TWI490027B - Rotary Suction Absorbing Device and Its Gas Purification Treatment System - Google Patents

Rotary Suction Absorbing Device and Its Gas Purification Treatment System Download PDF

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TWI490027B
TWI490027B TW102136131A TW102136131A TWI490027B TW I490027 B TWI490027 B TW I490027B TW 102136131 A TW102136131 A TW 102136131A TW 102136131 A TW102136131 A TW 102136131A TW I490027 B TWI490027 B TW I490027B
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compartment
desorption
adsorption
suction
disposed
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TW201513923A (en
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Feng Tang Chang
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Jg Environmental Tech Co Ltd
Feng Tang Chang
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Description

轉環式吸脫附裝置及其氣體淨化處理系統Rotary suction and desorption device and gas purification treatment system thereof

本發明之轉環式吸脫附裝置及其氣體淨化處理系統,其係主要藉由一轉環式吸附器吸附欲處理廢氣中的有機物質,而使處理後之廢氣中的有機物質含量降低至廢氣排放標準,本發明係應用於半導體、光電、化工化學產業等製程中會產生含有機物質之排放廢氣者。The rotary ring type suction and desorption device of the present invention and the gas purification treatment system thereof mainly reduce the organic substance content in the treated exhaust gas by adsorbing the organic substance in the exhaust gas by a rotary ring adsorber to reduce the content of the organic substance in the treated exhaust gas to Exhaust gas emission standards, the present invention is applied to semiconductor, photovoltaic, chemical and chemical industries and other processes that produce emissions containing organic matter.

積體電路產業、光電產業、面板等半導體相關產業的製程中係產生許多含有機物質的廢液、廢水、廢氣等,例如半導體廠於黃光製程包含清洗、塗底、光阻覆蓋、軟烤、曝光、烘烤、顯影、硬烤等步驟中,係使用到各式清洗液、光阻液等有機溶劑,會產生有揮發性有機物質(VOCs, Volatile Organic Compounds),其中大部份的揮發性有機物質屬於有害性的空氣污染物(Hazardous Air Pollutants;HAPs),人體長期暴露於含高濃度揮發性有機物質的環境下可能會造成中毒及致癌性腫瘤等反應,並且,存在大氣中的揮發性有機物質會產生光化學反應,導致臭氧濃度提高並產生高氧化性污染物。據此,這些產生的揮發性有機物質不僅危害人體健康更造成環境污染,因此必需經過適當的處理,使工廠排放之廢氣中的揮發性有機物質含量降低至規範標準後,才能排放至外界。In the process of semiconductor-related industries such as integrated circuit industry, optoelectronic industry, and panel, many waste materials, waste water, and exhaust gas containing organic substances are produced. For example, semiconductor factories include cleaning, coating, photoresist coating, and soft baking in the process of yellow light. In the steps of exposure, baking, development, and hard baking, organic solvents such as various cleaning solutions and photoresists are used, and volatile organic compounds (VOCs, Volatile Organic Compounds) are generated, and most of them are volatilized. Sexual organic substances are harmful air pollutants (HAPs). Long-term exposure to high concentrations of volatile organic substances may cause poisoning and carcinogenic tumors, and there are volatilizations in the atmosphere. Sexual organic matter produces a photochemical reaction that leads to an increase in ozone concentration and the production of highly oxidizing contaminants. Accordingly, these volatile organic substances not only endanger human health but also cause environmental pollution. Therefore, it is necessary to properly treat the volatile organic substances in the exhaust gas discharged from the factory to the standard before discharging to the outside world.

習知技術中,一種應用在處理含有機物質的廢氣之裝置係為吸脫附轉環設備,其主要包含一外殼殼體、一隔離箱、一轉輪及一驅動單元,其中該外殼殼體係具有一容置空間,該轉輪係裝載有吸附材,用於吸附流經該外殼殼體容置空間之廢氣中的有機物質,而該隔離箱、該轉輪及該驅動單元係設置於該外殼殼體之容置空間中,該隔離箱係區隔有吸附區、脫附區及吹除區,該轉輪係可轉動地容置於該隔離箱內,並可轉動而使其中的吸附材不斷的循環於該吸附區、該脫附區及該吹除區,而使該轉輪中的吸附材在吸附區吸附通過該吸附區的廢氣中的有機物質,再轉動至該脫附區中藉由通過脫附氣流而使有機物質的脫附,接著轉動至該吹除區藉由通過吹除氣流而使脫附材乾燥並冷卻,以達完全地再生活化後,再重複轉動至該吸附區對廢氣進行吸附處理,如此,藉由轉輪的旋轉運作,使吸附材不斷的重複吸附、脫附、吹除之步驟,使通過吸脫附轉環設備後的廢氣中所含的有機物質減少到排放標準後,才能排出至大氣中。In the prior art, a device for treating exhaust gas containing organic substances is a suction and release rotating ring device, which mainly comprises an outer casing, an isolation box, a rotating wheel and a driving unit, wherein the outer casing is Having an accommodating space, the turret is loaded with an absorbing material for adsorbing organic substances in the exhaust gas flowing through the accommodating space of the outer casing, and the isolating box, the rotating wheel and the driving unit are disposed on the In the accommodating space of the outer casing, the isolation box is separated by an adsorption zone, a detachment zone and a blowing zone, and the rotor is rotatably accommodated in the isolation box, and can be rotated to make the adsorption therein The material continuously circulates in the adsorption zone, the desorption zone and the blowing zone, so that the adsorbent in the runner adsorbs the organic matter in the exhaust gas passing through the adsorption zone in the adsorption zone, and then rotates to the desorption zone. By desorbing the organic substance by desorbing the gas stream, and then rotating to the blowing zone, the desorbed material is dried and cooled by blowing off the gas stream to completely regenerate and activate, and then repeatedly rotated to The adsorption zone adsorbs the exhaust gas, so By the rotation operation of the runner, the adsorption material is repeatedly repeatedly adsorbed, desorbed, and blown off, so that the organic substances contained in the exhaust gas after the suction and desorption of the rotating ring device are reduced to the discharge standard, and then discharged to In the atmosphere.

然而,習知的吸脫附轉環設備係將提供轉輪旋轉的驅動單元裝設於外殼殼體之容置空間中,該驅動單元中的馬達、齒輪組、金屬的支撐件及電子零件運作時係可能機械磨擦或電氣放電產生火花而引燃外殼之容置空間內含有機物質或/及塵粒的廢氣並導致爆炸,而極具危險性;並且,外殼之容置空間內的有機物質或/及塵粒含量高,其易造成齒輪組、支撐件等金屬的機械零件髒污、生鏽腐蝕,進而造成損壞及維修成本增加;再者,當維修人員需要更換、維護及保養驅動單元的機械零件或電子零件時,必須要進入吸脫附轉環設備的內部,不僅不方便且耗費時間,更使人員暴露在有機物質或/及塵粒含量高的危險環境下,而有危險之虞。However, the conventional suction and release rotating ring device is provided with a driving unit for rotating the rotating wheel, and the motor, the gear set, the metal supporting member and the electronic component are operated in the driving unit. At the time, mechanical friction or electrical discharge may cause sparks to ignite the exhaust gas containing organic matter or/and dust particles in the accommodating space of the outer casing and cause explosion, which is extremely dangerous; and the organic matter in the accommodating space of the outer casing Or / and high dust content, it is easy to cause the mechanical parts of gears, supports and other metal parts to be dirty, rust and corrosion, resulting in damage and increased maintenance costs; in addition, when maintenance personnel need to replace, maintain and maintain the drive unit When it comes to mechanical parts or electronic parts, it must enter the inside of the suction and release ring equipment, which is not only inconvenient and time consuming, but also exposes personnel to dangerous environments with high content of organic substances and/or dust particles, and is dangerous. Hey.

據此,習知的吸脫附轉環設備係有安全性低、機械零件易老化損壞及保養維修不方便等缺點。Accordingly, the conventional suction and release rotating ring equipment has the disadvantages of low safety, easy aging damage of mechanical parts, and inconvenient maintenance and repair.

