CN104548866B - Revolving ring type adsorption desorption device and gas purification processing system thereof - Google Patents
Revolving ring type adsorption desorption device and gas purification processing system thereof Download PDFInfo
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- CN104548866B CN104548866B CN201310485406.9A CN201310485406A CN104548866B CN 104548866 B CN104548866 B CN 104548866B CN 201310485406 A CN201310485406 A CN 201310485406A CN 104548866 B CN104548866 B CN 104548866B
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- 238000002336 sorption--desorption measurement Methods 0.000 title claims abstract description 68
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Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
The open a kind of revolving ring type adsorption desorption device of the present invention, comprise housing, bracing frame, shielded box, revolving ring type absorber and driver element, housing has accommodation space and bottom opening, bracing frame is arranged at hull outside, driver element is arranged on the bracing frame of hull outside and is connected with revolving ring type absorber by bottom opening, therefore during driver element operating driving revolving ring type absorber, can avoid may igniting the doubt such as organic exhaust gas of enclosure interior because of the heat energy of motor running and spark, and improve the security that equipment is overall, and, maintenance personal maintains, when electronic component in maintenance and adjustment driver element is with frame for movement, avoid exposure in the environment that organic matter content is high without entering this revolving ring type adsorption desorption device inside, and make the maintenance of equipment and more convenient to operate and simple.
Description
Technical field
The present invention relates to a kind of revolving ring type adsorption desorption device and gas purification processing system thereof, it mainly passes through
One revolving ring type absorber adsorbs the organic substance in waste gas to be processed, and make in the waste gas after process organic
Content of material is reduced to waste gas emission standard, and the present invention is applied to semiconductor, photoelectricity, chemical industry Chemical Industries
Deng the environment produced in processing procedure containing organic substance discharge waste gas.
Background technology
The processing procedure of the semiconductor related industries such as IC industry, opto-electronics, panel produces many contain
The waste liquid of organic substance, waste water, waste gas etc., such as semiconductor factory gold-tinted processing procedure comprise cleaning, linging,
In the steps such as photoresistance covers, soft bakes, exposes, toasts, develops, hard baking, use various cleaning fluid,
The organic solvents such as light blocking solution, can produce volatile organic matter (VOCs, Volatile Organic
Compounds), wherein most volatile organic matter belongs to the air pollutants of harmfulness
(Hazardous Air Pollutants；HAPs), human body is exposed to for a long time containing high concentration volatile organic matter
In the environment of be likely to result in poisoning and the reaction such as carcinogenic tumours, and, deposit volatility in an atmosphere
Organic substance can produce photochemical reaction, causes ozone concentration to improve and produces high oxidative pollutant.According to
This, these volatile organic matters produced not only are detrimental to health and more cause environmental pollution, therefore must
The volatile organic matter content in the waste gas of plant emissions need to be made to be reduced to specification through suitable process
After standard, just can be emitted into the external world.
In prior art, a kind of device applied at the waste gas processed containing organic substance is that adsorption desorption change sets
Standby, it mainly comprises a case body, a shielded box, a runner and a driver element, wherein this shell
Housing has an accommodation space, and this runner is mounted with adsorption material, flows through this case body for absorption and houses
Organic substance in the waste gas in space, and this shielded box, this runner and this driver element are arranged at this shell
In the accommodation space of housing, this shielded box has separated adsorption zone, desorption district and has blown down district, and this runner can turn
It is placed in this shielded box dynamicly, and rotatably makes adsorption material therein constantly be circulated in this absorption
District, this desorption district and this blowing district, and make the adsorption material in this runner adsorb by this absorption at adsorption zone
Organic substance in the waste gas in district, is rotated further by this desorption district making organic substance by desorption air-flow
Desorption, then turns to this blowing district and makes desorption material be dried and cool down by blowing down air-flow, to reach completely
After ground regeneration activating, repeat and turn to this adsorption zone and waste gas is carried out adsorption treatment, so, by turning
The rotational run of wheel, makes adsorption material constantly repeat the step of adsorption and desorption, blowing, makes by inhaling de-
After organic substance contained in waste gas after attached swivel device is reduced to discharge standard, just can be expelled to air
In.
But, existing adsorption desorption swivel device is that the driver element providing runner to rotate is installed in shell
Motor, gear train, the support member of metal and electronics zero in the accommodation space of housing, in this driver element
Mechanical friction or electrical discharge spark may be produced and the accommodation space of the shell that ignites is contained within during part running
Machine material and/or the waste gas of grit also cause blast, and great danger；Further, the accommodation space of shell
Interior organic substance and/or grit content are high, and it easily causes the machine components of the metal such as gear train, support member
Dirty, corrosion, in turn results in damage and maintenance cost increases；Furthermore, when maintenance personal needs more
When changing, safeguard and maintain machine components or the electronic component of driver element, it is necessary to enter adsorption desorption change
The inside of equipment, the not only inconvenient and time of consuming, more makes personnel be exposed to organic substance and/or grit contains
Measure under high hazardous environment, and dangerous anxiety.
