ν-methyl η, and ketone (N_Methyl).
Pyrolidone)、乙醇銨（2-Aminoethanol)、二曱基二硫醇 (Dithiolethylene Glycol)、二曱基硫醇（Dimethyl Sulfide)、 異丙醇（Isopropyl Alcohol)、丙酮（Acetone)等化合物’以沸 石轉輪吸附濃縮廢氣後’再以焚化爐於攝氏600〜900度以 上之溫度燃燒，分解這些揮發性有機物質以及臭氣和毒氣 最有效。目前以吸附濃縮沸石轉輪處理加上燃燒焚化的方 式，進行揮發性有機氣體的廢氣排放處理，已在半導體及 光電業界廣為採用。 201238653 工業上常以吸附濃縮沸石轉輪焚化系統處理揮發性有 機廢氣，其處理效率可穩定達到符合揮發性有機廢氣 (volatile organic compounds, VOCs)排放標準。然而，吸附 濃縮沸石轉輪最大之處理問題為廢氣中含多量高沸點物 質、聚合物質、脫附熱能量不足無法有效脫附出、或廢氣 中混排其它粒狀污染物，所導致之整體處理效率下降。光 電業製程及使用之物料與半導體相近，但在含高沸點VOCs 去光阻劑之使用量上遠高於半導體業，故使得其排放廢氣 組成上之高沸點VOCs較多；同時這類高沸點物質中，亦 同時是聚合物者佔大多數。這類高沸點VOCs雖容易吸附 於沸石轉輪上，但由於系統設計之安全考量，使得脫附高 沸點VOCs溫度不足，所以往往造成脫附不易，日久後高 沸點VOCs將蓄積其上、佔據吸附位置，影響系統整體效 能，故成為部份光電業應用沸石吸附濃縮焚化系統效能不 彰之因；而以往亦有廠家欲以提高脫附溫度、以增加高沸 點物質脫附效率，但這項操作措施容易造成系統跳機、形 成無通風之密閉狀態，若無緊急處理程序如灑水、喷入冷 卻氮氣等，如此將造成沸石吸附轉輪組合處產生悶熱狀 態，嚴重亦使得其局部溫度異常突升、讓沸石轉輪產生結 構性之永久破壞。 為防止沸石轉輪受到高沸點及（或）聚合物VOCs蓄 積，佔據沸石轉輪活性吸附位置導致系統效能不彰等問 題，沸石轉輪可藉由高溫活化來解決上述問題。 目前工業上一般採用之活化再生方式可分為線上活化 201238653 再生或線外活化再生二種，線外活化再生例如於美國專利 案4957721、日本公開特許62-282639及63-156542等所 述，其係將使用一段時間之沸石轉輪拆卸下來，在以更高 溫度（通常為300〜1000°C )直接加熱或高溫氣體處理，使 蓄積之高沸點物質因受到一定程度之溫度作用而斷鍵成為 小分子，而被碳化或脫除。然而，沸石轉輪之拆卸程序繁 雜，雖然可將蓄積之高沸點物質有效分解脫除，但沸石轉 輪拆卸過程容易造成轉輪結構損壞及吸附劑孔洞結構破 壞，而失去吸附能力或因劣化粉碎而損失。 線上活化再生例如日本公開昭 63-232823、 63-310636、英國專利案Brit. 1546437及德國專利案Ger. Offen 2419827等所述，其優點是可連續操作，避免繁雜之 拆卸程序，但此線上連續轉動轉輪之活化再生往往無法有 效將原蓄積之高沸點物質移除，而影響吸附能力。 而本國發明專利公告號1323183之「處理揮發性有機 廢氣之濃縮轉輪線上高溫活化之再生裝置及方法」，係提供 一種有效的轉輪線上高溫活化之再生裝置及方法；然而， 於該裝置及方法中，雖然可有效進行轉輪之線上高溫活 化，但由於轉輪具有一定之厚度，於進行線上高溫活化時， 因為該轉輪厚度因素，使得高溫氣體流經轉輪後溫度降 低，使得轉輪於前、後兩面之活化結果不同，也因為經常 性的再生，反而使得轉輪、後兩面之使用壽命不同，而在 使用一定再生次數後，雖然接觸高溫面之轉輪仍可使用， 但相對面則已無法再生，從而減少了該轉輪的使用壽命。 201238653 因此，本發明提供一種轉輪高溫活化之改良再生裝置 及其再生方法，藉由調控進入該轉輪再生吸附區之加熱氣 體入流方向與氣流比例，使得該轉輪再生吸附區之轉輪於 前、後兩面皆得以相同高溫進行脫附再生與活化，可有效 增加再生與活化的效率，亦因為前、後兩面之再生效果相 同，不會因為該轉輪之後面效果低而減損使用壽命，達至 延長該轉輪重覆使用之壽命。 【發明内容】 為了改善上述習知技術所面臨的問題，本發明提供一 種沸石轉輪之線上再生裝置及再生方法，本發明之裝置及 方法可有效活化再生沸石轉輪，增進吸附濃縮沸石轉輪處 理效率及延長該沸石轉輪之使用壽命。 詳而言之，本發明之目的為提供一種沸石轉輪之線上 再生裝置，其係包含： 一轉輪，係至少包含一吸附區及一再生脫附區， 並用以淨化揮發性有機廢氣； 一驅動元件，係用於控制該轉輪於一適當時間間 隔以步進或連續方式轉動； 一熱源，係用於加熱一氣體至一活化再生溫度； 及 一切換閥組，係用以切換經加熱該氣體進入該濃 縮轉輪之再生脫附區的方向，以交替入流方向使該濃 縮轉輪之再生脫附區均勻加熱完成再生。 201238653 本發明之再一目的為提供一種沸石轉輪之線上再生方 法，其係用於上述之線上再生裝置，其係包含下列步驟： (1) 利用該驅動元件控制該轉輪於一適當時間間隔以 步進或連續方式轉動，使欲進行再生之轉輪進入再 生脫附區，並於該再生脫附區停留一再生時間。 (2) 利用該切換閥組切換經加熱該氣體進入該再生脫 附區之入流方向，使該再生脫附區之轉輪進行前後 均勻之線上高溫再生； 重覆上述步驟（1)及步驟(2)，直至轉輪整體前後溫 度均勻一致完成再生。 本發明同時提供另一種沸石轉輪之線上再生裝置，其 係於上述線上再生裝置之再生脫附區進一步包含一再生脫 附預熱區，利用該切換閥組之控制，同時將經加熱該氣體 以前、後兩種入流方式分別針對再生脫附區及再生脫附預 熱區進行南溫再生。 本發明之另一目的為提供一種沸石轉輪之線上再生方 法，其係用於上述之線上再生裝置，其係包含下列步驟： (1) 利用該驅動元件控制該轉輪於一適當時間間隔以 步進或連續方式轉動，使欲進行再生之轉輪進入再 生脫附區及再生脫附預熱區，並於該再生脫附區及 再生脫附預熱區停留一再生時間。 (2) 利用該切換閥組同時將經加熱該氣體以前、後兩入 流方向進入該再生脫附區及再生脫附預熱區，使該 轉輪同時進行前後兩面之線上高溫再生； 201238653 重覆上述步驟（1)及步驟(2)，直到該轉輪整體前後 溫度均勻一致完成再生。 同時，於上述線上再生方法中，該轉輪之高溫活化再 生時間為10分鐘至120分鐘；且該步進或連續轉動間隔角 度為10°至90°。 藉由上述本發明之一種沸石轉輪之線上再生裝置及其 再生方法，可有效提升該轉輪之再生功效，並延長該轉輪 之使用壽命。 下列實驗設計係為說明，不應限制本發明之範疇，合 理的變化，諸如對於熟習此項技藝者顯而易見為合理者， 可於不脫離本發明之範疇下進行。 【實施方式】 為使充分瞭解本發明之目的、特徵及功效，茲藉由下 述具體之實施例，並配合所附之圖式，對本發明做一詳細 說明，說明如後： 第1圖為習知揮發性有機廢氣淨化裝置的示意圖。如 圖所示，一般處理揮發性有機廢氣之方法如下所述，當載 入上述裝置後，揮發性有機廢氣經由第一風機11抽送至濃 縮轉輪31，該濃縮轉輪31包括一吸附區311及一再生脫附 區312，被導入之揮發性有機廢氣經由該濃縮轉輪31之吸 附區311中的吸附劑所吸附，而經吸附後之乾淨氣流經由 第二風機21導入第一煙自91排放。同時，吸附揮發性有 機廢氣之吸附劑經由一驅動元件33之運轉而運送至該濃縮 201238653 轉輪31之再生脫附區312;並一鼓風機61抽送經一第一熱 交換器73加熱至再生溫度的氣流通過該濃縮轉輪31之再 生脫附區312，此時，再生脫附區312中被吸附的揮發性有 機物質受熱而脫附到氣流中，該氣流再被導引至一第二熱 交換器74預熱，再導入一焚化爐81燃燒成水及二氧化碳 為主的物質，再經由第二熱交換器74及第一熱交換器73 後，由第二煙囪92排放至大氣中。 第2圖則為本國公告號1323183「處理揮發性有機廢氣 之濃縮轉輪線上高溫活化之再生裝置及方法」之再生裝置 示意圖，如圖所示，該裝置包含一轉輪32、一驅動元件33 及一第一熱交換器73，其中該轉輪32包含一吸附區321、 一再生脫附區322及一冷卻區323。 第3圖則為本國公告號1323183「處理揮發性有機廢氣 之濃縮轉輪線上高溫活化之再生裝置及方法」之再生方法 較佳實施例示意圖。參見第2圖及第3圖，在將揮發性有 機廢氣淨化自系統載出後，進行高溫活化再生程序，開啟 鼓風機61，此時乾淨空氣會自一進氣口 42進入，通過該轉 輪32之冷卻區323後送至該第一熱交換器73,該第一熱交 換器73將乾淨空氣加熱至所設定之活化再生溫度並輸送至 再生脫附區322進行轉輪之活化再生，活化再生一設定時 間後，驅動元件33可驅動轉輪一設定角度，使轉輪32已 活化之部分進入冷卻區323進行冷卻，同時吸附區321中 未活化再生之部分進入再生脫附區322進行活化再生。