為解決上述現有技術的缺失,本發明係提供一種轉環式吸脫附裝置,係藉由將驅動單元係設置於該殼體之外部而提升了設備整體之安全性,並且,維修人員保養、維修及調整該驅動單元中之電子零件與機械結構時,無需進入該轉環式吸脫附裝置內部而避免暴露於有機物質或/及塵粒含量高的環境中,並使設備的維護及操作更加方便及簡單。In order to solve the above-mentioned deficiencies of the prior art, the present invention provides a swivel type suction and detachment device, which improves the safety of the whole device by arranging the drive unit outside the casing, and maintenance personnel maintains, When repairing and adjusting the electronic parts and mechanical structure in the drive unit, it is not necessary to enter the inside of the rotary suction and release device to avoid exposure to an environment with high content of organic substances or/and dust particles, and to maintain and operate the equipment. More convenient and simple.

為達上述目的及其他目的,本發明係提供一種轉環式吸脫附裝置,包含一殼體、一支撐架、一隔離箱、一轉環式吸附器及一驅動單元,該殼體係具有一容置空間及連通該容置空間之一底部開口、一進氣口及一排氣口;該支撐架設置於該殼體之外部;該隔離箱係設置於該殼體之容置空間中,且該隔離箱係具有一吸附隔間、一脫附隔間及一通道,該通道係對應該底部開口且連通該吸附隔間及該脫附隔間;該轉環式吸附器可轉動地設置於該殼體之容置空間中並具有一轉輪及一轉盤,該轉輪係固定於該轉盤上並容置於該通道中,該轉盤係對應該底部開口,且該轉盤係環繞設置有一第一密封件,該第一密封件係抵壓於該轉盤與該殼體之間的間隙而達成氣密;該驅動單元係設置於該支撐架上並透過該底部開口與該轉盤連接,該驅動單元包含一立柱、一軸承、複數個支承滾輪、一齒輪組及一馬達,該立柱係固定至該支撐架,該軸承係連接於該立柱與該齒輪組之間,該齒輪組係連接該轉盤與該馬達,以使馬達驅動該轉環式吸附器以該立柱為中心轉動,而使該轉輪轉動通過該吸附隔間及該脫附隔間,該等支承滾輪係固定至該支撐架且滾動接觸地支承該轉盤。To achieve the above and other objects, the present invention provides a rotary ring suction and release device comprising a casing, a support frame, an isolation box, a rotary ring adsorber and a driving unit, the housing having a The accommodating space is connected to one of the bottom opening of the accommodating space, an air inlet and an air vent; the support frame is disposed outside the casing; the isolating box is disposed in the accommodating space of the casing, And the isolation box has an adsorption compartment, a desorption compartment and a passage, the passage is corresponding to the bottom opening and communicates with the adsorption compartment and the desorption compartment; the rotary ring adsorber is rotatably disposed a rotating wheel and a turntable are disposed in the accommodating space of the casing, the rotating wheel is fixed on the rotating plate and is accommodated in the passage, the rotating plate is corresponding to the bottom opening, and the rotating wheel is arranged around a first sealing member, the first sealing member is pressed against the gap between the rotating plate and the housing to achieve airtightness; the driving unit is disposed on the supporting frame and connected to the rotating plate through the bottom opening, The drive unit includes a column, a bearing, and a complex a support roller, a gear set and a motor, the column is fixed to the support frame, the bearing is connected between the column and the gear set, the gear set is connected to the turntable and the motor to enable the motor to drive the The rotary ring adsorber rotates around the column, and the wheel rotates through the adsorption compartment and the desorption compartment, and the support rollers are fixed to the support frame and support the turntable in rolling contact.

上述之轉環式吸脫附裝置,其中該轉輪係具有一框架及複數個吸附箱塊,該框架係具有複數個側壁以形成有環狀排列的複數個容置隔間,以供容置該等吸附箱塊,且各該側壁的側邊係分別設置有一第二密封件,該隔離箱之該吸附隔間與該脫附隔間之交接處係具有一隔離壁,各該隔離壁之長度係大於或等於對應之相鄰二側壁之間距,各該第二密封件用於抵壓於該隔離壁,以使該吸附隔間與該脫附隔間相互隔離。The above-mentioned rotary ring type suction and desorption device, wherein the wheel train has a frame and a plurality of adsorption box blocks, the frame has a plurality of side walls to form a plurality of accommodating compartments arranged in an annular shape for accommodating The adsorption box blocks, and the side edges of each of the side walls are respectively provided with a second sealing member, and the intersection of the adsorption compartment and the desorption compartment of the isolation box has a partition wall, and each of the partition walls The length is greater than or equal to the distance between the adjacent adjacent sidewalls, and each of the second seals is configured to be pressed against the partition wall to isolate the adsorption compartment from the desorption compartment.

上述之轉環式吸脫附裝置,其中該隔離箱係進一步包括有一吹除隔間,該吹除隔間係設置於該脫附隔間與該吸附隔間之間並與該通道連通,該轉輪轉動時係依序通過吸附隔間、脫附隔間與吹除隔間。The above-mentioned rotary ring type suction and desorption device, wherein the isolation box further comprises a blowing compartment, wherein the blowing compartment is disposed between the desorption compartment and the adsorption compartment and communicates with the channel, When the runner rotates, it passes through the adsorption compartment, the desorption compartment and the blowout compartment.

上述之轉環式吸脫附裝置,其中該轉輪係具有一框架及複數個吸附箱塊,該框架係具有複數個側壁以形成有環狀排列的複數個容置隔間,以供容置該等吸附箱塊,且各該側壁的側邊係分別設置有一第二密封件,該隔離箱之該吸附隔間、該脫附隔間與該吹除隔間之彼此交接處係具有一隔離壁,各該隔離壁之長度係大於或等於對應之相鄰二側壁之間距,各該第二密封件用於抵壓於該隔離壁,以使該吸附隔間、該脫附隔間與該吹除隔間之間相互隔離。The above-mentioned rotary ring type suction and desorption device, wherein the wheel train has a frame and a plurality of adsorption box blocks, the frame has a plurality of side walls to form a plurality of accommodating compartments arranged in an annular shape for accommodating The adsorption box blocks, and the side edges of each of the side walls are respectively provided with a second sealing member, and the adsorption compartment of the isolation box, the desorption compartment and the blowing compartment are separated from each other. a wall, each of the partition walls having a length greater than or equal to a distance between the adjacent adjacent side walls, each of the second seals for pressing against the partition wall, such that the adsorption compartment, the desorption compartment, and the The blowout compartments are isolated from each other.

上述之轉環式吸脫附裝置,其中該脫附隔間係具有一第一進氣部及一第一排氣部,該吹除隔間係具有一第二進氣部及一第二排氣部,該第一進氣部及該第二進氣部係設置於該轉輪之內側並固定至該立柱上,該第一排氣部與該第二排氣部設置於該轉輪之外側。The above-mentioned rotary-type suction and desorption device, wherein the desorption compartment has a first intake portion and a first exhaust portion, the blow-off compartment has a second intake portion and a second row a gas portion, the first air inlet portion and the second air inlet portion are disposed on the inner side of the rotating wheel and fixed to the column, and the first exhaust portion and the second exhaust portion are disposed on the rotating portion Outside.

上述之轉環式吸脫附裝置,其中該齒輪組包含一第一齒輪及一第二齒輪,該第一齒輪設置於該軸承上並固定至該轉盤底部,該第二齒輪係連接該第一齒輪,該馬達係與該第二齒輪結合,該馬達係驅動該第二齒輪而帶動該第一齒輪。The above-mentioned rotary ring type suction and desorption device, wherein the gear set includes a first gear and a second gear, the first gear is disposed on the bearing and fixed to the bottom of the turntable, and the second gear train is connected to the first a gear coupled to the second gear, the motor driving the second gear to drive the first gear.

上述之轉環式吸脫附裝置,其中該等支承滾輪之數量係為三個,其係以該立柱為圓心而呈120度圓心角排列。In the above-mentioned rotary ring type suction and desorption device, the number of the supporting rollers is three, which is arranged at a center angle of 120 degrees with the column as a center.

上述之轉環式吸脫附裝置,其中進一步包含一預冷器,其係容置於該殼體之容置空間中並設置在該進氣口與該轉環式吸附器之間。The above-mentioned rotary ring suction and release device further includes a pre-cooler that is housed in the accommodating space of the housing and disposed between the air inlet and the rotary ring adsorber.