Accordingly, existing adsorption desorption swivel device have that security is low, the easy aged deterioration of machine components and guarantor
Support the shortcomings such as maintenance inconvenience.
Summary of the invention
For solving the disappearance of above-mentioned prior art, the open a kind of revolving ring type adsorption desorption device of the present invention, it leads to
Cross and driver element is arranged at the outside of this housing and improves the security that equipment is overall, and, maintenance
Personnel's maintenance, when keeping in repair and adjust electronic component in this driver element with frame for movement, it is not necessary to entering should
Revolving ring type adsorption desorption device is internal and avoids exposure in organic substance and/or the high environment of grit content, and
Make the maintenance of equipment and more convenient to operate and simple.
For reaching above-mentioned purpose and other purpose, the present invention provides a kind of revolving ring type adsorption desorption device, comprises one
Housing, a bracing frame, a shielded box, a revolving ring type absorber and a driver element, this housing has one
Accommodation space and connect a bottom opening of this accommodation space, an air inlet and an exhaust outlet；This bracing frame
It is arranged at the outside of this housing；This shielded box is arranged in the accommodation space of this housing, and this shielded box tool
Having an absorption compartment, an a desorption compartment and passage, this passage is to should bottom opening and connect this absorption
Compartment and this desorption compartment；This revolving ring type absorber is rotatablely arranged in the accommodation space of this housing also
Having a runner and a rotating disk, this runner is fixed on this rotating disk and is placed in this passage, this rotating disk pair
Should bottom opening, and this rotating disk is surrounded with one first seal, and this first seal presses on this
Gap between rotating disk and this housing and reach airtight；This driver element is arranged on this bracing frame and passes through
This bottom opening is connected with this rotating disk, this driver element comprise a column, a bearing, multiple supporting rollern,
One gear train and a motor, this column is fixed to this bracing frame, and this bearing is connected to this column and this gear
Between group, this gear train connects this rotating disk and this motor, so that motor drives this revolving ring type absorber with this
Rotate centered by column, and make this runner rotate through this absorption compartment and this desorption compartment, these supportings
Roller supports this rotating disk with being fixed to this bracing frame and Structure deformation.
Above-mentioned revolving ring type adsorption desorption device, wherein this runner has a framework and multiple adsorption box block, should
Framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption boxes accommodating
Block, and the side of each this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box with
The junction of this desorption compartment has a dividing wall, and respectively the length of this dividing wall is more than or equal to corresponding phase
The spacing of adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall so that this absorption compartment with
This desorption compartment is mutually isolated.
Above-mentioned revolving ring type adsorption desorption device, wherein this shielded box has farther included a blowing compartment, should
Blow down compartment be arranged between this desorption compartment and this absorption compartment and with this channel connection, this runner rotate
Shi Yixu is by absorption compartment, desorption compartment and blows down compartment.
Above-mentioned revolving ring type adsorption desorption device, wherein this runner has a framework and multiple adsorption box block, should
Framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption boxes accommodating
Block, and the side of each this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box,
This desorption compartment has a dividing wall with the place of crossing one another of this blowing compartment, and respectively the length of this dividing wall is big
In or equal to the spacing of corresponding adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall,
So that it is mutually isolated between this absorption compartment, this desorption compartment and this blowing compartment.
Above-mentioned revolving ring type adsorption desorption device, wherein this desorption compartment has one first intake section and one first
Exhaust portion, this blowing compartment has one second intake section and a second exhaust portion, this first intake section and should
Second intake section is arranged at the inner side of this runner and is fixed on this column, this first exhaust portion with this second
Exhaust portion is arranged at the outside of this runner.
Above-mentioned revolving ring type adsorption desorption device, wherein this gear train comprises one first gear and one second tooth
Wheel, this first gear is arranged on this bearing and is fixed to bottom this rotating disk, this second gear connect this
One gear, this motor is combined with this second gear, and this motor drives this second gear to drive this first tooth
Wheel.
Above-mentioned revolving ring type adsorption desorption device, wherein the quantity of these supporting rollerns is three, and it stands with this
Post be the center of circle and in 120 degree of central angles arrangements.
Above-mentioned revolving ring type adsorption desorption device, comprises a forecooler the most further, and it is placed in this housing
Accommodation space in and be arranged between this air inlet and this revolving ring type absorber.