因 此，藉由驅動元件33驅動轉輪32轉動，使轉輪32以此步 201238653 進方式於一適當時間間隔轉動一適當角度，並停留一適當 時間，即可完成轉輪整體之活化再生。 然而，於上述線上高溫活化之再生裝置及方法中，雖 然可有效進行轉輪之線上高溫活化，但由於轉輪具有一定 之厚度（20公分至45公分），於進行線上高溫活化時，因 為該轉輪厚度因素，使得高溫氣體流經轉輪期間使得氣流 溫度降低，進而使得該轉輪於前、後兩面之活化效果不同， 也因為經常性的再生，反而使得轉輪、後兩面之使用壽命 不同，而在使用一定次數的再生後，雖然接觸高溫面之轉 輪仍可使用，但相對面則已無法再生，從而減少了該轉輪 的使用壽命。 第4圖則為本發明中沸石轉輪之線上再生裝置的示意 圖。如第4圖所示，該裝置包含一轉輪32、一驅動元件33、 一第一熱交換器73及一切換閥組，其中該轉輪32包含一 吸附區321、一再生脫附區322及一冷卻區323，而該切換 閥組則由第一閥門A1、第二閥門A2、第三閥門A3及第四 閥門A4所組成。 於線上高溫再生該轉輪時，當第一閥門A1及第二閥門 A2打開，而第三閥門A3及第四閥門A4關閉之時，經該 第一熱交換器73加熱至活化高溫的氣體，經由一鼓風機61 之抽送而往該鼓風機61方向流經該轉輪32之再生脫附區 322，而經過一段適當時間後，則將第一閥門A1及第二閥 門A2關閉，而將第三閥門A3、第四閥門A4打開，此時， 經該第一熱交換器73加熱至活化高溫的氣體，經由該鼓風 201238653 機61之抽送而往與該鼓風機61相反方向流經該轉輪32之 再生脫附區322，如此交替操作該切換閥組，以使該轉輪 32之再生脫附區332中吸附劑得以前、後兩面均勻高溫脫 附或/及活化，進而完成有效脫附與再生。依據此一方法操 作，前、後兩面均可接受達至設定溫度之高溫氣流進行線 上高溫再生活化，可使該轉輪前、後兩面均以設定溫度達 至脫附與再生活化，可同時提升該轉輪之再生壽命。 再者，第5圖為本發明中沸石轉輪之改良線上再生裝 置另一實施例的示意圖。如第5圖所示，該裝置包含一轉 輪32、一驅動元件33、一第一熱交換器73及一切換閥組， 其中該轉輪32包含一吸附區321、一再生脫附區322、一 冷卻區323及一再生脫附預熱區324,而該切換閥組則由第 一閥門A1及第二閥門A2所組成。 於線上高溫再生該轉輪時，將該第一閥門A1及第二閥 門A2都打開，此時，經第一熱交換器73加熱至活化高溫 的氣體經由一鼓風機61之抽送，同時經由該第一閥門A1 及第二閥門A2而分別流向再生脫附區322及再生脫附預熱 區324，經過該驅動元件33之反覆驅動該轉輪32，使該轉 輪32中吸附劑得以前、後兩面均勻高溫脫附或/及活化， 進而完成再生。於此一具體實施例中，藉由該轉輪之區段 差別，同時進行前、後兩面之活化再生，亦可達成前、後 兩面之均勻脫附再生，從而延長該轉輪之重覆再生的使用 哥命。 另外，再參見第6圖，為本發明中沸石轉輪之改良線 201238653 上再生裝置再一實施例的示意圖。如第6圖所示’該裝置 包含一轉輪32、一驅動元件33、一第一熱交換器73及一 切換閥組，其中該轉輪32包含一吸附區321、一再生脫附 區322、一冷卻區323及一再生脫附預熱區324，而該切換 閥組則由第一閥門A1、第二閥門A2及第三閥門A3所組 成；於此實施例中，係將第5圖之實施例中流經該再生脫 附預熱區324之高溫氣流，藉由增設之第三閥門A3再導入 該第一熱交換器73之中，可有效重覆利用該高溫氣流，進 一步節省提高氣流溫度所需之電力成本。 為檢測本發明中再生裝置及方法的活化再生效果，進 行失活的蜂巢狀沸石轉輪高溫活化再生效能實驗。以習知 線上南溫再生裝置與本發明之改良線上局溫再生裝置比 較，將二者再生後之沸石轉輪樣品與新沸石轉輪樣本比對 吸附異丙醇(IPA)(於lOOppmv)之飽和吸附量。使用熱天 平以熱重量分析法(Thermogravimetric Analysis; TGA)分析 及使用示差熱分析裝置以示差熱分析法（Differential ThermalAnalysis ; DTA)分析，其結果顯示於第6圖。 由第7圖可知，以200、300及400°C之活化再生溫度 活化1小時後之再生能力，本發明中之再生效果皆明顯高 於習知的線上高溫活化裝置之效果，尤其於200〜300。(：高 溫活化時’本發明之線上再生裝置對於沸石之再生效能相 較於習知線上高溫活性襄置有將近20%以上之提升，且本 發明之裝置以180°C進行1小時之線上高溫活化亦可達至 60%以上的活化效能，此一結果亦非習知線上高溫活化裝 12 201238653 置於200°C進行再生所能達，因此本發明之再生裝置及方法 可達到良好之活化再生效果並可節省活化再生時間，相較 於習知線上高溫活化裝置可提供更好的再生活化之功效及 結果。 【圖式簡單說明】 第1圖為習知揮發性有機廢氣淨化裝置的示意圖。 第2圖為習知處理揮發性有機廢氣之濃縮轉輪線上高 溫活化的再生裝置示意圖。 第3圖為習知處理揮發性有機廢氣之濃縮轉輪線上高 溫活化的再生方法較佳實施例示意圖。 第4圖為本發明中沸石轉輪之線上再生裝置一具體實 施例的示意圖。 第5圖為本發明中沸石轉輪之線上再生裝置另一具體 實施例的示意圖。 第6圖為為本發明中沸石轉輪之線上再生裝置再一具 體實施例的示意圖。 第7圖為習知線上高溫再生裝置與本發明線上再生裝 置再生沸石轉輪之再生效能比較結果圖。 【主要元件符號說明】 11 第一風機 21 第二風機 31、32 濃縮轉輪 13 201238653 311 、 321 吸附區 312 、 322 再生脫附區 323 冷卻區 324 再生脫附預熱區 33 驅動元件 42 進氣口 61 鼓風機 73 第一熱交換器 74 第二熱交換器 81 焚化爐 91 第一煙囪 92 第二煙囪 A1 第一閥門 A2 第二閥門 A3 第三閥門 A4 第四閥門 14Pyrolidone), 2-Aminoethanol, Dithiolethylene Glycol, Dimethyl Sulfide, Isopropyl Alcohol, Acetone, etc. After the wheel adsorbs the concentrated exhaust gas, it is burned at a temperature of 600 to 900 degrees Celsius in an incinerator, and it is most effective to decompose these volatile organic substances and odors and poisonous gases. At present, the exhaust gas treatment of volatile organic gases is carried out by adsorption-concentrated zeolite rotor treatment plus combustion incineration, which has been widely used in the semiconductor and photovoltaic industries. 