上述之轉環式吸脫附裝置,其中進一步包含一空氣過濾器,其係容置於該殼體之容置空間中並設置在該進氣口與該預冷器之間。The above-mentioned rotary ring suction and release device further includes an air filter that is housed in the accommodating space of the housing and disposed between the air inlet and the pre-cooler.

為達上述目的及其他目的,本創作另提供一種氣體淨化處理系統,包含如上述之轉環式吸脫附裝置以及一燃燒爐,該轉環式吸脫附裝置之脫附隔間係藉由一氣體管路與該燃燒爐連接。To achieve the above and other objects, the present invention further provides a gas purification treatment system comprising the above-described rotary suction and desorption device and a combustion furnace, wherein the desorption compartment of the rotary suction and desorption device is A gas line is connected to the burner.

為達上述目的及其他目的,本創作再提供一種氣體淨化處理系統,包含如上述之轉環式吸脫附裝置以及一冷凝器,該轉環式吸脫附裝置之脫附隔間係藉由一氣體管路與該冷凝器連接。To achieve the above and other objects, the present invention further provides a gas purification treatment system comprising the above-described rotary suction and desorption device and a condenser, wherein the desorption compartment of the rotary suction and desorption device is A gas line is connected to the condenser.

因此,上述本發明提供之轉環式吸脫附裝置,係藉由將該驅動單元係設置於該殼體之外部而提升了設備整體之安全性,其係可避免該驅動單元運轉時產生熱能甚至火花而引燃該殼體內部之有機廢氣等疑慮,還可避免該驅動單元中之電子零件與材料結構由於接觸到有機廢氣、塵粒及濕氣而易被髒污、生鏽及腐蝕的缺點,使得維護設備的成本可降低並增加使用壽命,並且,維修人員直接在該轉環式吸脫附裝置外部即可直接保養、維修及調整該驅動單元中之電子零件與機械結構,無需進入該轉環式吸脫附裝置內部,可避免暴露於有機物質含量高的環境中,並使得設備的維護及操作更加方便及簡單。另外,本發明還提供有包含該轉環式吸脫附裝置的氣體淨化系統等應用,係為具有高安全性、低設備維護成本、零件保養維修方便等優點者。Therefore, the above-mentioned rotary ring type suction and detachment device provided by the present invention improves the safety of the whole device by providing the drive unit outside the casing, which can prevent heat generation of the drive unit during operation. Even sparks can ignite the organic exhaust gas inside the casing, and the electronic components and material structures in the driving unit can be easily contaminated, rusted and corroded due to contact with organic exhaust gas, dust particles and moisture. Disadvantages, the cost of maintenance equipment can be reduced and the service life is increased, and the maintenance personnel can directly maintain, repair and adjust the electronic parts and mechanical structures in the drive unit directly outside the rotary suction and release device without entering The inside of the rotary suction and desorption device can avoid exposure to an environment with high organic matter content, and makes maintenance and operation of the device more convenient and simple. In addition, the present invention also provides an application such as a gas purification system including the rotary ring type suction and desorption device, which is advantageous in that it has high safety, low equipment maintenance cost, and convenient maintenance and repair of parts.

為充分瞭解本發明之目的、特徵及功效,茲藉由下述具體之實施例,並配合所附之圖式,對本發明做一詳細說明,說明如後:In order to fully understand the objects, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings.

請參照第1圖至第6圖,其係為本發明第一實施例之轉環式吸脫附裝置的結構示意圖。本創作第一實施例之轉環式吸脫附裝置10主要包含一殼體100、一支撐架200、一隔離箱300、一轉環式吸附器400及一驅動單元500,用於處理有機廢氣。Please refer to FIG. 1 to FIG. 6 , which are schematic diagrams showing the structure of the rotary ring suction and release device according to the first embodiment of the present invention. The rotary suction and release device 10 of the first embodiment of the present invention mainly comprises a casing 100, a support frame 200, an isolation box 300, a rotary ring adsorber 400 and a driving unit 500 for treating organic waste gas. .

如第1圖至第3圖所示,該殼體100係具有一容置空間110及連通該容置空間之一底部開口120(第3圖)、一進氣口130及一排氣口140;該支撐架200設置於該殼體100之外部,本實施例中該支撐架200係設置於該殼體100之底面,用於支撐該轉環式吸脫附裝置10於地面上;該隔離箱300係設置於該殼體100之容置空間110中,如第2圖及第3圖所示,該隔離箱300係具有一吸附隔間310、一脫附隔間320及一通道340,該通道340係對應該底部開口且連通該吸附隔間310及該脫附隔間320;該轉環式吸附器400可轉動地設置於該殼體100之容置空間110中並具有一轉輪410及一轉盤420,該轉輪410係固定於該轉盤420上並可轉動地容置於該通道340中,該轉盤420係對應該底部開口120,且該轉盤420係環繞設置有一第一密封件421,該第一密封件421係抵壓於該轉盤420與該殼體100之間的間隙而達成氣密;該驅動單元500係設置於該支撐架200上並透過該底部開口120與該轉盤420連接,該驅動單元500包含一立柱510、一軸承520、複數個支承滾輪530、一齒輪組540及一馬達550,該立柱510係固定至該支撐架200,該軸承520係連接於該立柱510與該齒輪組540之間,該齒輪組540係連接該轉盤420與該馬達550,以使馬達550驅動該轉環式吸附器400以該立柱510為中心轉動,而使該轉輪410轉動通過該吸附隔間310及該脫附隔間320,該等支承滾輪530係固定至該支撐架200且滾動接觸地支承該轉盤420。As shown in FIG. 1 to FIG. 3 , the housing 100 has an accommodating space 110 and a bottom opening 120 ( FIG. 3 ) that communicates with the accommodating space, an air inlet 130 and an air outlet 140 . The support frame 200 is disposed on the outer surface of the housing 100. In the embodiment, the support frame 200 is disposed on the bottom surface of the housing 100 for supporting the rotary ring suction and release device 10 on the ground; The box 300 is disposed in the accommodating space 110 of the casing 100. As shown in FIG. 2 and FIG. 3, the box 300 has an adsorption compartment 310, a desorption compartment 320 and a passage 340. The channel 340 is open to the bottom and communicates with the adsorption compartment 310 and the desorption compartment 320. The revolving adsorber 400 is rotatably disposed in the accommodating space 110 of the housing 100 and has a revolver 410 and a turntable 420, the reel 410 is fixed on the turntable 420 and rotatably received in the passage 340, the turntable 420 corresponds to the bottom opening 120, and the turntable 420 is circumferentially provided with a first seal The first sealing member 421 is pressed against the gap between the turntable 420 and the casing 100 to achieve airtightness; the driving unit 500 The driving unit 500 is disposed on the support frame 200 and connected to the turntable 420. The driving unit 500 includes a column 510, a bearing 520, a plurality of supporting rollers 530, a gear set 540 and a motor 550. The column 510 Attached to the support frame 200, the bearing 520 is coupled between the column 510 and the gear set 540. The gear set 540 is coupled to the turntable 420 and the motor 550 to cause the motor 550 to drive the rotary ring adsorber. 400 rotates around the column 510, and the wheel 410 rotates through the adsorption compartment 310 and the desorption compartment 320. The support rollers 530 are fixed to the support frame 200 and support the turntable 420 in rolling contact. .

上述本發明第一實施例之轉環式吸脫附裝置10中,如第1圖所示,該立柱510係固定至該支撐架200而支撐該軸承520、該齒輪組540及馬達550等元件,該馬達550係帶動齒輪組540運轉,而帶動該轉盤420藉由該軸承520而相對該立柱510轉動,配合第2圖及第3圖所示地,該轉輪410於該通道340中轉動且通過該吸附隔間310及該脫附隔間320。In the above-described rotary ring type suction and detachment device 10 according to the first embodiment of the present invention, as shown in FIG. 1, the column 510 is fixed to the support frame 200 to support components such as the bearing 520, the gear set 540, and the motor 550. The motor 550 drives the gear set 540 to operate, and the rotating plate 420 is rotated relative to the column 510 by the bearing 520. The rotating wheel 410 rotates in the channel 340 as shown in FIGS. 2 and 3. And passing through the adsorption compartment 310 and the desorption compartment 320.