Above-mentioned revolving ring type adsorption desorption device, comprises an air cleaner the most further, and it is placed in this
In the accommodation space of housing and be arranged between this air inlet and this forecooler.
For reaching above-mentioned purpose and other purpose, the present invention separately provides a kind of gas purification processing system, comprises
Revolving ring type adsorption desorption device described above and a combustion furnace, the desorption compartment of this revolving ring type adsorption desorption device
It is connected with this combustion furnace by a gas piping.
For reaching above-mentioned purpose and other purpose, the present invention reoffers a kind of gas purification processing system, comprises
Revolving ring type adsorption desorption device described above and a condenser, the desorption compartment of this revolving ring type adsorption desorption device
It is connected with this condenser by a gas piping.
Therefore, the revolving ring type adsorption desorption device that the invention described above provides, by being arranged at this driver element
The outside of this housing and improve the security that equipment is overall, generation when it can avoid this driver element operate
Heat energy even spark and the doubt such as organic exhaust gas of this enclosure interior of igniting, also can avoid in this driver element
Electronic component and material structure due to touch organic exhaust gas, grit and moisture and easily by dirty, get rusty
And the shortcoming of corrosion so that safeguard that the cost of equipment can reduce and increase service life, and, keep in repair people
Member directly can directly maintain, keeps in repair and adjust in this driver element outside this revolving ring type adsorption desorption device
Electronic component and frame for movement, it is not necessary to enter inside this revolving ring type adsorption desorption device, can avoid exposure to
In the environment that organic matter content is high, and make the maintenance of equipment and more convenient to operate and simple.It addition,
The gas purge system etc. that the present invention is also provided with comprising this revolving ring type adsorption desorption device is applied, and it has height
The advantages such as security, low cost of equipment maintenance, part maintenance convenience.
Accompanying drawing explanation
Fig. 1 is the schematic side view of the revolving ring type adsorption desorption device of first embodiment of the invention.
Fig. 2 is the schematic top plan view of the revolving ring type adsorption desorption device of first embodiment of the invention.
Fig. 3 is the housing in the revolving ring type adsorption desorption device of first embodiment of the invention, the signal of shielded box
Figure.
Fig. 4 is the signal of the revolving ring type absorber in the revolving ring type adsorption desorption device of first embodiment of the invention
Figure.
Fig. 5 is the revolving ring type absorber in the revolving ring type adsorption desorption device of first embodiment of the invention and isolation
The schematic diagram of case.
Fig. 6 is the enlarged diagram of part A in Fig. 1.
Fig. 7 is that the revolving ring type adsorption desorption device of first embodiment of the invention comprises forecooler and air further
The schematic side view of filter.
Fig. 8 is the schematic diagram of the gas purification processing system of second embodiment of the invention.
Fig. 9 is the schematic diagram of the gas purification processing system of third embodiment of the invention.
[primary clustering symbol description]
1,2 gas purification processing systems
10 revolving ring type adsorption desorption devices
20 combustion furnaces
30 condensers
100 housings
110 accommodation spaces
120 bottom openings
130 air inlets
140 exhaust outlets
200 bracing frames
300 shielded boxs
310 absorption compartments
320 desorption compartments
321 first intake sections
322 first exhaust portions
330 blow down compartment
331 second intake sections
332 second exhaust portions
340 passages
350a, 350b dividing wall
360 fixed supports
400 revolving ring type absorbers
410 runners
411 frameworks
412 adsorption box blocks
413 sidewalls
414 house compartment
415a, 415b second seal
420 rotating disks
421 first seals
500 driver elements
510 columns
520 bearings
530 supporting rollerns
540 gear trains
541 first gears
542 second gears
550 motors
600 forecoolers
700 air cleaners
Detailed description of the invention
For being fully understood by the purpose of the present invention, feature and effect, existing by following specific embodiment, and
Coordinate accompanying drawing, the present invention be described in detail, illustrate as rear:
Refer to Fig. 1 to Fig. 6, it is the structure of revolving ring type adsorption desorption device of first embodiment of the invention
Schematic diagram.The revolving ring type adsorption desorption device 10 of first embodiment of the invention mainly comprises a housing 100,
Bracing frame 200, one shielded box 300, revolving ring type absorber 400 and a driver element 500, be used for locating
Reason organic exhaust gas.