201238653 The industry often treats volatile organic waste gas by adsorption-concentrated zeolite wheel incineration system, and its treatment efficiency can be stably achieved to meet the requirements of volatile organic compounds (VOCs). However, the biggest problem in the adsorption and concentration of zeolite runners is that the exhaust gas contains a large amount of high-boiling substances, polymer materials, insufficient desorption of thermal energy, can not be effectively desorbed, or other particulate pollutants are mixed in the exhaust gas, resulting in overall treatment. The efficiency is declining. The photovoltaic industry process and materials used are similar to those of semiconductors, but the use of high-boiling VOCs to remove photoresist is much higher than that of the semiconductor industry, so that the high-boiling VOCs of the exhaust gas composition are more; and such high boiling point Among the substances, it is also the majority of polymers. Although such high-boiling VOCs are easily adsorbed on the zeolite runner, due to the safety considerations of the system design, the temperature of the desorption high-boiling VOCs is insufficient, so the desorption is often difficult, and the high-boiling VOCs will accumulate on the surface after a long time. The adsorption position affects the overall efficiency of the system, so it has become the cause of the inefficiency of the zeolite adsorption and concentration incineration system in some photovoltaic industries. In the past, some manufacturers wanted to increase the desorption temperature to increase the desorption efficiency of high-boiling substances. The operation measures are likely to cause the system to trip and form a closed state without ventilation. If there is no emergency treatment procedure such as watering, spraying cooling nitrogen, etc., this will cause the smoldering state of the zeolite adsorption runner combination to be severe, and the local temperature is abnormal. Sudden rise, causing structural permanent damage to the zeolite runner. In order to prevent the zeolite runner from being subjected to high boiling point and/or polymer VOCs accumulation, occupying the active adsorption position of the zeolite runner leads to inefficiency of the system, and the zeolite runner can solve the above problem by high temperature activation. At present, the activation regeneration method generally employed in the industry can be divided into two types: on-line activation 201238653 regeneration or off-line activation regeneration, and the off-line activation regeneration is described in, for example, U.S. Patent No. 4,497,721, Japanese Patent Publication No. 62-282639, and No. 63-156542, etc. The zeolite wheel is removed for a period of time, and is directly heated or treated with a high temperature gas at a higher temperature (usually 300 to 1000 ° C), so that the accumulated high-boiling substance is broken due to a certain degree of temperature. Small molecules that are carbonized or removed. However, the disassembly procedure of the zeolite runner is complicated. Although the accumulated high-boiling substance can be effectively decomposed and removed, the disassembly process of the zeolite runner is likely to cause damage to the structure of the runner and damage of the pore structure of the adsorbent, and lose the adsorption capacity or smash due to deterioration. And the loss. The in-line activation regeneration is described in, for example, Japanese Laid-Open Patent Publication No. Sho-63-232823, No. 63-310636, British Patent No. B. 1546437, and German Patent Application No. 24, 1982, and the like, which has the advantages of continuous operation and avoiding complicated disassembly procedures, but continuous on the line. The activation regeneration of the rotating runner often fails to effectively remove the original high-boiling substance and affect the adsorption capacity. The "Regeneration Device and Method for High Temperature Activation of a Concentrated Rotor Line for Disposing Volatile Organic Waste Gas" of the National Invention Patent Publication