請參照第1圖,待處理之有機廢氣由該進氣口130進入後會經過該轉輪410的吸附隔間310,當有機廢氣通過該轉輪410之吸附隔間310時,該轉輪410中係具有複數個吸附箱塊412用於吸附有機廢氣中的有機物質(含有機溶劑),進而降低或去除有機廢氣中的有機物質含量,淨化後之乾淨氣體再由該排氣口140排出;而該轉輪410中的吸附箱塊412之吸附材吸附了有機物質後,該轉輪410係旋轉至該脫附隔間320,藉由一脫附氣源40(第8圖)產生之脫附氣流將有機物質自該等吸附箱塊412內的吸附材中脫附,而使該吸附箱塊412內的吸附材在生活化,再生活化後的吸附箱塊412再旋轉至該吸附隔間310進行有機廢氣之處理。Referring to FIG. 1 , the organic waste gas to be treated enters the adsorption compartment 310 of the runner 410 after entering the air inlet 130, and the organic wheel passes through the adsorption compartment 310 of the runner 410. The middle system has a plurality of adsorption box blocks 412 for adsorbing organic substances (containing organic solvent) in the organic waste gas, thereby reducing or removing the organic substance content in the organic waste gas, and the purified clean gas is discharged from the exhaust port 140; After the adsorbing material of the adsorption box 412 in the runner 410 adsorbs the organic substance, the rotating wheel 410 is rotated to the desorption compartment 320, and is generated by a desorption air source 40 (Fig. 8). The gas stream is desorbed from the adsorbent material in the adsorption box 412, so that the adsorbent material in the adsorption tank block 412 is domesticized, and the regeneration activated adsorption block 412 is rotated to the adsorption partition. Inter-310 performs organic waste gas treatment.

於本實施例中,該隔離箱300較佳具有一吹除隔間330,該吹除隔間330係設置於該脫附隔間320與該吸附隔間310之間並與該通道340連通,該轉輪410轉動時係依序通過該吸附隔間310、脫附隔間320與吹除隔間330。據此,該轉輪410中的吸附箱塊412離開該脫附隔間320後係旋轉至該吹除隔間330中,藉由一吹除氣源50(第8圖)提供之吹除氣流通過該等吸附箱塊412,使該等吸附箱塊412內吸附材加速其內水氣之去除及溫度之降低,而快速完成該等吸附箱塊412內吸附材之再生活化,再生活化後的吸附箱塊412再旋轉至該吸附隔間310進行有機廢氣之處理,藉此,於本實施例中,該轉輪410旋轉運作而使該等吸附箱塊412依序經過該吸附隔間310、該脫附隔間320與該吹除隔間330且循環運作,以於該吸附隔間310中吸附待處理之有機廢氣中的有機物質,於該脫附隔間320中脫附吸附箱塊412內的有機物質,並於該吹除隔間330中吹除該吸附箱塊412。In the present embodiment, the isolation box 300 preferably has a blowing compartment 330 disposed between the desorption compartment 320 and the adsorption compartment 310 and communicating with the channel 340. When the runner 410 rotates, it passes through the adsorption compartment 310, the desorption compartment 320, and the blowout compartment 330 in sequence. Accordingly, the suction box 412 in the runner 410 is rotated away from the desorption compartment 320 and then rotated into the blowing compartment 330 by a blowing air source 50 (Fig. 8). Through the adsorption box 412, the adsorbent material in the adsorption box block 412 accelerates the removal of the water vapor therein and the temperature decrease, and the regeneration and activation of the adsorbent material in the adsorption box 412 are quickly completed, and the regeneration is activated. The subsequent adsorption box block 412 is further rotated to the adsorption compartment 310 for organic waste gas treatment. In this embodiment, the rotation wheel 410 rotates to operate the adsorption box block 412 sequentially through the adsorption compartment. 310. The desorption compartment 320 and the blowing compartment 330 are cyclically operated to adsorb organic substances in the organic waste gas to be treated in the adsorption compartment 310, and desorb the adsorption tank in the desorption compartment 320. The organic material in block 412 is blown off the suction box block 412 in the purge compartment 330.

上述之脫附氣源40所提供之脫附氣流係可為蒸汽、氮氣、熱空氣或其混合之氣流;上述之吹除氣源50所提供之吹除氣流係可為氮氣或空氣之氣流。The desorption gas stream 40 provided by the desorption gas source 40 may be a gas stream of steam, nitrogen, hot air or a mixture thereof; and the purge gas stream provided by the purge gas source 50 may be a gas stream of nitrogen or air.

本發明第一實施例之轉環式吸脫附裝置10中,該驅動單元500係設置於該殼體100之外部,故該驅動單元500中的馬達550及齒輪組540等在運轉時產生熱能甚至火花而引燃該殼體100內部之有機廢氣等疑慮係可被避免,進而提昇了安全性,並且,維修人員在保養、維修及調整該驅動單元500中之電子零件與機械結構時,無需進入該殼體100中,使得設備的維護及操作更加方便及簡單,也免除了暴露在有機物質含量高的環境裡之必要;此外,本發明第一實施例之轉環式吸脫附裝置10係因該驅動單元500設置於該殼體100之外,而可避免該驅動單元500中之電子零件與材料結構由於接觸到含有機物質之廢氣及濕氣而易生鏽及腐蝕的缺點,使得零件汰換次數減少、維護成本降低並增加使用壽命。In the swing-type suction and release device 10 of the first embodiment of the present invention, the drive unit 500 is disposed outside the casing 100, so that the motor 550 and the gear set 540 in the drive unit 500 generate heat during operation. Even the fact that sparks ignite the organic exhaust gas inside the casing 100 can be avoided, thereby improving safety, and maintenance personnel do not need to maintain, repair, and adjust the electronic parts and mechanical structures in the drive unit 500. Entering the housing 100 makes the maintenance and operation of the device more convenient and simple, and also eliminates the need to be exposed to an environment with a high content of organic substances; moreover, the rotary suction and release device 10 of the first embodiment of the present invention Because the driving unit 500 is disposed outside the casing 100, the electronic components and the material structure in the driving unit 500 can be prevented from being rusted and corroded due to contact with exhaust gas and moisture containing organic substances, so that Reduced number of parts replacement, reduced maintenance costs and increased service life.

請參照第1圖並配合第6圖所示,該轉盤420係環繞設置有該第一密封件421,該第一密封件421係抵壓於該轉盤420與該底部開口120邊緣之間的間隙而達成氣密。如第6圖所示例,該第一密封件421係可藉由例如固定座與螺絲等構件固定至該轉盤420的邊緣,該殼體100之底部開口120邊緣處係可具有凸緣,即該凸緣係緊鄰該轉盤420與該底部開口120邊緣之間的間隙,而使第一密封件421被該固定座抵壓於該凸緣上並封閉該轉盤420與該底部開口120邊緣之間的間隙,且當該轉環式吸附器400旋轉時,第一密封件421持續抵壓於該轉盤420與該底部開口120邊緣之間,進而在有機廢氣處理過程中達成氣密。Referring to FIG. 1 and FIG. 6 , the turntable 420 is circumferentially provided with the first sealing member 421 , and the first sealing member 421 is pressed against the gap between the turntable 420 and the edge of the bottom opening 120 . And achieve airtightness. As shown in FIG. 6, the first sealing member 421 can be fixed to the edge of the turntable 420 by a member such as a fixing seat and a screw, and the edge of the bottom opening 120 of the housing 100 can have a flange, that is, The flange is adjacent to the gap between the turntable 420 and the edge of the bottom opening 120, such that the first seal 421 is pressed against the flange by the mount and closes between the turntable 420 and the edge of the bottom opening 120. The gap, and when the rotary ring adsorber 400 rotates, the first seal 421 continues to press between the turntable 420 and the edge of the bottom opening 120, thereby achieving airtightness during organic waste gas treatment.