As shown in Figure 1 to Figure 3, this housing 100 has an accommodation space 110 and connects this accommodation space
A bottom opening 120 (Fig. 3), air inlet 130 and an exhaust outlet 140；This bracing frame 200 is arranged
In the outside of this housing 100, in the present embodiment, this bracing frame 200 is arranged at the bottom surface of this housing 100,
For supporting this revolving ring type adsorption desorption device 10 in ground；This shielded box 300 is arranged at this housing 100
Accommodation space 110 in, as shown in Figures 2 and 3, this shielded box 300 have an absorption compartment 310,
An one desorption compartment 320 and passage 340, this passage 340 to should bottom opening and connect this absorption every
Between 310 and this desorption compartment 320；This revolving ring type absorber 400 is rotatablely arranged at this housing 100
Accommodation space 110 in and there is runner 410 and a rotating disk 420, this runner 410 is fixed on this turn
On dish 420 and be placed in rotationally in this passage 340, this rotating disk 420 to should bottom opening 120,
And this rotating disk 420 is surrounded with one first seal 421, this first seal 421 presses on this turn
Gap between dish 420 and this housing 100 and reach airtight；This driver element 500 is arranged at this support
Being connected with this rotating disk 420 on frame 200 and by this bottom opening 120, this driver element 500 comprises one
Column 510, one bearing 520, multiple supporting rollern 530, gear train 540 and a motor 550, should
Column 510 is fixed to this bracing frame 200, and this bearing 520 is connected to this column 510 and this gear train 540
Between, this gear train 540 connects this rotating disk 420 and this motor 550, so that motor 550 drives this turn
Ring type absorber 400 rotates centered by this column 510, and makes this runner 410 rotate through this absorption
Compartment 310 and this desorption compartment 320, these supporting rollerns 530 are fixed to this bracing frame 200 and roll
Support this rotating disk 420 contiguously.
In the revolving ring type adsorption desorption device 10 of the invention described above first embodiment, as it is shown in figure 1, this stands
Post 510 is fixed to this bracing frame 200 and supports this bearing 520, this gear train 540 and motor 550 etc.
Assembly, this motor 550 driven gear group 540 operates, and drives this rotating disk 420 by this bearing 520
And rotate relative to this column 510, coordinate shown in Fig. 2 and Fig. 3, this runner 410 is in this passage 340
Rotate and by this absorption compartment 310 and this desorption compartment 320.
Refer to Fig. 1, pending organic exhaust gas can pass through this runner 410 after being entered by this air inlet 130
Absorption compartment 310, when organic exhaust gas is by the absorption compartment 310 of this runner 410, this runner 410
In there is multiple adsorption box block 412 for the organic substance (containing organic solvent) adsorbing in organic exhaust gas, enter
And reducing or remove the organic matter content in organic exhaust gas, the clean gas after purification is again by this exhaust outlet
140 discharge；And after the adsorption material of the adsorption box block 412 in this runner 410 has adsorbed organic substance, should
Runner 410 rotates to this desorption compartment 320, and the desorption air-flow produced by desorption source of the gas 40 (Fig. 8) will
Organic substance adsorption material in these adsorption box blocks 412 is desorbed, and in making this adsorption box block 412
Adsorption material regeneration activating, the adsorption box block 412 after regeneration activating rotates to this absorption compartment 310 again and carries out
The process of organic exhaust gas.
In the present embodiment, this shielded box 300 preferably has a blowing compartment 330, this blowing compartment 330
It is arranged between this desorption compartment 320 with this absorption compartment 310 and connects with this passage 340, this runner
410 sequentially pass through this absorption compartment 310, desorption compartment 320 and blow down compartment 330 when rotating.Accordingly,
Adsorption box block 412 in this runner 410 rotates to this blowing compartment 330 after leaving this desorption compartment 320
In, the blow-out gas stream that blowing down source of the gas 50 (Fig. 8) by one provides passes through these adsorption box blocks 412, makes these
The removal of aqueous vapor and the reduction of temperature in adsorption box block 412, adsorption material accelerates it, and it is rapidly completed these
The regeneration activating of adsorption material in adsorption box block 412, the adsorption box block 412 after regeneration activating rotates to being somebody's turn to do again
Absorption compartment 310 carries out the process of organic exhaust gas, and whereby, in the present embodiment, this runner 410 rotates
Operate and make these adsorption box blocks 412 sequentially pass through this absorption compartment 310, this desorption compartment 320 and be somebody's turn to do
Blow down compartment 330 and circulation running, to adsorb in pending organic exhaust gas in this absorption compartment 310
Organic substance, this desorption compartment 320 is desorbed the organic substance in adsorption box block 412, and at this
Blow down in compartment 330 and blow down this adsorption box block 412.
The desorption air-flow that above-mentioned desorption source of the gas 40 is provided can be steam, nitrogen, hot-air or it is mixed
The air-flow closed；What above-mentioned blowing source of the gas 50 was provided blows down the air-flow that air-flow can be nitrogen or air.