No. 1323183 provides an effective regeneration device and method for high temperature activation on a rotary line; however, In the method, although the high-temperature activation on the wire of the runner can be effectively performed, since the runner has a certain thickness, when the high-temperature activation on the line is performed, the temperature of the high-temperature gas flows through the runner decreases due to the thickness factor of the runner, so that the rotation The activation results of the front and back sides are different, and because of the frequent regeneration, the service life of the runner and the rear two sides is different, and after using a certain number of regenerations, although the runner contacting the high temperature surface can still be used, The opposite side is no longer regenerable, reducing the life of the runner. 201238653 Accordingly, the present invention provides an improved regenerative apparatus for regenerative activation of a reel and a method for regenerating the same by adjusting a flow direction of a heated gas entering a regenerative adsorption zone of the reel and a flow ratio, so that the revolving regenerative zone of the reel is Both the front and the back can be desorbed and reactivated at the same high temperature, which can effectively increase the efficiency of regeneration and activation, and also because the regeneration effects of the front and back sides are the same, and the service life will not be degraded due to the low surface effect of the runner. To extend the life of the re-use of the reel. SUMMARY OF THE INVENTION In order to improve the problems faced by the above-mentioned prior art, the present invention provides an online regenerative device and a regeneration method for a zeolite reel. The device and method of the present invention can effectively activate a regenerated zeolite reel and enhance the adsorption-concentrated zeolite reel. Processing efficiency and extending the service life of the zeolite runner. In detail, an object of the present invention is to provide a line regeneration device for a zeolite wheel, comprising: a rotating wheel comprising at least one adsorption zone and a regeneration desorption zone for purifying volatile organic waste gas; a driving element for controlling the rotating wheel to rotate in a stepwise or continuous manner at an appropriate time interval; a heat source for heating a gas to an activation regeneration temperature; and a switching valve group for switching the heating The gas enters the direction of the regeneration desorption zone of the concentration wheel, and the regeneration desorption zone of the concentration wheel is uniformly heated to complete regeneration in an alternate flow direction. 201238653 A further object of the present invention is to provide a method for regenerating a line of zeolite runners for use in the above-described in-line regenerating apparatus comprising the following steps: (1) controlling the reel at an appropriate time interval by using the driving element Rotating in a stepwise or continuous manner causes the runner to be regenerated to enter the regeneration desorption zone and stay in the regeneration desorption zone for a regeneration time. (2) using the switching valve group to switch the inflow direction of the heated heating gas into the regenerative desorption zone, so that the revolving decoupling zone runner performs high-temperature regeneration on the uniform front and rear lines; repeating the above steps (1) and steps ( 2) Regeneration is completed until the temperature of the runner is uniform. The