CN202387370U - Purifying device for low-concentration volatile organic compound in environmental gas - Google Patents
Purifying device for low-concentration volatile organic compound in environmental gas Download PDFInfo
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- CN202387370U CN202387370U CN2011203456094U CN201120345609U CN202387370U CN 202387370 U CN202387370 U CN 202387370U CN 2011203456094 U CN2011203456094 U CN 2011203456094U CN 201120345609 U CN201120345609 U CN 201120345609U CN 202387370 U CN202387370 U CN 202387370U
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- desorption
- exhaust passage
- organic compound
- inlet channel
- sorption
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- 239000012855 volatile organic compound Substances 0.000 title claims abstract description 29
- 230000007613 environmental effect Effects 0.000 title claims abstract description 9
- 238000003795 desorption Methods 0.000 claims abstract description 83
- 238000001179 sorption measurement Methods 0.000 claims abstract description 33
- 230000003647 oxidation Effects 0.000 claims abstract description 20
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 20
- 238000002336 sorption--desorption measurement Methods 0.000 claims abstract description 14
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 239000003054 catalyst Substances 0.000 claims description 18
- 230000009467 reduction Effects 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 5
- 230000027455 binding Effects 0.000 claims description 3
- 238000009739 binding Methods 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 26
- 150000002894 organic compounds Chemical class 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
A purifying device for low-concentration volatile organic compound in environmental gas comprises a rotary sorption-desorption device, a sorption differential pressure generator, a desorption thermal resource, a low temperature oxidation contact agent unit and a desorption differential pressure generator, wherein the rotary sorption-desorption device at least comprises a sorption area and a desorption area; a sorption inlet passage and a sorption exhaust passage are opposite to the sorption area, and a desorption inlet passage and a desorption exhaust passage are opposite to the desorption area; the sorption differential pressure generator is arranged in the sorption inlet passage or in the sorption exhaust passage, and enables volatile organic compound contained in the environmental gas to be absorbed and purified through the sorption area, and the purified gas returns into the environment or atmosphere; the desorption thermal resource is arranged in the desorption inlet passage; the low temperature oxidation contact agent unit is arranged in the desorption exhaust passage; and the desorption differential pressure generator is arranged in the desorption inlet passage or in the desorption exhaust passage. The purifying device for low-concentration volatile organic compound in environmental gas has efficacy of low equipment and operation cost, and has the function of prolonging the service life of an original filter system.
Description
Technical field
After the utility model relates to a kind of absorption and desorption process that utilizes rotary adsorption desorption device; And the organic compound that then with low-temperature oxidation catalyst unit desorption is come out is given the design of decomposing, purifying, light-concentration volatile organic compound purifier in particularly a kind of environment.
Background technology
Processing procedures such as TFT-LCD and semi-conductive development, cleaning, etching and vapor deposition; Using a large amount of organic compounds through regular meeting is coated with or cleans; These organic compounds (as: IPA/PGMEA/PGME etc.) mostly can be delivered to the back-end processing discharging through exhaust apparatus, and haply can be in the following discharging of closing in rules and regulations, but still have the part organic compound can loss in the dust free room operating environment; Its concentration is about tens of extremely about hundreds of ppb; Operating personnel also possibly cause discomfort if be in the environment of this low concentration organic compound for a long time, particularly contain low threshold value stink organic compound (like acetic acid).
Again, the Air-conditioner design of dust free room and the arrangement of filter mainly are divided into two parts, and some is that outer gas replenishes gas, and another partly is a recyclegas; The gas part mainly is humidity, particulate contaminant and the vaporous pollutant of control gas outside, and the recyclegas part then focuses on the removal of processing procedure loss chemicals.Yet, present dust free room ceiling major part all be equiped with the blower fan filtering system (Fan Filter Unit, FFU); In order to filter all contaminations in the gas that gets into dust free room; But because FFU costs an arm and a leg and need regularly change, so, handled by preposition filtration system because of difficult if use the lower VOC of boiling point in the processing procedure; Cause the replacing frequency of FFU to improve, and then increase generation of waste and increase cost of equipment maintenance; Moreover; When the Filtration Adsorption filter material of FFU carries out pure adsorb volatile organic compound (VOCs) as if the employing activated carbon; If contain the PGMEA composition among this VOCs; Then be easy to produce in the active carbon adsorption filter material hydrolysis and be the low extremely smelly acetic acid (threshold value is about 1-10ppb) of threshold value, cause the sense of discomfort of operating environment more.