In the revolving ring type adsorption desorption device 10 of first embodiment of the invention, this driver element 500 is arranged at
The outside of this housing 100, therefore motor 550 in this driver element 500 and gear train 540 etc. are in operating
Time produce heat energy even spark and the doubts such as this organic exhaust gas within housing 100 of igniting can be avoided by, enter
And improve security, and, maintenance personal is maintaining, is keeping in repair and adjust in this driver element 500
When electronic component and frame for movement, it is not necessary to enter in this housing 100 so that the maintenance of equipment and operation are more
It is convenient and simple to add, and also eliminates the necessity being exposed in the environment that organic matter content is high；Additionally, this
The revolving ring type adsorption desorption device 10 of invention first embodiment is arranged at this housing 100 because of this driver element 500
Outside, and the electronic component in this driver element 500 can be avoided owing to touching containing organic with material structure
Waste gas and the moisture of material and the shortcoming easily getting rusty and corrode so that part is eliminated and changed number of times and reduce, safeguard into
This reduction also increases service life.
Refer to Fig. 1 and coordinate shown in Fig. 6, this rotating disk 420 is surrounded with this first seal 421,
This first seal 421 presses on the gap between this rotating disk 420 and this bottom opening 120 edge and reaches
Become airtight.Example as shown in Figure 6, this first seal 421 can be by such as fixing the components such as seat and screw
Being fixed to the edge of this rotating disk 420, bottom opening 120 edge of this housing 100 can have flange,
This flange i.e. is close to the gap between this rotating disk 420 and this bottom opening 120 edge, and makes the first sealing
Part 421 is pressed on this flange and closes this rotating disk 420 and this bottom opening 120 edge by this fixing seat
Between gap, and when this revolving ring type absorber 400 rotates, the first seal 421 persistently presses on
Between this rotating disk 420 and this bottom opening 120 edge, and then during VOCs treatment, reach gas
Close.
Refer to Fig. 3 to Fig. 5, the runner of the revolving ring type adsorption desorption device 10 of first embodiment of the invention
In 400, as it is shown on figure 3, this absorption compartment 310 of this shielded box 300, this desorption compartment 320 with
The place of crossing one another of this blowing compartment 330 has dividing wall 350a, a 350b, in the present embodiment, and should be every
Correspond to the outer peripheral edge of this runner 410 from wall 350a, and this dividing wall 350a length (arc length) is slightly larger than
The outside spacing of corresponding adjacent two sidewalls 413, this dividing wall 350b is interior corresponding to this runner 410
Periphery, and this dividing wall 350b length (arc length) is slightly larger than the inner side spacing of corresponding adjacent two sidewalls 413；
As shown in Figure 4, this runner 410 has a framework 411 and multiple adsorption box block 412, this framework 411
There is multiple sidewall 413 to be formed with the multiple accommodating compartment 414 of annular arrangement, inhale for accommodating these
Attached case block 412, and the side of each this sidewall 413 is respectively arranged with one second seal 415a, 415b,
In the present embodiment, respectively this second seal 415a is arranged at each this sidewall 413 to should runner 410
On outer peripheral edge, respectively this second seal 415b be arranged at respectively this sidewall 413 to should be in runner 410
On periphery, respectively the width of this second seal 415a slightly larger than outside each this sidewall 413 with respectively this isolation
Distance between wall 350a, respectively the width of this second seal 415b is slightly larger than inside each this sidewall 413
And the respectively distance between this dividing wall 350b, to reach the most airtight effect.
As it is shown in figure 5, respectively the length of this dividing wall 350a is more than or equal to corresponding adjacent two sidewalls 413
The spacing in outside, respectively the length of this dividing wall 350b is more than or equal in corresponding adjacent two sidewalls 413
The spacing of side, respectively this second seal 415a is used for pressing on this dividing wall 350a, respectively this second sealing
Part 415b is used for pressing on this dividing wall 350b, so that this absorption compartment 310, this desorption compartment 320
And mutually isolated between this blowing compartment 330, clean with after avoiding pending organic exhaust gas, processing
Gas, desorption air-flow and blow-out gas transpiration dissipate and mixing.
Loading the adsorption material for adsorbing organic substance in above-mentioned adsorption box block 412, wherein adsorption material is pressed
According to different organic substances can be zeolite, activated carbon, silica gel, activated alumina, porous resin or
Its mixture.
The first above-mentioned seal 421 and the second seal 415a, 415b can be rubber, silica gel or iron fluorine
The elastic strip body of dragon, additionally, respectively this first seal 421 and respectively this second seal 415a, 415b can
There is hollow structure further, to utilize air layer to completely cut off the temperature difference that both sides are different；Further, preferably
It is that the first seal 421 and the second seal 415a, 415b high temperature resistant can reach more than 100 DEG C, more preferably
Be high temperature resistant to reach more than 250 DEG C.
Refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 5, the revolving ring type adsorption desorption device of first embodiment of the invention
In the shielded box 300 of 10, this desorption compartment 320 has one first intake section 321 and a first exhaust portion
322, this first intake section 321 has a desorption gas air inlet, and this first exhaust portion 322 has one and takes off
Attached air flow exhaust mouth, is desorbed after air-flow is entered by this desorption gas air inlet by being positioned at this on this runner 410
Adsorption box block 412 in desorption compartment 320, by the organic matter in adsorption material in these adsorption box blocks 412
Matter is desorbed, and concentrates air-flow after forming the desorption containing organic substance, concentrates air-flow by this after described desorption
Desorption air flow exhaust mouth is discharged；This blowing compartment 330 has one second intake section 331 and a second exhaust
Portion 332, this second intake section 331 has a blow-out gas air inlet, and this second exhaust portion 332 has one
Blow-out gas exhaust outlet, blows down air-flow and is entered by this blow-out gas air inlet, and by the suction on this runner 410
Attached case block 412, then discharged by this blow-out gas exhaust outlet；Example as shown in Figures 1 and 3, this first air inlet
Portion 321 and this second intake section 331 are arranged at the inner side of this runner and are fixed by a fixed support 360
To this column 510, this first exhaust portion 322 is arranged at this runner 410 with this second exhaust portion 332
Outside.
Refer to Fig. 1, the driver element 500 of the revolving ring type adsorption desorption device 10 of first embodiment of the invention
In, this gear train 540 comprises one first gear 541 and one second gear 542, this first gear 541
Be arranged on this bearing 520 and be fixed to bottom this rotating disk 420, this second gear 542 connect this first
Gear 541, this motor 550 is combined with this second gear 542, and this motor 550 drives this second gear
542 and drive this first gear 541, and then make this rotating disk 420 rotate.Wherein, this motor 550 can
Being a step-by-step movement or continous way gear motor, this bearing 520 can be a thrust bearing.
Refer to Fig. 1 and Fig. 2, the driving list of the revolving ring type adsorption desorption device 10 of first embodiment of the invention
Unit 500 supports this rotating disk 420 by these supporting rollerns 530, and in the present embodiment, these support rolling
The quantity of wheel 530 is three, and it arranges as the center of circle in 120 degree of central angles with this column 510, to carry
For the support that this rotating disk 420 is firm during rotating.Certainly, the quantity of these supporting rollerns 530
Being not limited to this, it can be that more than two and symmetric arrays are to support this rotating disk 420.
Refer to Fig. 7, the revolving ring type adsorption desorption device 10 of first embodiment of the invention can further include one
Forecooler 600, this forecooler 600 is placed in the accommodation space 110 of this housing 100 and is arranged on this
Between air inlet 130 and this revolving ring type absorber 400.This forecooler 600 can for example, cooling coil,
It is re-fed into this revolving ring type absorber 400 for first being cooled down by pending organic exhaust gas.Additionally, this
The revolving ring type adsorption desorption device 10 of bright first embodiment also can comprise an air cleaner 700, this air mistake
It is pre-with this that filter 700 is placed in the accommodation space 110 of this housing 100 and is arranged on this air inlet 130
Between cooler 600, the pending organic exhaust gas entered by this air inlet 130 for filtration.
Refer to Fig. 8, it is the schematic diagram of gas purification processing system of second embodiment of the invention, should
Gas purification processing system 1 comprises revolving ring type adsorption desorption device 10 and a combustion of above-mentioned first embodiment
Burning stove 20, the desorption compartment 320 of this revolving ring type adsorption desorption device 10 is by a gas piping and this burning
Stove 20 connects, and specifically, this gas piping is by the first exhaust portion 322 of this desorption compartment 320
Desorption air flow exhaust mouth is connected to this combustion furnace 20, enters this combustion furnace for by concentrated gas streaming after desorption
20 burn with the temperature of more than 600 to 900 DEG C.
Refer to Fig. 9, it is the schematic diagram of gas purification processing system of third embodiment of the invention, should
The revolving ring type adsorption desorption device 10 and one that gas purification processing system 2 comprises above-mentioned first embodiment is cold
Condenser 30, the desorption compartment 320 of this revolving ring type adsorption desorption device 10 is by a gas piping and this condensation
Device 30 connects, and specifically, this gas piping is by the first exhaust portion 322 of this desorption compartment 320
Desorption air flow exhaust mouth is connected to this condenser 30, enters this condenser for by concentrated gas streaming after desorption
30 so that it is in organic substance condense because of cooling, and through liquid phase separation process with obtain purify gas
Body and the liquid of organic substance, the liquid of described organic substance recycles again, the gas of described purification
Body may conform to exhausting waste gas standard and discharged by chimney (not shown).