invention also provides another online regenerative device for a zeolite reel, which is further characterized in that the regenerative desorption zone of the above-mentioned online regenerating device further comprises a regenerative desorption preheating zone, and the gas is heated by the control of the switching valve group. The former and the latter two inflow modes are used to regenerate the south temperature for the regeneration desorption zone and the regeneration desorption preheating zone. Another object of the present invention is to provide a method for regenerating a line of zeolite runners for use in the above-described in-line regenerating apparatus comprising the following steps: (1) controlling the reel at an appropriate time interval by using the driving element The stepping or continuous rotation causes the runner to be regenerated to enter the regeneration desorption zone and the regeneration desorption preheating zone, and a regeneration time is maintained in the regeneration desorption zone and the regeneration desorption preheating zone. (2) using the switching valve group to simultaneously enter the regeneration desorption zone and the regeneration desorption preheating zone before and after heating the gas, so that the runner simultaneously performs high temperature regeneration on the front and rear sides; 201238653 In the above steps (1) and (2), the regeneration is completed until the temperature of the runner is uniform. Meanwhile, in the above-described in-line regeneration method, the high temperature activation regeneration time of the runner is from 10 minutes to 120 minutes; and the stepwise or continuous rotation interval angle is from 10° to 90°. According to the above-mentioned linear regenerative device of the zeolite reel of the present invention and the regeneration method thereof, the regenerative effect of the reel can be effectively improved, and the service life of the reel can be prolonged. The following experimental design is intended to be illustrative, and is not intended to limit the scope of the invention, and it is obvious that such modifications may be made without departing from the scope of the invention. DETAILED DESCRIPTION OF THE INVENTION In order to fully understand the objects, features and effects of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings. A schematic diagram of a conventional volatile organic waste gas purification device. As shown in the figure, the method for generally treating volatile organic waste gas is as follows. After loading the above device, the volatile organic waste gas is pumped to the concentration runner 31 via the first blower 11, and the concentration runner 31 includes an adsorption zone 311. And a regeneration desorption zone 312, the introduced volatile organic waste gas is adsorbed by the adsorbent in the adsorption zone 311 of the concentration runner 31, and the adsorbed clean airflow is introduced into the first smoke from the second fan 21 through the second fan 21 emission. At the same time, the adsorbent adsorbing the volatile organic waste gas is transported to the regeneration desorption zone 312 of the concentrated 201238653 runner 31 via the operation of a driving element 33; and a blower 61 is pumped and heated to a regeneration temperature via a first heat exchanger 73. The gas stream passes through the regeneration desorption zone 312 of the concentration wheel 31. At this time, the adsorbed volatile organic substances in the regeneration desorption zone 312 are heated and desorbed into the gas stream, which is then directed to a second heat. The exchanger 74 is