The utility model content
The utility model technical problem underlying to be solved is; Overcome the above-mentioned defective that prior art exists; And light-concentration volatile organic compound purifier in a kind of environment is provided; It has equipment and the cheap effect of operating cost, and has the effect that prolongs original filtration system useful life.
The utility model solves the technical scheme that its technical problem adopted:
Light-concentration volatile organic compound purifier in a kind of environment; Include: a rotary adsorption desorption device; At least distinguish an adsorption zone and a desorption district are arranged; And this adsorption zone is provided with absorption inlet channel and absorption exhaust passage relatively, and this desorption district is provided with desorption inlet channel and desorption exhaust passage relatively; One absorption pressure reduction generator is arranged at maybe this absorption exhaust passage of this absorption inlet channel, makes environmental gas through this adsorption zone contained VOC given adsorption cleaning, and purified gas is got back in the environment; One desorption thermal source is arranged at this desorption inlet channel; One low-temperature oxidation catalyst unit is arranged at this desorption exhaust passage; An and desorption pressure reduction generator; Be arranged at this desorption inlet channel or this desorption exhaust passage; The desorption air communication of order after this desorption thermal source heating crossed this desorption district; And being given desorption, adsorbed VOC comes out, and the VOC decomposing, purifying of borrowing this low-temperature oxidation catalyst unit that desorption is come out, purified gas is got back in environment or the atmosphere.
In addition; Further there is the circulating current passage terminal the binding and sends gas channel outside in this desorption exhaust passage; This circulating current passage fork-join is in this isolation inlet channel and be provided with first shut-off valve; This is sent gas channel outside and is communicated to atmosphere and is provided with second shut-off valve, and makes this first shut-off valve and this second shut-off valve keep the aspect of one open-one close.Again, the upstream extremity of this desorption exhaust passage in this low-temperature oxidation catalyst unit further is provided with an ozone supply unit.
Moreover, further make this desorption exhaust passage terminal yoke be connected to this absorption inlet channel and be provided with cooler.
Yet this low-temperature oxidation catalyst unit is with supported on alumina manganese or iron; Wherein, manganese/iron ratio is 1/3.In addition, further between the desorption district of this rotary adsorption desorption device and adsorption zone, increase by an isolated area, and this isolated area is provided with and isolates inlet channel and separated exhaust passage relatively, and this separated exhaust passage is connected to the upper reaches of this desorption inlet channel.Again, this rotary adsorption desorption device is rotary-type or revolving ring type.
The beneficial effect of the utility model is that it has equipment and the cheap effect of operating cost, and has the effect that prolongs original filtration system useful life.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the structural representation of the utility model first embodiment.
Fig. 2 is the structural representation of the utility model second embodiment.
Fig. 3 is the structural representation of the utility model the 3rd embodiment.
Label declaration among the figure:
10 rotary adsorption desorption devices
11 adsorption zones
111 absorption inlet channels
112 absorption exhaust passages
12 desorption districts
121 desorption inlet channels
122 desorption exhaust passages
123 circulating current passages
124 send gas channel outside
125 first shut-off valves
126 second shut-off valves
13 isolated areas
131 isolate inlet channel
132 separated exhaust passages
20 absorption pressure reduction generators
30 desorption thermals source
40 low-temperature oxidation catalyst unit
50 desorption pressure reduction generators
60 ozone supply unit
70 coolers
The specific embodiment
At first; See also shown in Figure 1; The utility model first embodiment includes: a rotary adsorption desorption device 10, can be the illustrated rotary-type or revolving ring type that do not show of figure, and and distinguish at least an adsorption zone 11 and a desorption district 12 are arranged; And this adsorption zone 11 is provided with absorption inlet channel 111 and absorption exhaust passage 112 relatively, and this desorption district 12 is provided with desorption inlet channel 121 and desorption exhaust passage 122 relatively; One absorption pressure reduction generator 20; Be arranged at maybe this absorption exhaust passage 112 of this absorption inlet channel 111; Make environmental gas pass through this adsorption zone 11 contained organic compound (like IPA and PGMEA) is given adsorption cleaning, purified gas is got back in the environment (or atmosphere); One desorption thermal source 30 is arranged at this desorption inlet channel 121; One low-temperature oxidation catalyst unit 40 be arranged at this desorption exhaust passage 122, and this low-temperature oxidation catalyst unit 40 is with supported on alumina manganese or iron (manganese/iron ratio can be 1/3); An and desorption pressure reduction generator 50; Be arranged at this desorption inlet channel 121 or this desorption exhaust passage 122; Order desorption air communication of (being heated to 120～180 ℃ approximately) after these desorption thermal source 30 heating is crossed this desorption district 12; And adsorbed organic compound is given desorption come out (temperature is about 50～120 ℃ behind the desorption), and borrow VOC that this low-temperature oxidation catalyst unit 40 comes out desorption in lower temperature (about 50～120 ℃) and space flow speed GHSV＞10,000hr
-1Following decomposing, purifying (efficient＞99%), purified gas is got back in the environment (or atmosphere).