The gas purification processing system 2 of third embodiment of the invention is suitable for organic substance may shape during the course
Become in the application of frowziness gas or corrosive chemical, for example, the processing procedure of TFT-LCD panel
In, dimethyl sulfoxide (DMSO) (DMSO) contained in the resist of delustering of removing photoresistance program (stripping process) is
A kind of higher boiling is water-soluble and volatility is low and be easily condensed into the organic matter of corrosive liquids, its waste gas exists
Easy reduction reaction in processing procedure and form stench and the low inflammable dimethyl disulfide (dimethyl of autoignition temperature
Sulfide, DMS) and the gaseous contaminant of DMDS (dimethyl disulfide, DMDS), or
Complete oxidation produces the acidic corrosive gases such as sulfur dioxide or contacts generation radical corrosion with moisture
Liquid, therefore condensation of arranging in pairs or groups after being preferably desorbed concentration again with revolving ring type adsorption desorption device adsorption cleaning of the present invention
Mode concentrates air-flow after processing desorption.
In sum, the revolving ring type adsorption desorption device that first embodiment of the invention is provided, by driving this
Moving cell is arranged at the outside of this housing and improves the security that equipment is overall, and it can avoid this driving list
Produce the doubt such as organic exhaust gas of heat energy even spark and this enclosure interior of igniting during unit's operating, also can avoid
Electronic component in this driver element and material structure are owing to touching organic exhaust gas and moisture and Yi Beisheng
Rust and the shortcoming of corrosion so that safeguard that the cost of equipment can reduce and increase service life, and, maintenance
Personnel directly can directly maintain, keep in repair and adjust this driver element outside this revolving ring type adsorption desorption device
In electronic component and frame for movement, it is not necessary to enter inside this revolving ring type adsorption desorption device, can avoid expose
In the environment that organic matter content is high, and make the maintenance of equipment and more convenient to operate and simple.Separately
Outward, second embodiment of the invention and the 3rd embodiment are also provided with comprising the change that first embodiment is provided
The gas purge system of formula adsorption desorption device etc. apply, its have high security, low cost of equipment maintenance,
The advantages such as part maintenance is convenient.
The present invention is the openest with preferred embodiment, but it should be understood by those skilled in the art that
It is that this embodiment is only used for describing the present invention, and is not construed as limiting the scope of the present invention.It should be noted that
, such as equivalent with this embodiment change and displacement, all should be set to be covered by scope of the invention.
Therefore, protection scope of the present invention is when as defined in claim.
Claims (10)
1. a revolving ring type adsorption desorption device, it is characterised in that comprise:
One housing, has an accommodation space and connects a bottom opening of this accommodation space, an air inlet
And an exhaust outlet；
One bracing frame, is arranged at the outside of this housing；
One shielded box, is arranged in the accommodation space of this housing, and this shielded box have an absorption compartment,
An one desorption compartment and passage, this passage is to should bottom opening and connect this absorption compartment and this desorption
Compartment；
One revolving ring type absorber, is rotatablely arranged in the accommodation space of this housing and has a runner
And a rotating disk, this runner is fixed on this rotating disk and is placed in this passage, and this rotating disk is to should bottom
Opening, and this rotating disk is surrounded with one first seal, this first seal press on this rotating disk with
Gap between this housing and reach airtight；This runner has a framework and multiple adsorption box block, this frame
Frame has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption boxes accommodating
Block, and the side of each this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box
Having a dividing wall with the junction of this desorption compartment, the length of this dividing wall is more than or equal to correspondence
The spacing of adjacent two sidewalls, respectively the width of this second seal more than each this sidewall and respectively this dividing wall it
Between spacing, and make respectively this second seal can press on this dividing wall when passing through；So that this absorption every
Between mutually isolated with this desorption compartment；And
One driver element, is arranged on this bracing frame and is connected with this rotating disk by this bottom opening, should
Driver element comprises a column, a bearing, multiple supporting rollern, a gear train and a motor, and this stands
Post is fixed to this bracing frame, and this bearing is connected between this column and this gear train, and this gear train connects
This rotating disk and this motor, so that motor drives this revolving ring type absorber to rotate centered by this column, and
Making this runner rotate through this absorption compartment and this desorption compartment, these supporting rollerns are fixed to this support
Frame and Structure deformation ground support this rotating disk.