請參照第3圖至第5圖,本發明第一實施例之轉環式吸脫附裝置10的轉輪400中,如第3圖所示,該隔離箱300之該吸附隔間310、該脫附隔間320與該吹除隔間330之彼此交接處係具有一隔離壁350a,350b,本實施例中,該隔離壁350a係對應於該轉輪410之外周緣,且該隔離壁350a長度(弧長)係略大於對應之相鄰二側壁413之外側間距,該隔離壁350b係對應於該轉輪410之內周緣,且該隔離壁350b長度(弧長)係略大於對應之相鄰二側壁413之內側間距;如第4圖所示,該轉輪410係具有一框架411及複數個吸附箱塊412,該框架411係具有複數個側壁413以形成有環狀排列的複數個容置隔間414,以供容置該等吸附箱塊412,且各該側壁413的側邊係分別設置有一第二密封件415a,415b,於本實施例中,各該第二密封件415a係設置於各該側壁413對應該轉輪410之外周緣上,各該第二密封件415b係設置於各該側壁413對應該轉輪410之內周緣上,各該第二密封件415a的寬度係略大於各該側壁413外側與各該隔離壁350a之間的距離,各該第二密封件415b的寬度係略大於各該側壁413內側與各該隔離壁350b之間的距離,以達有效氣密之效果。Referring to FIGS. 3 to 5, in the reel 400 of the rotary suction and release device 10 of the first embodiment of the present invention, as shown in FIG. 3, the adsorption compartment 310 of the isolation box 300, the The detachment compartment 320 and the blowing compartment 330 are disposed at a distance from each other with a partition wall 350a, 350b. In this embodiment, the partition wall 350a corresponds to the outer circumference of the runner 410, and the partition wall 350a The length (arc length) is slightly larger than the outer side spacing of the corresponding adjacent two side walls 413. The partition wall 350b corresponds to the inner circumference of the rotating wheel 410, and the length (arc length) of the partition wall 350b is slightly larger than the corresponding phase. The inner side spacing of the adjacent two side walls 413; as shown in FIG. 4, the rotating wheel 410 has a frame 411 and a plurality of adsorption box blocks 412, the frame 411 having a plurality of side walls 413 to form a plurality of annular arrays A second sealing member 415a, 415b is disposed on a side of each of the side walls 413, and in the embodiment, each of the second sealing members 415a is disposed. The second sealing member 415b is disposed on each of the side walls 413 corresponding to the outer circumference of the rotating wheel 410. 413 corresponds to the inner circumference of the runner 410, the width of each of the second sealing members 415a is slightly larger than the distance between the outer side of each of the side walls 413 and each of the partition walls 350a, and the width of each of the second sealing members 415b is slightly The distance between the inner side of each of the side walls 413 and each of the partition walls 350b is greater than the effect of effective airtightness.

如第5圖所示,各該隔離壁350a之長度係大於或等於對應之相鄰二側壁413外側之間距,各該隔離壁350b之長度係大於或等於對應之相鄰二側壁413內側之間距,各該第二密封件415a用於抵壓於該隔離壁350a,各該第二密封件415b用於抵壓於該隔離壁350b,以使該吸附隔間310、該脫附隔間320與該吹除隔間330之間相互隔離,以避免待處理之有機廢氣、處理後之乾淨氣體、脫附氣流及吹除氣流逸散及混合。As shown in FIG. 5, the length of each of the partition walls 350a is greater than or equal to the distance between the outer sides of the corresponding adjacent side walls 413, and the length of each of the partition walls 350b is greater than or equal to the distance between the inner sides of the corresponding adjacent side walls 413. Each of the second sealing members 415a is for pressing against the partition wall 350a, and each of the second sealing members 415b is for pressing against the partition wall 350b, so that the adsorption compartment 310, the desorption compartment 320 and the desorption compartment 320 are The purge compartments 330 are isolated from each other to avoid organic waste gas to be treated, treated clean gas, desorbed gas stream, and blown gas stream from escaping and mixing.

上述之吸附箱塊412內係裝載用於吸附有機物質之吸附材,其中吸附材係依不同的有機物質而可為沸石、活性碳、矽膠、活性氧化鋁、多孔性樹脂或其混合物。The adsorption box block 412 is loaded with an adsorbent for adsorbing organic substances, wherein the adsorbent material may be zeolite, activated carbon, silica gel, activated alumina, porous resin or a mixture thereof depending on different organic substances.

上述之第一密封件421及第二密封件415a,415b係可為橡膠、矽膠或鐵氟龍之彈性片體,此外,各該第一密封件421及各該第二密封件415a,415b係可進一步具有中空結構,以利用空氣層隔絕兩側不同之溫度差;並且,較佳的是,第一密封件421及第二密封件415a,415b係可耐高溫達100℃以上,更佳的是可耐高溫達250℃以上。The first sealing member 421 and the second sealing member 415a, 415b may be elastic sheets of rubber, silicone or Teflon, and each of the first sealing members 421 and the second sealing members 415a, 415b are The hollow structure may further have a hollow structure to isolate different temperature differences on both sides by using the air layer; and, preferably, the first sealing member 421 and the second sealing member 415a, 415b are resistant to high temperatures of 100 ° C or more, more preferably It can withstand high temperatures up to 250 °C.

請參照第1圖、第2圖、第3圖及第5圖,本發明第一實施例之轉環式吸脫附裝置10的隔離箱300中,該脫附隔間320係具有一第一進氣部321及一第一排氣部322,該第一進氣部321係具有一脫附氣進氣口,該第一排氣部322係具有一脫附氣流排氣口,脫附氣流係由該脫附氣進氣口進入後通過該轉輪410上位於該脫附隔間320中的吸附箱塊412,將該等吸附箱塊412內吸附材中的有機物質脫附,而形成含有有機物質的脫附後濃縮氣流,所述脫附後濃縮氣流係由該脫附氣流排氣口排出;該吹除隔間330係具有一第二進氣部331及一第二排氣部332,該第二進氣部331係具有一吹除氣進氣口,該第二排氣部332係具有一吹除氣排氣口,吹除氣流係由該吹除氣進氣口進入,並通過該轉輪410上的吸附箱塊412,再由該吹除氣排氣口排出;如第1圖及第3圖所示例,該第一進氣部321及該第二進氣部331係設置於該轉輪之內側並藉由一固定支架360固定至該立柱510上,該第一排氣部322與該第二排氣部332設置於該轉輪410之外側。Referring to FIG. 1 , FIG. 2 , FIG. 3 , and FIG. 5 , in the isolation box 300 of the rotary suction and release device 10 of the first embodiment of the present invention, the desorption compartment 320 has a first The air intake portion 321 and a first exhaust portion 322 have a degassing air inlet port, and the first exhaust portion 322 has a desorption airflow exhaust port for desorbing the airflow. After the degassing gas inlet enters, the adsorption block 412 located in the desorption compartment 320 of the reel 410 is desorbed, and the organic substances in the adsorption material in the adsorption block 412 are desorbed. a desorbed concentrated gas stream containing an organic substance, the desorbed concentrated gas stream being discharged from the desorbing gas exhaust port; the blowing compartment 330 having a second intake portion 331 and a second exhaust portion 332, the second air inlet portion 331 has a blow-off air intake port, and the second exhaust portion 332 has a blow-off air exhaust port through which the blow-off airflow enters. And passing through the adsorption box block 412 on the runner 410, and then discharging through the blow-off gas exhaust port; as shown in FIGS. 1 and 3, the first intake portion 321 and the second intake portion 331 On the inner side of the wheel is provided by a mounting bracket 360 and secured to the uprights 510, 322 of the first portion and the second exhaust gas exhaust portion 332 is provided on the outside of the wheel 410.

請參照第1圖,本發明第一實施例之轉環式吸脫附裝置10的驅動單元500中,該齒輪組540包含一第一齒輪541及一第二齒輪542,該第一齒輪541設置於該軸承520上並固定至該轉盤420底部,該第二齒輪542係連接該第一齒輪541,該馬達550係與該第二齒輪542結合,該馬達550係驅動該第二齒輪542而帶動該第一齒輪541,進而使該轉盤420轉動。其中,該馬達550係可為一步進式或連續式減速馬達,該軸承520係可為一止推軸承。Referring to FIG. 1 , in the driving unit 500 of the rotary suction and release device 10 of the first embodiment of the present invention, the gear set 540 includes a first gear 541 and a second gear 542, and the first gear 541 is disposed. The second gear 542 is coupled to the first gear 541, and the motor 550 is coupled to the second gear 542. The motor 550 drives the second gear 542 to drive the second gear 542. The first gear 541 further rotates the turntable 420. The motor 550 can be a stepping or continuous reduction motor, and the bearing 520 can be a thrust bearing.