Again; Further between the desorption district 12 of this rotary adsorption desorption device 10 and adsorption zone 11, increase by an isolated area 13; This isolated area 13 has the function of isolation, cooling and recuperation of heat; And this isolated area 13 is provided with isolation inlet channel 131 and separated exhaust passage 132 relatively; And this separated exhaust passage 132 is connected to the upper reaches of this desorption inlet channel 121, makes environmental gas pass through this isolated area 13 and with recuperation of heat (have concurrently and isolate and cooling effect), the gas after the recuperation of heat becomes the source of the gas of desorption air-flow.
Moreover; See also shown in Figure 2; The utility model second embodiment further has circulating current passage 123 and sends gas channel 124 outside in these 122 terminal bindings of desorption exhaust passage than first embodiment; These circulating current passage 123 fork-joins are in this isolation inlet channel 131 and be provided with first shut-off valve 125, and this is sent gas channel 124 outside and is communicated to atmosphere and is provided with second shut-off valve 126, and make this first shut-off valve 125 and this second shut-off valve 126 keep the aspect of one open-one close; Therefore; This circulating current passage 123 lets becomes the source of the gas of isolating air-flow through these low-temperature oxidation catalyst unit 40 purified gases; And the circulation of the air-flow of formation circulation desorption and isolation, carry out the ventilation of circulating current and borrow this to send gas channel 124 outside opportune moment.
In addition, this desorption exhaust passage 122 further is provided with an ozone supply unit 60 in the upstream extremity of this low temperature catalyst oxidation unit 40, provides ozone to this low temperature catalyst oxidation unit 40, as the usefulness of strengthening catalyst complete oxidation decomposition reaction function.
Person in addition sees also shown in Figure 3ly, and the utility model the 3rd embodiment further makes these desorption exhaust passage 122 terminal yokes be connected to this absorption inlet channel 111 and is provided with cooler 70 than first embodiment; Therefore, this circulating current passage 123 lets through these low-temperature oxidation catalyst unit 40 purified gases, passes through this adsorption zone 11 after cooling off with this cooler 70 once more.
According to said structure; The utility model is in order to the contained VOC of environment purification gas (such as the gas of dust free room inside); And make environmental gas pass through the adsorption zone 11 of this rotary adsorption desorption device 10, utilize adsorption zone 11 that VOC is given adsorption cleaning; Yet; Carry out the adsorbing while at adsorption zone 11; Desorption air communication after the heating is crossed desorption district 12, comes out and adsorbed VOC is given desorption, and borrows this low-temperature oxidation catalyst unit 40 that the VOC that desorption comes out is given decomposing, purifying.
Be with; The utility model is after the process absorption and desorption process of rotary adsorption desorption device 10; Satisfy under the condition of low temperature; Utilize this low-temperature oxidation catalyst unit 40 that the VOC that desorption comes out is given decomposing, purifying, and have equipment clean efficient height and the cheap effect of operating cost.Moreover; Use if be positioned in the dust free room; Then can reduce blower fan filtering system (FFU) and filter the burden of VOC, prolong the replacement cycle of FFU, have the effect that prolongs original filtration system useful life; And after can avoiding absorption, remain in organic compound in the adsorption material the derive problem of stink of reaction that is hydrolyzed for a long time.
The above; It only is the preferred embodiment of the utility model; Be not that the utility model is done any pro forma restriction; Every technical spirit according to the utility model all still belongs in the scope of the utility model technical scheme any simple modification, equivalent variations and modification that above embodiment did.