2. revolving ring type adsorption desorption device as claimed in claim 1, it is characterised in that this shielded box enters
One step includes a blowing compartment, and this blowing compartment is arranged between this desorption compartment and this absorption compartment
And with this channel connection, this runner rotate time sequentially by absorption compartment, desorption compartment with blow down compartment.
3. revolving ring type adsorption desorption device as claimed in claim 2, it is characterised in that this shielded box
Crossing one another between this blowing compartment and this absorption compartment, between this blowing compartment and this desorption compartment
Place has a dividing wall, between respectively the length of this dividing wall is more than or equal to corresponding adjacent two sidewalls
Away from, respectively this second seal is used for pressing on this dividing wall, so that this absorption compartment, this desorption compartment
And it is mutually isolated between this blowing compartment.
4. revolving ring type adsorption desorption device as claimed in claim 3, it is characterised in that this desorption compartment
Having one first intake section and a first exhaust portion, this blowing compartment has one second intake section and one
Two exhaust portion, this first intake section and this second intake section are arranged at the inner side of this runner and are fixed to this
On column, this first exhaust portion and this second exhaust portion are arranged at the outside of this runner.
5. the revolving ring type adsorption desorption device as according to any one of Claims 1-4, it is characterised in that
This gear train comprises one first gear and one second gear, and this first gear is arranged on this bearing and solid
It is fixed that to this rotating disk, this second gear connects this first gear, and this motor is combined with this second gear,
This motor drives this second gear to drive this first gear.
6. the revolving ring type adsorption desorption device as according to any one of Claims 1-4, it is characterised in that
The quantity of these supporting rollerns is three, and it arranges with this column as the center of circle in 120 degree of central angles.
7. the revolving ring type adsorption desorption device as according to any one of Claims 1-4, it is characterised in that
Comprise a forecooler further, its be placed in the accommodation space of this housing and be arranged on this air inlet with
Between this revolving ring type absorber.
8. revolving ring type adsorption desorption device as claimed in claim 7, it is characterised in that comprise further
One air cleaner, it is placed in the accommodation space of this housing and is arranged on this air inlet and this precooling
Between device.
9. a gas purification processing system, it is characterised in that comprise as appointed in claim 1 to 8
One described revolving ring type adsorption desorption device and a combustion furnace, the desorption of this revolving ring type adsorption desorption device
Compartment is connected with this combustion furnace by a gas piping.
10. a gas purification processing system, it is characterised in that comprise as in claim 1 to 8
Revolving ring type adsorption desorption device described in any one and a condenser, taking off of this revolving ring type adsorption desorption device
Attached compartment is connected with this condenser by a gas piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310485406.9A CN104548866B (en) | 2013-10-16 | 2013-10-16 | Revolving ring type adsorption desorption device and gas purification processing system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310485406.9A CN104548866B (en) | 2013-10-16 | 2013-10-16 | Revolving ring type adsorption desorption device and gas purification processing system thereof |
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| Publication Number | Publication Date |
|---|---|
| CN104548866A CN104548866A (en) | 2015-04-29 |
| CN104548866B true CN104548866B (en) | 2016-08-24 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM394853U (en) * | 2010-05-28 | 2010-12-21 | Cherng Jye Air Cond Co Ltd | Fluidized purifier for absorbent material |
| CN202087198U (en) * | 2011-04-12 | 2011-12-28 | 杰智环境科技股份有限公司 | On-line regenerating device for modified zeolite concentration rotating wheel |
| TW201238653A (en) * | 2011-03-25 | 2012-10-01 | Jg Environmental Tech Co Ltd | Improved on-line regeneration device and method for zeolite rotor concentrator |
-
2013
- 2013-10-16 CN CN201310485406.9A patent/CN104548866B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM394853U (en) * | 2010-05-28 | 2010-12-21 | Cherng Jye Air Cond Co Ltd | Fluidized purifier for absorbent material |
| TW201238653A (en) * | 2011-03-25 | 2012-10-01 | Jg Environmental Tech Co Ltd | Improved on-line regeneration device and method for zeolite rotor concentrator |
| CN202087198U (en) * | 2011-04-12 | 2011-12-28 | 杰智环境科技股份有限公司 | On-line regenerating device for modified zeolite concentration rotating wheel |
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| CN104548866A (en) | 2015-04-29 |
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Effective date of registration: 20181031 Address after: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Co-patentee after: Zhang Fengtang Patentee after: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Co-patentee after: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. Address before: China Taiwan Taoyuan County Co-patentee before: Zhang Fengtang Patentee before: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221118 Address after: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Patentee after: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Patentee after: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. Address before: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Patentee before: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Patentee before: Zhang Fengtang Patentee before: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. |