請參照第1圖與第2圖,本發明第一實施例之轉環式吸脫附裝置10的驅動單元500係藉由該等支承滾輪530支承該轉盤420,於本實施例中,該等支承滾輪530之數量係為三個,其係以該立柱510為圓心而呈120度圓心角排列,以提供該轉盤420在轉動的過程中穩固的支撐。當然,該等支承滾輪530之數量係不限於此,其係可為二個以上並對稱排列以支承該轉盤420。Referring to FIGS. 1 and 2, the drive unit 500 of the rotary suction and release device 10 of the first embodiment of the present invention supports the turntable 420 by the support rollers 530. In this embodiment, The number of support rollers 530 is three, which are arranged at a center angle of 120 degrees with the column 510 as a center to provide stable support of the turntable 420 during rotation. Of course, the number of the supporting rollers 530 is not limited thereto, and may be two or more and symmetrically arranged to support the turntable 420.

請參照第7圖,本發明第一實施例之轉環式吸脫附裝置10可進一步包含一預冷器600,該預冷器600係容置於該殼體100之容置空間110中並設置在該進氣口130與該轉環式吸附器400之間。該預冷器600係可例如為冷卻盤管,其係用於將待處理之有機廢氣先冷卻再送入該轉環式吸附器400。此外,本發明第一實施例之轉環式吸脫附裝置10還可包含一空氣過濾器700,該空氣過濾器700係容置於該殼體100之容置空間110中並設置在該進氣口130與該預冷器600之間,以用於過濾由該進氣口130進入的待處理之有機廢氣。Referring to FIG. 7 , the swing-type suction and release device 10 of the first embodiment of the present invention may further include a pre-cooler 600 that is received in the housing space 110 of the housing 100 and It is disposed between the air inlet 130 and the rotary ring adsorber 400. The pre-cooler 600 can be, for example, a cooling coil that is used to cool the organic waste gas to be treated and then to the rotary ring adsorber 400. In addition, the rotary suction and release device 10 of the first embodiment of the present invention may further include an air filter 700, which is housed in the accommodating space 110 of the housing 100 and disposed therein. The gas port 130 is interposed between the precooler 600 for filtering the organic waste gas to be treated which is entered by the gas inlet 130.

請參照第8圖,其係為本發明第二實施例之氣體淨化處理系統的示意圖,該氣體淨化處理系統1係包含上述第一實施例之轉環式吸脫附裝置10以及一燃燒爐20,該轉環式吸脫附裝置10之脫附隔間320係藉由一氣體管路與該燃燒爐20連接,具體而言,該氣體管路係由該脫附隔間320之第一排氣部322的脫附氣流排氣口連接至該燃燒爐20,以用於將脫附後濃縮氣流送入該燃燒爐20以600至900℃以上的溫度進行燃燒。Referring to FIG. 8, which is a schematic diagram of a gas purification treatment system according to a second embodiment of the present invention, the gas purification treatment system 1 includes the above-described first embodiment of the rotary suction and release device 10 and a combustion furnace 20. The desorption compartment 320 of the rotary suction and release device 10 is connected to the combustion furnace 20 by a gas pipeline. Specifically, the gas pipeline is from the first row of the desorption compartment 320. The desorption gas flow vent of the gas portion 322 is connected to the combustion furnace 20 for feeding the desorbed concentrated gas stream to the combustion furnace 20 for combustion at a temperature of 600 to 900 ° C or higher.

請參照第9圖,其係為本發明第三實施例之氣體淨化處理系統的示意圖,該氣體淨化處理系統2係包含上述第一實施例之轉環式吸脫附裝置10以及一冷凝器30,該轉環式吸脫附裝置10之脫附隔間320係藉由一氣體管路與該冷凝器30連接,具體而言,該氣體管路係由該脫附隔間320之第一排氣部322的脫附氣流排氣口連接至該冷凝器30,以用於將脫附後濃縮氣流送入該冷凝器30,使其中的有機物質因降溫而凝結,且經由液相分離處理以獲得淨化之氣體及有機物質之液體,所述有機物質之液體再進行回收處理,所述淨化之氣體係可符合廢氣排氣標準而由煙囪(圖未示)排出。Referring to FIG. 9, which is a schematic diagram of a gas purification treatment system according to a third embodiment of the present invention, the gas purification treatment system 2 includes the above-described first embodiment of the rotary ring suction and discharge device 10 and a condenser 30. The desorption compartment 320 of the rotary suction and release device 10 is connected to the condenser 30 by a gas line. Specifically, the gas line is from the first row of the desorption compartment 320. The desorption gas flow outlet of the gas portion 322 is connected to the condenser 30 for feeding the desorbed concentrated gas stream to the condenser 30, causing the organic matter therein to be condensed by cooling, and is subjected to liquid phase separation treatment. A purified gas and a liquid of an organic substance are obtained, and the liquid of the organic substance is further subjected to a recovery process, and the purified gas system can be discharged by a chimney (not shown) in accordance with an exhaust gas exhaust standard.

本發明第三實施例之氣體淨化處理系統2係適合有機物質可能在過程中形成有臭味氣體或腐蝕性化學物質的應用中,舉例而言,TFT-LCD面板之製程中, 去光阻程序(stripping process)之去光阻劑中所含的二甲基亞碸(DMSO)係為一種高沸點水溶性而且揮發性低而易冷凝為腐蝕性液體的有機物,其廢氣在處理過程中易還原反應而形成惡臭且自燃溫度低易燃的二甲基硫(dimethyl sulfide, DMS) 和二甲基二硫(dimethyl disulfide, DMDS)的氣態污染物,或者完全氧化產生二氧化硫等酸性腐蝕性氣體或與濕氣接觸產生硫酸根腐蝕性液體,故較佳以本發明轉環式吸脫附裝置吸附淨化再脫附濃縮後褡配冷凝的方式處理脫附後濃縮氣流。The gas purification treatment system 2 of the third embodiment of the present invention is suitable for applications in which an organic substance may form an odorous gas or a corrosive chemical substance in the process, for example, in a process of a TFT-LCD panel, a photoresist removal process The dimethyl hydrazine (DMSO) contained in the photoresist of the stripping process is an organic substance having a high boiling point water solubility and low volatility and easily condensing into a corrosive liquid, and the exhaust gas is easily reduced during the treatment. Reaction to form gaseous pollutants of dimethyl sulfide (DMS) and dimethyl disulfide (DMDS) which are malodorous and have low spontaneous combustion temperature, or completely oxidize to produce acidic corrosive gases such as sulfur dioxide or Since the moisture contact produces a sulfate corrosive liquid, it is preferred to treat the decondensed concentrated gas stream in the manner of adsorption, purification, desorption, concentration and condensation of the cyclone suction and desorption device of the present invention.

綜上所述,本發明第一實施例所提供之轉環式吸脫附裝置,係藉由將該驅動單元係設置於該殼體之外部而提升了設備整體之安全性,其係可避免該驅動單元運轉時產生熱能甚至火花而引燃該殼體內部之有機廢氣等疑慮,還可避免該驅動單元中之電子零件與材料結構由於接觸到有機廢氣及濕氣而易被生鏽及腐蝕的缺點,使得維護設備的成本可降低並增加使用壽命,並且,維修人員直接在該轉環式吸脫附裝置外部即可直接保養、維修及調整該驅動單元中之電子零件與機械結構,無需進入該轉環式吸脫附裝置內部,可避免暴露於有機物質含量高的環境中,並使得設備的維護及操作更加方便及簡單。另外,本發明第二實施例及第三實施例還提供有包含第一實施例所提供之轉環式吸脫附裝置的氣體淨化系統等應用,係為具有高安全性、低設備維護成本、零件保養維修方便等優點者。In summary, the rotary ring suction and release device provided by the first embodiment of the present invention improves the safety of the device as a whole by providing the drive unit outside the casing, which can be avoided. The driving unit generates thermal energy or even sparks to ignite the organic exhaust gas inside the casing, and the electronic parts and material structures in the driving unit are easily rusted and corroded due to contact with organic exhaust gas and moisture. The disadvantages of the maintenance equipment can be reduced and the service life can be increased, and the maintenance personnel can directly maintain, repair and adjust the electronic parts and mechanical structures in the drive unit directly outside the rotary suction and release device, without Entering the inside of the rotary suction and release device can avoid exposure to an environment with high organic matter content, and make the maintenance and operation of the device more convenient and simple. In addition, the second embodiment and the third embodiment of the present invention further provide an application of the gas purification system including the rotary ring suction and release device provided in the first embodiment, which has high safety and low equipment maintenance cost. Advantages such as convenient maintenance and repair of parts.