preheated, and is introduced into an incinerator 81 to be burned into water and carbon dioxide-based substances, and then discharged to the atmosphere by the second chimney 92 via the second heat exchanger 74 and the first heat exchanger 73. Figure 2 is a schematic diagram of a regenerative device of the National Publication No. 1323183 "Regeneration device and method for processing high temperature activation of a concentrated organic gas line on a volatile organic waste gas". As shown, the device comprises a rotating wheel 32 and a driving element 33. And a first heat exchanger 73, wherein the runner 32 includes an adsorption zone 321, a regenerative desorption zone 322, and a cooling zone 323. Fig. 3 is a schematic view showing a preferred embodiment of the regeneration method of the national publication No. 1323183 "Regeneration apparatus and method for treating high temperature activation on a concentrated rotary line of volatile organic waste gas". Referring to Figures 2 and 3, after the volatile organic waste gas is purified from the system, a high temperature activation regeneration process is performed to open the blower 61, at which time clean air enters from an air inlet 42 through which the wheel 32 passes. The cooling zone 323 is sent to the first heat exchanger 73. The first heat exchanger 73 heats the clean air to the set activation regeneration temperature and sends it to the regeneration desorption zone 322 for activation regeneration of the rotor, activation regeneration. After a set time, the driving element 33 can drive the rotating wheel to a set angle, so that the activated portion of the rotating wheel 32 enters the cooling zone 323 for cooling, and the unactivated portion of the adsorption zone 321 enters the regeneration desorption zone 322 for activation regeneration. . Therefore, by rotating the rotating wheel 32 by the driving member 33, the rotating wheel 32 is rotated by an appropriate angle at an appropriate time interval in this manner, and stays for an appropriate time to complete the activation regeneration of the entire rotating wheel. However, in the above-mentioned high-temperature activation regeneration device and method, although the high-temperature activation of the wire on the wire can be effectively performed, since the runner has a certain thickness (20 cm to 45 cm), when performing high-temperature activation on the wire, The thickness of the runner causes the temperature of the airflow to decrease during the flow of the high-temperature gas through the runner, which in turn makes the activation effect of the runner on the front and rear sides different, and also causes the service life of the runner and the rear two sides due to frequent regeneration. Different, after using a certain number of regenerations, although the runner that contacts the high temperature surface can still be used, the opposite surface can no longer be regenerated, thereby reducing the service life of the runner. Figure 4 is a schematic view of the on-line regeneration device of the zeolite runner of the present invention. As shown in FIG. 4, the device includes a runner 32, a driving component 33, a first heat exchanger 73 and a switching valve group, wherein the runner 32 includes an adsorption zone 321 and a regeneration desorption zone 322. And a cooling zone 323, and the switching valve group is composed of a first valve A1, a second valve A2, a third valve A3 and a fourth valve A4. When the rotor is regenerated on the line at a high temperature, when the first valve A1 and the second valve A2 are opened, and the third valve A3 and the fourth valve