In sum; The utility model is on structural design, use practicality and cost benefit; It is required to meet industry development fully, and the structure that is disclosed also is to have unprecedented innovation structure, has novelty, creativeness, practicality; The regulation that meets relevant novel patent requirement is so mention application in accordance with the law.
Claims (6)
1. light-concentration volatile organic compound purifier in the environment is characterized in that, comprising:
One rotary adsorption desorption device, distinguishing at least has an adsorption zone and a desorption district, and relatively this adsorption zone be provided with the absorption inlet channel with and attach the exhaust passage, and this desorption district is provided with desorption inlet channel and desorption exhaust passage relatively;
One absorption pressure reduction generator is arranged at maybe this absorption exhaust passage of this absorption inlet channel, makes environmental gas through this adsorption zone contained VOC given adsorption cleaning, and purified gas is got back in environment or the atmosphere;
One desorption thermal source is arranged at this desorption inlet channel;
One low-temperature oxidation catalyst unit is arranged at this desorption exhaust passage;
One desorption pressure reduction generator is arranged at this desorption inlet channel or this desorption exhaust passage.
2. light-concentration volatile organic compound purifier in the environment according to claim 1; It is characterized in that; Further there is the circulating current passage terminal the binding and sends gas channel outside in this desorption exhaust passage; This circulating current passage fork-join is in isolating inlet channel and being provided with first shut-off valve, and this is sent gas channel outside and is communicated to atmosphere and is provided with second shut-off valve, and makes this first shut-off valve and this second shut-off valve keep the aspect of one open-one close.
3. light-concentration volatile organic compound purifier is characterized in that in the environment according to claim 1 and 2, and the upstream extremity of said desorption exhaust passage in this low-temperature oxidation catalyst unit further is provided with an ozone supply unit.
4. light-concentration volatile organic compound purifier is characterized in that in the environment according to claim 1, further makes this desorption exhaust passage terminal yoke be connected to this absorption inlet channel and be provided with cooler.
5. light-concentration volatile organic compound purifier in the environment according to claim 4; It is characterized in that; Further between the desorption district of this rotary adsorption desorption device and adsorption zone, increase by an isolated area; And this isolated area is provided with isolation inlet channel and separated exhaust passage relatively, and this separated exhaust passage is connected to the upper reaches of this desorption inlet channel.
6. light-concentration volatile organic compound purifier is characterized in that in the environment according to claim 5, and said rotary adsorption desorption device is rotary-type or revolving ring type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203456094U CN202387370U (en) | 2011-09-15 | 2011-09-15 | Purifying device for low-concentration volatile organic compound in environmental gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203456094U CN202387370U (en) | 2011-09-15 | 2011-09-15 | Purifying device for low-concentration volatile organic compound in environmental gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202387370U true CN202387370U (en) | 2012-08-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203456094U Expired - Fee Related CN202387370U (en) | 2011-09-15 | 2011-09-15 | Purifying device for low-concentration volatile organic compound in environmental gas |
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| Country | Link |
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| CN (1) | CN202387370U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105188883A (en) * | 2013-05-09 | 2015-12-23 | 恩必安有限公司 | Air purification device |
| CN105263602A (en) * | 2013-04-16 | 2016-01-20 | 恩必安有限公司 | Air purifying filter with desorption unit using microwave heating and air purifying device using the same |
| CN107537279A (en) * | 2016-06-23 | 2018-01-05 | 杰智环境科技股份有限公司 | Indoor water-soluble airborne molecular contaminants in ground purifier and method |
-
2011
- 2011-09-15 CN CN2011203456094U patent/CN202387370U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105263602A (en) * | 2013-04-16 | 2016-01-20 | 恩必安有限公司 | Air purifying filter with desorption unit using microwave heating and air purifying device using the same |
| CN105188883A (en) * | 2013-05-09 | 2015-12-23 | 恩必安有限公司 | Air purification device |
| CN105188883B (en) * | 2013-05-09 | 2017-12-05 | 恩必安有限公司 | Air cleaning unit |
| CN107537279A (en) * | 2016-06-23 | 2018-01-05 | 杰智环境科技股份有限公司 | Indoor water-soluble airborne molecular contaminants in ground purifier and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120822 Termination date: 20190915 |
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| CF01 | Termination of patent right due to non-payment of annual fee |