本發明在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本發明,而不應解讀為限制本發明之範圍。應注意的是,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本發明之範疇內。因此,本發明之保護範圍當以申請專利範圍所界定者為準。The invention has been described above in terms of the preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.

1,2‧‧‧氣體淨化處理系統
10‧‧‧轉環式吸脫附裝置
20‧‧‧燃燒爐
30‧‧‧冷凝器
100‧‧‧殼體
110‧‧‧容置空間
120‧‧‧底部開口
130‧‧‧進氣口
140‧‧‧排氣口
200‧‧‧支撐架
300‧‧‧隔離箱
310‧‧‧吸附隔間
320‧‧‧脫附隔間
321‧‧‧第一進氣部
322‧‧‧第一排氣部
330‧‧‧吹除隔間
331‧‧‧第二進氣部
332‧‧‧第二排氣部
340‧‧‧通道
350a,350b‧‧‧隔離壁
360‧‧‧固定支架
400‧‧‧轉環式吸附器
410‧‧‧轉輪
411‧‧‧框架
412‧‧‧吸附箱塊
413‧‧‧側壁
414‧‧‧容置隔間
415a,415b‧‧‧第二密封件
420‧‧‧轉盤
421‧‧‧第一密封件
500‧‧‧驅動單元
510‧‧‧立柱
520‧‧‧軸承
530‧‧‧支承滾輪
540‧‧‧齒輪組
541‧‧‧第一齒輪
542‧‧‧第二齒輪
550‧‧‧馬達
600‧‧‧預冷器
700‧‧‧空氣過濾器
1,2‧‧‧Gas purification treatment system
10‧‧‧Circular suction and desorption device
20‧‧‧burning furnace
30‧‧‧Condenser
100‧‧‧shell
110‧‧‧ accommodating space
120‧‧‧ bottom opening
130‧‧‧air inlet
140‧‧‧Exhaust port
200‧‧‧Support frame
300‧‧‧Isolation box
310‧‧‧Adsorption compartment
320‧‧‧Demolition compartment
321‧‧‧First intake
322‧‧‧First Exhaust Department
330‧‧‧Blow off the compartment
331‧‧‧Second intake
332‧‧‧Second exhaust
340‧‧‧ channel
350a, 350b‧‧‧ partition wall
360‧‧‧Fixed bracket
400‧‧‧Circular adsorber
410‧‧‧runner
411‧‧‧Frame
412‧‧‧Adsorption box
413‧‧‧ side wall
414‧‧‧ accommodating compartment
415a, 415b‧‧‧second seal
420‧‧‧ Turntable
421‧‧‧First seal
500‧‧‧ drive unit
510‧‧‧ column
520‧‧‧ bearing
530‧‧‧Support roller
540‧‧‧ Gear Set
541‧‧‧First gear
542‧‧‧second gear
550‧‧ ‧ motor
600‧‧‧Precooler
700‧‧‧Air filter

第1圖係為本發明第一實施例之轉環式吸脫附裝置的側視示意圖。 第2圖係為本發明第一實施例之轉環式吸脫附裝置的俯視示意圖。 第3圖係為本發明第一實施例之轉環式吸脫附裝置中的殼體、隔離箱的示意圖。 第4圖係為本發明第一實施例之轉環式吸脫附裝置中的轉環式吸附器的示意圖。 第5圖係為本發明第一實施例之轉環式吸脫附裝置中的轉環式吸附器與隔離箱的示意圖。 第6圖係為第1圖中A部分的放大示意圖。 第7圖係為本發明第一實施例之轉環式吸脫附裝置進一步包含預冷器及空氣過濾器的側視示意圖。 第8圖係為本發明第二實施例之氣體淨化處理系統的示意圖。 第9圖係為本發明第三實施例之氣體淨化處理系統的示意圖。Fig. 1 is a side elevational view showing the rotary ring type suction and detachment device of the first embodiment of the present invention. Fig. 2 is a schematic plan view showing the rotary ring type suction and detachment device of the first embodiment of the present invention. Fig. 3 is a schematic view showing the casing and the isolation box in the rotary ring type suction and detachment device according to the first embodiment of the present invention. Fig. 4 is a schematic view showing a rotary ring type adsorber in the rotary ring type suction and desorption device of the first embodiment of the present invention. Fig. 5 is a schematic view showing a rotary ring type adsorber and an isolation box in the rotary ring type suction and desorption device according to the first embodiment of the present invention. Fig. 6 is an enlarged schematic view of a portion A in Fig. 1. Figure 7 is a side elevational view of the rotary ring suction and release device according to the first embodiment of the present invention further including a precooler and an air filter. Figure 8 is a schematic view showing a gas purification treatment system of a second embodiment of the present invention. Figure 9 is a schematic view showing a gas purification treatment system of a third embodiment of the present invention.

10‧‧‧轉環式吸脫附裝置10‧‧‧Circular suction and desorption device

100‧‧‧殼體100‧‧‧shell

110‧‧‧容置空間110‧‧‧ accommodating space

130‧‧‧進氣口130‧‧‧air inlet

140‧‧‧排氣口140‧‧‧Exhaust port

200‧‧‧支撐架200‧‧‧Support frame

300‧‧‧隔離箱300‧‧‧Isolation box

360‧‧‧固定支架360‧‧‧Fixed bracket

400‧‧‧轉環式吸附器400‧‧‧Circular adsorber

410‧‧‧轉輪410‧‧‧runner

411‧‧‧框架411‧‧‧Frame

412‧‧‧吸附箱塊412‧‧‧Adsorption box

420‧‧‧轉盤420‧‧‧ Turntable

421‧‧‧第一密封件421‧‧‧First seal

500‧‧‧驅動單元500‧‧‧ drive unit

510‧‧‧立柱510‧‧‧ column

520‧‧‧軸承520‧‧‧ bearing

530‧‧‧支承滾輪530‧‧‧Support roller

540‧‧‧齒輪組540‧‧‧ Gear Set

541‧‧‧第一齒輪541‧‧‧First gear

542‧‧‧第二齒輪542‧‧‧second gear

550‧‧‧馬達550‧‧ ‧ motor

Claims (11)