A4 are closed, the first heat exchanger 73 is heated to activate the high temperature gas. After being pumped by a blower 61, the regenerative desorption zone 322 of the reel 32 flows in the direction of the blower 61, and after a suitable period of time, the first valve A1 and the second valve A2 are closed, and the third valve is closed. A3, the fourth valve A4 is opened, at this time, the gas heated to the high temperature by the first heat exchanger 73 is pumped through the blower 201238653 machine 61 and flows through the runner 32 in the opposite direction to the blower 61. Regenerating the desorption zone 322, so that the switching valve group is alternately operated, so that the adsorbent in the regenerative desorption zone 332 of the reel 32 is uniformly desorbed or/activated on the front and rear sides, thereby completing effective desorption and regeneration. . According to this method, both the front and the back sides can receive the high temperature airflow reaching the set temperature for high-temperature regeneration and activation on the line, so that both the front and the back sides of the runner can reach the desorption and regeneration activation at the set temperature. At the same time, the regenerative life of the runner is increased. Further, Fig. 5 is a schematic view showing another embodiment of the improved in-line regenerating apparatus of the zeolite reel of the present invention. As shown in FIG. 5, the device includes a rotating wheel 32, a driving component 33, a first heat exchanger 73 and a switching valve group, wherein the rotating wheel 32 includes an adsorption zone 321 and a regeneration desorption zone 322. a cooling zone 323 and a regeneration desorption preheating zone 324, and the switching valve group is composed of a first valve A1 and a second valve A2. When the rotor is regenerated on the line at a high temperature, the first valve A1 and the second valve A2 are both opened. At this time, the gas heated to the high temperature by the first heat exchanger 73 is pumped through a blower 61, and simultaneously through the first A valve A1 and a second valve A2 respectively flow to the regeneration desorption zone 322 and the regeneration desorption preheating zone 324, and the runner 32 is driven repeatedly by the driving component 33, so that the adsorbent in the runner 32 is obtained before and after. The two sides are uniformly desorbed or/activated at a high temperature to complete the regeneration. In this embodiment, by performing the regeneration of the front and rear surfaces by the difference of the sections of the runner, the uniform desorption regeneration of the front and rear sides can be achieved, thereby prolonging the repeated regeneration of the runner. The use of brothers. Further, referring to Fig. 6, there is shown a schematic view of still another embodiment of the regenerative apparatus of the improved line of the zeolite runner of the present invention 201238653. As shown in FIG. 6, the device includes a reel 32, a driving element 33, a first heat exchanger 73 and a switching valve group, wherein the reel 32 includes an adsorption zone 321 and a regenerative desorption zone 322. a cooling zone 323 and a regenerative desorption preheating zone 324, and the switching valve group is composed of a first valve A1, a second valve A2 and a third valve A3; in this embodiment, the fifth drawing is shown in FIG. In the embodiment, the high-temperature airflow flowing through the regeneration desorption preheating zone 324 is re-introduced into the first heat exchanger 73 by the added third valve A3, so that the high-temperature airflow can be effectively reused, thereby further improving the airflow. The cost of electricity required for temperature. In order to examine the activation regeneration effect of the regeneration apparatus and method of the present invention, a high temperature activation regeneration performance experiment of the inactivated honeycomb zeolite runner was carried out. Comparing the conventional on-line south temperature regeneration device with the improved on-line local temperature regeneration device of the present invention, comparing the regenerated zeolite wheel sample with the new zeolite runner sample to adsorb isopropyl alcohol (IPA) (at 100 ppmv) Saturated adsorption amount. The thermogravimetric analysis (TGA) analysis was performed using a thermogravimetric analysis and differential thermal analysis (DTA) analysis using a differential thermal analysis device, and the results are shown in Fig. 6. It can be seen from Fig. 7 that the regeneration ability after activation of the activation regeneration temperature of 200, 300 and 400 ° C for 1 hour, the regeneration effect in the present invention is significantly higher than the effect of the conventional online high temperature activation device, especially 200~ 300. (: When the high temperature is activated, the on-line regenerating device of the present invention has an improvement of the regeneration efficiency of the zeolite by more than 20% compared with the conventional high-temperature active enthalpy, and the apparatus of the present invention performs the high temperature on the line at 180 ° C for 1 hour. The activation can also achieve an activation efficiency of more than 60%. This result is also not achieved by the conventional high-temperature activation device 12 201238653 at 200 ° C for regeneration. Therefore, the regeneration device and method of the present invention can achieve good activation regeneration. The effect can save the activation regeneration time, and can provide better regeneration and activation effects and results compared with the conventional high-temperature activation device. [Simplified Schematic] FIG. 1 is a schematic diagram of a conventional volatile organic waste gas purification device. Figure 2 is a schematic diagram of a conventional regeneration device for treating high temperature activation of a concentrated rotating wheel on a volatile organic waste gas. Fig. 3 is a schematic view showing a preferred embodiment of a regeneration method for high temperature activation of a concentrated rotating wheel on a volatile organic waste gas. Figure 4 is a schematic view of a specific embodiment of a line regeneration device for a zeolite runner in the present invention. Figure 5 is a line of the zeolite runner in the present invention. A schematic view of another embodiment of the regeneration apparatus. Fig. 6 is a schematic view showing still another embodiment of the on-line regeneration device of the zeolite runner of the present invention. Fig. 7 is a diagram showing the conventional high-temperature regeneration device and the online regeneration device of the present invention. Comparison of regeneration performance of zeolite runners. [Main component symbol description] 11 First fan 21 Second fan 31, 32 Concentrated runner 13 201238653 311 , 321 adsorption zone 312 , 322 regeneration desorption zone 323 cooling zone 324 regeneration Preheating zone 33 Drive element 42 Air inlet 61 Blower 73 First heat exchanger 74 Second heat exchanger 81 Incinerator 91 First chimney 92 Second chimney A1 First valve A2 Second valve A3 Third valve A4 Four valves 14