一種轉環式吸脫附裝置,包含: 一殼體,係具有一容置空間及連通該容置空間之一底部開口、一進氣口及一排氣口; 一支撐架,設置於該殼體之外部; 一隔離箱,係設置於該殼體之容置空間中,且該隔離箱係具有一吸附隔間、一脫附隔間及一通道,該通道係對應該底部開口且連通該吸附隔間及該脫附隔間; 一轉環式吸附器,可轉動地設置於該殼體之容置空間中並具有一轉輪及一轉盤,該轉輪係固定於該轉盤上並容置於該通道中,該轉盤係對應該底部開口,且該轉盤係環繞設置有一第一密封件,該第一密封件係抵壓於該轉盤與該殼體之間的間隙而達成氣密;以及 一驅動單元,係設置於該支撐架上並透過該底部開口與該轉盤連接,該驅動單元包含一立柱、一軸承、複數個支承滾輪、一齒輪組及一馬達,該立柱係固定至該支撐架,該軸承係連接於該立柱與該齒輪組之間,該齒輪組係連接該轉盤與該馬達,以使馬達驅動該轉環式吸附器以該立柱為中心轉動,而使該轉輪轉動通過該吸附隔間及該脫附隔間,該等支承滾輪係固定至該支撐架且滾動接觸地支承該轉盤。The utility model relates to a rotary ring suction and release device, comprising: a housing having an accommodation space and a bottom opening connecting the one of the accommodation spaces, an air inlet and an air outlet; a support frame disposed on the shell An isolation box is disposed in the accommodating space of the housing, and the isolation box has an adsorption compartment, a desorption compartment and a passage corresponding to the bottom opening and communicating An adsorption compartment and the desorption compartment; a rotary ring adsorber rotatably disposed in the accommodating space of the housing and having a rotating wheel and a turntable fixed to the turntable Positioned in the channel, the turntable is corresponding to the bottom opening, and the turntable is surrounded by a first sealing member, the first sealing member is pressed against the gap between the rotating plate and the casing to achieve airtightness; And a driving unit disposed on the support frame and connected to the turntable through the bottom opening, the driving unit comprises a column, a bearing, a plurality of supporting rollers, a gear set and a motor, wherein the column is fixed to the a support frame to which the bearing is attached Between the column and the gear set, the gear set connects the turntable and the motor to cause the motor to drive the rotary ring adsorber to rotate around the column, and rotate the wheel through the adsorption compartment and the off Attached to the support frame, the support rollers are fixed to the support frame and support the turntable in rolling contact. 如請求項第1項所述之轉環式吸脫附裝置,其中該轉輪係具有一框架及複數個吸附箱塊,該框架係具有複數個側壁以形成有環狀排列的複數個容置隔間,以供容置該等吸附箱塊,且各該側壁的側邊係分別設置有一第二密封件,該隔離箱之該吸附隔間與該脫附隔間之交接處係具有一隔離壁,該隔離壁之長度係大於或等於對應之相鄰二側壁之間距,各該第二密封件用於抵壓於該隔離壁,以使該吸附隔間與該脫附隔間相互隔離。The rotary suction and detachment device of claim 1, wherein the turret has a frame and a plurality of absorbing boxes, the frame having a plurality of side walls to form a plurality of accommodating rings a compartment for accommodating the adsorption box blocks, wherein each side wall of each side wall is provided with a second sealing member, and the junction of the adsorption compartment and the desorption compartment of the isolation box has an isolation a wall having a length greater than or equal to a distance between the adjacent adjacent side walls, each of the second seals for pressing against the partition wall to isolate the adsorption compartment from the desorption compartment. 如請求項第1項所述之轉環式吸脫附裝置,其中該隔離箱係進一步包括有一吹除隔間,該吹除隔間係設置於該脫附隔間與該吸附隔間之間並與該通道連通,該轉輪轉動時係依序通過吸附隔間、脫附隔間與吹除隔間。The rotary suction and release device of claim 1, wherein the isolation box further comprises a blowing compartment, the blowing compartment being disposed between the desorption compartment and the adsorption compartment And communicating with the channel, the rotating wheel sequentially passes through the adsorption compartment, the desorption compartment and the blowing compartment. 如請求項第3項所述之轉環式吸脫附裝置,其中該轉輪係具有一框架及複數個吸附箱塊,該框架係具有複數個側壁以形成有環狀排列的複數個容置隔間,以供容置該等吸附箱塊,且各該側壁的側邊係分別設置有一第二密封件,該隔離箱之該吸附隔間、該脫附隔間與該吹除隔間之彼此交接處係具有一隔離壁,各該隔離壁之長度係大於或等於對應之相鄰二側壁之間距,各該第二密封件用於抵壓於該隔離壁,以使該吸附隔間、該脫附隔間與該吹除隔間之間相互隔離。The rotary suction and desorption device of claim 3, wherein the reel has a frame and a plurality of adsorption boxes, the frame having a plurality of side walls to form a plurality of accommodations arranged in a ring shape a compartment for accommodating the adsorption box blocks, and a side of each of the side walls is respectively provided with a second sealing member, the adsorption compartment of the isolation box, the desorption compartment and the blowing compartment Each of the intersections has a partition wall, each of the partition walls having a length greater than or equal to a distance between the corresponding adjacent two side walls, each of the second seals for pressing against the partition wall, so that the adsorption compartment, The desorption compartment is isolated from the blowing compartment. 如請求項第4項所述之轉環式吸脫附裝置,其中該脫附隔間係具有一第一進氣部及一第一排氣部,該吹除隔間係具有一第二進氣部及一第二排氣部,該第一進氣部及該第二進氣部係設置於該轉輪之內側並固定至該立柱上,該第一排氣部與該第二排氣部設置於該轉輪之外側。The rotary suction and release device of claim 4, wherein the desorption compartment has a first air intake portion and a first exhaust portion, the blowout compartment having a second inlet a first exhaust portion and a second exhaust portion, the first intake portion and the second intake portion are disposed on the inner side of the rotating wheel and fixed to the column, the first exhaust portion and the second exhaust portion The portion is disposed on the outer side of the runner. 如請求項第1至5項中任一項所述之轉環式吸脫附裝置,其中該齒輪組包含一第一齒輪及一第二齒輪,該第一齒輪設置於該軸承上並固定至該轉盤底部,該第二齒輪係連接該第一齒輪,該馬達係與該第二齒輪結合,該馬達係驅動該第二齒輪而帶動該第一齒輪。The rotary suction and release device according to any one of claims 1 to 5, wherein the gear set includes a first gear and a second gear, the first gear is disposed on the bearing and fixed to the bearing At the bottom of the turntable, the second gear train is coupled to the first gear, and the motor is coupled to the second gear, and the motor drives the second gear to drive the first gear. 如請求項第1至5項中任一項所述之轉環式吸脫附裝置,其中該等支承滾輪之數量係為三個,其係以該立柱為圓心而呈120度圓心角排列。The rotary suction and release device according to any one of claims 1 to 5, wherein the number of the support rollers is three, which are arranged at a center angle of 120 degrees with the column as a center. 如請求項第1至5項中任一項所述之轉環式吸脫附裝置,其中進一步包含一預冷器,其係容置於該殼體之容置空間中並設置在該進氣口與該轉環式吸附器之間。The rotary suction and release device according to any one of claims 1 to 5, further comprising a pre-cooler configured to be placed in the housing space of the housing and disposed at the air inlet Between the mouth and the rotary ring adsorber. 如請求項第8項所述之轉環式吸脫附裝置,其中進一步包含一空氣過濾器,其係容置於該殼體之容置空間中並設置在該進氣口與該預冷器之間。The rotary suction and release device of claim 8, further comprising an air filter disposed in the accommodating space of the housing and disposed at the air inlet and the pre-cooler between. 一種氣體淨化處理系統,包含如上述請求項第1項至第9項中任一項所述之轉環式吸脫附裝置以及一燃燒爐,該轉環式吸脫附裝置之脫附隔間係藉由一氣體管路與該燃燒爐連接。A gas purification treatment system comprising the rotary ring suction and desorption device according to any one of the above-mentioned items 1 to 9 and a combustion furnace, the desorption compartment of the rotary suction and desorption device It is connected to the combustion furnace by a gas line. 一種氣體淨化處理系統,包含如上述請求項第1項至第9項中任一項所述之轉環式吸脫附裝置以及一冷凝器,該轉環式吸脫附裝置之脫附隔間係藉由一氣體管路與該冷凝器連接。A gas purification treatment system comprising the rotary ring suction and release device according to any one of the above-mentioned items 1 to 9 and a condenser, the desorption compartment of the rotary suction and release device It is connected to the condenser by a gas line.
TW102136131A 2013-10-04 2013-10-04 Rotary Suction Absorbing Device and Its Gas Purification Treatment System TWI490027B (en)

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TWM394853U (en) * 2010-05-28 2010-12-21 Cherng Jye Air Cond Co Ltd Fluidized purifier for absorbent material
CN202087198U (en) * 2011-04-12 2011-12-28 杰智环境科技股份有限公司 On-line regenerating device for modified zeolite concentration rotating wheel
JP2013517431A (en) * 2010-01-14 2013-05-16 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド Ventilation gas management system and process

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JP2013517431A (en) * 2010-01-14 2013-05-16 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド Ventilation gas management system and process
TWM394853U (en) * 2010-05-28 2010-12-21 Cherng Jye Air Cond Co Ltd Fluidized purifier for absorbent material
CN202087198U (en) * 2011-04-12 2011-12-28 杰智环境科技股份有限公司 On-line regenerating device for modified zeolite concentration rotating wheel

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